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Abstract
This paper reviews the state-of-the-art in three
dimensional (3-D) packaging technology for very large scale
integration (VLSI). A number of bare dice and multichip module
(MCM) stacking technologies are emerging to meet the ever
increasing demands for low power consumption, low weight
and compact portable systems. Vertical interconnect
techniques are reviewed in details. Technical issues such as
silicon efficiency, complexity, thermal management,
interconnection density, speed, power etc. are critical in the
choice of 3-D stacking technology, depending on the target
application.