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Assignment SEM

1. What are the advantages of the SEM over optical microscopy?


2. What signals are generated during electron beam-specimen interactions? What signals are generally
used in SEM?
3. What type of samples can be analyzed under the SEM instrument?
4. Three major electron beam parameters include electron
probe size, electron probe current, and electron beam
convergence angle. Which of the parameter is important in
setting:
a) highest resolution image,
b) best quality image, or
c) best depth of field image.
Should this parameter be small or large?
5. Define:
a. quality of the image,
b. resolution of the image,
c. depth of focus, and
d. magnification
6. On the schematic drawing shown on the right, identify
basic components of the electron column of the scanning
electron microscope. In one sentence describe the function
of (each) component.
7. Why there is a vacuum in the electron column?
8. Briefly explain the astigmation effect, its cause and how it
is corrected/eliminated.
9. When elastic scattering takes place? What happens with
energy and trajectory of the electron during its elastic
scattering with atoms of the specimen? What signals are generated during elastic scattering? What are
the primary factors that affect probability of elastic scattering?
10. When inelastic scattering takes place? What happens with energy and trajectory of the electron during
its inelastic scattering with atoms of the specimen? What signals are generated during inelastic
scattering? What are the primary factors that affect probability of inelastic scattering?
11. What is the interaction volume.Briefly discuss the influence of beam and specimen parameters on
the interaction volume.
12. When will you prefer the use of the BSE detector over the E-T detector?
13. Why the BSE detector is not efficient at collecting secondary electrons as well as backscattered
electrons with energy less than 2-5 keV?