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Today planar technologv is used e\iensiveIy for IC Fnhrintion. Fiplms 1.9 and 1.10 show
the major steps ofa plnnnr pmcrss. Tllrsr steps isclt~deo \idntion. pl~otolitho~peptclh~-~
ins. ion impl;ination. ned tnrtdliwtian. This r~~cliodnc scrilws tlinr steps briefly blow
detailed disrt~ssionsc an 1w fol~~licn l CI~:,pten 3 10 S: Chapter 9 describes lllc inregfittion
of tllcsr unit p r w s steps to Torn) sernimnduetor de\iws.
Today planar technologv is used e\iensiveIy for IC Fnhrintion. Fiplms 1.9 and 1.10 show
the major steps ofa plnnnr pmcrss. Tllrsr steps isclt~deo \idntion. pl~otolitho~peptclh~-~
ins. ion impl;ination. ned tnrtdliwtian. This r~~cliodnc scrilws tlinr steps briefly blow
detailed disrt~ssionsc an 1w fol~~licn l CI~:,pten 3 10 S: Chapter 9 describes lllc inregfittion
of tllcsr unit p r w s steps to Torn) sernimnduetor de\iws.
Today planar technologv is used e\iensiveIy for IC Fnhrintion. Fiplms 1.9 and 1.10 show
the major steps ofa plnnnr pmcrss. Tllrsr steps isclt~deo \idntion. pl~otolitho~peptclh~-~
ins. ion impl;ination. ned tnrtdliwtian. This r~~cliodnc scrilws tlinr steps briefly blow
detailed disrt~ssionsc an 1w fol~~licn l CI~:,pten 3 10 S: Chapter 9 describes lllc inregfittion
of tllcsr unit p r w s steps to Torn) sernimnduetor de\iws.