Dr .K.V.

SUBBA REDDY INSTITUTE OF TECHNOLOGY

GUIDED BY

K.KISHORE KUMAR [ASST.PROFESSOR,M.TECH]

PRESENTED BY BATCHNO-9 09FH1A0439-M.MANOHAR NAIDU 09FH1A0426-V.DILEEP CHOWDARY 09FH1A0444-G.RAMMOHAN 10FH5A0404-J.KRANTHI KUMAR

ABSTRACT
Microelectromechanical systems (MEMS) is the technology of very

small mechanical devices driven by electricity and it merges at the nano scale into nanoelectromechanical systems(NEMS) and nanotechnology. MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a meter).

AIM OF THE PROJECT

The main aim of this project is to control the Robot using

MEMS. The MEMS will be fixed to the hand. Whenever the hand moves in any direction, the mechanical movement of the hand will be recognized by MEMS. MEMS convert this mechanical hand movement into equivalent electrical signals and send it to the microcontroller. The microcontroller at the transmitter side receives this and sends corresponding signals to the receiver side through RF TRANSEIVER OR ZIGBEE.

SOFTWARE AND HARDWARE TOOLS

Software Tools: Keil compiler Orcad Proload
Hardware Tools: Microcontroller AT89S52. MEMS sensor DC motors and driver circuit

BLOCK DIAGRAM RECEIVER

TRANSMITTER

WHAT IS MEMS TECHNOLOGY?

Micro-Electro-Mechanical Systems, or MEMS, is a technology

that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of microfabrication. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS. while in some other parts of the world they are called Microsystems Technology or micromachined devices.

WHAT ARE MEMS

MEMS devices sense, think, act and communicate.
They redirect light, pump and mix fluids, and detect

molecules, heat, pressure, or motion. The interaction of electronics, mechanics, light or fluids working together makes up a microelectromechanical system or MEMS.

APPLICATIONS OF MEMS
Applications are developed where miniaturization is

beneficial: Consumer products Aerospace Automotive Biomedical Chemical Optical displays Wireless and optical communications

ADVATAGES OF MEMS
Batch Fabrication: Reduced Manufacturing Cost &

Time. Little harm to environment and capable of incorporating. Easy to integrate into systems or modify.

DISADVATAGES OF MEMS
It is very small to trace out