AS ISO 18118—2006

ISO 18118:2004
AS ISO 18118—2006

Australian Standard®
This is a free 7 page sample. Access the full version at http://infostore.saiglobal.com.

Surface chemical analysis—Auger

electron spectroscopy and X-ray
photoelectron spectroscopy—Guide to
the use of experimentally determined
relative sensitivity factors for the
quantitative analysis of homogeneous
materials
 This Australian Standard® was prepared by Committee CH-016, Spectroscopy. It was
approved on behalf of the Council of Standards Australia on 20 September 2006.
This Standard was published on 20 October 2006.

The following are represented on Committee CH-016:

• Australian Chamber of Commerce

• Australian Institute of Physics
• CSIRO Energy Technology
• Department of Defence (Australia)
• Department of Natural Resources and Mines Qld
• National Association of Testing Authorities Australia
• Queensland Health Scientific Services
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Additional Interests:

• Curtin University of Technology

• La Trobe University
• University of Newcastle
• The University of New South Wales
• The University of Queensland
• University of South Australia

This Standard was issued in draft form for comment as DR 06411.

Standards Australia wishes to acknowledge the participation of the expert individuals that
contributed to the development of this Standard through their representation on the
Committee and through public comment period.

Keeping Standards up-

up-to-
to- date
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be found by visiting www.standards.org.au

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notify us immediately of any apparent inaccuracies or ambiguities. Contact us via email at
mail@standards.org.au,
mail@standards.org.au or write to Standards Australia, GPO Box 476, Sydney, NSW 2001.
 AS ISO 18118—2006

Australian Standard®
This is a free 7 page sample. Access the full version at http://infostore.saiglobal.com.

Surface chemical analysis—Auger

electron spectroscopy and X-ray
photoelectron spectroscopy—Guide to
the use of experimentally determined
relative sensitivity factors for the
quantitative analysis of homogeneous
materials

First published as AS ISO 18118—2006.

COPYRIGHT
© Standards Australia
All rights are reserved. No part of this work may be reproduced or copied in any form or by
any means, electronic or mechanical, including photocopying, without the written
permission of the publisher.
Published by Standards Australia, GPO Box 476, Sydney, NSW 2001, Australia
ISBN 0 7337 7794 5
 ii

PREFACE

This Standard was prepared by the Standards Australia Committee CH-016, Spectroscopy. This
Standard is identical with, and has been reproduced from, ISO 18118:2004, Surface chemical
analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Guide to the use
of experimentally determined relative sensitivity factors for the quantitative analysis of
homogeneous materials.
The objective of this Standard is to provide guidance on the measurement and use of
experimentally determined relative sensitivity factors for the quantitative analysis of
homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy.
As this Standard is reproduced from an International Standard, the following applies:
(a) Its number appears on the cover and title page while the International Standard number
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appears only on the cover

(b) In the source text ‘this International Standard’ should read ‘this Australian Standard’.
(c) A full point substitutes for a comma when referring to a decimal marker.
References to International Standards should be replaced by references to Australian or
Australian/New Zealand Standards, as follows:
Reference to International Standard Australian Standard
ISO AS ISO
18115 Surface chemical analysis— 18115 Surface chemical analysis—
Vocabulary Vocabulary
The other ISO document listed as a normative reference in Clause 2 has not been adopted as
Australian Standard.
The terms ‘normative’ and ‘informative’ have been used in this Standard to define the
application of the annex to which they apply. A ‘normative’ annex is an integral part of a
Standard, whereas an ‘informative’ annex is only for information and guidance.
 ISO 18118:2004(E)

iii

Contents CONTENTS Page

Page
Foreword ............................................................................................................................................................ iv
Introduction ........................................................................................................................................................ v
1 Scope...................................................................................................................................................... 1
2 Normative references ........................................................................................................................... 1
3 Terms and definitions........................................................................................................................... 1
4 Symbols and abbreviated terms.......................................................................................................... 2
5 General information .............................................................................................................................. 3
6 Measurement conditions...................................................................................................................... 4
6.1 General ................................................................................................................................................... 4
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6.2 Excitation source .................................................................................................................................. 4

6.3 Energy resolution.................................................................................................................................. 4
6.4 Energy step and scan rate ................................................................................................................... 4
6.5 Signal intensity...................................................................................................................................... 4
6.6 Gain and time constant (for AES instruments with analogue detection systems) ........................ 4
6.7 Modulation to generate a derivative spectrum .................................................................................. 4
7 Data-analysis procedures .................................................................................................................... 5
8 Intensity-energy response function .................................................................................................... 5
9 Determination of chemical composition using relative sensitivity factors .................................... 5
9.1 Calculation of chemical composition ................................................................................................. 5
9.2 Uncertainties in calculated compositions .......................................................................................... 6
Annex A (normative) Equations for relative sensitivity factors..................................................................... 7
A.1 Symbols and abbreviated terms.......................................................................................................... 7
A.2 Principles ............................................................................................................................................... 9
A.3 Relative sensitivity factors................................................................................................................. 10
Annex B (informative) Information on uncertainty of the analytical results .............................................. 17
B.1 Symbols and abbreviated terms........................................................................................................ 17
B.2 Introduction ......................................................................................................................................... 17
B.3 Matrix effects ....................................................................................................................................... 17
B.4 Sample morphology............................................................................................................................ 18
B.5 Surface topography ............................................................................................................................ 18
B.6 Radiation damage ............................................................................................................................... 18
B.7 Ion-sputtering effects ......................................................................................................................... 18
B.8 Surface contamination ....................................................................................................................... 19
Bibliography ..................................................................................................................................................... 20

© ISO 2004 – All rights reserved iii

 ISO 18118:2004(E)
iv

INTRODUCTION

Introduction
Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) are surface-analytical
techniques that are sensitive to the composition in the surface region of a material to depths of, typically, a few
nanometres (nm). Both techniques yield a surface-weighted signal, averaged over the analysis volume. Most
samples have compositional variations, both laterally and with depth, and quantification is often performed
with approximate methods since it can be difficult to determine the magnitude of any compositional variations
and the distance scale over which they may occur. The simplest sample for analysis is one that is
homogeneous. Although this situation occurs infrequently, it is often assumed, for simplicity in the analysis,
that the sample material of interest is homogeneous. This International Standard provides guidance on the
measurement and use of experimentally determined relative sensitivity factors for the quantitative analysis of
homogeneous materials by AES and XPS.
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© ISO 2004 – All rights reserved v

 INTERNATIONAL STANDARD 1 ISO 18118:2004(E)

AUSTRALIAN STANDARD

Surface chemical analysis — Auger electron spectroscopy and

X-ray photoelectron spectroscopy — Guide to the use of
experimentally determined relative sensitivity factors for the
quantitative analysis of homogeneous materials

1 Scope
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This International Standard gives guidance on the measurement and use of experimentally determined
relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron
spectroscopy and X-ray photoelectron spectroscopy.

2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.

ISO 18115, Surface chemical analysis — Vocabulary

ISO 21270, Surface chemical analysis — X-ray photoelectron and Auger electron spectrometers — Linearity
of intensity scale

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 18115 apply. The definitions of
absolute elemental sensitivity factor and relative elemental sensitivity factor from ISO 18115 are given for
convenience in 3.1 and 3.2. Definitions of average matrix relative sensitivity factor and pure-element relative
sensitivity factor from a future amendment to ISO 18115 are given in 3.3 and 3.4.

3.1
absolute elemental sensitivity factor
coefficient for an element with which the measured intensity for that element is divided to yield the atomic
concentration or atomic fraction of the element present in the sample

NOTE 1 The choice of use of atomic concentration or atomic fraction should be made clear.

NOTE 2 The type of sensitivity factor used should be appropriate for the equations used in the quantification process
and for the type of sample analysed, for example, of homogeneous samples or segregated layers.

NOTE 3 The source of the sensitivity factors should be given in order that the correct matrix factors or other
parameters have been used.

NOTE 4 Sensitivity factors depend on parameters of the excitation source, the spectrometer and the orientation of the
sample to these parts of the instrument. Sensitivity factors also depend on the matrix being analysed, and in SIMS this has
a dominating influence.

© ISO 2004 – All rights reserved

www.standards.org.au 1
© Standards Australia
 This is a free preview. Purchase the entire publication at the link below:

AS ISO 18118-2006, Surface chemical analysis -

Auger electron spectroscopy and X-ray
photoelectron spectroscopy - Guide to the use of
This is a free 7 page sample. Access the full version at http://infostore.saiglobal.com.

experimentally determined relative sensitivity

factors for the quantitative analysis of
homogeneous materials

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