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3.

-
1.

...............................................................................................................3-3
1.1.
1.2.

1.3.
1.4.
1.5.

, ..........................3-3
..........................................................................3-3
1.2.1. ...............................................................................................3-4
1.2.2. ...................................................................................................3-5
1.2.3. ............................3-6
1.2.4. ..................................................................................3-6
..................................................................................................................3-7
...................................................................3-8
...........................3-10
1.5.1. ..................................................................................3-11
1.5.2. ..................3-14
1.5.2.1. ........................... 3-14
1.5.2.2. ................................................................ 3-16
1.5.2.3. ................................................................. 3-19

1.6.

1.5.3. .............................................................................................3-21
1.5.4. .....................................................................................................3-22
1.5.5. ...........................................................................3-27
1.5.6. ..........................................................................................3-28
1.5.7. .................................................................................3-28
...............................3-29
1.6.1. ..................................................................................3-30
1.6.2. ..................3-32
1.6.2.1. ........................... 3-32
1.6.2.2. ................................................................ 3-34
1.6.2.3. ................................................................. 3-37

1.6.3.
1.6.4.
1.6.5.
1.6.6.
2.

.....................................................................................................3-39
...........................................................................3-42
..........................................................................................3-43
.................................................................................3-44

- .......................................................3-45
2.1.

2.2.

2.3.

2.4.

2.5.

......................................................................................................3-45
2.1.1. .........................................................................................3-45
2.1.2. ..................................................................................................3-46
2.1.3. DFL.............................................................3-46
2.1.4. ..............................................................................................3-48
2.1.5. ........3-51
2.1.6. .....................................................................3-52
2.1.7. ..............................................................................................................3-56
2.1.8. ................................................................................3-60
2.1.9. ................................................................................................3-61
- ....................................................................................3-62
2.2.1. ...........................................................................3-62
2.2.2. .........................................................................................3-63
2.2.3. ..............................................................................................................3-63
..................................................................................................3-64
2.3.1. ...........................................................................3-64
2.3.2. .........................................................................................3-65
2.3.3. .............................................................................................3-66
2.3.4. ..............................................................................................................3-67
........................................................................3-68
2.4.1. ...........................................................................3-68
2.4.2. .........................................................................................3-68
2.4.3. .............................................................................................3-69
2.4.4. ..............................................................................................................3-70
2.4.5. .............................................................................3-71
........................................................................................................3-71

3-1

2.6.

2.7.

3.

- ...........................................3-85
3.1.

3.2.

3.3.

4.

........................................................................................................3-85
3.1.1. .........................................................................................3-85
3.1.2. ..................................................................................................3-86
3.1.3. ..........................................................3-86
3.1.4. Mag.............................................................3-90
3.1.5. ..............................................................................................3-91
3.1.6. ........3-94
3.1.7. .....................................................................3-96
3.1.8. ............................................................................................................3-100
3.1.9. ..............................................................................3-104
3.1.10. .............................................................................................3-104
....................................................................3-105
3.2.1. .........................................................................3-105
3.2.2. .......................................................................................3-105
3.2.3. ...........................................................................................3-106
3.2.4. ............................................................................................................3-107
..................................................................................................3-108
3.3.1. .........................................................................3-108
3.3.2. .......................................................................................3-108
3.3.3. ...........................................................................................3-109
3.3.4. ............................................................................................................3-111
3.3.5. ..........................................................................3-111

.............................................................................................................3-112
4.1.
4.2.

4.3.
4.4.

4.5.

3-2

2.5.1. ...........................................................................3-71
2.5.2. .........................................................................................3-72
2.5.3. .............................................................................................3-72
2.5.4. ..............................................................................................................3-74
2.5.5. ............................................................................3-75
...............................................................................3-76
2.6.1. ...........................................................................3-76
2.6.2. .........................................................................................3-76
2.6.3. .............................................................................................3-77
2.6.4. ..............................................................................................................3-78
................................................................................3-78
2.7.1. ...........................................................................3-78
2.7.2. .........................................................................................3-81
2.7.3. .............................................................................................3-81
2.7.4. ..............................................................................................................3-83

.................................................................................................................................3-112
(DFL(HEIGHT))............................................................................3-112
4.2.1. ...................................................................................................3-112
4.2.2. ........................................................................3-113
4.2.3. .............................................................................3-113
4.2.4. ...................................................................................3-116
4.2.5. ......................................................................................................3-118
4.2.6. ..........................................................................3-119
4.2.7. .........................................................................................3-122
(IPR-LOW(BIAS VOLTAGE))..........................................................3-123
4.3.1. ......................................................................3-124
4.3.2. ..........................................................................3-126
(MAG(HEIGHT))..................................................................3-127
4.4.1. ......................................................................3-127
4.4.2. ..........................................................................3-128
4.4.3. ...................................................3-130
(PHASE(HEIGHT)).........................................................................3-131
4.5.1. ......................................................................3-131
4.5.2. ...........................................................3-133

3. -

3. -
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1.4.
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Load Calibrations (. 1-10).

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3-20

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3. OK,
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3-26

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3-28

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2.
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3. (. 1.6.3 . 3-39).
4. (. 1.6.4 . 3-42).
5. (. 1.6.5 . 3-43).
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3-44

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5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).

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3-45

2.1.2.
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3-46

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3-47

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3-48

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3-49

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3-50

3. -

Set Point
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2.1.5.

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3-51


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2.1.6.
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. 2-11.

Scan
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1D- ,
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2D- .

3-52

3. -


Mode ( )
Contact Topography (Constant Force) (. 2-13).
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3-53


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3-54

3. -

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3-55

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2.1.7.

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3-56

3. -

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3-57



(. . 2-18, . 2-19) ,
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. 2-23.

3-58

3. -

. 2-23. Height

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.
, ,
, , :
Frequency. Set Point
FB Gain.
Pause
.
Restart .

3-59

. Pause
,
Restart.



, ,
.

, ,
.
,
,
.
,
.

.
,
Set Point , .

2.1.8.

:
1. File Save.
2. ,

C:\Program Files\NT-MDT\Nova).
3. *.mdt.

3-60

.
NoNameXX.mdt, XX Nova.

3. -

2.1.9.
:
1. (

).

2. , :
a. Approach (
) (. 2-26).

. 2-26. Approach

b. Moving Backward (. 2-27)


Approach. C
23 .

. 2-27

c. ,
(. 2-28).

Backward

. 2-28

3-61

2.2.

2.2.1.
-
, .
-
, , , ,
- , ,
(, ), .
-
. ,
,

(. 2-29). , .

. 2-29

. 2-30


.
. LF,
.

.
,
,
(. 2-30). .
, .
, ,
. ,

.

3-62

3. -

2.2.2.
- ,
2.1 . 3-45.

1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52). :
Lateral Force.
6. (. 2.1.7 . 3-56).
( ) ,
. 2.1.6 . 3-52
Contact Topography (Constant Force) Lateral Force.
Scan
Mode Lateral Force (. 2-31).
,
, .

. 2-31.

2.2.3.
Run,
Scan:

2D- :
( Height),
( LF) (. 2-32);

3-63

. 2-32.

1D-
(. 2-33).

. 2-33. LF

2.3.

2.3.1.

.
(
).
.

, ,
.
,
. .

(. . 2-34)
( DFL ),
, ,
DFL .

3-64

3. -

. 2-34

,
,
( DFL)
, .
,
DFL .
: , .

. , ( ,
, - ..) ,
.

,
.
.

2.3.2.
, ,

.

1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
3-65

4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).

,
.

2.3.3.
1. Scan (
(. 2-35).

. 2-35.

2. Contact Constant Height Mode


Scan (. 2-36).

. 2-36.

3-66

.
FB Gain ( )
.

.
DFL.

3. -

2.3.4.
Run,
Scan:

2D- , ,
(. 2-37);

. 2-37.

1D-
(. 2-38).

. 2-38. DFL

3-67

2.4.
2.4.1.

, , ,
,
..
,
.
,

. ,
-

.
, ,
- -, p-n ,

2.4.2.
,
2.1 . 3-45.
,
,
.


AU006.

.

1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).

,
.
3-68

3. -

2.4.3.
1. Scan (
(. 2-39).

. 2-39.

2. Spreading Resistance Mode


Scan (. 2-40).

. 2-40.

3. (

).

4. Ipr low .
5. Bias Voltage,
(. 2-41)
.

. 2-41. Bias Voltage

6. , Bias Voltage ,
Ipr low
110 A.

3-69

2.4.4.
Run,
Scan:

2D- :
( Height),
( Ipr low);

. 2-42.

1D-
(. 2-43).

. 2-43. Ipr low

3-70

Ipr low

3. -

2.4.5.
, :
Set Point ( );

( Bias Voltage) (. . 2-41).
;
(
).

2.5.

!
.

2.5.1.
.
Z-
,
.
.
,
.
, (. 2-44).

. 2-44


.
,
, , .

3-71

2.5.2.
,
2.1 . 3-45.
, ,

.

1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
,
,
.

2.5.3.
1. Scan (
(. 2-45).

. 2-45.

2. Force Modulation Mode


Scan (. 2-46).

. 2-46.

3-72

.
Z- ,
(, ),

.

3. -

:
1. Resonance (
) (. 2-48).

. 2-47.

2. Auto peak find (. 2-48).

. 2-48. Resonance

3. (From, To) 525 .


4. , Run
( ).

(
Mag) (. 2-49).

. 2-49

3-73

5. Frequency (. 2-50), .

. 2-50

6. , 25 .
( Amplitude)
(. . 2-48), (
Gain) ( Preamplifier) (. . 2-48).

2.5.4.
Run,
Scan:

2D- :
( Height), -
( Mag) (. 2-51);

3-74

3. -

. 2-51.

. Mag
.

1D-
(. 2-52).

. 2-52. Mag

2.5.5.
, :
Set Point ( );
, ;
( Amplitude) (. . 2-48),
( Gain)
( Preamplifier) (. . 2-48);
( ).

3-75

2.6.

2.6.1.

.
(Set Point), ,
, ( DFL).
DFL

( ).
DFL (,
)
.
. ,

, (
DFL) .

,
(
) ,

. ,

.
- .

.

2.6.2.
,
2.1 , . 3-45.
,
,
.

1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
3-76

3. -


,
.

2.6.3.
,
DFL, :
1. Scan Settings (. 2-53),
Scan.

. 2-53.

2.
DFL.
3. OK,
.

3-77

2.6.4.
Run,
Scan:

2D- :
( Height),
( DFL) (. 2-54);

. 2-54.

1D-
(. 2-55).

. 2-55. DFL

2.7.

2.7.1.


.

- .

3-78

3. -

.
,

.
.

,
.
,

.
. 2-56 ,
, .
,
, .

. 2-56


. ,
,
.

, . ,
.


. , ,

.

3-79

,
,
,
(. 2-57).
.

. 2-57

.
,
, .
( ), ,
,
,
. .
, , ,
,
, .. .
.

.

.

3-80

3. -

2.7.2.

(. 3,
. ).
.
,
,
.


AU007.
.


1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).

,
.

2.7.3.
1. Scan (
(. 2-58).

. 2-58.

2. Piezoresponse Force Microscopy Mode


Scan (. 2-59).

3-81

. 2-59.

.

Gain Preamplifier,
DFL (. 2-60).

. 2-60

:
Height Mag (. 2-61);
Phase (. 2-61).

. 2-61.

3-82

3. -

2.7.4.
Run,
Scan:

2D- :
( Height),
( Mag),
( Phase) (. 2-62).

. 2-62.

1D-
(. 2-63).

. 2-63. Mag

. ,
,
( DFL).
( LF),
DFL LF (. 2-64).

. 2-64

3-83


2D-

, (. 2-65).

. 2-65.

3-84

3. -

3. -



,
.

3.1.

3.1.1.

.

, AU020 AU030.
.

,
:
;
;
,
;
;
;
0.51 .


:
1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).

3-85

3.1.2.
,
SemiContact (. 3-1)
.

. 3-1.

SemiContact
, .

3.1.3.

:
1. Resonance (
) (. 3-2).

. 3-2.

2. Auto peak find (. 3-3).

. 3-3. Resonance

3. ,
( From, To), 90 500 .
4. ,
Run.

3-86

3. -

:

( Mag);
;
,
;

Mag (. 3-4).

. 3-4

5. ,
. ( )
, . 3-4,
, .
( 3.1.4
Mag . 3-90).
, ,
.

,
, ,
. , ,
. 3-5
. 3-9.

3-87

, , ,
(
),
( Gain , Amp Gain ),
.
I. ,
3540 .
,
3540 (. 3-5),
:

. 3-5

1.
Gain, (. 3-6).

. 3-6

2. Mag 2025 ,
Gain . Mag
(. 3-7).

3-88

3. -

. 3-7

3. Mag 2025
,
Run.
4. ,
( 3.1.4 . 3-90),
1-3 .
(. 3-8)
( Preamplifier : 1 10).

. 3-8

II. ,
3540 .
,
3540 (. 3-9), :

. 3-9

3-89

1. Amplitude,
(. 3-10).

. 3-10

2. Amplitude .
3.
, Run.
4. ,
( 3.1.4
Mag . 3-90), 1-3
.

3.1.4. Mag
Mag
2025 .
Mag
. :
1.
Amplitude, (. 3-11) (
01 ).

. 3-11

2. Mag 2025 ,
Amplitude .
Mag (. 3-12).

. 3-12

3-90

3. -

3.
(
: 0.1, 1, 10) (. 3-13).

. 3-13

.
Mag ,
( Gain)
( Preamplifier).
Mag

( Amplitude),
.
, Mag

,
.

3.1.5.
1. Approach (
) (. 3-14).

. 3-14.

2. SetPoint,

(. 3-15).

. 3-15. Approach

3. ,

3-91

:
, Z-
, ,
(. 3-16).
;

. 3-16.

Set Point,
Mag (.. Set Point=Mag/2);
, .
Mag
,
.
1030 , ,
(. 3-17):

3-92

3. -

. 3-17.
1 ; 2

Mag Set Point,


Z- , Mag
Set Point,
;

(. 1 . 3-17);
;
Mag Set Point
Mag(t), ;
Approach Done. (. 2 . 3-17).

3-93

. ,
, ,
. ,
( Z-)
.

.

, . ,
Mag .

Set Point
Set Point:
Auto SetPoint (
);
Set Point ,
(. 3-18).

. 3-18

Set Point
Mag (.. SetPoint=Mag/2).

. Set Point
Mag.

3.1.6.

( FB Gain),
.
( ),
.
Mag (. 3-19).

3-94

3. -

. 3-19.


0.50.7 ,
. FB Gain.

:
1. FB Gain
,
(. 3-20).

. 3-20. FB Gain

2. FB Gain, Mag
.
3. FB Gain,
.
Mag (. . 3-19).
4. FB Gain,
0.50.7 FB Gain,
Mag.

. FB Gain
0.3,
.

3-95

FB Gain 0.3
, :
1. (

).

2. Mag 2050 %,
( Gain) (
Preamplifier).
3. ( Amplitude)
Mag 2025.

.
,
Mag 20.

4. (

).

5.

( 3.1.7 . 3-96),
14.

3.1.7.
Scan (
(. 3-21).

. 3-21.

Scan
(. 3-22).

. 3-22. Scan

1D- ,
.
2D- .

Mode ( )
Semicontact Topography (. 3-23).
.

3-96

3. -

. 3-23.


:

, ,
Z-,
;
, ,
,
, , 0.51 .

, , Set Point, FB Gain.
.

, :
1. ,
2D- (. 3-24).

. 3-24. 2D-
1 ;
2 ,

3-97

2.
(. 1 . 3-24).

.
Scan Size.

3.
. ,

. ,
(. 2 . 3-24) .

.
(. . 3-16).
, ,

X Y (Point Number),
( Scan Size) (Step Size)
(. 3-25).

. 3-25

Point Number, Scan Size, Step Size


:
Point Number:

Scan Size ;
Step Size .

Scan Size:

Step Size ;
Point Number .

Step Size:

Scan Size ;
Point Number .

3-98

3. -



, ,
.
, ,
.
(
Frequency) 0.52 (. . 3-25).


,

Sensor Height. :
1. Scan Setings (. 2-16),
Scan.

. 3-26

2. ,
, SensorHeight.
3. OK,
.

3-99

3.1.8.

( TGQ-1, 3 ).

,
, , ,
.
Run,
Scan (. 3-27).

. 3-27

Run:

2D- , ,
(. 3-28);

. 3-28.

1D-
(. 3-29);

3-100

3. -

. 3-29. Height

Scan ,
: Pause, Restart, Stop (. 3-30).

. 3-30

- ,
Stop <Esc>.


(. . 3-28, . 3-29) ,
.
,
Subtract. None (. 3-30).
Plane (. 3-31),
, ,
, . 3-28, , . 3-32.

. 3-31

3-101

. 3-32.

, 1D-
.
. 3-29, ,
. 3-33.

. 3-33. Height

Subtract .
.

3-102

.
,

Subtract,
.

3. -



, Frequency (. 3-34),
Set Point (. 3-35), FB Gain
(. 3-35).
.

. 3-34

. 3-35

Pause.
,

.
. ,
, :
Frequency, Set Point
FB Gain.
Restart .


, ,
.

, ,
.
,
,
.
,
.

.
,
Set Point , .

3-103

3.1.9.

:
1. File Save.
2. ,

C:\Program Files\NT-MDT\Nova).
3. *.mdt.

.
NoNameXX.mdt, XX Nova.

3.1.10.
:
1. (

).

2. , :
1) Approach (
) (. 3-36).

. 3-36.

2) Moving Backward (. 3-37)


Approach. C
23 .

. 3-37

3) , Fast Backward
(. 3-38).

. 3-38

3-104

3. -

3.2.

3.2.1.


.
(Set Point), , ,
( Mag).
Mag ,
( ).
Mag (,
)
.
.
,
,
( Mag),
.
,
,
,
(
) ,
.

.

.

.

3.2.2.
,
3.1 . 3-85.
,
,
.

.

AU020 AU030.
.

3-105

1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).
,
,
.

3.2.3.
,
Mag ,
:
1. Scan Setting (. 3-39) Settings
Scan.

. 3-39.

3-106

3. -

2.
Mag.
3. OK,
.

3.2.4.
Run,
Scan:

2D- :
( Height),
( Mag) (. 3-40);

. 3-40. ( TGQ-1)

1D-
(. 3-41).

. 3-41. Mag

3-107

3.3.

3.3.1.
,
,
, , .
,
. ,
(. 3-42).

. 3-42


.

,
. , ,
,
,

3.3.2.
, ,

.

.

, AU020 AU030.
.

3-108

3. -


1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).
,
,
.

3.3.3.
Mode ( )
Phase Contrast (. 3-43).
.

. 3-43.


:
1. (
).

2. Phase (. 3-44).

. 3-44

3-109

Phase 0 180
, 0
360 .
3. Resonance , Phase (. 3-45)
( ),

(. 3-46).
,
0 180 .
.

. 3-45

. 3-46

3-110

3. -

3.3.4.
Run,
Scan:

2D- :
( Height),
( Phase) (. 3-47).

. 3-47.

1D-
(. 3-48)

. 3-48. Phase

3.3.5.
, :
Set Point ( );
( Phase);
( FB Gain);
( ).

3-111

4.

4.1.

.

.

.
DFL(Height). ,
, ,
.

4.2. (DFL(Height))

z- , ..
DFL(Height).
,
z- ( Height)
DFL. DFL(Height) ,
, ,
.

. ,
.

4.2.1.
,
(.
, 3, 2, . ).
:
1. (. 4.2.2 . 3-113);
2. , ..
(. 4.2.3 . 3-113);
3. (. 4.2.4 . 3-116);
4. (. 4.2.5 . 3-118);
5. (. 4.2.6 . 3-119);
6. (. 4.2.7 . 3-122).

3-112

3. -

4.2.2.
Curves (
(. 4-1).

. 4-1. Curves

4.2.3.
1. a
(. . 4-2).
Height.

. 4-2

.

:
Height

Z;

SetPoint

,
,
;

BiasVoltage

, ,
, .

2. f1(a) ,
.
DFL (. 4-3).

. 4-3

3-113

. a,
,
f1(a).

3. Land, Lift (. 4-4).

. 4-4

.
Land ( ) ,

, .
Lift , , ..
.

Land = 0.

. Height
(. 4-5):
1) 1 Height
, Lift,
2) 2 - , Land
3) 3 - , Lift;
4) 4 - Height .

. 4-5

3-114

3. -

1.
(
Point
in
curve)

( Curve Time). Point in curve 1000.


Curve Time 15 .

. 4-6

2. , (
f1(a) safety limits).

. , DFL(Height)
,
, ( Level)
, 5-10 ,
Set Point. , ,
,
, 3-5
Set Point.

Height.
,
. Z-

(. 4-7).

. 4-7. Z-

,
,
, .. Curve Time.

3-115

4.2.4.

.
Select Frame (. 4-8) .
2D-
.

. 4-8

:
;
, ;
.
.

.



:
1. XY Point Set Point (. 4-9).

. 4-9

2. ,
.
3. Curves.

3-116

3. -

,

, .
1. XY Point Set Line (. 4-10).

. 4-10

2. 2D-
, (. 4-11).
<Ctrl>
; .

. 4-11

3. , ,
Positions.



.
1. XY Point Set Grid (. 4-12).

. 4-12

3-117

2. <Ctrl>,
(. 4-13).
.

. 4-13

3. Positions (. 4-12)
X Y.

4.2.5.

.

, ,
, .
, <Esc>
.

3-118

3. -

4.2.6.

(. 4-14). DFL(Heigth)
.
,
,
(. 4-15). .
25 .

. 4-14. DFL(Heigth)

. 4-15. ,

. 4-14 ,
( )
( ).

. , Height,
() ().

.
.


. DFL(Heigth)
. 4-16.

3-119

. 4-16.

.
,

(. 4-17).

. 4-17.

Data,

(. , 2).
- ,

.

3-120

3. -

:
1. Data.
2. (.1 . 4-18).

. 4-18. Data
1 ; 2 ;
3 ; 4

3.
2,
3,
.
4. , ,
4,
( ) .

3-121

4.2.7.

.
.
z- DFL , DFL
, ,
, (. 4-19).

. 4-19

,
Z.
:
F = k Height

(1)

k (. ).
Height.

(Pair Markers)
, . 4-20.

. 4-20

3-122

3. -

DX DY
Height DFL. Height = 25 .
0.03 /. ,
:
F = 0.03 /25 0.8

(2)

, (
) .
, ,
Set Point = 2 .
Height, . 4-21.
Set Point;
DFL
.

. 4-21


Set Point = 2 :
F = 0.03 /81 2.4 .

(3)

4.3. (Ipr-low(Bias Voltage))


,
( Ipr-low) (
Bias Voltage). ,
.
,
(.
, 3, 2, . ).
.
BV .

3-123

4.3.1.
,
4.2 (DFL(Height)) . 3-112.
.
, .
1. ,
Contact (. 4-22).

. 4-22

2. -
. :
a

Scan (
).

b Mode Spreading Resistance (. 4-23).

. 4-23

-
(. 4-24):

. 4-24
) ; )

3-124

3. -

1. (
).

2.
Bais Voltage; f1(a) Ipr-low
(. 4-25).

. 4-25

3. ( From, To).
4. (. 4-26).
Curve Time 1 .

. 4-26

4. ( , , )
(. 4-27).

. 4-27

5. .
6.

3-125

4.3.2.

(. 4-28).
Ipr-low(Bias Voltage) .
, ,
.

. 4-28

,
( )
( ).

.
.

.
,

(. 4-29).

. 4-29.

Data,

(. , 2).

3-126

3. -

4.4. (Mag(Height))

z- , .. Mag(Height).
Mag , . Height

, z- .
,
,
.
,
(.
, 3, 2, . ).

4.4.1.
,
4.2 (DFL(Height)) . 3-112.
.
, .
:
1. ,
SemiContact (. 4-30).

. 4-30

2. (
).

3. Height;
f1(a) Mag (. 4-31).

. 4-31

4. ( Land, Lift).
.

3-127

5. (. 4-32).

. 4-32

.
Mag ( Land),
.
Mag 10 %
Mag (
Level 0.5 2 ).

Height
, .

6. ( , , )
(. 4-33).

. 4-33

7. .
8.

4.4.2.
(. 4-34).
Mag(Heigth) .
,
, .

3-128

3. -

. 4-34

,
( ),
( ).

. , Height,
() ().

.
.

.
,
(. 4-35).

. 4-35.

Data,

(. , 2).

3-129

4.4.3.

.

Mag(Heigth)


. ,
, z-

.
,
z- ( Height):
= Height

(1)

,
.
,
, .
Height, Mag
( Set Point) ,
.
,
Mag Height:
Height = K Mag

(2)

.
Mag
Height.

(Pair Markers)
(. 4-36).
DX DY Height Mag.

. 4-36

3-130

3. -

, (2) ,
,
Mag, :
K = Height / Mag = DX / DY= 31.7 / 4 = 7.93 [/]

(3)


:
(4)

= KMag

, Set Point = 8 ,
64 .

. ,
Gain, Lock-In
- ( Scheme ).
, K
. Lock-In ,
. , ,
.

4.5. (Phase(Height))

z- , ..
Phase(Height).
, ,
, ,
.
,
(.
, 3, 2, . ).

4.5.1.
,
4.2 (. 3-112).
. ,
.
:
1. ,
SemiContact (. 4-37).

. 4-37

3-131

2. (
).

3. Height;
f1(a) Phase (. 4-38).

. 4-38

4. ( Land Lift).
.

. (
Land) Height
10-20 % Mag
(. 4-39).
Mag(Height) (. . 4.4
(Mag(Height)) . 3-127).
Height ~ -50 .

Mag

~ 10-20%

. 4-39

5. (. 4-40).

. 4-40

3-132

3. -

6. ( , , )
(. 4-33).

. 4-41

7. .
8.

4.5.2.
(. 4-42).
Phase(Height) .
,
, .

. 4-42

,
( )
( ).

. , Height,
() ().
.
.

3-133

Phase(Height)
, , . , . 4-42
.
.
. 4-43
. . ,
, .. ,
( Amplitude).

. 4-43

.
,
(. 4-44).

. 4-44.

Data,

(. , 2).

3-134