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DAY4 Latchup,ESD&Antenna VENKATESHPRASAD

01/07/09

WhatisLatchup?
ItisafailuremechanismofCMOSintegratedcircuitscharacterized byexcessivecurrentdraincoupledwithfunctionalfailure, parametricfailureand/ordevicedestruction. Thecauseofthelatchupexistsinalljunctionsisolatedorbulk CMOSprocesses:parasiticPNPNpaths.

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Latchup
in Vdd
out
p+ n+ n+ P+ Nwell p+ n+

GND

Vdd

Rsub T1

T1
Rsub

T2

Rwell

vsub
Substratetap

T2
Well tap

Psubstrate

Rwell

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Conditionwhicharenecessaryfor latchuptooccur
Bothparasiticbipolarmustbebiasedintotheactivestate. Theproductoftheparasiticbipolartransitioncurrentgainmustbe sufficienttoallowregeneration.i.e.,greaterthanorequaltoone. Theterminalnetworkmustbecapableofsupplyingacurrentgreater thantheholdingcurrentrequiredbythePNPNpath.

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Guidelinestoavoidlatchup
Everywellshouldhaveatleastonetap. Allsubstrateandwelltapsshouldconnectdirectlytotheappropriate supplyinmetal. nMOStransistorsshouldbeclusteredtogethernearGNDand pMOStransistorsshouldbeclusteredtogethernearVDD,avoiding convolutedstructuresthatintertwinenMOSandpMOStransistorsin checkboardpatterns.

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ESD
Itcanoccurwhenthechargesstoredinmachinesorthehumanbody aredischargedtothechiponcontactorbystaticinduction. DifferentmodelsforESDtesting 1.HBMHumanBodyModel 2.MMMachineModel 3.CDMChargeDeviceModel

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HumanBodyModelHBM
1Mohms 1.5kohms

Inthismethodatouchofa chargedpersonsfingeris simulatedbydischarginga 100pfcapacitorthrougha 1.5kohmsresistor. Effectiveprotectionnetworks canwithstandashighas8kV HBMESDstress.

Vesd

100pf

DUT

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MachineModelMM

Contactwithothermachines alsocauseESDstress. Bodyresistanceisabsent, thestresscanbemore severewithhighercurrent levels.


+

1Mohms

Vesd

200pf

DUT

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ChargeDeviceModelCDM

1Gohms

DUT

TheCDMESDtesters electricallychargeDUTand thendischargeittoground, thusprobingthehighshort durationcurrentpulsetoDUT.

Charging supply

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AntennaEffect
Metallayer gate D S

Chargescollectedonmetalcancreateasignificantelectricalfields acrossthegateoxides.Thisiscalledantennaeffect. Antennadesignrule:specifythemaximumratioofmetalareato gateareasuchthatchargeonthemetalwillnotdamagethegate.

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MetalSplittingorLayerJumping

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MetalSplittingorLayerJumping

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Electromigration
Highcurrentdensitiesleadtoanelectronwindthatcauses metalatomstomigrateovertime. Electromigrationdependsonthecurrentdensity,J=I/(w.t) Theelectromigrationcurrentslimitsvarywithmaterials, processing,desiredmeantimetofailureandobtainedfromthe fabricationvendor.

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