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Define(
Top_Elec_Thick=100nm dy_Top_Elec=5nm yf_Top_Elec=1
Oxide_Thick=20.5nm dy_Oxide=1 nm yf_Oxide=1
Bulk_Depth1=100nm dy_Top_Bulk=1nm yf_Top_Bulk=1.01 ymax_Top_Bulk
=2nm
Bulk_Thick=2um dy_Bulk=$ymax_Top_Bulk yf_Bulk=1.05 ymax_Bulk=10 nm
Bot_Elec_Thick=100nm dy_Bot_Elec=5nm yf_Bot_Elec=1 ymax_Bot_Elec=5n
m
Dev_Left=-100nm
Dev_Right=100nm
)
DefineDevice (
MinX=$Dev_Left, maxX=$Dev_Right,
MinY=expr(-Oxide_Thick-Top_Elec_Thick), maxY=expr(Bulk_Thick+Bot_Elec_Thic
k),
# Define Mesh Lines
x=$Dev_Left,
x=expr(Dev_Left+Dev_Right),
x=$Dev_Right,
y=expr(-Top_Elec_Thick-Oxide_Thick), dy=$dy_Top_Elec, yfactor=$yf_Top_Elec,
yside=1,
y=expr(-Oxide_Thick), dy=$dy_Oxide, yfactor=$yf_Oxide, yside=1,
y=0 , dy=$dy_Top_Bulk, yfactor=$yf_Top_Bulk, dymax=$ymax_Top_Bulk, yside=1,
y=$Bulk_Depth1 , dy=$dy_Bulk, yfactor=$yf_Bulk, dymax=$ymax_Bulk, yside=1,
y=$Bulk_Thick, dy=$dy_Bot_Elec, yside=1,
y=expr(Bulk_Thick+Bot_Elec_Thick) ,
DefineBoundary (
Region=gate,
Polygon2D (
Point (x=$Dev_Right,y=expr(-Oxide_Thick)),
Point(x=$Dev_Left,y=expr(-Oxide_Thick)),
Point (x=$Dev_Left,y=expr(-Oxide_Thick-Top_Elec_Thick)),
Point (x=$Dev_Right,y=expr(-Oxide_Thick-Top_Elec_Thick))
)
)
DefineContact(
Region=gate IsContactRegion=true
Region=backgate IsContactRegion=true)
# Profile Specification
Profile (name=Ptype, region=Silicon1, Uniform (value=2.65e15))
#setAttributes {
#Traps(material(silicon,oxide), distributed,
#trap(ilevel=0, dgen=1, et=-0.4, nt=1e11, taun=1e-3,
#taup=2e-7),
#trap(ilevel=1, dgen=1, et=0, nt=-1e11, taun=1e-3,
#taup=2e-7),
#trap(ilevel=2, dgen=1, et=0.4, nt=-1e11, taun=1e-3,
#taup=2e-7)
#)
#}
Save (meshfile=CapA_21nm_ZeroBias.tdf)
solve{
acanalysis( logfile=CapA.data, frequency=1e2, terminal(gate,backgate),
RampSpecification(startValue=1, endValue=-3, nsteps=80){BiasO
bject(name=gate,type=contactvoltage)}
)
}
Save (meshfile=CapA_21nm_neg3Vtraps.tdf)