-

2
3


1.

2.

V1

V2

V 2

42 .4

( / )

V1< V

< V2


1.

2.

N2Ar

1
2

2
3
4

1974

D=M012/wd064(r/m)043

M
d
W

D
m


1976Pratt & Whitney

100

12000 24000 36000

r/min
Revolution of atomizing disc
187
154
135
m
Mean powder particle size
33.0
44.5 56.0
100
Recovery rate of 100 mech powder

1
2
3
4

aA() mM () nN ()

aA() bB() mM () nN ()

1.
2.
3.
4.

1.

n
N
a
A
n
N
b
B

P
G G RT ln
0
P

P
G G RT ln
0
P

123

2.

4 3
2
G r Gr 4r
3
Gr

P
r 2 KT ln

P
0

G 16 2 2

2
2 2

3K T ln P P

P0

P/P0

3.

4.

CH 4 C 2H 2

M e CO n

Ni 4CO Ni CO 4 ()

Ni CO 4 () Ni 4CO

----

----MgCaNa

MeCln H 2 Me HCl

()

1.

MeCl x Cm H n H 2 Mea Cb HCl

TiCl 4 C3 H 8 2 H 2 3TiC 6 HCl

2.

MeCl x NH 3 Mea N b HCl

MeCl x N 2 H 2 Mea N b HCl
SiCl4 4 NH 3 Si3 N 4 2 HCl

3.

MeCl x BCl3 H 2 Mea Bb HCl

TiCl 4 2 BCl3 5H 2 TiB2 10 HCl

4.

MeCl x SiCl4 H 2 Mea Sib HCl

2MoCl5 4SiCl4 8H 2 2MoSi2 16 HCl

TiC
BC
SiC
NbC
WC

TiCl4 CH4 C6H5CH3

BCl3 CH4
SiCl4 CH4
NbCl5 CH4
WCl6 C6H5CH3 CH4

1100~1200
1100~1700
1300~1500
~1000
1000~1500

H2
H2
H2
H2
H2

TiB2
ZrB2
VB2
TaB
WB

TiCl4 BBr3 BCl3

ZrCl4 BBr3 BC3
VCl4 BBr3 BCl3
TaCl5 BBr3 BCl3
WCl6 BBr3 BCl3

1100~1300
1700~2500
900~1300
1300~1700
800~1200

H2
H2
H2
H2
H2

MoSi2

MoCl5 SiCl4 Mo SiCl4

1100~1800

H2

TiN
BN
TaN

TiCl4
BCl3
TaCl5

1100~1200
1200~1500
~1200

N2 H2
N2 H2
N2 H2

MeOn X Me XOm

 G0~T

Fe3O4 4CO 3Fe 4CO2

WO 3 3H 2 W 3H 2O

2 Al 2O3 3C 2 N 2 4 AlN 3CO2

WO 3 C 3H 2 WC 3H 2O