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\cols2\colno1\colw1546\colsr-0\colno2\colw9546\pard\li720\ri0\sl-213\slmult0 \fs
18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slm
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-346\slmult0 \fs20\cf0\f0\charscalex100\i {Revisin }\i0 \par\column\pard\li1080\r
i0\sl-213\slmult0 \fs18\cf0\par\pard\li1080\ri0\sl-213\slmult0 \fs18\cf0\par\par
d\li1080\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li1080\ri0\sl-213\slmult0 \fs18\c
f0\par\pard\li1080\ri0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Revista Cien
cia e Ingeniera. Vol. 27, No. 3, pp. 109-117, agosto-noviembre, 2006. ISSN 1316-7
081}\i0 \par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmul
t0 \fs18\cf0\par\pard\li0\ri0\sl-440\slmult0 \fs36\cf0\f0\charscalex100\b {Estad
o del arte de los sistemas microelectromecnicos}\b0 \par\pard\li466\ri0\sl-213\sl
mult0 \fs18\cf0\par\pard\li466\ri0\sl-413\slmult0 \fs36\cf0\f0\charscalex100\b {

Microelectromechanical systems state of the art}\b0 \par\pard\li2493\ri0\sl-213\

slmult0 \fs18\cf0\par\pard\li2493\ri0\sl-360\slmult0 \fs18\cf0\f0\charscalex100\
b {Mrquez*, David y Crdenas, Oscar }\b0 \par\pard\li2066\ri0\sl-226\slmult0 \fs20\
cf0\f0\charscalex100 {Universidad de Los Andes, Facultad de Ingeniera }\par\pard\
li2146\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Postgrado en Automatizacin
e Instrumentacin }\par\pard\li3053\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100
{Mrida 5101, Venezuela}\par\pard\li3146\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {*damarquezg,@ula.ve }\par\pard\sect\sectd\sbknone\cols3\colno1\colw5173\co
lsr-0\colno2\colw3680\colsr-0\colno3\colw2240\pard\li720\ri0\sl-213\slmult0 \fs1
8\cf0\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {Recibido: 09
-09-2006}\par\column\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-2
13\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\
sl-373\slmult0 \fs20\cf0\f0\charscalex100\b {Resumen}\b0 \par\column\pard\li0\ri
0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscal
ex100 {Revisado: 29-10-2006}\par\pard\sect\sectd\sbknone\pard\li706\ri0\sl-213\s
lmult0 \fs18\cf0\par\pard\li706\ri0\sl-240\slmult0 \fs18\cf0\f0\charscalex100\i
{El progreso paralelo de la mecnica y la electrnica, ha creado una nueva tecnologa
incorporando mecnica y electrnica }\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf
0\f0\charscalex100\i {bajo el nombre de Sistemas Micro-Electro-Mecnicos (Microele
ctromechanical Systems: MEMS). Esta tecnologa se est }\i0 \par\pard\li706\ri0\sl-2
26\slmult0 \fs18\cf0\f0\charscalex100\i {convirtiendo rpidamente en una de las te
cnologas ms promisorias, con un potencial aparentemente ilimitado para domi-}\i0 \
par\pard\li706\ri0\sl-213\slmult0 \fs18\cf0\f0\charscalex100\i {nar los desarrol
los tecnolgicos futuros. Los Sistemas Microelectromecnicos han ganado gran aceptac
in como productos }\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex
100\i {viables para las muchas aplicaciones comerciales y gubernamentales. Actua
lmente se estn usando en la industria del au-}\i0 \par\pard\li706\ri0\sl-226\slmu
lt0 \fs16\cf0\f0\charscalex100\i {tomvil, telecomunicaciones, aplicaciones biomdic
as, domtica, medio ambiente, entre otras. En este trabajo se presenta }\i0 \par\p
ard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {el estado del arte y
aplicaciones de sistemas con tecnologa MEMS, basado en investigacin biblio hemerog
rfica y de In-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs16\cf0\f0\charscalex100\
i {ternet. La investigacin esta limitada a describir los MEMS, definicin, ventajas
, tecnologas relacionadas con el diseo y }\i0 \par\pard\li706\ri0\sl-213\slmult0 \
fs16\cf0\f0\charscalex100\i {fabricacin, clasificacin de sus aplicaciones, tendenc
ias en mecnica y mercados de aplicacin. La produccin masiva de }\i0 \par\pard\li706
\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {MEMS, garantiza una funcionali
dad consistente y una ejecucin exacta de los estndares de diseo. Sin embargo, la co
n-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {fiabilid
ad de estos dispositivos tiene que ser evaluada meticulosamente y ste es un reque
rimiento vital para mayores mejo-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\c
f0\f0\charscalex100\i {ras y una adopcin ms general. Los micro motores de 1 MHz mo
strados recientemente sugieren el potencial extraordina-}\i0 \par\pard\li706\ri0
\sl-213\slmult0 \fs18\cf0\f0\charscalex100\i {rio de los MEMS. El rpido desarroll
o del campo de los MEMS iguala el progreso en microelectrnica de hace treinta aos
}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {que conduj
o a los modernos microprocesadores de alta potencia y computadoras ultrarrpidas.
Para desarrollar comple-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\cha
rscalex100\i {tamente el nuevo mundo de la microelectromecnica, es esencial un es
fuerzo interdisciplinario coordinado y el apoyo con-}\i0 \par\pard\li706\ri0\sl226\slmult0 \fs18\cf0\f0\charscalex100\i {tinuado de la comunidad cientfica.}\i0
\par\pard\li706\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li706\ri0\sl-240\slmult0 \
fs20\cf0\f0\charscalex100\b {Palabras clave}\b0 \fs20\cf0\f0\charscalex100 {:}{
}\fs20\cf0\f0\charscalex100 {instrumentacin, sistemas microelectromecanicos, tecn
ologas futuras}\fs20\cf0\f0\charscalex100\b {.}\b0 \par\pard\li5200\ri0\sl-213\sl
mult0 \fs18\cf0\par\pard\li5200\ri0\sl-360\slmult0 \fs20\cf0\f0\charscalex100\b
{Abstract }\b0 \par\pard\li706\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li706\ri0\s
l-240\slmult0 \fs18\cf0\f0\charscalex100\i {The parallel progress of the mechani
cs and the electronics, have created a new mechanical and electronic technology
in-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {corpora

ting under the name of Micro-Electro-Mechanical Systems (Microelectromechanical

Systems: MEMS). This tech-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\c
harscalex100\i {nology is quickly becoming one of the most promissory technologi
es, with an apparently limitless potential to dominate the}\i0 \par\pard\li706\r
i0\sl-226\slmult0 \fs16\cf0\f0\charscalex100\i {future technological development
s. Microelectromechanical Systems have gained great acceptance like viable produ
cts for }\i0 \par\pard\li706\ri0\sl-213\slmult0 \fs16\cf0\f0\charscalex100\i {th
e many commercial and governmental applications. At the moment they are being us
ed in the industry of the automobile, }\i0 \par\pard\li706\ri0\sl-226\slmult0 \f
s16\cf0\f0\charscalex100\i {biomedical applications, telecommunications, domotic
a, environment, among others. In this work one appears the state of }\i0 \par\pa
rd\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {the art and applicatio
ns of systems with technology MEMS, based on papers review and Internet. The inv
estigation this lim-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs16\cf0\f0\charsca
lex100\i {ited to describe to the MEMS, definition, advantages, technologies rel
ated to the design and manufacture, classification of }\i0 \par\pard\li706\ri0\s
l-213\slmult0 \fs18\cf0\f0\charscalex100\i {its applications, tendencies in mech
anics and markets of application. The massive production of MEMS, guarantees a c
on-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {sistent
functionality and an exact execution of the design standards. Nevertheless, the
trustworthiness of these devices me-}\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs
18\cf0\f0\charscalex100\i {ticulously must be evaluated and this one is a vital
requirement for greater improvements and one more a more general}\i0 \par\pard\l
i706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100\i {adoption. Micro motor of 1
MHz shown recently suggests the extraordinary potential of the MEMS. The fast d
evelopment of }\i0 \par\pard\li706\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100
\i {the field of the MEMS equals the progress in microelectronics of thirty year
s ago that it lead to the modern microprocessors}\i0 \par\pard\li706\ri0\sl-213\
slmult0 \fs18\cf0\f0\charscalex100\i {of high power and high speed computers. In
order to completely develop the new world of the microelectromechanical, in-}\i
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ry effort coordinated and the continued support of the scientific community is e
ssential. }\i0 \par\pard\li706\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li706\ri0\s
l-240\slmult0 \fs20\cf0\f0\charscalex100\b {Key words}\b0 \fs20\cf0\f0\charscale
x100 {:}{ }\fs20\cf0\f0\charscalex100 {instrumentation, microelectromechanical s
ystems, future technologies.}\par\pard\li3413\ri0\sl-213\slmult0 \fs18\cf0\par\p
ard\li3413\ri0\sl-360\slmult0 \fs14\cf0\f0\charscalex100\i {Revista Ciencia e In
geniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pard\sect\sectd\sbknone\
pard\sect\sectd\sbkpage
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b0 { }\fs20\cf0\f0\charscalex100\b {Introduccin}\b0 \par\pard\li546\ri0\sl-213\sl
mult0 \fs18\cf0\par\pard\li546\ri0\sl-240\slmult0 \fs20\cf0\f0\charscalex100 {Lo
s MEMS, tambin conocidos como microsistemas,}\par\pard\li160\ri0\sl-213\slmult0 \
fs20\cf0\f0\charscalex100 {son definidos tpicamente como dispositivos microscpicos
}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {diseados, fabric
ados, y utilizados para interactuar o produ-}\par\pard\li160\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {cir cambios dentro de un ambiente controlado (Fujita
, }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {1996). Estos p
equeos y ms sofisticados dispositivos que}\par\pard\li160\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {piensan, actan, miden y se comunican, estn remplazando }\pa
r\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {a los dispositivos
actuales tradicionales en muchas aplica-}\par\pard\li160\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {ciones. }\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\
f0\charscalex100 {Cul es la motivacin para usar microsistemas? El }\par\pard\li160\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {uso de microsistemas ofrece un me
nor consumo de poten-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex
100 {cia, alto desempeo, peso reducido y un costo mas bajo }\par\pard\li160\ri0\
sl-226\slmult0 \fs20\cf0\f0\charscalex100 {que los dispositivos utilizados actua
lmente. La tcnica de}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex10
0 {fabricacin \uc1\u8220Xbatch\uc1\u8221X (Malshe et al, 1999) reduce los costos
}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de ensamble y ma
nufactura, reduce el tamao y su peso lo }\par\pard\li160\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {que resulta en menos consumo de potencia e incrementa la
}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {flexibilidad del
diseo de sistemas. Reduciendo el tamao y }\par\pard\li160\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {peso de un dispositivo permite que puedan usarse mltiples
}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {componentes en
serie o paralelo para aumentar la funciona-}\par\pard\li160\ri0\sl-226\slmult0 \
fs20\cf0\f0\charscalex100 {lidad, capacidad y fiabilidad del dispositivo.}\par\p
ard\li546\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Los microsistemas se pu
eden categorizar en seis dis-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {tintos tipos: (Fujita, 1998) }\par\pard\li546\ri0\sl-226\slmult0 \f
s20\cf0\f0\charscalex100\i {Sensores}\i0 \fs20\cf0\f0\charscalex100 { son dispos
itivos MEMS diseados para me-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {dir cambios e interactuar con el ambiente. Estos microsis-}\par\pard
\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {temas incluyen sensores qum
icos, de movimiento, inercia-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {les, trmicos y pticos.}\par\pard\li546\ri0\sl-226\slmult0 \fs18\cf0\f
0\charscalex100\i {Actuadores}\i0 \fs20\cf0\f0\charscalex100 { son un grupo de d
ispositivos diseados pa-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscal
ex100 {ra proporcionar un estmulo a otros componentes o disposi-}\par\pard\li160\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tivos MEMS. En los microsistemas
los actuadores son ope-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscal
ex100 {rados electrostticamente o trmicamente.}\par\pard\li546\ri0\sl-226\slmult0

\fs20\cf0\f0\charscalex100\i {MEMS RF}\i0 { }\fs20\cf0\f0\charscalex100 {son una

clase de dispositivos usados para}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\
f0\charscalex100 {transmitir alta frecuencia, es decir seales de radio fre-}\par
\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cuencia. Los disposit
ivos tpicos incluyen: interruptores }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0
\f0\charscalex100 {(switches), capacitores, antenas, etc.}\par\pard\li546\ri0\sl
-226\slmult0 \fs18\cf0\f0\charscalex100\i {MEMS pticos}\i0 \fs20\cf0\f0\charscale
x100 { son dispositivos diseados para dirigir,}\par\pard\li160\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {reflejar, filtrar, y/o amplificar la luz. Estos com
ponentes }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {incluye
n interruptores pticos y reflectores. }\par\pard\li546\ri0\sl-226\slmult0 \fs20\
cf0\f0\charscalex100\i {MEMS para microfluidos}\i0 \fs20\cf0\f0\charscalex100 {
son dispositivos diseados }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charsc
alex100 {para interactuar con fluidos. Dispositivos como bombas y }\par\pard\li1
60\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {vlvulas se han diseado para trab
ajar con pequeos vol-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex10
0 {menes de fluido.}\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex10
0\i {Bio MEMS}\i0 { }\fs20\cf0\f0\charscalex100 {son dispositivos que, como much
os de los }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {MEMS p
ara microfluidos, son diseados para interactuar}\par\pard\li160\ri0\sl-226\slmult
0 \fs20\cf0\f0\charscalex100 {especficamente con muestras biolgicas. Dispositivos
co-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mo stos son di
seados para interactuar con protenas, clu-}\par\pard\li160\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {las biolgicas, reactivos mdicos, etc. y pueden usarse para
}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {suministrar medi
camentos u otro anlisis mdico en sitio. }\par\pard\li546\ri0\sl-213\slmult0 \fs20\
cf0\f0\charscalex100 {Estas seis reas representan aplicaciones totalmente di-}\pa
r\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ferentes de disposit
ivos MEMS que actualmente se encuen-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {tran en uso o en desarrollo para aplicaciones comerciales o
}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {gubernamentales.
}\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-240\slmult0
\fs20\cf0\f0\charscalex100\b {2}\b0 { }\fs18\cf0\f0\charscalex100\b {Generalidad
es sobre MEMS}\b0 \par\pard\li546\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li546\ri
0\sl-240\slmult0 \fs20\cf0\f0\charscalex100 {Aunque no existe una definicin estan
darizada de}\par\column\pard\li3066\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3066
\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3066\ri0\sl-213\slmult0 \fs18\cf0\par\p
ard\li3066\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3066\ri0\sl-346\slmult0 \fs18
\cf0\f0\charscalex100\i {Mrquez y Crdenas}\i0 \par\pard\li0\ri0\sl-213\slmult0 \fs
18\cf0\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {MEMS, est comnm
ente aceptado que se trata de un dis-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {positivo de pequeas dimensiones con cierto nivel de auto-}\par
\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {noma, compuesto de eleme
ntos activos y pasivos microfa-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {bricados y que realiza diferentes funciones (Trimmer, }\par\pard\li
0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {1996). Estas funciones son esen
cialmente la percepcin, el }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {procesado de datos, la comunicacin con el exterior y la }\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {accin sobre el entorno. La naturalez
a del microsistema }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{puede ser elctrica, magntica, ptica, trmica, mecnica o}\par\pard\li0\ri0\sl-226\slmu
lt0 \fs20\cf0\f0\charscalex100 {fludica. La arquitectura del microsistema incorpo
ra circui-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tos elec
trnicos y/u pticos, generadores de seal y recepto-}\par\pard\li0\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {res, microsensores, microactuadores y microgenerado
res.}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Los circuito
s electrnicos/pticos realizan principal-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {mente funciones inteligentes, entre las que se encuentran el
}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {procesado de seal,
el anlisis de datos y las tareas de deci-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\

cf0\f0\charscalex100 {sin. A su vez, la accin conjunta de generadores de seal y}\pa

r\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {receptores permite rea
lizar las funciones de comunicacin}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {del microsistema. Los microsensores, por su parte, realizan }\par
\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {funciones sensoriales d
e deteccin y de percepcin, mien-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\cha
rscalex100 {tras que los microactuadores llevan a cabo funciones de }\par\pard\l
i0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {adaptacin y de accin/reaccin. La
autonoma del sistema}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{est garantizada por los microgeneradores que realizan fun-}\par\pard\li0\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {ciones de suministro y de transformacin d
e energa (Jan-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {son,
2000).}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Como se ob
serva en la Fig. 1, bsicamente, MEMS es}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {un sistema conformado por microestructuras, microsenso-}\par
\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {res, microelectrnica y m
icroactuadores. Las microestructu-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {ras constituyen el armazn del sistema, los microsensores}\par\par
d\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {detectan seales, la microele
ctrnica procesa la seal y da }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsc
alex100 {las rdenes al microactuador para reaccionar.}\par\pard\li160\ri0\sl-213\
slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0
\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\l
i160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\pa
r\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs1
8\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmu
lt0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160
\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-346\slmult0 \fs14\cf0\f0\cha
rscalex100 { Figura 1. Componentes de los micr}\fs14\cf0\f0\charscalex100 {osist
emas (MEMS) (Fujita, 1998). }\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard
\li0\ri0\sl-253\slmult0 \fs20\cf0\f0\charscalex100\b {3}\b0 { }\fs18\cf0\f0\char
scalex100\b {Tendencias en micromecnica}\b0 \par\pard\li386\ri0\sl-213\slmult0 \f
s18\cf0\par\pard\li386\ri0\sl-240\slmult0 \fs20\cf0\f0\charscalex100 {El advenim
iento de la era de la microelectrnica avan-}\par\pard\li0\ri0\sl-213\slmult0 \fs2
0\cf0\f0\charscalex100 {zada hace dos dcadas atrs, marc el comienzo de una }\par\pa
rd\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nueva era de la informacin
y las comunicaciones. Se estn }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\char
scalex100 {desarrollando tecnologas multidisciplinarias con el objeto}\par\pard\l
i0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de satisfacer requerimientos c
ada vez ms complejos. En }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {particular, la experiencia en mecnica est siendo transferi-}\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {da, modificada y mejorada a fin de
orientar nuevos desaf-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex10
0 {os. Las tecnologas de la informacin juegan hoy un rol de }\par\pard\li0\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {liderazgo, y el hardware necesario sigue
siendo de naturale-}\par\pard\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\margls
xn666\margrsxn133\pard\li2853\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li2853\ri0\s
l-213\slmult0 \fs18\cf0\par\pard\li2853\ri0\sl-226\slmult0 \fs14\cf0\f0\charscal
ex100\i {Revista Ciencia e Ingeniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0
\par\pard\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\par
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20\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\
pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\
cf0\par\pard\li720\ri0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Estado del a
rte de los sistemas microelectromecnicos }\i0 \par\pard\li720\ri0\sl-213\slmult0
\fs18\cf0\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {za predo
minantemente mecnica. Los dispositivos CD-}\par\pard\li720\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {ROM, DVD-ROM y los discos duros entre otros, integran }
\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {componentes mecnic
os, electrnicos, magnticos y pti-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\c
harscalex100 {cos, los que deben ser necesariamente ultra pequeos y li-}\par\pard
\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {vianos, a la vez que confi
ables y robustos (Trimmer, 1996).}\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\
f0\charscalex100 {A raz de la significacin de estas aplicaciones y del}\par\pard\l
i720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nivel de madurez de la micro
electrnica, la investigacin ha }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {estado orientada en la ltima dcada al \uc1\u8220Xmundo pequeo\uc1\u822
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as nuevas micro y nano tecnologas. El progreso}\par\pard\li720\ri0\sl-213\slmult0
\fs20\cf0\f0\charscalex100 {paralelo de la mecnica y la electrnica ha creado una
nue-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {va tecnologa,
incorporando mecnica y electrnica bajo el }\par\pard\li720\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {nombre de Sistemas Micro Electro Mecnicos (MEMS), la }\p
ar\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {que se est convirtie
ndo rpidamente en una de las tecnolo-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {gas ms promisorias, con un potencial aparentemente ili-}\par\p
ard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {mitado para dominar los
desarrollos tecnolgicos futuros}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\

charscalex100 {(Koester et al, 1996). La Mecnica jugar un rol de lideraz-}\par\par

d\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {go en el desarrollo de nu
evas aplicaciones de MEMS, in-}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\c
harscalex100 {cluyendo artefactos que realizan ya sea funciones bsicas, }\par\par
d\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tales como acelermetros de
airbag y micro interruptores de }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f
0\charscalex100 {radio frecuencia para comunicaciones inalmbricas o tareas}\par\p
ard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {avanzadas, tales como m
icro girscopos, visores digitales }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f
0\charscalex100 {de micro espejo y pico satlites (Trimmer, 1996).}\par\pard\li109
3\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Estos nuevos sistemas con micro
actuadores, micro}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{sensores, y artefactos de control incrustados, pueden pro-}\par\pard\li720\ri0
\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {veer evidencia experimental sobre fe
nmenos de pequea }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {e
scala y as verificar principios fundamentales en el micro-}\par\pard\li720\ri0\sl
-226\slmult0 \fs20\cf0\f0\charscalex100 {cosmos. Las aplicaciones en micro fluid
ica contribuyen al}\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100
{suministro eficiente de medicamentos mientras que los Bio-}\par\pard\li720\ri0
\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {MEMS estn ganando incesantemente el i
nters de la co-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mu
nidad de ingenieros y cientficos. Los nuevos productos }\par\pard\li720\ri0\sl-22
6\slmult0 \fs20\cf0\f0\charscalex100 {MEMS incorporarn materiales inteligentes av
anzados pie-}\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {zoelc
tricos, ferroelctricos o magnetoestrictivos con fun-}\par\pard\li720\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {ciones y aplicaciones particulares. Permitirn
que micro }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mquinas
\uc1\u8220Xinteligentes\uc1\u8221X funcionen con desempeos inigua-}\par\pard\li7
20\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {lables (Fujita, 1996). En los
casos en que la mecnica puede}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {reemplazar a la electrnica, provee funcionalidad superior y }\par\par
d\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {no est sujeta a ruido elec
trnico no deseado. Por ejemplo,}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\c
harscalex100 {los componentes electrnicos clsicos de redes de fibra p-}\par\pard\li
720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tica estn siendo reemplazados
ahora por interruptores}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscal
ex100 {MEMS pticos que permiten la creacin de conjuntos de }\par\pard\li720\ri0\sl
-213\slmult0 \fs20\cf0\f0\charscalex100 {interruptores en miniatura de alta capa
cidad que jugarn un}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{rol crtico en el desarrollo de interruptores pticos de gran }\par\pard\li720\ri0
\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {escala en redes de fibra ptica futura
s (Petersen, 2000).}\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {La produccin masiva de MEMS con geometras idn-}\par\pard\li720\ri0\sl-213\slmul
t0 \fs20\cf0\f0\charscalex100 {ticas garantiza una funcionalidad consistente y u
na ejecu-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cin exac
ta de los estndares de diseo. Sin embargo, la }\par\pard\li720\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {confiabilidad de estos artefactos tiene que ser eval
uada me-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ticulosa
mente y este es un requerimiento vital para mayores}\par\pard\li720\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {mejoras y una adopcin ms general. Deben desarro
llarse }\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tcnicas ex
perimentales para medir propiedades mecnicas }\par\pard\li720\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {y de materiales para abordar las preguntas crticas y
funda-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mentales d
e comportamiento constitutivo y de fractura en }\par\pard\li720\ri0\sl-226\slmul
t0 \fs20\cf0\f0\charscalex100 {micro escalas reales de MEMS. El ensayo de materi
ales y el}\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {anlisis
de tensiones son partes claves de este desarrollo y }\par\pard\li720\ri0\sl-226\
slmult0 \fs20\cf0\f0\charscalex100 {los mtodos experimentales existentes deben se
r perfeccio-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nado

s o rediseados completamente para armonizar con los}\par\column\pard\li4400\ri0\s

l-213\slmult0 \fs18\cf0\par\pard\li4400\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li
4400\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li4400\ri0\sl-213\slmult0 \fs18\cf0\p
ar\pard\li4400\ri0\sl-346\slmult0 \fs20\cf0\f0\charscalex100\i {111 }\i0 \par\pa
rd\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {desafos y requerimientos del nuevo tamao (Trimmer, }\par\pard\li0
\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {1996). Las herramientas necesari
as para la visualizacin de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {las deformaciones en una escala pequea ya estn disponi-}\par\pard\li0\ri0\
sl-226\slmult0 \fs20\cf0\f0\charscalex100 {bles. Los microscopios de exploracin e
lectrnica son ins-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {t
rumentos de alta resolucin, mientras que el microscopio }\par\pard\li0\ri0\sl-226
\slmult0 \fs20\cf0\f0\charscalex100 {de fuerza atmica recientemente desarrollado
provee poten-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cia d
e resolucin sin precedentes y una flexibilidad sin pa-}\par\pard\li0\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {ralelos para operar en virtualmente cualquier
medio a fin de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {fa
cilitar las pruebas de materiales bajo una variedad de }\par\pard\li0\ri0\sl-213
\slmult0 \fs20\cf0\f0\charscalex100 {condiciones (Malshe, 1999). La mecnica compu
tacional y }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {los mtod
os de elementos finitos han alcanzado el nivel de }\par\pard\li0\ri0\sl-226\slmu
lt0 \fs20\cf0\f0\charscalex100 {maduracin necesario como para desarrollar nuevas
capaci-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {dades de CA
D (diseo asistido por computador) y modela-}\par\pard\li0\ri0\sl-213\slmult0 \fs2
0\cf0\f0\charscalex100 {do para micro artefactos y nuevas y mejores tcnicas de fa
-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {bricacin.}\par\par
d\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Estos nuevos desafos deben
ser satisfechos por un es-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsc
alex100 {fuerzo metodolgico de la comunidad mecnica relacionada}\par\pard\li0\ri0\
sl-226\slmult0 \fs20\cf0\f0\charscalex100 {con los MEMS. El diseo de artefactos,
la fabricacin, la }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {e
valuacin de los ensayos y de la confiabilidad deberan ser }\par\pard\li0\ri0\sl-22
6\slmult0 \fs20\cf0\f0\charscalex100 {abordados en un esfuerzo coordinado que so
pese por igual }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tod
os los aspectos del desarrollo de los MEMS antes men-}\par\pard\li0\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {cionados. A la fecha, el sector manufacturero
ha demostra-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {do un
a actividad considerable para atraer la mayora del so-}\par\pard\li0\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {porte financiero y la atencin de las comunidad
es}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {acadmica e indust
rial. Hoy, el campo de la micro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\c
harscalex100 {mecnica es impulsado por la aplicacin, y la confiabilidad}\par\pard\
li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ha sido abordada sin un adecu
ado entendimiento de la me-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charsc
alex100 {cnica. Slo casos aislados han sido estudiados sin desarro-}\par\pard\li0\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {llar las herramientas generales y
los mtodos apropiados }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {para resolver la cuestin de la integridad mecnica. Aplica-}\par\pard\li0\ri0\s
l-226\slmult0 \fs20\cf0\f0\charscalex100 {ciones novedosas e importantes requier
en una evaluacin }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {de
la confiabilidad basada en la mecnica (Malshe, 1999).}\par\pard\li0\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {Antes de que pueda lograrse la introduccin y p
erfecciona-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {miento
de micro mquinas nuevas, la comunidad mecnica }\par\pard\li0\ri0\sl-226\slmult0 \f
s20\cf0\f0\charscalex100 {debe demostrar el adelanto necesario. Las tensiones re
si-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {duales, los efe
ctos de la concentracin de tensiones en mi-}\par\pard\li0\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {cro entalladuras y esquinas y las fallas por propagacin d
e }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {fisuras estn lleg
ando a ser crecientemente significativas, }\par\pard\li0\ri0\sl-226\slmult0 \fs2

0\cf0\f0\charscalex100 {causando a menudo interrupciones temporarias en la inves

-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tigacin de nuevas
micro estructuras (Trimmer, 1996). Las }\par\pard\li0\ri0\sl-213\slmult0 \fs20\c
f0\f0\charscalex100 {herramientas analticas y experimentales requeridas estn, }\pa
r\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {en principio, disponib
les en un nivel de desarrollo que hace }\par\pard\li0\ri0\sl-226\slmult0 \fs20\c
f0\f0\charscalex100 {factibles tales investigaciones. La comunidad de investiga}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cin en mecnica debe
prestar atencin cuidadosamente a }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\c
harscalex100 {las etapas tempranas del desarrollo de la micro tecnologa y }\par\p
ard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {coordinar sus esfuerzos.
}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Hoy, muchos asp
ectos de la mecnica estn siendo re-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {inventados, aunque a escalas variables (Fig. 2). El rpido}\par\par
d\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {desarrollo del campo de los
MEMS iguala el progreso en }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\chars
calex100 {microelectrnica de hace treinta aos que condujo a los }\par\pard\li0\ri0
\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {modernos microprocesadores de alta p
otencia y computado-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{ras ultrarrpidas. Para desarrollar completamente los nue-}\par\pard\li0\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {vos mundos de la microelectromecnica y de
la nanotecno-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {loga,
son esenciales un esfuerzo interdisciplinario }\par\pard\li0\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {coordinado y el apoyo continuado de la comunidad ci
entfi-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ca.}\par\pard
\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\li3413\
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rd\li3413\ri0\sl-253\slmult0 \fs14\cf0\f0\charscalex100\i {Revista Ciencia e Ing
eniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pard\sect\sectd\sbknone\p
gwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\sect\sectd\sbkpage
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\charscalex100 {nado, as como algunas aplicaciones especficas desarrolla-}\par\par
d\li0\ri0\sl-213\slmult0 \fs18\cf0\f0\charscalex100 {das para cada tcnica.}\par\p
ard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {En cuanto al proceso de
fabricacin de MEMS, Fig. 3,}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsc
alex100 {se basa en el mismo proceso que la industria microelectr-}\par\pard\li0\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nica (Koester et al, 1996), este
requiere una precisin muy }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscal
ex100 {alta en todas y cada una de sus etapas. Esto hace que sea }\par\pard\li0\
ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {necesario desarrollar complejos s
istemas sensorizados ca-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {paces de controlar, monitorear y supervisar las caractersti-}\par\pard\li0\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cas y evolucin de dichos procesos.
}\par\pard\li386\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {Adems de controla
r y supervisar las condiciones del }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f
0\charscalex100 {proceso de fabricacin, para asegurar la precisin y funcio-}\par\p
ard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {nalidad del microdisposit
ivo producido, es necesario some-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\

charscalex100 {ter a este a numerosas pruebas una vez finalizada su fabri-}\par\

pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cacin (test de hermeticid
ad, integridad elctrica, etc.)}\par\pard\sect\sectd\sbknone\pgwsxn11893\pghsxn168
40\marglsxn666\margrsxn133\cols2\colno1\colw5173\colsr-0\colno2\colw5920\pard\li
160\ri0\sl-306\slmult0 \fs20\cf0\f0\charscalex100\b {4}\b0 { }\fs18\cf0\f0\chars
calex100\b {Diseo y fabricacin de MEMS }\b0 \par\pard\li546\ri0\sl-213\slmult0 \fs
18\cf0\par\pard\li546\ri0\sl-240\slmult0 \fs20\cf0\f0\charscalex100 {Como en la
fabricacin de semiconductores, los dispo-}\par\pard\li160\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {sitivos MEMS se fabrican habitualmente a partir de oblea
s }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {de silicio o v
idrio. Sin embargo, la tecnologa MEMS ha }\par\pard\li160\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {superado sus orgenes en la industria de semiconductores a
l}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {incluir otras tc
nicas de fabricacin, como el micro-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\
f0\charscalex100 {mecanizado de silicio superficial, micro-mecanizado de si-}\pa
r\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {licio en volumen, fo
tolitografa, deposicin y moldeado de }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {plstico (LIGA), y maquinado por electrodescarga (EDM) }\par\pa
rd\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {(Ehrfeld et al, 2000), (
Petersen, 1982). }\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{La fabricacin especfica de MEMS crea caractersti-}\par\pard\li160\ri0\sl-226\slmu
lt0 \fs20\cf0\f0\charscalex100 {cas fsicas en las obleas quitando capas que se pu
eden sacri-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ficar
debajo de las estructuras mecnicas deseadas (Bustillo }\par\pard\li160\ri0\sl-22
6\slmult0 \fs20\cf0\f0\charscalex100 {et al, 1998), (Kovacs, 1998). El procesami
ento de MEMS}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {habi
tualmente comprende grabados ms profundos y espe-}\par\pard\li160\ri0\sl-226\slmu
lt0 \fs20\cf0\f0\charscalex100 {cializados y puede fusionar obleas en una pila p
ara crear un }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {dis
positivo multicapa ms grande (Ehrfeld et al, 2000). Los }\par\pard\li160\ri0\sl-2
26\slmult0 \fs20\cf0\f0\charscalex100 {dispositivos MEMS suelen tambin tener cara
ctersticas en }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {amb
os lados de la oblea. En algunos procesos, se requiere }\par\pard\li160\ri0\sl-2
26\slmult0 \fs20\cf0\f0\charscalex100 {una serie de pasos de grabado para labrar
las caractersticas}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{deseadas. En otros procesos, mltiples capas de un material }\par\pard\li160\ri0
\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {-polisilicio, generalmente- se depos
itan en la superficie de }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charsc
alex100 {una oblea y luego se graban selectivamente, dejando carac-}\par\pard\li
160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tersticas complejas de mltiples
capas en la superficie }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {(Bustillo et al, 1998), (Griffin et al, 2000).}\par\pard\li1320\ri0\sl-2
13\slmult0 \fs18\cf0\par\pard\li1320\ri0\sl-186\slmult0 \fs16\cf0\f0\charscalex1
00 {Tabla 1. Tcnicas de fabricacin de MEMS. }\par\column\pard\li0\ri0\sl-226\slmul
t0 \fs20\cf0\f0\charscalex100 {(Malshe et al, 1999), (Ehrfeld et al, 2000).}\par
\pard\li493\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18
\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmul
t0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-2
13\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\
ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18\cf0\par\par
d\li493\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li493\ri0\sl-213\slmult0 \fs18\cf0
\par\pard\li493\ri0\sl-373\slmult0 \fs16\cf0\f0\charscalex100 {Figura 3. Proceso
de microfabricacin (Malshe et al, 1999). }\par\pard\li0\ri0\sl-213\slmult0 \fs18
\cf0\par\pard\li0\ri0\sl-240\slmult0 \fs20\cf0\f0\charscalex100\b {5}\b0 { }\fs1
8\cf0\f0\charscalex100\b {Ventajas de los dispositivos MEMS }\b0 \par\pard\li386
\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li386\ri0\sl-240\slmult0 \fs20\cf0\f0\cha
rscalex100 {Los MEMS poseen una serie de ventajas frente a los }\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sistemas de mayor tamao, entre las c
uales se encuentran:}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100
{(Fujita, 1998), (Janson, et al, 2000) }\par\pard\li0\ri0\sl-226\slmult0 \fs18\

cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Posibilidad de

fabricacin masiva con bajo costo.}\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\c
harscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Componentes ms finos y d
elicados.}\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u822
6X}{ }\fs20\cf0\f0\charscalex100 {Tamao y peso reducido. }\par\pard\li0\ri0\sl-22
6\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100
{Consumo de energa reducido.}\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\f0\charsc
alex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Alta precisin y biocompatibil
idad. }\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u8226X}
{ }\fs20\cf0\f0\charscalex100 {Partes mecnicas precisamente diseadas, las cuales
se-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {rn ms eficiente
s y durables.}\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\
u8226X}{ }\fs20\cf0\f0\charscalex100 {Micro-materiales con propiedades que les p
ermitan ser }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ms fu
ertes y ligeros.}\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\u
c1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Desarrollo de componentes electrnicos ms
rpidos, de }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mayor
potencia y funcionalidad. }\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charsca
lex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Sistemas mecnicos y pticos ms rpi
dos y complejos. }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100
{Mayor nmero de partes, mayor funcionalidad. }\par\pard\li0\ri0\sl-226\slmult0 \
fs18\cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Nuevos dis
positivos pto-electrnicos sobre la base de }\par\pard\li160\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {principios cunticos.}\par\pard\li0\ri0\sl-226\slmult0 \f
s18\cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Aprovechami
ento de reacciones qumicas resultantes de }\par\pard\li160\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {"nuevas propiedades" como es el reducir las dimensione
s }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {de trabajo (ex
posicin de mayor nmero de electrones }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {disponibles para la reaccin). }\par\pard\sect\sectd\sbknone\pg
wsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\li2853\ri0\sl-213\slmult0 \fs
18\cf0\par\pard\li2853\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li2853\ri0\sl-213\s
lmult0 \fs18\cf0\par\pard\li2853\ri0\sl-213\slmult0 \fs14\cf0\f0\charscalex100\i
{Revista Ciencia e Ingeniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pa
rd\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\sect\
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}}}}\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\margtsxn666\margbsxn373\col
s3\colno1\colw6706\colsr-0\colno2\colw3413\colsr-0\colno3\colw973\pard\li720\ri0
\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\l
i720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\pa
r\pard\li720\ri0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Estado del arte de
los sistemas microelectromecnicos }\i0 \par\pard\li1093\ri0\sl-213\slmult0 \fs18
\cf0\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Dichas venta
jas han favorecido su introduccin en un }\par\pard\li720\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {gran nmero de aplicaciones y mercados (Fujita, 1998),}\par
\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {(Janson, et al, 2000)
, (Fujita, 1996).}\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri
0\sl-266\slmult0 \fs20\cf0\f0\charscalex100\b {6}\b0 { }\fs18\cf0\f0\charscalex1

00\b {Mercado previsto}\b0 \par\pard\li1093\ri0\sl-213\slmult0 \fs18\cf0\par\par

d\li1093\ri0\sl-253\slmult0 \fs20\cf0\f0\charscalex100 {El mercado mundial de ME
MS en el ao 2000 ascen-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {di a ms de 13.000 millones de dlares. Segn el "Anlisis }\par\pard\li720\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {de mercado de los MEMS" desarrollado por
NEXUS (Eu-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ropea
n commissioned NEXUS Task Force), esta cifra po-}\par\pard\li720\ri0\sl-226\slmu
lt0 \fs20\cf0\f0\charscalex100 {dra elevarse a ms de 34.000 millones de dlares para
el}\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ao 2006, de ac
uerdo con las previsiones de expansin de }\par\pard\li720\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {los productos existentes actualmente en el mercado. A es
ta }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cifra habra qu
e sumarle otros 4.200 millones de dlares }\par\pard\li720\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {procedentes de la comercializacin de nuevos productos }\p
ar\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {emergentes: chips-l
aboratorio, sistemas de dosificacin de }\par\pard\li720\ri0\sl-226\slmult0 \fs20\
cf0\f0\charscalex100 {drogas, sensores de olor (nariz electrnica), cabezales mag}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {neto-pticos, etc.
}\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {El sector autom
otriz era el que estaba a la cabeza del}\par\pard\li720\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {mercado de los MEMS. Una de las aplicaciones ms tpicas}\par
\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {en este campo es el u
so de acelermetros para sistemas de }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {deteccin de impactos y activacin del airbag. Slo en el }\par\par
d\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {2000, se vendieron 240 mi
llones de acelermetros, gene-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {rando un mercado de 1.300 millones de dlares (Maseeh et}\par\pard\li7
20\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {al, 2005).}\par\pard\li1093\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Hoy en da, la situacin ha evolucionad
o de tal forma }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {q
ue son las tecnologas de la informacin y la medicina los}\par\column\pard\li0\ri0\
sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\
ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\
li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\p
ard\li0\ri0\sl-320\slmult0 \fs14\cf0\f0\charscalex100 {Tabla 2. Mercado previsto
(NEXUS, 2005).}\par\column\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\r
i0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\l
i0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-346\slmult0 \fs20\cf0\f0\cha
rscalex100\i {113 }\i0 \par\pard\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\marg
lsxn666\margrsxn133\cols2\colno1\colw5720\colsr-0\colno2\colw5373\pard\li720\ri0
\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sectores que integran un mayor volum
en del mercado de }\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100
{microsistemas (Butler, 2005). En tecnologas de la informa-}\par\pard\li720\ri0\
sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cin, los cabezales de lectura de disco
duro y cabezales de}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {impresin de chorro de tinta ocupan un volumen de merca-}\par\pard\li720\ri0\s
l-226\slmult0 \fs20\cf0\f0\charscalex100 {do de 8.900 millones de dlares, unos do
s tercios del mer-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{cado total de los MEMS. En cuanto al sector de la medici-}\par\pard\li720\ri0\
sl-213\slmult0 \fs20\cf0\f0\charscalex100 {na, el mayor volumen de ventas de mic
rosistemas se}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {pro
dujo para audfonos y marcapasos: 1.150 y 1.000 millo-}\par\pard\li720\ri0\sl-226\
slmult0 \fs18\cf0\f0\charscalex100 {nes de dlares, respectivamente (Maseeh et al,
2005). }\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {En la
Tabla 2 se presenta el mercado previsto en dla-}\par\pard\li720\ri0\sl-213\slmult
0 \fs20\cf0\f0\charscalex100 {res para los dispositivos MEMS, se muestran las ve
ntas pa-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ra el ao
2000, las proyecciones de ventas para el presente }\par\pard\li720\ri0\sl-226\sl
mult0 \fs20\cf0\f0\charscalex100 {ao 2006, as como la tasa de crecimiento, lo que
deja de }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {manifies

to la creciente penetracin en el mercado que tie-}\par\pard\li720\ri0\sl-226\slmu

lt0 \fs20\cf0\f0\charscalex100 {nen estos dispositivos.}\par\pard\li720\ri0\sl-2
13\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-253\slmult0 \fs20\cf0\f0\charscalex10
0\b {7}\b0 { }\fs18\cf0\f0\charscalex100\b {Mercados de aplicacin}\b0 \par\pard\l
i1093\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li1093\ri0\sl-266\slmult0 \fs20\cf0\
f0\charscalex100 {La variedad de productos existentes en la actualidad es }\par\
pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {muy grande, desde sens
ores de presin en un motor de au-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {tomvil hasta micropinzas para ciruga. Estos microdisposi-}\par\par
d\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tivos sustituyen a sus ho
mlogos de mayor tamao, o bien }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {permiten nuevas aplicaciones que les estaban vetadas (Ma-}\par\pard\
li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {seeh et al, 2005). }\par\pa
rd\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Uno de los sectores con
siderado con un alto potencial }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {de desarrollo es el de las telecomunicaciones. Su introduc-}\par\
pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {cin en dicho campo ha s
ido favorecida por la rpida ex-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\c
harscalex100 {pansin de los sistemas basados en fibra ptica (Hagelin et}\par\pard\
li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {al, 1999). }\par\column\pa
rd\li173\ri0\sl-306\slmult0 \fs14\cf0\f0\charscalex100 {Figura 4. Mercado mundia
l de los MEMS hasta el ao 2000 (NEXUS}\par\pard\li2146\ri0\sl-186\slmult0 \fs16\c
f0\f0\charscalex100 {2005). }\par\pard\li386\ri0\sl-213\slmult0 \fs18\cf0\par\pa
rd\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Finalmente, cabe mencion
ar la presencia de MEMS en}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {muchos otros sectores, como son el medioambiental, dom-}\par\pard\li0\ri0
\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tica, electrodomsticos o mquina-herram
ienta. En todos}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ell
os, existen numerosas aplicaciones para todo tipo de mi-}\par\pard\li0\ri0\sl-22
6\slmult0 \fs20\cf0\f0\charscalex100 {crodispositivos: micromotores, sensores de
presin, girs-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {copos,
microespectrmetros, y muchos otros (Butler, 2005).}\par\pard\li386\ri0\sl-226\sl
mult0 \fs20\cf0\f0\charscalex100 {Seguidamente, se describirn someramente algunas
de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {las principale
s aplicaciones de los microsistemas en los dis-}\par\pard\li0\ri0\sl-213\slmult0
\fs20\cf0\f0\charscalex100 {tintos sectores.}\par\pard\li0\ri0\sl-213\slmult0 \
fs18\cf0\par\pard\li0\ri0\sl-253\slmult0 \fs18\cf0\f0\charscalex100\i {7.1 Autom
otriz }\i0 \par\pard\li386\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li386\ri0\sl-24
0\slmult0 \fs20\cf0\f0\charscalex100 {El sector automotriz vive hoy en da una rev
olucin }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {impulsada po
r las microtecnologas tanto a nivel mecnico }\par\pard\li0\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {como electrnico. Actualmente, todos los vehculos incor-}\p
ar\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {poran un microsensor
de presin en el sistema de control}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {electrnico del motor y un acelermetro en el airbag. Se}\par\pard\li
0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {estima que en un futuro no muy
lejano, los sensores y la }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {electrnica representarn aproximadamente el 30% del va-}\par\pard\li0\ri0\s
l-213\slmult0 \fs20\cf0\f0\charscalex100 {lor de un automvil (Maseeh et al, 2005)
. }\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Se pueden dist
inguir tres reas principales de aplica-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {cin de MEMS en este sector: 1) seguridad y confort, 2)}\par\p
ard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sistemas informticos y de
comunicacin dentro del vehcu-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charsc
alex100 {lo, y 3) gestin del motor y consumo.}\par\pard\li386\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {En cuanto a seguridad y confort, para evitar acciden
-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tes, es necesario
que el conductor sea capaz de controlar el }\par\pard\sect\sectd\sbknone\pgwsxn
11893\pghsxn16840\marglsxn666\margrsxn133\pard\li3413\ri0\sl-213\slmult0 \fs18\c
f0\par\pard\li3413\ri0\sl-346\slmult0 \fs14\cf0\f0\charscalex100\i {Revista Cien

cia e Ingeniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pard\sect\sectd\

sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\sect\sectd\sbkpage
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colno3\colw2853\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-21
3\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\r
i0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-346\slmult0 \fs20\cf0\f0\chars
calex100\i {114 }\i0 \par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160
\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {vehculo en situaciones crticas. Lo
s vehculos ms moder-}\par\column\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li
0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\par
d\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par
\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-360\slmult0 \fs20\cf0
\f0\charscalex100 {sin de gases (Maseeh et al, 2005).}\par\column\pard\li0\ri0\sl
-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri
0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li
0\ri0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Mrquez y Crdenas}\i0 \par\pard\
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i160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {res de seales y rpidos actuado

res, son capaces de recono-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\char

scalex100 {cer situaciones de peligro, ayudar al conductor a mantener }\par\pard
\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {el vehculo bajo control, y
mejorar la seguridad pasiva.}\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {Los sensores de presin son otro ejemplo de microsis-}\par\pard\li160\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {temas para seguridad en el vehculo
. Son usados para la }\par\pard\li160\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex
100 {medicin de presin/temperatura en el neumtico, control }\par\pard\li160\ri0\sl226\slmult0 \fs18\cf0\f0\charscalex100 {de presin de cilindro de freno, etc (Butl
er, 2005). Otro }\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {
MEMS frecuentemente utilizado en aplicaciones de seguri-}\par\pard\li160\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {dad es el acelermetro. ste es un component
e clave de los }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {s
istemas de airbag, siendo el responsable de su activacin al}\par\pard\li160\ri0\s
l-226\slmult0 \fs20\cf0\f0\charscalex100 {detectar un choque.}\par\pard\li546\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Otros ejemplos de MEMS en aplicacio
nes de seguri-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {da
d en el automvil son los microdispositivos de medicin }\par\pard\li160\ri0\sl-226\
slmult0 \fs20\cf0\f0\charscalex100 {y control de la suspensin y adherencia a la c
alzada, siste-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ma
s de frenada asistida y estabilizadores, sistemas inteli-}\par\pard\li160\ri0\sl
-226\slmult0 \fs20\cf0\f0\charscalex100 {gentes para el control de la intensidad
de los faros delante-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscale
x100 {ros por medicin de las condiciones ambientales, sensores}\par\pard\li160\ri
0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {radares y de distancia para la dete
ccin de obstculos, etc.}\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex
100 {Asimismo, los sensores de humedad, sistemas de con-}\par\pard\li160\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {trol de la temperatura en el interior de
l vehculo, o microsis-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex
100 {temas para el filtrado de aire contaminado permiten incre-}\par\pard\li160\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mentar el confort de los ocupante
s del automvil.}\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Lo
s sistemas informticos y de telecomunicacin apli-}\par\pard\li160\ri0\sl-226\slmul
t0 \fs20\cf0\f0\charscalex100 {cados al sector automotriz proporcionan tambin un
amplio }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {rango de
posibilidades para los microsistemas, especial-}\par\pard\li160\ri0\sl-213\slmul
t0 \fs20\cf0\f0\charscalex100 {mente para los basados en microelectrnica y optoel
ectr-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nica: integr
acin del PC en el automvil, sistemas de co-}\par\pard\li160\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {municacin inteligente, etc (Koester et al 1996). }\par\
pard\li546\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {La integracin de un PC
en el vehculo proporciona }\par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\f0\charsc
alex100 {numerosas ventajas: informacin en tiempo real sobre el }\par\pard\li160\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {estado del trfico y de las carrete
ras proporcionando al con-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\chars
calex100 {ductor una ruta alternativa, ajuste automtico de la radio o }\par\pard\
li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de la temperatura, entreten
imiento de los ocupantes, etc. }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {Los sistemas de comunicacin de manos libres, y los siste-}\par\par
d\li160\ri0\sl-213\slmult0 \fs18\cf0\f0\charscalex100 {mas de reconocimiento de
voz permiten comunicarse al }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {conductor sin necesidad de usar las manos aumentando el }\par\pard\l
i160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {confort y la seguridad del m
ismo.}\par\pard\li546\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {La implanta
cin en el vehculo de sistemas de comuni-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\
cf0\f0\charscalex100 {cacin inteligentes (telefona, sistemas de navegacin, ser-}\pa
r\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {vicios de internet,
etc.) contribuye a una conduccin mucho}\par\pard\li160\ri0\sl-226\slmult0 \fs20\c
f0\f0\charscalex100 {ms cmoda y segura. }\par\pard\li546\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {La gestin del motor es otro de los grandes campos de }\par

\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {aplicacin de los MEMS

en el automvil (Maseeh et al, }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {2005). Los sistemas de ignicin electrnica han provocado }\par\pard\li
160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {la aparicin de complejos siste
mas de gestin del motor. }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {Las unidades de control electrnicas modernas, equipadas}\par\pard\li160\r
i0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {con diversos sensores, permiten qu
e los motores de inyec-}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscal
ex100 {cin sean ms potentes y econmicos, emitiendo menor vo-}\par\pard\li160\ri0\sl
-226\slmult0 \fs20\cf0\f0\charscalex100 {lumen de gases que los antiguos motores
. }\par\pard\li546\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {Los nuevos si
stemas de inyeccin electrnicos, con }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\
f0\charscalex100 {avanzados microdispositivos capaces de inyectar durante el}\pa
r\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ciclo de admisin micr
ogotas de combustible con tamaos}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {tan pequeos como 10 micras, permiten la construccin de}\par\pard\li
160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {motores con menor consumo de
combustible y menor emi-}\par\column\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {Los avances en tecnologa de circuitos integrados, y el}\par\pard\l
i0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {desarrollo y evolucin de compon
entes electrnicos inteli-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {gentes de bajo coste, permiten el desarrollo e integracin en }\par\pard\li0
\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {el propio motor de sensores y di
spositivos de proceso de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscal
ex100 {seales y otras funciones con menor costo y mayor eficien-}\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cia. }\par\pard\li0\ri0\sl-213\slm
ult0 \fs18\cf0\par\pard\li0\ri0\sl-240\slmult0 \fs18\cf0\f0\charscalex100\i {7.2
Aeronutico y defensa}\i0 \par\pard\li386\ri0\sl-213\slmult0 \fs18\cf0\par\pard\l
i386\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {El sector aeronutico se carac
teriza por su necesidad }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {de instrumentacin y sistemas de medida precisos. Una }\par\pard\li0\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {gran variedad de microsistemas es integr
ada hoy en da en}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {apl
icaciones de aeronutica. Entre ellos, cabe mencionar}\par\pard\li0\ri0\sl-226\slm
ult0 \fs20\cf0\f0\charscalex100 {medidores de presin de aire, de aceleracin, senso
res de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {humedad, pr
esin, gas, temperatura, estabilizadores, etc }\par\pard\li0\ri0\sl-226\slmult0 \f
s20\cf0\f0\charscalex100 {(Butler, 2005).}\par\pard\li386\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {En el sector aeroespacial, la microtecnologa es la cla-}
\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ve en la fabricacin
de sistemas robustos, efectivos y minia-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\
cf0\f0\charscalex100 {turizados para la exploracin del espacio.}\par\pard\li386\r
i0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Otras aplicaciones en el sector es
pacial son: microins-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex10
0 {trumentos y microelectrnica para misiones espaciales, mi-}\par\pard\li0\ri0\sl
-213\slmult0 \fs20\cf0\f0\charscalex100 {crohigrmetros, micromotores de propulsin,
fotodetectores }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de
infrarrojo, microrobots, etc (Malshe et al, 1999).}\par\pard\li0\ri0\sl-213\slm
ult0 \fs18\cf0\par\pard\li0\ri0\sl-240\slmult0 \fs18\cf0\f0\charscalex100\i {7.3
Medio ambiente y agricultura}\i0 \par\pard\li386\ri0\sl-213\slmult0 \fs18\cf0\p
ar\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Entre los sistemas
basados en microtecnologas aplica-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\
charscalex100 {bles a este sector, se pueden mencionar equipos de metro-}\par\pa
rd\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {loga, sensores qumicos para
medir los niveles de contami-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\char
scalex100 {nacin, monitorizacin medioambiental y de la agricultura, }\par\pard\li0
\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {o microsistemas para mediciones
metereolgicas.}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Un r
ea de aplicacin cuya importancia se ver fuer-}\par\pard\li0\ri0\sl-226\slmult0 \fs
20\cf0\f0\charscalex100 {temente incrementada en un futuro cercano, y en el que

los }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {microsistemas

jugarn un papel crtico, es el control de po-}\par\pard\li0\ri0\sl-213\slmult0 \fs2
0\cf0\f0\charscalex100 {lucin medioambiental (Maseeh et al, 2005). }\par\pard\li
386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Los microsensores pueden ser
utilizados tambin para }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {el control de pureza de alimentos, empleando instrumenta-}\par\pard\li0\ri0\
sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cin que integra espectrmetros de infrar
rojo, dispositivos}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {
de anlisis de color, o microsensores de aleaciones con }\par\pard\li0\ri0\sl-213\
slmult0 \fs20\cf0\f0\charscalex100 {memoria para registrar la temperatura de ali
mentos conge-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {lados
.}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Los MEMS tambin
son usados en el sector energti-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {co, por ejemplo dentro del control y gestin de los parme-}\par\pard\l
i0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tros de extraccin de pozos de p
etrleo (Koester et al,}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex10
0 {1996). }\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-253\sl
mult0 \fs18\cf0\f0\charscalex100\i {7.4 Medicina }\i0 \par\pard\li386\ri0\sl-426
\slmult0 \fs20\cf0\f0\charscalex100 {Tanto la medicina como la bioqumica, sectore
s en los }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {que la mi
niaturizacin es esencial, estn registrando una}\par\pard\li0\ri0\sl-226\slmult0 \f
s20\cf0\f0\charscalex100 {vertiginosa penetracin dentro del campo de las microtec
-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nologas (Butler, 2
005). }\par\pard\li386\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Debido a l
os MEMS, las nuevas tcnicas en este sector}\par\pard\li0\ri0\sl-226\slmult0 \fs20
\cf0\f0\charscalex100 {tienden a ser menos invasivas, ms baratas y con una mayor
}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {rapidez de diagnsti
co.}\par\pard\sect\sectd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133
\pard\li2853\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li2853\ri0\sl-213\slmult0 \fs
18\cf0\par\pard\li2853\ri0\sl-253\slmult0 \fs14\cf0\f0\charscalex100\i {Revista
Ciencia e Ingeniera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pard\sect\se
ctd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\sect\sectd\sbkp
age
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3\margtsxn666\margbsxn373\cols3\colno1\colw5720\colsr-0\colno2\colw4400\colsr-0\
colno3\colw973\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213
\slmult0 \fs18\cf0\par\pard\li720\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li720\ri
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alex100\i {Estado del arte de los sistemas microelectromecnicos }\i0 \par\pard\li
1093\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f
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abierto en los ltimos }\par\column\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard
\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\
pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\
par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-360\slmult0 \fs18\
cf0\f0\charscalex100\i {7.6 Telecomunicaciones}\i0 \par\column\pard\li0\ri0\sl-2
13\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\
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ri0\sl-346\slmult0 \fs20\cf0\f0\charscalex100\i {115 }\i0 \par\pard\sect\sectd\s
bknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\cols2\colno1\colw5720\col
sr-0\colno2\colw5373\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ao
s, numerosas lneas de aplicacin novedosas, entre las}\par\pard\li720\ri0\sl-226\sl
mult0 \fs20\cf0\f0\charscalex100 {que se incluyen las siguientes:}\par\pard\li72
0\ri0\sl-213\slmult0 \fs16\cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs18\cf0\f0\cha
rscalex100 {Descubrimiento, desarrollo y produccin de medicamen-}\par\pard\li880\
ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {tos: microrreactores, matrices pa
ra muestras con un n-}\par\pard\li880\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {mero elevado de microceldas, etc.}\par\pard\li720\ri0\sl-226\slmult0 \fs16\c
f0\f0\charscalex100 {\uc1\u8226X}{ }\fs18\cf0\f0\charscalex100 {Sistemas de dosi
ficacin de medicamentos: pldoras inte-}\par\pard\li880\ri0\sl-226\slmult0 \fs18\cf
0\f0\charscalex100 {ligentes, jeringuillas sin aguja, bombas implantables, in-}\
par\pard\li880\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {haladores, etc.}\p
ar\pard\li720\ri0\sl-226\slmult0 \fs16\cf0\f0\charscalex100 {\uc1\u8226X}{ }\fs1
8\cf0\f0\charscalex100 {Anlisis de ADN para diagnstico, terapia gentica, ca-}\par\p
ard\li880\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {racterizacin e ingeniera
gentica y medicina forense.}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\chars
calex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Diagnstico in vitro, anlisis
y monitorizacin, etc.}\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex
100 {El mayor volumen de mercado de microsistemas en }\par\pard\li720\ri0\sl-213
\slmult0 \fs20\cf0\f0\charscalex100 {medicina se produce en audfonos y marcapasos
. Otros sis-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tema
s similares, aunque menos frecuentes, son los integra-}\par\pard\li720\ri0\sl-22
6\slmult0 \fs18\cf0\f0\charscalex100 {dos en rganos artificiales, microsistemas d
e estimulacin }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de
nervios y msculos, etc (Butler, 2005). }\par\pard\li1093\ri0\sl-213\slmult0 \fs20
\cf0\f0\charscalex100 {Los MEMS permiten asimismo obtener informacin }\par\pard\l
i720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {del cuerpo humano: microsens
ores de visin, medidores de }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\char
scalex100 {glucosa, de presin sangunea, de oxgeno en sangre, en-}\par\pard\li720\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {doscopios, sistemas de diagnosis ge

ntica, etc. Los sistemas }\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charsca

lex100 {de medicin de glucosa en la sangre modernos, por ejem-}\par\pard\li720\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {plo, son capaces de trabajar con mu
estras de tan slo 3 mi-}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscale
x100 {crolitros, integrando microcapilares y microelectrodos (en }\par\pard\li72
0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {el caso de sensores electroqumic
os).}\par\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Otra rea en
la que los MEMS dan lugar a importantes }\par\pard\li720\ri0\sl-213\slmult0 \fs2
0\cf0\f0\charscalex100 {mejoras es la ciruga mnimamente invasiva. Esto es posible}
\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {gracias a los nue
vos dispositivos e instrumentos miniaturi-}\par\pard\li720\ri0\sl-226\slmult0 \f
s20\cf0\f0\charscalex100 {zados, que incorporan microestructuras mecnicas, compo}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {nentes microptico
s y de fibra ptica, microsensores tcti-}\par\pard\li720\ri0\sl-213\slmult0 \fs20\c
f0\f0\charscalex100 {les y de presin, etc. Los motores lineales para microciruga }
\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {controlan la posi
cin de instrumentos quirrgicos a muy }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {pequea escala (en el orden de la micra) mejorando los re-}\par
\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sultados de la mayora
de las tcnicas quirrgicas actuales}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {(Maseeh et al, 2005). }\par\pard\li720\ri0\sl-213\slmult0 \fs18\
cf0\par\pard\li720\ri0\sl-240\slmult0 \fs18\cf0\f0\charscalex100\i {7.5 Mquinas h
erramientas}\i0 \par\pard\li1093\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li1093\ri
0\sl-240\slmult0 \fs20\cf0\f0\charscalex100 {La introduccin de MEMS en el sector
de la mquina-}\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {herr
amienta ha posibilitado la apertura de novedosas lneas }\par\pard\li720\ri0\sl-22
6\slmult0 \fs20\cf0\f0\charscalex100 {de trabajo, en las que han aparecido nueva
s posibilidades de }\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex10
0 {aplicacin para microrrobots, micromquinas-herramienta y }\par\pard\li720\ri0\sl
-226\slmult0 \fs20\cf0\f0\charscalex100 {micromoldes (Maseeh et al, 2005). }\par
\pard\li1093\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Los microrobots son
elementos fundamentales para el }\par\pard\li720\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {ensamblado y manipulacin de microelementos, siendo uti-}\par\pard
\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {lizados principalmente en:
}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u8226X}{ }\
fs20\cf0\f0\charscalex100 {Ensamblado y empaquetado de chips hbridos, microsen-}\
par\pard\li880\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sores y micromquina
s.}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u8226X}{
}\fs20\cf0\f0\charscalex100 {Posicionado, alineamiento y ensamblado de dispositi
vos }\par\pard\li880\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {optoelectrnic
os. }\par\pard\li1093\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Por otra p
arte, numerosos microdispositivos son inte-}\par\pard\li720\ri0\sl-226\slmult0 \
fs20\cf0\f0\charscalex100 {grados hoy en da en sistemas de control y supervisin de
}\par\pard\li720\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {procesos industr
iales. Sensores de presin o temperatura, }\par\pard\li720\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {detectores de presencia, o sensores de gas en la industr
ia}\par\pard\li720\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {qumica y petroq
umica, etc. (Takashi et al, 2005). }\par\column\pard\li386\ri0\sl-240\slmult0 \f
s20\cf0\f0\charscalex100 {Dentro de las telecomunicaciones, la microtecnologa }\p
ar\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {desempea un papel fund
amental. La rpida expansin de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\chars
calex100 {los sistemas de telecomunicacin basados en fibra ptica ha }\par\pard\li0
\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {provocado un espectacular crecim
iento tanto en el nmero }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex
100 {como en el tipo de fabricantes de dispositivos y componen-}\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {tes pticos (Jaime et al 1999). }\par
\pard\li386\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Debido a la alta prec
isin requerida para las conexio-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {nes pticas y a la sensibilidad que presenta esta tecnologa a }\par\pa
rd\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {los desalineamientos de po

sicin y angulares, los microsis-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\ch

arscalex100 {temas son de gran importancia en los sistemas de fibra pti-}\par\par
d\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {ca. Gracias a ellos, es pos
ible posicionar fibras de entrada y}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f
0\charscalex100 {salida mediante canales micromecanizados, sin necesidad }\par\p
ard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de realizar complejas y c
ostosas operaciones de alineamien-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {to activo. Adems, se fabrican numerosas microestructuras}\par\par
d\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {como elementos pticos pasivo
s (interruptores pticos, gu-}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charsca
lex100 {as de onda, divisores de haz, etc.) (Lorenz et al, 1997),}\par\pard\li0\
ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {(Ayon, et al, 1997) }\par\pard\li
386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {En el contexto de la radiofre
cuencia, la aplicacin de }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {los microsistemas tiene tambin un creciente inters. Las }\par\pard\li0\ri0\s
l-213\slmult0 \fs20\cf0\f0\charscalex100 {ventajas ofrecidas por los microsistem
as en trminos de re-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{duccin de tamao, consumo energtico, compatibilidad e }\par\pard\li0\ri0\sl-226\slm
ult0 \fs20\cf0\f0\charscalex100 {integrabilidad son investigadas para el desarro
llo de micro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {compo
nentes de radio frecuencia, tales como filtros, mi-}\par\pard\li0\ri0\sl-213\slm
ult0 \fs20\cf0\f0\charscalex100 {crointerruptores y antenas (Hyman et al, 1999).
}\par\pard\li0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-253\slmult0 \fs
18\cf0\f0\charscalex100\i {7.7 Domtica \uc1\u8211X Edificios inteligentes}\i0 \pa
r\pard\li386\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li386\ri0\sl-240\slmult0 \fs2
0\cf0\f0\charscalex100 {Los microsistemas incorporados en aplicaciones de}\par\p
ard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {domtica pueden ser tan sim
ples como detectores de fugas}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\char
scalex100 {de gas, o sensores de presin con funcin de autoencendido }\par\pard\li0
\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {similares a los utilizados en ba
lanzas (Butler, 2005). Sin }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsc
alex100 {embargo, los sistemas multifuncionales que se desarrollan}\par\pard\li0
\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {hoy en da estn enfocados a aplicac
iones ms complejas}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {c
omo control de olores en cocina, anlisis de polucin, me-}\par\pard\li0\ri0\sl-213\
slmult0 \fs20\cf0\f0\charscalex100 {dicin y ajuste de temperatura, luminosidad y
humedad, etc.}\par\pard\li386\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Las
futuras necesidades de la domtica incluyen la in-}\par\pard\li0\ri0\sl-226\slmul
t0 \fs20\cf0\f0\charscalex100 {corporacin de microsistemas en aplicaciones dirigi
das a }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {los siguient
es objetivos (Maseeh et al, 2005): }\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f
0\charscalex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Aumentar el confort
y la seguridad: cmaras de seguridad, }\par\pard\li173\ri0\sl-213\slmult0 \fs20\cf
0\f0\charscalex100 {llaves inteligentes, clulas de infrarojos, detectores de }\pa
r\pard\li173\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {prdidas en conduccion
es de agua y de gas, etc.}\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscal
ex100 {\uc1\u8226X}{ }\fs20\cf0\f0\charscalex100 {Reducir el consumo: control pti
mo de calefaccin, luz, }\par\pard\li173\ri0\sl-226\slmult0 \fs20\cf0\f0\charscale
x100 {electrodomsticos, etc., en funcin de las necesidades en }\par\pard\li173\ri0
\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {cada momento. Los detectores de pres
encia permiten co-}\par\pard\li173\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{nocer la existencia o no de personas en cada habitacin,}\par\pard\li173\ri0\sl226\slmult0 \fs20\cf0\f0\charscalex100 {evitando que queden aparatos encendidos
cuando no hay }\par\pard\li173\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {na
die. }\par\pard\li0\ri0\sl-226\slmult0 \fs18\cf0\f0\charscalex100 {\uc1\u8226X}{
}\fs20\cf0\f0\charscalex100 {Realizar operaciones autnomas y remotas. Permiten r
ea-}\par\pard\li173\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {lizar operaci
ones de forma automtica: encender la luz al }\par\pard\li173\ri0\sl-226\slmult0 \
fs20\cf0\f0\charscalex100 {entrar en la casa, poner en funcionamiento la calefac
cin}\par\pard\li173\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {a determinada

hora, etc. Estas operaciones pueden ser}\par\pard\li173\ri0\sl-226\slmult0 \fs20

\cf0\f0\charscalex100 {programadas tambin de forma remota. }\par\pard\li386\ri0\
sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Todo esto requiere el uso de MEMS par
a el desarrollo }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de
los sensores y actuadores, llaves inteligentes y cmaras }\par\pard\sect\sectd\sb
knone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\li3413\ri0\sl-213\slm
ult0 \fs18\cf0\par\pard\li3413\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3413\ri0\
sl-226\slmult0 \fs14\cf0\f0\charscalex100\i {Revista Ciencia e Ingeniera. Vol. 27
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sl-226\slmult0 \fs20\cf0\f0\charscalex100 {La reduccin del consumo de energa, agua

y deter-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {gente,
son objetivos primordiales para la industria de los}\par\pard\li160\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {electrodomsticos. Las caractersticas requeridas
en los sen-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sore
s y actuadores utilizados para este fin son bastante exi-}\par\pard\li160\ri0\sl
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as tcnicas y larga }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
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-226\slmult0 \fs20\cf0\f0\charscalex100 {troduccin de MEMS en este sector, ya que
son los nicos }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ca
paces de proporcionar caractersticas tcnicas ptimas }\par\pard\li160\ri0\sl-226\slm
ult0 \fs20\cf0\f0\charscalex100 {con un bajo coste (Butler, 2005).}\par\pard\li1
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cf0\f0\charscalex100\i {7.9}\i0 \tab \fs18\cf0\f0\charscalex100\i {Tecnologas de
la informacin}\i0 \par\pard\li546\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li546\ri0
\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {El mercado de tecnologas de la inform
acin es el que}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {may
or volumen de MEMS integra y factura. La clave de su }\par\pard\li160\ri0\sl-226
\slmult0 \fs20\cf0\f0\charscalex100 {xito se encuentra en la miniaturizacin, integ
racin y bajo }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cost
e de la microelectrnica asociada (Butler, 2005). }\par\pard\li546\ri0\sl-226\slm
ult0 \fs20\cf0\f0\charscalex100 {Numerosas microestructuras con funciones mecnica
s,}\par\pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {magnticas y ptic
as, entre otras, forman parte de los dispo-}\par\pard\li160\ri0\sl-226\slmult0 \
fs20\cf0\f0\charscalex100 {sitivos de almacenamiento de datos (discos duros, lec
toras }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {de CD-ROM,
etc.) y de los perifricos de entrada y salida }\par\pard\li160\ri0\sl-226\slmult
0 \fs20\cf0\f0\charscalex100 {de datos (monitores, escners, lectoras de cdigo de b
arras,}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {displays d
e pantalla plana, etc.). Los cabezales magnticos }\par\pard\li160\ri0\sl-213\slmu
lt0 \fs20\cf0\f0\charscalex100 {de discos duros y pticos para CD-ROMs, junto con
los ca-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {bezales d
e inyeccin de tinta para impresoras y los displays,}\par\pard\li160\ri0\sl-226\sl
mult0 \fs20\cf0\f0\charscalex100 {constituyen las principales aplicaciones de lo
s MEMS de-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ntro d
e este sector (Ehrfeld et al, 2000).}\par\pard\li546\ri0\sl-213\slmult0 \fs20\cf
0\f0\charscalex100 {El desarrollo de nuevos y mejores MEMS permitir }\par\pard\li
160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {mejorar factores como calidad
de color y resolucin en im-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\char
scalex100 {presoras, as como nitidez de imagen en pantalla, aumentar }\par\pard\li
160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {la densidad de datos y veloci
dad de procesamiento en dis-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\cha
rscalex100 {positivos de almacenamiento de datos, y finalmente, permi-}\par\pard
\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {tir reducir el tamao y peso
de los dispositivos, disminu-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\ch
arscalex100 {yendo asimismo su coste.}\par\pard\li160\ri0\sl-213\slmult0 \fs18\c
f0\par\pard\li160\ri0\sl-253\slmult0 \fs20\cf0\f0\charscalex100\b {8}\b0 { }\fs1
8\cf0\f0\charscalex100\b {Conclusiones }\b0 \par\pard\li546\ri0\sl-426\slmult0 \
fs20\cf0\f0\charscalex100 {Los MEMS han demostrado su aplicabilidad y poten-}\pa
r\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {cialidad durante los
ltimos aos. Estos microsistemas han }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0
\f0\charscalex100 {sido integrados en productos comerciales desde sensores}\par\
pard\li160\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {para el airbag en la i
ndustria automotriz hasta sistemas de }\par\pard\li160\ri0\sl-226\slmult0 \fs20\
cf0\f0\charscalex100 {proyeccin digital en el campo de tecnologas de la infor-}\pa
r\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {macin. El potencial d
e los MEMS apenas se esta comen-}\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0
\charscalex100 {zando a explotar, su aplicabilidad en la industria es inevita-}\
par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ble, la evolucin de

los sensores actualmente utilizados }\par\pard\li160\ri0\sl-213\slmult0 \fs20\

cf0\f0\charscalex100 {tienden a converger en el uso de tecnologas mas pequeas }\pa
r\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {y la nanotecnologa r
epresenta el prximo paso hacia la }\par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f
0\charscalex100 {miniaturizacin de los sistemas y procesos de medicin.}\par\pard\l
i160\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li160\ri0\sl-240\slmult0 \fs18\cf0\f0
\charscalex100\b {Referencias }\b0 \par\pard\li160\ri0\sl-213\slmult0 \fs18\cf0\
par\pard\li160\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Ayon, AA, Bayt RL,
y Breuer KS, 1997, A Performance }\par\column\pard\li3066\ri0\sl-213\slmult0 \f
s18\cf0\par\pard\li3066\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3066\ri0\sl-213\
slmult0 \fs18\cf0\par\pard\li3066\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li3066\r
i0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Mrquez y Crdenas}\i0 \par\pard\li0
\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\chars
calex100 {Evaluation of MEMS-based Micronozzles. AIAA 97-3169. }\par\pard\li0\ri
0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Bustillo J, Howe RT, y Muller RS, 1
998, Surface micro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100
{machining for microelectromechanical systems, Proceed-}\par\pard\li0\ri0\sl-226
\slmult0 \fs20\cf0\f0\charscalex100 {ings of the IEEE, Vol. 86, No. 8, pp. 15521574.}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Celik-Butler
Z, 2005, Introduction to micro electro me-}\par\pard\li0\ri0\sl-226\slmult0 \fs2
0\cf0\f0\charscalex100 {chanical systems (mems) and devices. Electrical Enginee
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charscalex100 {Fujita H, 1996, Future of actuators and microsystems, sen-}\par\p
ard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {sors and actuators, A56,
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00 {Fujita H, 1998, Microactuators and micromachines, Proc.}\par\pard\li0\ri0\sl
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cf0\f0\charscalex100 {Modeling and performance of MEMS based storage de-}\par\pa
rd\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {vices, Proc. of ACM SIGMET
RICS, pp. 56-65. }\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {H
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ult0 \fs20\cf0\f0\charscalex100 {Solgaard O, 1999, Scalable fiber optic switch u
sing micro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {machine
d mirrors, Proc. 10th Int. Conf. Solid-State Sensors }\par\pard\li0\ri0\sl-226\s
lmult0 \fs20\cf0\f0\charscalex100 {and Actuators (Transducers\uc1\u8217X99), Sen
dai, Japan.}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {Hyman D
. et al., 1999, Surface-Micromachined RF MEMS }\par\pard\li0\ri0\sl-226\slmult0
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lectromec. Syst., Vol. 8, No. 2, pp. 129-134.}\par\pard\li0\ri0\sl-226\slmult0 \
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gn rules, }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {rev. 4,
Technical Report, MCNC MEMS Technical applica-}\par\pard\li0\ri0\sl-226\slmult0
\fs20\cf0\f0\charscalex100 {tions center, 3021 Cornwallis Road, Research Triangl
e}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Park, NC 27709.}\
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y Petersen, KE, 1998, Bulk micro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0
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X}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {1551.}\par\pard\l

i0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Lorenz H, Despont M, Fahrnl N,

LaBianca N, Renaud, y}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex1
00 {Vettiger P, 1997, SU-8: A low-cost negative resist for }\par\pard\li0\ri0\sl
-213\slmult0 \fs20\cf0\f0\charscalex100 {MEMS, Journal of Micromechanics and Mic
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x100 {Malshe AP, O\uc1\u8217XNeal C, Singh SB, Brown WD,. Eaton WP y }\par\pard\
li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Miller WM, 1999, Challenges i
n the packaging of MEMS,}\par\pard\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscale
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ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {aging, Vol. 22, No. 3, pp. 233-24
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i Andrew y Finch Nora, 2005, Reducing }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf
0\f0\charscalex100 {MEMS product development and commercialization time,}\par\pa
rd\li0\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {IntelliSense Corporation.
}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Petersen KE, 1982,
Silicon as a mechanical material, Pro-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\c
f0\f0\charscalex100 {ceedings of the IEEE, Vol. 70, No. 5, pp. 420-457.}\par\par
d\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {Petersen KE, 2000, Micromec
hanical membrane switches }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charsca
lex100 {on silicon, IBM J. Res. Develop., Vol. 23, No. 4, pp. 376-}\par\pard\li0
\ri0\sl-213\slmult0 \fs20\cf0\f0\charscalex100 {385.}\par\pard\li0\ri0\sl-226\sl
mult0 \fs20\cf0\f0\charscalex100 {Ehrfeld W, et al., 2000, Fabrication of micros
tructures us-}\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {ing t
he LIGA process, Proceedings IEEE Micro Robots and }\par\pard\li0\ri0\sl-226\slm
ult0 \fs20\cf0\f0\charscalex100 {Teleoperators Workshop.}\par\pard\li0\ri0\sl-21
3\slmult0 \fs20\cf0\f0\charscalex100 {Takashi Y, Motoki T, Yuji S y Nobuhide K,
2005, Toward }\par\pard\li0\ri0\sl-226\slmult0 \fs20\cf0\f0\charscalex100 {devel
opment of feedback control system for wall turbulence }\par\pard\li0\ri0\sl-226\
slmult0 \fs20\cf0\f0\charscalex100 {with MEMS sensors and actuators.}\par\pard\s
ect\sectd\sbknone\pgwsxn11893\pghsxn16840\marglsxn666\margrsxn133\pard\li2853\ri
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\li2853\ri0\sl-253\slmult0 \fs14\cf0\f0\charscalex100\i {Revista Ciencia e Ingen
iera. Vol. 27, No. 3, agosto-noviembre, 2006}\i0 \par\pard\sect\sectd\sbknone\pgw
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cf0\par\pard\li720\ri0\sl-346\slmult0 \fs18\cf0\f0\charscalex100\i {Estado del a
rte de los sistemas microelectromecnicos }\i0 \par\pard\li720\ri0\sl-213\slmult0
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cf0\f0\charscalex100\i {Revista Ciencia e Ingeniera. Vol. 27, No. 3, agosto-novie
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0\ri0\sl-213\slmult0 \fs18\cf0\par\pard\li0\ri0\sl-346\slmult0 \fs20\cf0\f0\char

scalex100\i {117 }\i0}