Sematech Safety Guide - Silane

SEMATECH Application Guide 2.
0 for
SEMI S2-93 and SEMI S8-95

(Formerly the SEMATECH Interpretive Guide)
To purchase a copy of this guidebook, contact

Semiconductor Safety Association 1313 Dolley Madison Blvd. Suite 402 McLean, VA 22101 Phone: (703) 790-1745 Fax: (703) 790-2672 http://www.semiconductorsafety.org
To purchase a copy of SEMI S2-93 or SEMI S8-95, contact
Semiconductor Equipment and Materials International 805 East Middlefield Road Mountain View, CA 94043-4080 Phone: (415) 964-5111 Fax: (415) 967-5375 http://www.semi.org
Comments and feedback related to the technical content and format of this document are welcome. Please forward any typewritten comments with name and address to
SEMATECH Attention: ESH Operations, S2 Application Guide 2706 Montopolis Drive Austin, TX 78741 Phone: (512) 356-3235 Fax: (512) 356-7040 http://www.sematech.org
FOREWORD
It is SEMATECH philosophy that no job is so important that it may be performed without s regard for safety, health or protection of the environment. In keeping with that premise, SEMATECH has endeavored to continue driving improvements in the area of occupational safety, health and environmental protection throughout all aspects of the semiconductor industry. This guidebook evolved out of a desire on the part of SEMATECH's member companies to eliminate the inconsistencies they observed in the interpretation and application of SEMI S2. It was their wish to collaborate and develop a mutually acceptable approach to the use of S2 among their respective organizations. The result was the creation of this interpretation which is meant to enhance and simplify the quality, process, and value of S2 for member companies, equipment manufacturers, and equipment evaluators. It is expected that consistent application of these SEMI guidelines creates the shared advantage of reduced development costs for semiconductor equipment while ensuring that minimum safety, health and environmental requirements are met or exceeded. SEMATECH believes that safety responsibility is owned by everyone. It is our intent to share this material with the industry and continue to support SEMI efforts in the ongoing improvement of the SEMI guidelines.
William J. Spencer Chairman and Chief Executive Officer SEMATECH
i Revision 2.0 Foreword
ii Acknowledgements Revision 2.0
PREFACE Purpose
This guidebook provides a set of consistent criteria for the expectations, interpretations, and application recommendations of SEMI S2-93 and S8-95 (S8). It was developed through the cooperative efforts of representatives of SEMATECH's member companies with the assistance of representatives from key semiconductor industry segments such as equipment manufacturers, third-party consultants, and SEMI. S2 is a comprehensive document that addresses a wide range of equipment and ESH criteria. It is not the philosophy of S2 to provide all of the specific design criteria that may be applied to semiconductor manufacturing equipment, but rather to provide criteria unique to the industry and a roadmap to some of the many international codes, regulations, standards, and specifications that must be used when designing semiconductor manufacturing equipment. Among the criteria covered by S2 are ergonomic factors. S8 provides more detail on these factors and is cited in S2, therefore, interpretations of S8 are included in this guidebook as Part Two.
Format
This guidebook is composed of two parts: Part One: Application Guide for SEMI S2-93: Safety Guidelines for Semiconductor Manufacturing Equipment Part Two: Application Guide for SEMI S8-95: Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment The text in this guidebook has been arranged to facilitate easy reference as follows. All references to regulatory standards or guides will be highlighted in bold type. Example: NEMA ICS 1.1 All references to text found in SEMI S2-93 or SEMI S8-95 will be indicated by italics and surrounded by quotation marks. Example: "upon request.
The title of each section has been reprinted in the lower outside corner of each page to assist in the navigation of this guidebook.
iii Revision 2.0 Preface
Guidebook Use
This guidebook is a clarification of the contents of SEMI S2-93 and S8-95 and is intended to be used in conjunction with those documents. It is organized so that content follows the same order as the SEMI Guidelines. Note: If a particular section of S2 or S8 is not included in this guidebook, it is because the original text was not regarded to need clarification or elaboration.
The following general guidelines, interpretations, and conditions should be applied when using this guidebook: 1. While S2 often refers to safety in general terms, it is expected that the recommendations of S2 and this guidebook will be applied to the full scope of the environment, safety, and health area including ergonomics. Only where a particular section has specific safety applications (e.g., electrical safety) should the interpretation be limited to safety. 2. The phrase "semiconductor manufacturing applies to any process that is directly related to semiconductor device production including wafer processing, assembly, test, and R&D. It is not intended to include peripheral systems, equipment, and structures that support the facility or building or that are not directly used in producing or testing semiconductor devices. 3. For purposes of this guidebook, the phrase "upon request as stated in SEMI S2-93 is interpreted to read as required. 4. The terms "qualified or "qualified professional describing an S2 evaluator are difficult to define. For purposes of this guidebook, this term applies more appropriately to the thoroughness of the report produced. While it is understood that an evaluator must possess certain basic credentials, the quality of the final report will ultimately determine the credibility and acceptability of the review. SEMATECH and its members expect that this guidebook will reduce the confusion and ambiguity associated with the quality, content, detail of information, and data expected in all S2 evaluation reports.
iv Preface Revision 2.0
ACKNOWLEDGMENTS
SEMATECH would like to express its gratitude to those who contributed to the development of this guidebook:
Karl Albrecht, National Semiconductor Lynne Arnold, Motorola Bob Arsenault, DoD W. Kerry Barbee, Motorola Steve Barcik, SEMATECH Aimee Bordeaux, SEMI Doug Bower, AMD Ron Brooks, SEMATECH Steve Burnett, SEMATECH Jim Campbell, Intel Brian Claes, LAM Research Corp. Jenni Carter, EORM Barry E. Clayton, IBM Bob Desrosiers, IBM Rich Engle, IBM Jeff Farmer, SEMI Glenn Fishler, EORM Alexis M. Funk, SEMATECH Mike Gooch, Rockwell James W. Gordon, AMD Jada Gray, Motorola Stephanie Grelle, AMD Mark Harralson, Intel Stan Hughes, Applied Materials George Hynes, Digital Edward Karl, Applied Materials Jon Karner, AMD Ken Knowles, SEMATECH Rick Koski, Santa Clara Plastics Mark Krauss, Inchcape Testing Services Alan Krov, Texas Instruments Bill LaBonville, IBM Jenna Latt, AMD Curt Layman, Intel Mike Lewman, Philips Semiconductor Greg Lund, SEMATECH Bill Marmust, AT&T Andy McIntyre, EORM Rick Miller, Hewlett-Packard Ramon Nazarian, Texas Instruments Carey Newton, AMD Ilya Olshan, Digital Sam Pakdel, National Semiconductor Richard Parker, Intel Lynne Reardon, Hewlett-Packard Rio Rivas, Hewlett-Packard Tania Rippy, Texas Instruments Sue Ross-Whitesell, Texas Instruments Jamie Rubin, Hewlett-Packard Troy Schroeder, Symbios Logic Joe Selan, Advanced Ergonomics Homer Selby, IBM - IMD Mike Sherman, FSI Karen Silberman, Motorola Kim Spencer, AMD Dawn Speranza, Digital Jennifer Spruce, SEMATECH Brett Stringer, AMD Tom Tamayo, IBM Steve Tramell, Motorola John Vaughn, EORM Stephen Wilcox, Intel Carl F. Williams, Texas Instruments
And to those who also contributed significant effort to produce Revision 2.0 of this guidebook.
Karl Albrecht, National Semiconductor Ron Brooks, SEMATECH Steve Burnett, SEMATECH Bob Desrosiers, IBM Ruth Frazer, Steag Microtech George Hynes, Digital Rich Kaplan, Applied Materials Ken Knowles, SEMATECH Rich Koski, SCP Global Technologies Mark Krauss, Simcom International Curt Layman, SGS Control Services Greg Lund, SEMATECH Kathy Petterson, SEMATECH Lynne Reardon, Hewlett-Packard Mike Shemes, SEMI Homer Selby, IBM Brett Stringer, AMD Steve Tramell, Motorola Steve Wilcox, Intel Carl Williams, Texas Instruments
v Revision 2.0 Preface
DISCLAIMER
THIS GUIDEBOOK REFLECTS THE INTERESTS, OPINIONS, AND POSITION OF SEMATECH AND ITS MEMBER
COMPANIES AND DOES NOT NECESSARILY REPRESENT THE POSITION OR VIEWS OF THE SEMICONDUCTOR INDUSTRY AS A WHOLE.
WHILE EVERY ATTEMPT HAS BEEN MADE TO REFERENCE KNOWN APPLICABLE
REGULATIONS, CODES AND OTHER STANDARDS OR REQUIREMENTS, THE EQUIPMENT MANUFACTURER RETAINS ULTIMATE RESPONSIBILITY FOR ENSURING THAT THE EQUIPMENT IN QUESTION PROVIDES FULL REGULATORY COMPLIANCE REGARDLESS OF WHETHER SUCH REQUIREMENTS ARE ADDRESSED HEREIN. IN THE EVENT OF A CONFLICT, COMPLIANCE WITH LEGAL OR REGULATORY REQUIREMENTS MUST SUPERSEDE THE EXPECTATIONS EXPRESSED IN THIS GUIDEBOOK.
vi Disclaimer Revision 2.0
Table of Contents
FOREWORD ------------------------------------------------------------------------------------------------------------- i PREFACE---------------------------------------------------------------------------------------------------------------- ii DISCLAIMER ----------------------------------------------------------------------------------------------------------- v TABLE OF CONTENTS ----------------------------------------------------------------------------------------------vi
PART ONE: S2-93 APPLICATION GUIDE

1. PURPOSE ------------------------------------------------------------------------------------------------------------ 1 2. SCOPE ---------------------------------------------------------------------------------------------------------------- 1 3. SAFETY PHILOSOPHY ------------------------------------------------------------------------------------------- 1 4. GENERAL GUIDELINES ----------------------------------------------------------------------------------------- 1 5. SAFETY-RELATED INTERLOCKS ---------------------------------------------------------------------------- 3 6. CHEMICALS --------------------------------------------------------------------------------------------------------- 5 7. IONIZING RADIATION -------------------------------------------------------------------------------------------- 7 8. NON-IONIZING RADIATION------------------------------------------------------------------------------------- 8 9. AUDIO NOISE ------------------------------------------------------------------------------------------------------11 10. VENTILATION AND EXHAUST ------------------------------------------------------------------------------11 11. ELECTRICAL -----------------------------------------------------------------------------------------------------15 12. EMERGENCY SHUTDOWN-----------------------------------------------------------------------------------19 13. HEATED CHEMICAL BATHS---------------------------------------------------------------------------------20 14. ERGONOMICS/HUMAN FACTORS-------------------------------------------------------------------------20
vii Revision 2.0 Table of Contents
15. ROBOTICS AND AUTOMATION ---------------------------------------------------------------------------- 21 16. HAZARD WARNING-------------------------------------------------------------------------------------------- 21 17. EARTHQUAKE PROTECTION------------------------------------------------------------------------------- 22 18. DOCUMENTATION --------------------------------------------------------------------------------------------- 22 19. FIRE PROTECTION --------------------------------------------------------------------------------------------- 23 20. ENVIRONMENTAL ---------------------------------------------------------------------------------------------- 23 S2 APPENDIX 1 - TERMINOLOGY ------------------------------------------------------------------------------ 26 S2 APPENDIX 3 - SUPPLEMENTAL INFORMATION------------------------------------------------------- 27 APPENDIX A - ELECTRICAL AND MECHANICAL DESIGN CRITERIA ------------------------------- 29 APPENDIX B - LIQUID HAZARDOUS CHEMICAL DESIGN CRITERIA ------------------------------- 95 APPENDIX C - HAZARDOUS GAS AND LIQUID DOPANT DESIGN CRITERIA -------------------- 99
PART TWO: S8-95 APPLICATION GUIDE

5. TERMINOLOGY ------------------------------------------------------------------------------------------------- 115 8. GENERAL GUIDELINES -------------------------------------------------------------------------------------- 116 9. WORKSTATION DESIGN ------------------------------------------------------------------------------------- 116 10. DESIGN FOR MAINTAINABILITY AND SERVICE ---------------------------------------------------- 118 11. LIFTING, STRENGTH, AND MATERIALS HANDLING ---------------------------------------------- 119 13. CONTROLS AND DISPLAYS ------------------------------------------------------------------------------ 120 14. USER-COMPUTER INTERFACE -------------------------------------------------------------------------- 121 APPENDIX A - MANUAL MATERIAL HANDLING RISK ------------------------------------------------- 123
viii Table of Contents Revision 2.0
APPENDIX B - NIOSH EQUATION 1991 DRAFT----------------------------------------------------------- 129 APPENDIX C - BIOMECHANICAL MODELS ---------------------------------------------------------------- 139 APPENDIX D - FORCE DATA ----------------------------------------------------------------------------------- 141 APPENDIX E - CLOTHED ACCESS DIMENSIONS -------------------------------------------------------- 161 APPENDIX F - HANDLE DESIGN GUIDELINE-------------------------------------------------------------- 163 APPENDIX G - AWKWARD POSTURES --------------------------------------------------------------------- 165 APPENDIX H - MAXIMUM GRIP FORCES ------------------------------------------------------------------- 167
REFERENCE DOCUMENTS ------------------------------------------------------------------------------------- R-1 GLOSSARY ---------------------------------------------------------------------------------------------------------- G-1 ACRONYMS---------------------------------------------------------------------------------------------------------- G-5
ix Revision 2.0 Table of Contents
Part One
Application Guide for
SEMI S2-93
SEMATECH Application Guide for SEMI S2-93

1. Purpose
1.a. For purposes of this guidebook, minimum set is defined as the set of minimum requirements with expectations explained in this guide by the SEMATECH member companies. 1.b. SEMI S2-93 (S2) is intended to be performance-based to allow for flexibility of design; however, in some cases, specific codes and standards are cited in this guidebook to meet specific requirements. 1.c. Areas of consideration include environment, safety, and health (ESH) and also ergonomics. 1.d. The term equipment is defined as that which is used in manufacturing, developing, and testing semiconductor devices. This includes the entire equipment envelope including drains, exhaust ducts, and both point-of-use and facility-wide abatement equipment. This is not intended to include boilers, HVAC systems, chillers, or equipment that supports the facility.
2. Scope
2.a. The phrase semiconductor manufacturing is defined as any process that is directly related to semiconductor device production. This includes, but is not limited to, IC wafer processing, assembly, test, and R&D.
3. Safety Philosophy
3.1. 3.1.a. S2 is a comprehensive document that addresses a wide range of equipment and ESH criteria. It is not the philosophy of SEMI S2 to provide all of the specific design criteria that may be applied to semiconductor manufacturing equipment but rather to provide criteria unique to the industry and a roadmap to some of the many international codes, regulations, standards, and specifications that must be used when designing semiconductor manufacturing equipment. Design criteria considered to be the best practice known at the time of this writing have been included in appendices and should be applied to semiconductor equipment during design and evaluation for S2. 3.2. 3.2.a. The term equipment does not apply to any process product that may be damaged or lost as a result of equipment failure. 3.2.b. 3.3. 3.3.a. This list should not be considered all inclusive. See the Glossary for definitions of fail-safe and single-point failure.
4. General Guidelines
While this guidebook is intended to enhance and clarify the performance suggestions contained in SEMI S2-93, it is strongly recommended that the equipment manufacturer make every effort to apply and conform to all portions of this Application Guide. During equipment evaluations for S2 conformance, evaluators are encouraged to regard all portions of this guidebook as explicit requirements and to
1 Revision 2.0 S2-93 Application Guide

measure the equipment against it in full. It is the end-user responsibility to accept s or deny any deviations of the equipment from the directions outlined in this guide. 4.1. 4.1.a. Any deviation from these requirements should be negotiated with the end-user s designated ESH representative. 4.2. 4.2.a. It is considered the equipment manufacturer responsibility to comply with all s applicable codes and requirements; however, the equipment manufacturer may work with the end-user to identify these requirements. 4.2.b. The intent of this section is to identify hazards for which there are no feasible, technological, or practical means of reduction or elimination. It is not intended as a justification for avoiding compliance with any of the specific recommendations of S2. (For example, although silane is a hazardous material for which a safer substitute would be preferred, practical options are currently limited so the hazards of silane usage would be documented in this section of the S2 evaluation report.) 4.2.c. The equipment manufacturer should identify and provide means to isolate, block, or bleed, all hazardous energy to which personnel could be exposed during maintenance or service operations in a manner that creates minimum impact on the operation of the equipment. Equipment should be designed to allow hazardous energy isolation at the subassembly (e.g., pump, RF generators, chambers, chillers, gas system) level. 4.2.d. Equipment manufacturers have a responsibility to employ design-for-ESH concepts during tool development. Worker protection, pollution prevention, and waste minimization should be primary design goals. A reduction that does not cause increased consumption or waste generation in another area would be considered a true minimization. Actions that would increase resource usage, generation of wastes, or worker risk should not be pursued. 4.2.e. The term design includes the development and manufacture of semiconductor manufacturing equipment which, in turn, is subject to S2 evaluation. 4.2.f. As a minimum, risk analysis is defined as the S2 evaluation conducted by a qualified party. 4.2.g. The phrase applicable laws, regulations, and codes in effect at the time of purchase, and to the guidelines presented here or other applicable product safety standards implies that the review of the tool in question will meet the recommendations of SEMI S2-93 as well as all applicable recognized codes, regulations, standards, and guidelines in effect at the point of delivery of the equipment. 4.2.h. In geographic regions where permits are required for installation, it will be necessary for the end-user ESH professional to receive critical data several months s before shipment because of the lengthy permitting process. 4.2.i. 4.3 4.3.a. Compliance, as defined in this section, applies to the point of delivery of the equipment; however, equipment manufacturers are expected to address significant ESH compliance requirements in the design and construction of equipment for end-markets around the world. While it may not be feasible to meet all requirements for all possible end-markets, suppliers intent on marketing to internationally structured customers should evaluate this design approach and conform with all feasible requirements. The intent and The term property damage does not include lost product.
2 S2-93 Application Guide Revision 2.0

end result of such efforts should be driven by an approach of cost reduction associated with the following: 1. One unified product design as opposed to multiple design configurations. 2. Ease of equipment migration by the end-user from the original point of delivery to locations where there are significant differences in regulatory requirements. 4.4. 4.4.a. Although efforts should be made to contact the individuals described, the purchasing agent is typically recognized as the primary end-user contact. 4.5. 4.5.a. 4.6. 4.6.a. In this case, specific chemistry is defined as specific process parameters that include temperature, chemicals, feed rates, process times, and pressures (e.g., recipes ). 4.6.b. While the equipment manufacturer cannot foresee or control how a piece of equipment will ultimately be used by an end-user, the equipment manufacturer is expected to respond to this section. For example, the review of a metal etch tool would be expected to include a basic profile and baseline, keeping common manufacturing processes in mind. 4.7. 4.7.a. It is strongly recommended that the services of a qualified ESH professional be employed during equipment development to ensure that proper ESH design considerations are incorporated (see 4.2.d. of this guide). See Glossary for definition of single-point failure.
5. Safety-Related Interlocks
5.1. 5.1.a. For personal protection, hardware-based interlocks are recommended whenever access can be gained without the use of a tool to an area that would allow inadvertent contact with hazards such as remote or programmed machine starts, moving mechanical parts, hazardous potentials, hazardous energy levels, ionizing and nonionizing radiation, hazardous chemicals, or stored electrical energy. Typically, safety interlocks are hardwired between the logic output (switching) device and a fail-safe magnetic device that controls the hazardous energy. 5.1.b. Switches, contacts, and other interlock control devices should be connected to the ungrounded side of the circuit. Listed, tested, recognized or successfully tested and documented components are recommended. 5.1.c. Fail-safe interlocks intended for the protection of personnel and equipment should be hardware-based (see 5.1.d. of this guide) and should be designed such that a failure of any component in the interlock circuit would not compromise the safety of personnel or the system. 5.1.d. For hardware safety interlocks, electromechanical devices such as contactors, relays and switches are preferred over solid-state devices and non-user programmable controls (e.g., transistors, OP-amps, and diodes). If the use of such solid state devices are justified, they should comply with the applicable requirements of UL 991 and NEMA ICS 1.1; such devices also should be self-monitoring and redundant. Computer hardware is not considered a hardware safety interlock.

5.1.e. The equipment manufacturer should describe or define in the operations and maintenance manuals the safe standby condition that all equipment is placed into after a power interrupt, emergency off, or automatic shutdown.

5.1.f. Hydraulic and Pneumatic Systems Hydraulic and pneumatic systems should be designed for fail-safe operation. Quick dump valves are to be used such that no cylinders or other actuation devices will be left under pressure (cocked) after normal or emergency off (EMO) operation. Check valves and/or bleeder paths should be employed to eliminate any guillotine action of mechanical assemblies by gravitational forces. Hydraulic and pneumatic systems should be designed and built in compliance with the Joint Industrial Council (JIC) Hydraulic Standard, H-1 or Pneumatic Standard, P-1. 5.2. 5.2.a. Where automatic restoration is not reasonably possible, normal operation mode should not be restored until interlocks are reactivated. Safety interlocks should require an intentional operation to bypass. The semiconductor manufacturing equipment should not function in normal operation mode without interlocks activated. Note: The use of interlocks for controlling hazardous energy during service or maintenance should not be encouraged in the service or maintenance manuals in lieu of lockout/tagout. 5.4. 5.4.a. The list of hazards in 5.4 is not all inclusive.
5.4.b. Personnel should be protected from hazardous moving parts such as pulleys, shafts, sharp edges, and other potential hazards by solid or perforated safety covers that are interlocked or require a tool for removal. When a wire mesh or perforated cover is used for protection from hazards, the mesh should meet the recommendations of Table 5.4 below.
Table 5.4 Mesh Shield Sizes

Distance Between Mesh and Danger Point mm 13 - 38 38 - 64 64 - 89 89 - 140 140 - 165 165 - 191 191 - 216 inches 0.5 - 1.5 1.5 - 2.5 2.5 - 3.5 3.5 - 5.5 5.5 - 6.5 6.5 - 7.5 7.5 - 8.5 Maximum Mesh Opening mm 6 10 13 16 19 22 32 inches 0.250 0.375 0.500 0.625 0.750 0.875 1.250
5.4.c. Personnel should be protected from flying particles, dusts, mists, or other hazards by inherent design, capture ventilation, or shielding enclosures. 5.4.d. Cover Types Top covers for electrical enclosures should be provided to prevent objects from falling into the machine. 5 Revision 2.0 S2-93 Application Guide

Bottom covers for electrical enclosures should be provided to contain burning material inside the machine. Mesh may be used, if necessary. Acceptable bottom enclosures may be 1.0 mm (0.040 in.) sheet metal panel in which round holes 1.95 mm (0.078 in.) or smaller are no closer together than 3.2 mm (0.125 in.) from center to center. Horizontally hinged covers that are likely to present a hazard should be provided with a fail-safe device to prevent injury. Sliding covers that move in a vertical plane and are likely to present a hazard should be counterbalanced or provided with a fail-safe device to prevent injury. Vertical lift-off doors should be secured by mechanical means. 5.6. 5.6.a. 5.8. 5.8.a. Software safety interlocks include computer hardware (e.g., controllers). Refer to section 5.1 of SEMI S2-93 and this guidebook. Refer to section 5.1 of SEMI S2-93 and this guidebook.
6. Chemicals
Refer to Appendices B and C of this guide for direction in the design of chemical delivery and control systems. 6.1. 6.1.a. Quantitative NIOSH-approved industrial hygiene (IH) monitoring methods or other nationally recognized procedures should be used. 6.2. 6.2.a. This section applies to equipment that uses hazardous production materials (HPMs) or generates hazardous byproducts. 6.2.b. All sampling points (ports) should be readily accessible.
6.2.c. An assessment should be completed to determine the safe shutdown state of any HPM distribution system. At a minimum, a means for effective shutdown of externally supplied HPMs should be located on the piece of equipment at the incoming tool/facility interface. 6.2.d. Gases
Sample point locations should be recommended by the manufacturer for each ventilated enclosure that has non-welded mechanical connections handling HPMs near, at, or in the exhaust duct. The gas supply interface should be deactivated (shut down) during emergency procedures by a hardware-based fail-safe interlock, not a software-based system (see 5.1.c. of this guide). No system should be solely reliant upon software for effective shutdown. If a gas detection alarm system is provided by the equipment manufacturer, a failsafe interlock-based interface should allow for both high and low alarm levels ranging from TLV to three times (3x) TLV. 6.2.e. Documentation:
The equipment manufacturer should provide documentation in the operation and maintenance manuals identifying the following: 6 S2-93 Application Guide Revision 2.0

All chemicals expected to be used in or generated by the tool during processing (see 4.6.b. of this guide). Chemicals that are HPMs requiring detection and the regulation requiring such detection. (Local ordinances should be considered. Refer to SEMI S293, section 3.1). All chambers within the tool that contain an HPM. Location of all sample points for each HPM (graphic representation is preferred). Description of fail-safe interlock-based gas shutoff mechanism installed. 6.3. 6.3.a. The intent of this section is to prevent the uncontrolled or unintentional mixing of chemicals. (Also see section 20.5.1. of SEMI S2-93.) 6.4. Note: This section can be addressed in conjunction with section 6.6.
6.4.a. The equipment evaluator should consider all parts of the equipment system envelope, such as drains and exhaust ducts, that may contain process by-products presenting exposure hazards to operator or maintenance personnel. 6.4.b. Documentation: All anticipated maintenance activities along with chemical and exposure issues expected to be encountered. Chemical exposure levels measured or expected to be encountered along with relevant literature citations. (The qualifications of the individual performing this duty should be included if the person is not a Certified Industrial Hygienist.) 6.5. 6.5.a. All pressurized vessels should be equipped with normally closed valves on both the inlet and outlet chemical lines for bulk-filled systems and on the outlet line for handfilled systems. These valves should close when the interlock circuit is actuated. The vessel should be equipped with a pressure relief device plumbed to containment or drain. The pressure relief device should actuate at no more than 120% of the working pressure, but less than the vessel test pressure. 6.5.b. The system should be equipped with a means of relieving pressure before normal servicing or maintenance. Vessels containing HPMs should have a means of relieving the pressure remotely before servicing the vessel or other components in the compartment. The gas and vapor should be vented to exhaust. 6.5.c. The supply gas line used to pressurize the vessel should contain a check valve to prevent backflow. 6.5.d. The system should be located in an appropriate enclosure providing secondary containment that is equipped with the following: Draining capability. Liquid level sensor interlocked to close chemical supply valve, depressurize the vessel, and alert the tool operator in case of a leak.
The equipment manufacturer should provide documentation identifying the following:

All nonwelded fittings and valves associated with the vessel should be located within the cabinet. Covers/doors should be interlocked to prevent opening while any canister is under pressure. When an interlock is not feasible, transparent internal shields should be used to deflect any sudden pressure release. 6.5.e. Pipes, fittings, and gasket materials that contact any toxic, corrosive, flammable, or reactive chemicals should be resistant to those chemicals. 6.5.f. The equipment manufacturer should demonstrate that pressurized vessels and piping systems meet the ASME Code for Unfired Pressure Vessels. 6.5.g. The vessel should be equipped with a burst disk-type pressure relief device with a minimum 1/2-in. inner diameter (ID) nipple to allow adequate pressure relief in case of fire. The pressure relief device should actuate at no more than 120% of the working pressure, but less than the vessel test pressure. 6.5.h. The vessel should be located in an enclosed cabinet constructed of compatible materials. The cabinet should be under negative pressure. If access ports are present, an average face velocity of 100 linear feet per minute (lfm) with no point less than 80 lfm should be maintained across the panel face while the access panel is open. 6.6. Note: This section can be addressed in conjunction with section 6.4.
6.6.a. This information should be provided to the end-user regardless of whether or not it was specifically requested. Please refer to section 4 of this guidebook. 6.7. 6.7.a. For compliance with this section, simply see whether or not a label is present at the recommended locations, then verify that the labeling is adequate for the enclosure identified. Labels should be placed on the primary enclosures (primary means that the hazard is directly behind the enclosure). 6.7.b. Exception: Hazardous gas enclosures need to have a label only on the outer maintenance access panel. Refer to section 16 of SEMI S2-93 and this guidebook for direction on specific label recommendations. 6.7.c. Documentation:
The equipment manufacturer should identify all chemical enclosure maintenance openings in the maintenance manual.
7. Ionizing Radiation
7.1. 7.1.a. In keeping with good industrial hygiene practice, emission levels should be kept As Low As Reasonably Achievable (ALARA). At no time should emissions exceed the ACGIH TLVs. 7.1.b. This section applies to the normal operations, service and/or repair of any equipment, tool, or device that uses radioactive materials or can produce ionizing radiation. 7.2. 7.2.a. Documentation:

The equipment manufacturer should provide documentation that includes the following: A list identifying 1. all radioactive material, including activity level(s), contained within the equipment. 2. any equipment that generates ionizing radiation above regulatory threshold levels as well as the measured level of external radiation. A copy of the manufacturer submittal to the NRC, FDA, or other s appropriate agency. If the manufacturer has exempt status, clear documentation indicating such should be provided. A copy of the performance guarantee accepted by the NRC or other applicable regulatory agency(ies) for the equipment model unless the equipment has been generically exempted by classification. 7.3. 7.3.a. Administrative controls are considered a secondary control measure. All feasible options for primary (engineering) controls such as shielding should be fully applied before instituting administrative control measures. 7.3.b. When used, administrative controls should be documented clearly in all operation and maintenance manuals and included in appropriate labeling on the equipment. All equipment labeling should comply with sections 16 and 18 of SEMI S293,. 7.3.c. Documentation:
When administrative controls are to be used, the equipment manufacturer should provide documentation explaining why primary controls were not feasible. 7.4. The intent of this section is to minimize the potential for exposure of service personnel to any type of radiation. 7.4.a. All safety-related interlocks should meet the recommendations of SEMI S2-93, section 5. 7.4.b. Nondefeatable interlocks must meet NRC or other applicable regulatory agency requirements. 7.4.c. Documentation
A warning label must be placed on any panel that can be removed during repair, maintenance, or servicing. Any non-interlocked panel that can be removed must be labeled and documented in the maintenance manual.
8. Non-Ionizing Radiation
8.1. 8.1.a. This section covers normal operations and maintenance of equipment using or generating non-ionizing radiation including ultraviolet, visible light, near infrared, radio frequency/microwave, static magnetic fields, subradio frequency, and lasers. For Non-laser Equipment: 8.1.b. See section 5 of SEMI S2-93 regarding interlocks.

8.1.c. The ACGIH TLVs for ultraviolet, visible, infrared, static electric, and magnetic fields, and radio frequency (0-3 KHz) determine the maximum acceptable environmental exposure levels to non-ionizing radiation. Exposure limits for radio frequency (RF) radiation (3 KHz - 300 GHz) are those found in IEEE C95.1. 8.1.d. In keeping with good industrial hygiene practice, emission levels should be kept As Low As Reasonably Achievable (ALARA). At no time should emissions exceed the ACGIH TLVs. 8.1.e. Safety interlocks incorporated in equipment covered by this standard should be consistent with all other fail-safe safety interlocks, hard wired, and of fail-safe design. 8.1.f. Equipment using or generating microwave radio frequency/sub-RF should be designed to incorporate engineering controls which ensure that radiation exposures to personnel are As Low As Reasonably Achievable (ALARA). The maximum permissible emission level is 50% of the IEEE C95.1 limits for Uncontrolled Environments (3 KHz 300 GHz) or 50% of the ACGIH TLVs for frequencies < 3 KHz. For Laser Equipment: 8.1.g. It is acceptable to establish temporary Class III and IV laser controlled-access areas during maintenance and service operations. The equipment manufacturer should identify those operations requiring the establishment of such areas in the maintenance and service manuals. 8.1.h. 8.2. 8.2.a. Documentation The reference to OSHA 29 CFR 1046.10 should read FDA 21 CFR 1040.10.
The equipment manufacturer should identify all non-ionizing radiation sources (including lasers) along with the frequency, wavelength, and energy level in all operation and service manuals as well as through labeling on the outside skin of the equipment next to the ID plate on the tool. Refer to SEMI S1 for guidance on visual hazard alerts. For Non-laser Equipment: 8.2.b. Table 8.2 illustrates typical non-ionizing radiation types and the equipment used to measure their related hazards.

TABLE 8.2 Non-Ionizing Radiation
Non - IR Type
Static Magnetic Fields UV Light Emissions
Typical Location Monitored

Around source magnet housings. Lamp housings, view ports, plasma chamber view ports, visible emission points on equipment that uses or produces UV. Input and output cables, generators, match covers, view ports, chambers, magnetrons, and equipment connected to tool that may act as an antenna. Housing to IR Lamps that have visible light leakage and ports, lamp arrays during maintenance viewing.
Equipment Typically Used for Survey

Static magnetic field strength meter that measures in Gauss. Radiometer with UV detector that weights measured emissions to TLV Relative Spectral Effectiveness Curve. Measurements are in mW/cm2. Frequency specific probes, E-field (measured in V2/M2) and H-field (measured in A2/M2) probes. Use IEEE C95.1 as guide. Radiometer with detectors that are frequency-specific and cover ACGIH-TLV appropriate spectral ranges. Measurements are in mW/cm2.
RF/Microwave Fields
Visible Light and Near-IR
For Laser Equipment: 8.2.c. Where ANSI Class III & IV laser light emissions are accessible during maintenance, servicing, or repairs, administrative controls should be clearly defined in the maintenance and service manuals (e.g., procedures for setting up temporary laser controlled areas, posting signs, and securing access to area) in compliance with ANSI Z.136.1. 8.4. For Laser Equipment: 8.4.a. The equipment manufacturer should include the initial product report in the S2 evaluation report, including the assession numbers received from the CDRH. 8.4.b. The equipment must have a certification label as part of the labeling requirements outlined in 21 CFR 1040.10(g). 8.5. 8.5.a. Point-of-hazard panels are those that are not intended to be removed during normal operation or maintenance (i.e., they require only infrequent service or repair). All safety-related interlocks should meet the recommendations of SEMI S2-93, section 5. 8.5.b. Nondefeatable interlocks must meet CDRH requirements.
8.5.c. A warning label is required on any panel that can be removed during repair, maintenance, or servicing. 8.5.d. Any noninterlocked panel that can be removed must be labeled and identified in the maintenance and operation manuals.

8.6. 8.6.a. The term faulty installation includes the absence of shielding installation. The equipment manufacturer should make every effort to ensure that all shielding is properly in place before the equipment can be operated.
9. Audio Noise
9.1. 9.1.a Continuous and intermittent noise levels should be maintained at levels less than 80 dB(A), slow response. Impact noise, if present, should be maintained at levels not to exceed 130 dB peak. 9.2. 9.2.a. This exception applies only to equipment that generates no measurable noise levels during normal operation (e.g., microscope). 9.2.b. The measurement technique used must comply with ANSI S1.13, Methods for the Measurement of Sound Pressure Levels. The equipment mode of operation during the noise level tests must simulate as closely as possible the actual operating modes and conditions that may be experienced by the equipment user. Measurements must be taken at 1 meter (3.3 feet) distances completely around the equipment and its support equipment (e.g., pumps and motors) while equipment is in operating mode. The microphone must be held approximately 1.5 meters (4.9 feet) above the ground and 1 meter (3.3 feet) from the nearest major equipment surface. For operator-attended equipment, the microphone must be placed at the operator location for standing (approx. 1.5 meters) and sitting (approx. 1.2 meters) positions as measured from the walking/working surface. 9.2.c. Noise level test measurements from suppliers of components to the equipment manufacturer may be included. 9.2.d. Documentation
All noise levels, duration, frequency of occurrence, and meter calibration must be clearly stated in the test results.
10.
Ventilation and Exhaust

10.1.a. These systems should optimize the use of air flow, as far as practical directing escaping chemicals so they do not impinge on the equipment or expose personnel. 10.1.b. The following are considered to be modes of operation: Normal Maintenance Failure 10.1.c. Test validations should be performed using all reasonable setups for the three modes of operation. Testing in maintenance mode should validate flows while one or all maintenance access panels are opened. 10.1.d. A minimum duct velocity recommendation should be provided to demonstrate efficient and safe control of chemical emissions.
10.1.

10.1.e. To achieve optimized equipment exhaust (maintained as low as possible) the equipment should be designed to Compartmentalize potential leak points. Minimize size and number of potential openings. Maintain static pressure in enclosures greater than or equal to a -0.1 inches water gauge. Minimize the total size of enclosures . Promote even air flow through enclosures from one end to the other using design for sweep. 10.2. 10.2.a. Primary Safety Control is defined as the first method used to contain or control a chemical by ventilation (refer to SEMI F6 for further explanation). 10.2.b. Exhaust loads that require continuous flow [to] external treatment should be minimized. All exhaust loads should be minimized. 10.2.c. Documentation The equipment manufacturer or evaluator should identify the following: All HPM, odorous, and irritant chemicals present in equipment. Where exhaust is used as the primary safety control (rather than other controls such as chemical substitution or tool purging), and provide justification for using exhaust as the primary safety control. Static pressure and flow rates of all continuous flow exhaust along with justification of levels (the goal is to limit exhaust to a minimum while remaining effective in all operating modes). All nonroutine access enclosures (other than those identified for section 6.7 of this guide). Where supplementary exhaust is needed during maintenance operations where feasible. If not feasible, specific design requirements for exhaust should be provided to the end-user. Maintenance or supplemental exhaust required for maintenance should be designed into the tool by the equipment manufacturer. Supplemental exhaust should be considered part of equipment maintenance. 10.3. 10.3.a. The chemical list created for section 6.2 should indicate those chemicals with an NFPA 704 hazard rating of 3 or 4 by designating them as Hazardous Production Materials (HPMs). 10.3.b. The equipment supplier should document when external exhaust is required and specify the requirements for both process and standby modes. 10.3.c. Documentation The equipment manufacturer should document that all nonwelded connections containing HPMs under pressure are in an exhausted enclosure. 10.4. 10.4.a. Refer to Tracer Gas Analysis Method as described in SEMI F15. 10.5.

10.5.a. The phrase these criteria refers to sections 10.5.1 through 10.5.4 of SEMI S293. 10.5.b. Laminar room air flow conditions should exist or be simulated during all tests. The year of publication should be provided for all TLV/PEL levels quoted for tests. 10.5.c. Tracer Gas Analysis (TGA) method (refer to SEMI F15) is preferred for all HPM gas enclosures; however, because using this method can overlook the buildup of gases over time, supplementary testing methods have been outlined in Table 10.5 for the various types of equipment ventilation configurations.
TABLE 10.5 ENCLOSURE TESTING METHODS

Type of Enclosure HPM Gas Enclosures: nonpyrophorics pyrophorics only Lab Hood Wet Stations All other hazardous chemical enclosures without HPM gases (e.g., bubbler and vacuum system enclosures, liquid dispensing cabinets, pressurized liquid pumps) Tracer Gas Analysis (TGA) plus air pattern assessment TGA, air pattern assessment plus, appropriate air velocity assessment Face velocity plus air pattern assessment (ASHRAE Lab Hood Standard) Vapor visualization, face velocity Negative pressure confirmation through air pattern assessment Preferred Performance Test Method
10.5.d. Documentation The equipment evaluator should include a complete description of the testing methods used for Visual Pattern Assessment Static Pressure Capture Velocity Duct Velocity Face Velocity Environmental parameters (conditions of the room during testing) should also be described in detail. 10.5.1. 10.5.1.a. Documentation
Measure using the appropriate NIOSH/OSHA method for a representative period of time at least 15 minutes or one complete tool cycle. The 1% of ACGIH recommended TLV or PEL is considered the ceiling limit. At no time should there be an exposure during normal operating conditions. 10.5.2.

10.5.2.a. See secondary containment in Glossary. 10.5.2.b. Vapor visualization tests should be considered for failures involving liquid releases into secondary containment in the back of wet decks. 10.5.2.c. If NIOSH-approved testing methods are not feasible, professional judgment based on visual testing conducted by a CIH or equivalent will suffice. 10.5.3. 10.5.3.a. 6.6. 10.5.4. 10.5.4.a. In addition to work areas, exhaust systems, maintenance areas, and any other locations where measurements are taken should meet this criteria. Note: For purposes of completing the industrial hygiene evaluation under the conditions described in sections 10.5.1 through 10.5.3, an alternative test guarantee can be made in writing as an alternative to the NIOSH-approved IH test method. The qualifications of the individual(s) providing this guarantee should be provided. 10.5.4.b. Documentation This section should be addressed in conjunction with sections 6.4 and
Records of instrument calibrations performed by an accredited lab are recommended. 10.6. 10.6.a. The intent of this section is to improve exhaust optimization for the equipment while not causing ergonomic stress on maintenance personnel. 10.6.b. Hinged doors are preferred. 10.6.c. Visual ports should be included where possible to eliminate the need to remove panels. 10.7. 10.7.a. The equipment manufacturer should include a picture or schematic in the operation and maintenance manuals indicating where to sample. 10.8. 10.8.a. Refer to SEMI S6 for specific exhaust application(s). 10.9. 10.9.a. Interlocks systems include components such as the Dwyer Photohelic device that place the tool in a safe standby mode if exhaust flow falls below a minimum set point. 10.9.b. An alarm for low flow should be visible and audible from both the front and back of the equipment. 10.9.c. The equipment manufacturer should reference safe standby conditionas defined in section 5.1.e. 10.9.d. The equipment manufacturer should make the interlock system tamper-proof and include calibration records or recommendations for calibrating the monitoring device(s). 10.9.e. Static pressure devices are preferred over velocity monitors for corrosive and aerosol (wet) environments. Monitors are effective for gas boxes. Multiple alarm levels are desired for static pressure exhaust systems.

10.9.f. All devices should use the mid-third of their range for normal flow detection.
11.
Electrical
11.1.a. The reference note following type 3 should read: (NFPA 79, EN 60204, UL 1950 & 3101, EN 60950). 11.1.b. The supplier should list type 3 or higher electrical hazard tasks by their type (as defined in SEMI S2-93, section 11.1) in its equipment operation and maintenance manuals.) 11.1.c. As stated in 11.1, every effort should be made to modify potential type 4 and 5 tasks (Hot Work categories) to the lowest possible category. Those tasks that must remain type 4 or 5 should receive special emphasis in attention to detailed compliance with the criteria listed in 11.1. 11.1.d. OSHA Confined Space Entry requirements should be considered in type 5 tasks. 11.1.e. Type 4 and 5 tasks should be identified in the maintenance manual by icon and type, with hazards clearly described.
11.1.
11.2. 11.2.a. Each separate subassembly of the total equipment system (including remote and ancillary support equipment receiving power from an equipment supplier-provided power distribution panel) must be equipped with a lockable energy isolation device where required by OSHA 29 CFR 1910.147. Lockable energy isolation devices integral to the equipment power distribution panel are acceptable if the protected component equipment is located within 25 feet (7.6 meters) line-of-sight of the panel. 11.2.b. The lockable energy isolation device must be in a readily accessible location and lockable in the de-energized position only. 11.2.c. It is recommended that resetable circuit protection devices be accessible without exposing employees to live wiring. 11.3.1. 11.3.1.a. 11.3.2. 11.3.2.a Access holes through shields and covers and remote or external test points are recommended. 11.3.2.b. Barriers should be provided where Service is required with power on and inadvertent contact is likely. It is necessary to reach over, under, around, or in close proximity to hazards. Dropped tools could cause shorts or arcing. 11.3.3. 11.3.3.a. 11.3.4. 11.3.4.a. The equipment should meet the standard electrical codes of the country in which it will be used. See section 4.3 of this guide. Refer to SEMI S9 test document for electrical test methods. Nonconductive barriers are preferred.

11.3.4.b. All conductors within a harness, wireway, or raceway should have insulation rated for use at the highest potential present. 11.3.4.c. The intent of the second paragraph is to address components in the system that cannot be certified, listed, or recognized by a testing laboratory. 11.3.4.d. Heat Tapes and Bands Should be listed, recognized, or certified. Should have complete manufacturer use and installation s instructions/specifications. Application and integrated use should conform to UL 499 requirements. Heat tapes/bands and/or cables should not be modified. Should not be installed in applications where flammable chemicals are used or dispensed. Should be protected by a ground-fault circuit interrupt designed to protect personnel. 11.3.5. 11.3.5.a. Refer to NFPA 79 and/or EN 60204 for guidance on color codes.
11.3.5.b. It is acceptable to wrap conductor termination points with appropriately colored tape or sleeving reliably secured to conductor. (Sleeving is preferred.) 11.3.6. 11.3.6.a. The equipment supplier should provide appropriate overcurrent protection. 11.3.7. 11.3.7.a. EXCEPTION: Circuit breakers and circuit protectors are preferred over fuses as overcurrent devices for the following reasons: They can be reset without exposure to energized terminals and, therefore, can be safely reset by nontechnical personnel. The risk of putting an over-rated fuse into a socket is eliminated by the use of circuit breaker and protectors that are hardwired into the system. Multipole units that open all conductors simultaneously (such as those used on three-phase circuits when an overload occurs) may be used. 11.3.7.b. follows: The general recommendations of circuit protection devices are as
1. Amperage - Circuit protection devices should not exceed the amperage rating of the components and conductors they protect. 2. Location in circuit - Circuit protection devices should be located at the point where an ungrounded conductor connects to a larger conductor or its supply source. Exceptions to the location recommendations should meet one of the following: EXCEPTION 1: Where the conductor Is not over 7.6 meters (25 feet) long.

Amperage rating is at least one-third that of the conductor from which it is supplied. Terminates at a single circuit protection device. Is protected from physical damage. Note: The conductor should not connect to any component or device before termination at the protection device. EXCEPTION 2: Where the conductor: Is not over 3.05 meters (10 feet) long. Amperage rating is at less than the maximum continuous load current of the circuit. Amperage rating is not less than the rating of the device supplied or the rating of the overcurrent protective device at the conductor termination. Does not extend beyond the control panel enclosure. EXCEPTION 3: Where the circuit protection device protecting the large conductor also protects the smaller conductor. 3. Parallel devices - Circuit protection devices should not be connected in parallel to attain recommended amperage capacity. 4. Thermal devices - Thermal devices are not designed for short circuit protection and should not be used for conductor protection. 5. Grounded conductors - Circuit protection devices should not be connected in series with grounded or grounding conductors. 6. Accessibility - Circuit protection devices should be readily accessible by service personnel. 7. Enclosures - Circuit protection devices should be enclosed. 8. Labeling - The amperage rating of circuit protection devices should be indicated in a manner that is clear, durable, and visible after installation. 9. Resets - Automatically resetting circuit protection devices are not desired. 10. Mounting - Circuit protection devices should not be mounted on hinged or removable access panels. 11. Connection - Circuit protection devices should be connected to the load side of the supply circuit disconnection means. 11.3.7.c. Clip-type fuse holders and fuses should meet the following recommendations: 1. Use - As branch circuit protection. 2. Rating - Fuse holders should be rated for the amperage and voltage of the fuse and should be a minimum of 250V for 120/208 V circuits 600V for 277/480 V circuits 3. Enclosures - Fuses should be installed within a NEMA-type enclosure that has positive deenergization capability before opening. 11.3.7.d. Panel-mounted fuse holders and fuses should meet the following recommendations: 18 S2-93 Application Guide Revision 2.0

1. Shock-proof fuse holders should be used. 2. Use - 120 V, 15 A or less, single-phase circuits (less than 2 kVA). 3. Rating - Minimum of 125 V. 4. Wiring - Fuse holders that have exposed metal when the cap is removed (nonshockproof fuse holders) should have the line conductor connected to the end terminal and the load conductor connected to the side terminal. 5. Disconnect - Provision should be made for deenergization of the fuse during replacement. 6. Mounting - Fuse holder should have a D-punched hole, or equivalent, so that it will not rotate while the fuse is being removed. Note: In-line fuse holders are not desirable for installation in equipment. 11.3.7.e. Circuit breakers and circuit protectors are not designed and/or listed for the same function. Circuit breakers should meet the following: 1. Use - Short-circuit and/or over-current protection in any circuit. 2. Method of Operation - Should be manually operable and should clear a fault even if the handle mechanism were held closed. 3. ON and OFF indication - Should clearly indicate ON (closed) and OFF (open) positions. 4. Mounting position - Should be mounted on a vertical surface with handle up for the ON position. EXCEPTION: If horizontally mounted in a commercial distribution panel, the handle may be toward the center for the ON position. 5. Disconnect - Should open all ungrounded conductors if a fault occurs in any phase. 6. Installation - The supply conductors should be connected to the line side of the breaker. 11.3.7.f. Circuit protectors (circuit interrupters) are recognized as component appliance controls and are not interchangeable with circuit breakers because they may not provide short-circuit protection. Circuit protectors should meet the following recommendations: 1. Use - Supplementary (branch circuit) overcurrent protection in data processing and other non-industrial application. 2. Method of Operation - Should be manually operable and should clear a fault even if the handle mechanism were held closed. 3. ON and OFF indication - Should clearly indicate ON (closed) and OFF (open) positions. 4. Mounting position - Should be mounted on a vertical surface with handle up for the ON position. 5. Disconnect - Should open all ungrounded conductors if a fault occurs in any phase. 6. Installation - The supply conductors should be connected to the line side of the protector. 11.3.8.

11.3.8.a. EXCEPTION 3: Multiple units mounted separately with no shared hazards and without interconnecting circuits with hazardous potentials or energy levels or other potentially hazardous conditions may have 1. Separate sources of power. 2. Separate supply circuit disconnecting means. 3. Separate emergency off (EMO) circuits if they are clearly identified. 11.3.9. 11.3.9.a. SEMI S2-93 reference to NFPA 79 2-7 is now outdated. The s numbering system in NFPA 79 has changed. Use the most current revision. 11.4. 11.4.a. Whether integrated within the footprint or not, UPS should comply with section 11.4. 11.4.b. Any UPS over 240 VA should comply with SEMI S2-93, section 11.1. 11.4.c. Any UPS greater than 240 VA should comply with section 12 recommendations for emergency shutdown. 11.4.1. 11.4.1.a. Output of the UPS is defined as the UPS power to the tool.
11.4.1.b. The last sentence should state, The emergency off circuit and the main equipment breaker should be a hardware-based fail-safe circuit. 11.4.2 11.4.2.a. identified. 11.4.4. 11.4.4.a. Separate is defined as UPS wiring will not be routed with any other equipment wiring. Physically isolated is defined as properly enclosed and clearly
12.
Emergency Shutdown
Note: External EMO interfaces should be considered where the equipment is likely to be integrated and share hazards with other assemblies in the end-user facility. s 12.1. EXCEPTION: The following sentence should read: The component installation manual, however, should provide clear instruction to the system user to connect the component to the equipment emergency off circuit. s Note: An example of an exception is an RF generator or spin dryer.
12.1.
12.2. Note: For examples of circuit design, refer to Figures 25 through 28 of Appendix Supplement A.2: Typical Circuits. 12.2.a. EMO controls in single-phase equipment operating at 120 V or less, with up to 2.4 kVA main protection, where hazards are primarily electrical may be operated at line voltage. These controls should comply with one of the following:

The main supply disconnect switch may be used if it is readily accessible to the equipment operator, clearly labeled, and clearly indicates ON/OFF status. A dedicated EMO switch may be used. 12.4. 12.4.a. Refer to SEMI S2-93, section 11.4.1. 12.4.b. Additional EMO buttons should be provided when any operation or maintenance location is greater than 3 meters (10 feet) from a button or there is a physical barrier (e.g., wall, floor, service panel) between work locations and a button. 12.4.c. The EMO should be located in an area not subject to accidental activation. If a button guard is installed, its diameter should be no less than 75mm (3 inches) with the button recessed no more than 3mm (0.125 inches) from the front of the guard, or equivalently configured to allow for palm activation. 12.4.d. The switch should not be used in place of the stop (OFF) switch. 12.4.e. The switch should take precedence over all other controls. TEST: See Appendix A section 6.5.1 bullet 4 on page 79. 12.4.f. For labeling requirements, refer to NFPA 79 which requires a yellow background for EMO. 12.5. 12.5.a. Self-latching EMO buttons should be used. Lockable types will require approval by the end-user. 12.6. 12.6.a. SEMI S2-93 reference to NFPA 79, Chapter 11 is outdated. The numbering s system in NFPA 79 has changed. Use the most current revision. 12.6.b NOTE NFPA 79 allows red push buttons for emergency stop, stop, and off. These buttons should be clearly distinguishable from EMO.
13.
Heated Chemical Baths
Note: Clause 3 of SEMI S3 also addresses external tank heaters and heat exchangers. 13.a. Other heating system designs should also consider the listed applicable criteria.
14.
Ergonomics / Human Factors
14.a. See Part Two, Application Guide for SEMI S8-95 for direction on ergonomics considerations in equipment design. Note: A course has been developed to help equipment manufacturers implement ergonomic design criteria. For further information, contact SEMI. 14.5. 14.5.a. A machine, when in a standalone condition, should not overbalance when tilted in each direction to an angle of 10 degrees from its normal position (IEC 1010-1). (See Figure 14.5.1.)

14.5.b. A machine should not tilt when a force equal to 20% of the machine weight is applied (see Figure 14.5.2) in either a horizontal or vertical direction at the point of maximum moment when hinged frames, drawers, and so on, are extended for service in their most unfavorable positions.
10
F=.2w
No Tilt
F=.2w
Figure 14.5.1 Maximum Machine Tilt
Figure 14.5.2 Maximum Moment Force Tilt
15.
Robotics and Automation
15.a. Robot E-stops, if used, should be labeled and clearly distinguishable from the EMO. 15.b. EMOs should place the equipment in a safe standby condition and should not increase the hazard level.
16.
Hazard Warning
16.a. ANSI Z535 is the preferred standard to be used. 16.b. Shielding Surfaces exceeding the limits in Table 16 or temperatures below 0C should be shielded and labeled appropriately.

Table 16 Surface Temperature Limits in C
Material Type Operator Accessible Areas Hand-held or Carried Will Touch2 May Touch
3 1
Highly Conductive
(most metals)
Moderately Conductive
(glass)
Slightly Conductive
(most plastics)
50 55 70
55 65 75
65 75 90
Service Areas Will Touch2 No Need To Touch4 55 80 65 100 75 120
1. Operator contact duration is in excess of five seconds. 2. Operator or service personnel will touch the surface for less than 5 seconds at a time. 3. Surfaces where inadvertent contact is possible. 4. Surfaces not likely to be touched during normal operation.
17.
Earthquake Protection
17.2.a. Tie-ins and attachments should be capable of accommodating the expected displacement without increasing the hazard.
17.2.
18.
Documentation
18.a. The equipment manufacturer or evaluator should provide an evaluation (the S2 report) with detailed documentation demonstrating compliance with each section of S2. 18.b. Where the phrase upon request is stated throughout this section of SEMI S2-93 regarding documentation, such documentation is required. 18.1. 18.1.a. The equipment owner is defined as equipment engineer. 18.2 18.2.a. Procedures that should be documented for the end-user include the following: Lockout/tagout procedures for the specific equipment (including proper gas purging and capacitor discharge procedures). Energized work procedures (e.g., maintenance and calibration, or robot programming). Calibration and maintenance of leak, gas, and fire detection equipment and suppression systems. Confined space entry procedures (if applicable). 18.3. 23 Revision 2.0 S2-93 Application Guide

18.3.a. The explanatory diagram should include a process flow diagram. 18.3.b. Equipment manufacturers should provide a written response to their S2 reports when noncompliance is identified. The phrase Upon request in this section of SEMI S293 means required. See the Preface and section 4 of this guidebook for elaboration. 18.4. 18.4.a. (See Section 20.2)should read (see sections 20.2, 20.4, and Application Note 4 of SEMI S2-93). 18.4.b. Frequency and level of non-ionizing radiation. (See Section 8.2.) should read Frequency and level of non-ionizing radiation. (See section 8.2 and Application Note 5.)
19.
Fire Protection
19.2.a. The overall expectation is that flammable or combustible materials should not be used without adequate justification, and whenever they are used, they should not exceed the parameters stated in 19.2 of SEMI S2-93. (Refer to NFPA 318.) 19.2.1. 19.2.1.a. UL 94V-0 is recommended.
19.2.
Note: It should not be assumed if the material meets UL 94V-0 that it is noncombustible. 19.3.1. 19.3.1.a. All enclosures should be evaluated for fire protection systems.
19.3.1.b. All fire protection systems, as well as individual components, should be appropriately listed or recognized by an accredited testing lab, and must meet appropriate NFPA standards. 19.3.1.c. The equipment manufacturer should provide appropriate design calculations for all fire protection systems.
20.
Environmental
20.1.a. In the second paragraph, the words parameters are should be substituted for the term chemistry. 20.1.b. While the equipment manufacturer cannot foresee or control how a piece of equipment will ultimately be used by an end-user, the equipment manufacturer is expected to respond to this section. (For example, the review of a metal etch tool would be expected to include a basic profile and baseline, keeping common manufacturing processes in mind.) For the baseline process, the manufacturer should specify process parameters including, but not limited to, chemicals, feed rates, temperature, process times, pressure, and RF power. 20.2.1. 20.2.1.a. Upon request means required. as
20.1.
20.2.1.b. It is expected that this information should be supplied during the equipment selection process unless otherwise requested.

20.2.1.c. The following statement should be used in place of the last sentence of section 20.2.1 of SEMI S2-93: Permit application information provided by the equipment manufacturer should include chemical requirements, waste water effluent characterization, hazardous waste generation rates, solid waste generation rates, exhaust effluent characterization, and on-board effluent control technologies. This information includes the percentage of process chemical that actually reacts or is deposited on the product or the percentage of the input chemical that directly contributes to the desired result. The equipment manufacturer is encouraged to use the best available technology in generating this information. Refer to Application Note 4 in SEMI S2-93 . 20.2.2. 20.2.2.a. Spill prevention features to be designed into the equipment include secondary containment, seals, automatic shutoff devices and alarms, segregation of incompatible chemicals or wastes, and features that enhance ease of maintenance, cleaning, loading/unloading, and filling and emptying baths/chambers. Documentation of spill prevention features should address gases, liquids, and solids. 20.2.2.b. Spill containment should be adequate to contain effluents resulting from a single-point equipment or operator failure. 20.2.3. 20.2.3.a. The equipment manufacturer should include the MSDS(s) for these chemicals with the documentation. 20.2.3.b process. Contamination by process is interpreted as contamination from the
20.2.3.c. Potential sources of hazardous materials or materials likely to be contaminated during processing should be identified in the S2 report. 20.2.3.d. Equipment design should minimize the change-out of peripheral equipment maintenance fluids in both frequency and volume. 20.2.4. 20.2.4.a. It is also considered the manufacturer responsibility to be familiar with s local requirements; however, the manufacturer may work with the end-user to address these requirements and these criteria (see 4.2.a of this guide). 20.2.5. 20.2.5.a. The term environmental engineer should be defined as a qualified ESH professional. The ESH professional should review the S2 report provided by the equipment manufacturer to ensure that site-specific requirements are met. 20.3.2. Note: Deionized water use should be included in the chemical minimization strategy. 20.3.3. 20.3.3.a. less hazardous material is interpreted as least hazardous material.
20.3.3.b. The term process chemistries should be defined as process parameters (see 20.1.a of this guide). 20.4.1. 20.4.1.a. The terms by-products, emissions,and effluents include gases, vapors, mists, and particulates from processing equipment. Consideration should be given to byproducts that might be formed when chemicals are present, taking into account possible reactions of multiple chemicals used in the equipment. Effluent 25 Revision 2.0 S2-93 Application Guide

characterization includes both species and quantity of emissions and should be reported in standard units of measure (e.g., ppm). See Application Note 4 in SEMI S2-93 for an example list of effluent constituents. The supplier should document the test methods used to characterize the emissions. Characterization includes specifying the average and maximum emissions that can be expected during normal use, idle time, and maintenance operations. 20.4.2. 20.4.2.a. 20.4.3. 20.4.3.a. This evaluation of control/abatement alternatives should include, at a minimum, reviewing current best practices and collecting available test data on their efficiencies. 20.4.3.b. Control devices may include mist eliminators or condensers to collect liquid from heated chemical baths that condenses in cooler exhaust ductwork and particulate traps behind furnace chambers or combustion devices. Recycling of effluent should be considered whenever possible. 20.4.3.2. 20.4.3.2.a Refer to regulated ODSs, PFCs, and CFCs. To the extent possible, the process should also be designed to operate without the use of perfluorocompounds (PFCs) such as CF4, C2F6, NF3, C3F8, CHF3, and SF6 (see comments on Application Note 4 in this guide). PFC use and emissions will likely be more strictly controlled in the future on an international level. The use or creation of global warming gases (e.g., CO2, NOX, SO2) should also be minimized or eliminated if possible. 20.4.3.3. 20.4.3..3.a. Provisions should be made for separation of exhaust or waste streams in cases where emissions or effluent are chemically incompatible, individually recyclable, or require separate abatement/treatment procedures. 20.5. 20.5.a. as to terms of should be defined as depending upon. 20.6. 20.6.a. Equipment sinks, plenums, and waste lines should use double-contained lines, partitions, or other design features to prevent the mixing of incompatible waste streams such as solvents and water. 20.6.b. Effluent discharge of regulated substances should be avoided or minimized. Pollution prevention activities may include: Segregating waste streams for the purpose of recycling or reclaiming. Increasing process efficiencies/optimization. Reducing material usage during idle time. (See 20.3.3 of this guide) 20.6.1. 20.6.1.a Design should encourage central collection instead of local collection of chemical wastes. 20.6.3. Exhaust flow rates should be optimized/minimized (see 10.1).

20.6.3.a. This section applies to cases of equipment point-of-use collection. 20.6.3.b. Level detectors, leak detectors, and related alarms should be installed in equipment. See Appendices B and C of this guide for direction on leak detection. 20.6.4. 20.6.4.a. Equipment should be designed such that maintenance or repair results in a minimized amount of waste and involves using the least hazardous cleaning materials. The use and disposal of batteries should also be minimized. 20.6.5. 20.6.5.a. 20.6.5.b. clean up or disposal is interpreted as decontamination and disposal. Equipment design should incorporate life-cycle considerations such as
Refurbishment/reuse Modular construction 20.7. 20.7.a. All secondary containment should incorporate appropriate gas detection, liquid sensors, and alarms. If incompatible chemicals are used in the same piece of equipment, secondary containment should be designed to ensure that these chemicals cannot be combined. Automatic shutoff capability for bulk chemical delivery systems should be considered (refer to 6.2.c). 20.7.b. Secondary containment should be capable of being connected to collection/treatment system(s). These systems should be equipped with an alarm.
20.7.c. The Uniform Fire Code (UFC) requires that secondary containment be capable of holding at least 110% of the volume of the largest single container.
Note: Refer to the Uniform Fire Code and the Machinery Directive (European document).
S2-93 APPENDIX 1 TERMINOLOGY

EMO - Emergency Off Circuit. When activated, an EMO places the equipment into a safe shut
down condition and will restrict all hazardous potentials to the main power enclosure. This is a state in which all hazardous voltage has been removed from the equipment, all hazardous production materials flow has been stopped, any radiation sources de-energized or totally contained, any capacitors grounded, all moving parts stopped, and internal and external heat sources shut off, so that the equipment presents minimum hazard to personnel or the facility. The term EPO previously used synonymously with EMO is no longer used in reference to equipment.
Vacuum pump enclosure a. Equipment - That which is used in manufacturing, developing, and testing
semiconductor devices. See 1.d of this guide. b. Heat exhaust refers to an exhaust system intended solely for the removal of heat from equipment in which the exhaust stream is not treated.
Excess Flow Control Rupture is defined as a failure in a piping system which results in excess flow. See
Excess Flow Valve below.
Excess Flow Valve 27 Revision 2.0 S2-93 Application Guide

Mass flow controllers (MFCs) must not be used as positive shutoffs. A bellows/diaphragm valve is a typical positive shutoff.
Hazardous Voltage Hazardous voltage is considered to be any voltage exceeding 42.4 V peak, 30 V RMS, 60 V DC, 240VA or, in wet areas, 10 V AC or DC.
Risk Refer to SEMI S10 Safety Guideline for Risk Assessment Methodology.
Safe -Property
is not intended to include products in process.
S2-93 APPENDIX 3 SUPPLEMENTAL INFORMATION

Application Note 4: Environmental Checklist:
The equipment manufacturer is expected to provide this information. This information may be based on the equipment manufacturer baseline process (see sections 6.4, 6.6, and s 20.2.1 of this guide). The equipment manufacturer should supply information on specific test methods so specific testing can be conducted by the end-user. Item 3: Note: List the process effluents in quantities and rates generated under baseline process conditions, and specify the effluent destination immediately downstream of the tool, if known. Item 6: In addition to those chemicals listed in SEMI S2-93, the list below should also be evaluated. For all air emissions, determine the presence of and quantify chemical compounds found in the exhaust stream using, at a minimum, the list below.
Chemical List
Note: The following list is not all-inclusive. The equipment manufacturer is expected to test for other chemicals as applicable. In addition, concentrations of the substances on this list should be provided, based on testing under controlled conditions. Actual testing is preferred using approved, standard testing methods (e.g., EPA) in lieu of data extrapolation; however, if data extrapolation is necessary, the basis for any concentrations given should be documented. The equipment manufacturer should recommend the effluent monitoring technique considered optimum for the particular tool to enable the user to perform future testing if necessary. Include in the results a mass balance analysis that accounts for the percentage of the feed chemicals that is emitted in the exhaust stream. Current approved analytic methods should include FTIR and MS (these methods will be frequently updated).

Volatile organic compounds:
acetone butyrolactone chlorobenzene citrus terpene solvent ethyl acetate glycol ethers hexamethyldisilazane (HMDS) isopropyl alcohol morpholine n-butyl acetate n-methyl-pyrrolidone propylene glycol monomethyl ether acetate (PGMEA, 1-methoxy-2-propanolacetate) VOC-containing resins xylene
Others:
ammonia (NH3) arsine (and its oxides) (AsH3) boron trichloride (B Cl3) bromine (Br2) bromine chloride (BrCl) carbon dioxide (CO2) carbon monoxide (CO) chlorine (CL2) phosgene (COCl2) carbonium fluoride (COF2) cyanide diborane (B2H6) heavy metals, e.g., copper, lead, zinc, cadmium hydrogen bromide (HBr) hydrogen chloride (HCl) hydrogen fluoride (HF) dichlorodisilazane family (N2SiCl2) nitrous oxides (NOx) particulate matter (PM) phosphine (and its oxides) (PH3) silicon tetrafluoride (SiF4) chlorosilane (SiHxCly) fluorosilane (SiHxFy) silicon tetrachloride (SiCl4) sulfuryl fluoride (SOF2) sulfur dioxide (SO2) titanium tetrachloride (TiCl4)
PFCs:
perfluoroethane (C2F6) sulfur hexafluoride (SF6) carbon tetrafluoride/perfluoromethane (CF4), tetrafluoromethane, freon 14 nitrogen trifluoride (NF3) perfluoropropane (C3F8) trifluoromethane (CHF3)
Appendix A
Electrical and Mechanical Design Criteria

This appendix consists of a set of supplemental design criteria to assist in the electrical and mechanical design of semiconductor manufacturing equipment. It is intended to enhance and expand upon topics addressed throughout the main body of the guidebook. It is strongly recommended that the equipment manufacturer review the contents of this appendix for applicability to the equipment design in question.
The safety philosophy set forth in these guidelines is that potential hazards in the operation and maintenance of equipment be identified and engineered out of equipment during the design and construction phases. Where identified hazards cannot be eliminated, no single-point failure or operational error should allow immediate exposure of personnel, facilities, or the community to hazards or directly result in injury, death, or equipment loss. All equipment should be failsafe or of a fault-tolerant design.
1.0 General
1.1 Diagrams
Electrical system diagrams should be provided. They should include, but are not limited to, the following information: 1.1.1 Conductors. Drawings should show 1. All conductors. 2. Conductor color, size, and identification. 3. Multiconductor cables with the color code used, the number of conductors, and the AWG or metric size (for example, 20/#18.). 1.1.2 Components (Devices). Components should be 1. Identified on the drawing to match the equipment. 2. Shown with all wiring connections. Note: Internal wiring of subassemblies may be shown on separate drawings. 1.1.3 1.1.4 1.1.5 1.1.6 1.1.7 1.1.8 Terminals. Terminal boards and terminal connections should be identified. Contacts. Contact symbols should be shown with all utilities off and the equipment at its normal starting position. Thermal Overload. The thermal overload location in power and/or control circuits should be shown. Function. The function of all switches and control devices should be shown. Motors. Size (watts/horsepower) and function should be indicated. Power Recommendations. Supply voltage, phase, frequency, and amperage should be shown.
Appendix A Electrical and Mechanical Design Criteria
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1.1.9 Symbols. The symbols shown in Supplement A.1 are standard National Equipment Manufacturers' Association (NEMA) electrical symbols. For symbols not shown, refer to ANSI/IEEE 315. 1.1.9.1 Unique Symbols. Unique symbols should be identified and explained. 1.1.9.2 Schematics. The electrical schematic should be drawn between vertical lines that represent the source of control power. All control devices should be shown between these lines. Pilot lights and coils of control devices should be shown connected to the right vertical line (grounded). All contacts should be shown between the coils and the left vertical line (ungrounded). See Figure 28 in Supplement A.2. 1.1.10 Component Specifications. Circuit breakers, transformers, fuses, and so on, should indicate applicable values (for example, interrupt capacity, amperage, voltage, and kVA). 1.1.11 Convenience Outlets. Should be represented by a NEMA configuration indicating voltage, amperage, and grounding. See Figure 3 and Figure 4. 1.1.12 Grounding (Earth). The main grounding conductor and all component grounding conductors should be shown. 1.1.13 Calibration Points. All test points requiring power for tests or adjustments should be shown. 1.1.14 Design Review. All designs (diagrams) should be submitted for concept approval before start of build and during build when requested by the end-user.
1.2
Labels
Warning Signs. Warning signs are expected to identify and locate potential electrical and mechanical hazards. The need for such warnings is particularly significant when The hazard may not be immediately apparent. Personnel may assume that there is no hazard when, in fact, one exists. The hazard may exist only under a certain set of conditions and not otherwise. 1.2.1.1 Hazard Warning. Nonservice personnel should be warned of the presence of possible hazards in service areas. A sign mounted on a structural member of the machine warning personnel when there is potential exposure to chemical, electrical, thermal or mechanical hazards. Refer to SEMI S1 for guidance in proper signage. 1.2.1.2 Hazardous Potential Warning. Hazardous potentials (other than line voltage) above 250 V AC or DC should be identified by a prominent sign located near the energized parts. The sign applicable to the highest voltage present should be used. 1.2.1.3 Line Voltage Warning. Terminals with hazardous potentials present after the supply circuit disconnecting means is placed in the OFF position should be identified. The sign should read "LINE VOLTAGE PRESENT WITH MACHINE POWER OFF", or "LINE VOLTAGE ALWAYS PRESENT." The sign should be placed inside the enclosure adjacent to the terminals.
1.2.1
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1.2.2 Main Control Enclosure. A label indicating the following information should be installed near the "SUPPLY CIRCUIT DISCONNECTING MEANS": Voltage (V). Amperage (A). Phase (pH). Frequency (Hz).
Note: On multi-phase equipment, insert the measured operating amperage value of the highest phase. 1.2.3 Circuit Protection Devices. The rated current (in amperes) of circuit protection devices should be visibly indicated near the device. Fuses should also indicate type. Temperature. Surface temperatures exceeding the limits of Table 16 in section 16 of this guide should be labeled. Components (Devices). Devices should be identified adjacent to (not on) the component with the same designation as shown on the diagram(s). Functions. The function of each control station component should be identified on or adjacent to the component. Motors (186 Watts (1/4 HP) or Larger). Motors should display Direction arrows, where applicable. "THERMALLY PROTECTED" or "TP," where applicable. Manufacturer's nameplate. 1.2.8 Radio Frequency (RF). Equipment that requires FCC certification should be clearly indicated by FCC Certification labels. RF labels. High Voltage labels (maximum power output). 1.2.9 Weight. Equipment, designed for removal to service, exceeding 16 kg (35 lb.) should be clearly labeled with the approximate weight.
1.2.4 1.2.5 1.2.6 1.2.7
1.2.10 Cables. Multiconductor (jacketed) cables containing voltages in excess of 24 V should be marked showing their voltage, type, size, and temperature rating or manufacturer's part number. See section 3.4 of this guide. 1.2.11 Voltage (Nominal). Terminal boards and junction boxes located on units outside recognized power compartments, with potentials greater than 24 V, should be labeled to clearly indicate the voltages present.
1.3 Nominal Voltages

Nominal voltages for circuits are 24 V AC or DC, 120/208 V AC and 480 V AC. Actual voltages may vary due to line variations and/or component tolerances.
1.4 Equipment Power Recommendations

To maximize efficiency, equipment should be designed for 480 V or 208 V, 3 PH power whenever feasible. Figure 23 and Figure 24 (see Supplement A.2) and Table 1 (below) are provided as guides for determining equipment power recommendations.
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1.5 Mechanical Execution of Work
Components, conductors, and equipment should be installed in a neat and workmanlike manner.
Table 1 Equipment Power Recommendations

Equipment Power (kW) Recommendations Recommended Voltage (V) & Phase (pH) Approx. Amperage Range (A)
0 kW - 3 kW 0 kW - 5 kW 3 kW - 30 kW 15 kW & Over
120 V, 1 pH 208 V, 1 pH 208 V, 3 PH 480 V, 3 PH
0 A - 25 A 0 A - 25 A 10 A - 80 A 20 A & Over
2.0

Components (Devices)
Alarms and timers Boxes and enclosures Circuit protection devices Conductors, cords and cables Connectors, plugs and receptacles Electromagnetic compatibility (EMC) filters Fuse holders and relay sockets Ground buses Heating units Indicating lights Magnetic devices Power supplies Switches Terminal boards and lugs Transformers and ferroresonant regulators Tubing and sleeving
Examples:
2.1 General Recommendations

2.1.1 2.1.2 2.1.3 Approval. Components should be approved for the purpose and be listed or labeled by a nationally recognized testing laboratory. Installation and Use. Components should be installed and used according to any instructions included in the listing or labeling. Examination. Components should be suitable for the application and should be examined for 1. Mechanical strength and durability. 2. Heating effects under normal and abnormal conditions. 3. Arcing effects. 4. Classification by type, size, voltage, current capacity, frequency, and specific use.
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5. Any other factors which contribute to safeguarding persons from hazardous exposures. 2.1.4 2.1.5 2.1.6 2.1.7 Protection. Components should be protected so as not to exceed their maximum amperage rating by circuit breakers, circuit protectors or fuses. Temperature. Components should not be exposed to temperatures exceeding 90% of their maximum temperature rating. Marking. Component designation should be plainly identified adjacent to the component with the same designation as shown on the diagram(s). Mounting. Components should be mounted according to the following recommendations: 1. Components should be securely mounted. 2. Components should be located for ease of maintenance. 3. Components requiring periodic adjustment should be readily accessible without disassembly. 4. Components requiring adjustment, calibration, testing, or service with power on should have external test points or insulated potentiometer extensions to minimize exposure. 5. Components should not be mounted on hinged or removable covers or doors. 2.1.8 Shields. Shield recommendations are as follows: 1. Shields should be of sturdy construction and should be provided with holes for inserting test probes. 2. Shields should not support combustion. 3. Shields should be easily removed and replaced by service personnel. 4. Shields should be securely mounted independently of components so that removing a shield will not loosen components or devices. 5. Electrical shields should be nonconductive. 6. Components having hazardous potentials or hazardous energy levels and mounted on horizontal surfaces should be shielded. 7. Components having hazardous potentials or hazardous energy levels and mounted on vertical surfaces may require shields. See section 6.2, Service Personnel Protection. 8. Lacquer, enamel, sealing compounds, paper, or cotton should not be used in place of a shield. 2.1.9 Terminals. Terminals should comply with the following: 1. There should be no unshielded terminals having hazardous potentials or hazardous energy levels external to control enclosures, compartments or junction boxes. 2. Terminals should be sized and used according to Table 2. 3. Terminals on terminal blocks should be numbered in ascending order from top to bottom or from left to right. 4. There should not be more than two conductors per lug and two lugs per termination.
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Exception: Motor leads and flat, bare metal jumpers. See Figure 1 (below). 5. Terminals should retain conductor strands without damaging the conductor. 6. Approved terminal lugs should be used to connect conductors to component terminals which are not equipped with wire clamps, pressure plates or equivalent means of retaining conductor strands. (See section 2.2.)
Table 2 Maximum Amperage of Screw Terminals

Screw Size
Metric NC/NF
Amperage (Terminals per Screw)

One Two
Maximum Conductor Size

AWG mm
2
M3 -M3.5 M4 -M5 -M6 M8
-5-40 6-32 -8-32 10-32 12-24 1/4-20 5/16-18
10.0 10.5 14.0 16.0 21.0 35.0 49.0 60.0 100.0
7.0 7.5 10.0 11.5 15.0 25.0 35.0 45.0 70.0
14 14 12 12 12 10 8 6 2
1.5 1.5 2.5 2.5 2.5 4.0 6.0 10.0 35.0
Note: Conductor sizes do not represent exact dimensional equivalents.
Figure 1. Typical Terminals
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2.2 Terminal Lugs
2.2.1 Recommendations. Terminal lugs should 1. Be rated for the circuit amperage. 2. Be sized for both the screw and the conductor. 3. Be used on untied, stranded wire only. 4. Be securely crimped with appropriate tool. 5. Have insulated barrels. Exception: Grounding conductors or conductors larger than 8.35 mm2 (#8 AWG). 2.2.2 Applications. Terminal lugs should be applied according to the following: 1. Ring tongue: Desired for all terminations.
2. Flat spade: NOT desired for terminating hazardous potentials, hazardous energy levels or for grounding.
3. Flanged spade: Not desired for grounding except on a captive screw.
4. Female tab: Desired only for terminations to fixed male tabs on components. NOT desired for grounding. Should be fully insulated.
2.3
Control Switches
2.3.1 General Recommendations. Control switches should meet the following recommendations: 1. Voltage is restricted to 120 V, maximum. 2. Amperage is restricted to the maximum rating of the device. 3. Exposed parts, including mounting hardware, should be grounded, of insulating material, or be adequately covered by insulating material.
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4. Switches should be labeled for their function. 5. Switch function should comply with section 6.3 2.3.2 Push-Button Type Switches. Push-button type switches should meet the following recommendations: 1. Push-button colors should comply with Table 3. 2. Push-button head types should comply with Table 3. Example:
Flush 2.3.3
Extended
Mushroom
Lever Type Switches. Lever type switches should meet the following recommendations: 1. Snap Switch: Used for lighting control; not normally used in equipment.
2. Toggle Switch: Used for power control, 120 V or less, 15 A or less.
3. In Line Switch: Not desired.
Table 3 Push-button Color Code

Color Black or Green Red Red Red Yellow Function Start or Power On Stop or Power Off Emergency Off Emergency Stop Emergency Return Head Type Flush or Recessed Extended Mushroom Extended Mushroom
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2.4 Indicating Lights and Lighted Switches
2.4.1 General Recommendations. Indicating lights and lighted switches should meet the following recommendations: 1. Voltage is restricted to 120 V, maximum. 2. Switches should be installed in 24 V circuits or have voltage-reducing devices in the light assembly that limits bulb voltage to 24 V maximum. Exception: Neon lights. 3. Where multiple bulb socket assemblies are used, the bulbs should be rated for not more than 24 V and should be connected in parallel. 4. Two terminal lamp sockets should be wired with the shell terminal connected to the grounded conductor. 5. Switches should be labeled for their function. 6. Exposed parts, including mounting hardware, should be grounded, of insulating material, or be adequately covered by insulating material. 7. Lens color should comply with Table 4. 2.4.2 Lighted Switches. Lighted switches should comply with both Table 3 and Table 4.
Table 4 Indicating Light Color Code

Color Red Function Emergency or Warning (for example, Alarm, Overload, Limit Exceeded). Satisfactory, Ready, Go or Proceed (for example, Power on, Cycle Complete) Status, Interrupt, Stop (for example, Motors ON, Heaters ON.) Information (for example, AC ON, AC OFF, Power OFF, Auto Select) Indication Danger, abnormal, unsafe or wrong condition Prerequisite, safe, start, test or right condition. Attention, caution, standby, or alert condition. Normal conditions other than wrong, right or alert.
Green
Yellow (Amber)
White
Notes: 1. Other lenses may be any color except red. 2. Green may be used when white is not available. 3. Flashing indicating lights may be used when the application requires a more compelling indication.
2.5
Electrolytic Capacitors
Capacitors containing polychlorinated biphenyl (PCB) should not be used. Note: Polarized tantalum electrolytic capacitors may explode and/or ignite when reverse wired. 2.5.1 Safety Vent. Capacitor venting recommendations: 1. Capacitors greater than 25.4 mm (1 in.) in diameter or capable of storing more than four joules should be vented.
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2. The capacitor vent should be unobstructed for a minimum of 5.1 mm (0.2 inches). 3. Capacitors mounted horizontally should have vent holes placed in the upper quadrant (9, 12, 3 o'clock position). 2.5.2 Protection. Capacitor shielding recommendations: 1. Protection from venting or rupture should be provided by mounting or shielding capacitors so that vapors or debris will not be hazardous to personnel. 2. Terminals should be protected from shorting by tools. 3. Lacquer and sealing compounds should not be relied upon to provide protection. 2.5.3 Bleeder Resistor. Bleeder resistor recommendations: 1. A bleeder resistor should be provided if operating potential exceeds 60 V or stored energy exceeds 20 joules. 2. Under no load condition, the resistor should reduce voltage to less than 60 V and stored energy to less than 20 joules in 10 seconds or less. 2.5.4 Energy Calculation. The formula for energy calculation is J = 1/2 CE2 where: J = energy in joules (watt-seconds). C = capacitance in farads. E = DC voltage in volts. Inserting values in the energy formula gives the maximum allowable voltage and/or capacitance to limit the stored energy.
2.6 Transformers
This section applies to transformers operating at 600 V or less and installed as field replaceable components. 2.6.1 2.6.2 Location. Transformers should be securely fastened, protected from physical damage, and accessible for inspection and service. Protection. All ungrounded conductors in the INPUT (primary) and OUTPUT (secondary) should be protected by an overcurrent device rated at not more than 125% of the transformer full load current.
Note: Deviations should comply with ANSI/NFPA 70, Article 450-3(b). 2.6.3 Selection and Use. Table 5, Table 6, and Table 7 are provided as aids for proper selection and use of transformers and associated overcurrent protection devices. Marking. Each transformer should have a nameplate indicating manufacturer, rating, frequency, input voltage, and output voltage(s). Ventilation. Ventilation should be adequate to dissipate the transformer full load heat losses without creating an excessive ambient temperature. Isolation. Transformers should complete isolate the input and output windings. Auto Transformers. Auto transformers should not be used to develop a control circuit from a power circuit because they do not provide complete electrical 39 Revision 2.0 Appendix A Electrical and Mechanical Design Criteria
2.6.4 2.6.5 2.6.6 2.6.7

isolation between input and output windings. They may be used within control circuits or within power circuits with the following restrictions: 1. Control Circuits Auto transformers may be used for varying the voltage if the output circuit has a grounded conductor that is electrically connected to the grounded conductor of the input circuit. 2. Power Circuits Auto transformers may be used for buck/boost applications that comply with ANSI/NFPA 70, Article 210-9 and do not raise or lower the voltage by more than 20%. 2.6.8 Isolated Power Systems. Isolated power systems have limited use in equipment. When used, they should meet the following recommendations: 1. Purpose To reduce noise by not referencing the output circuit conductors to ground. 2. Labeling The transformer and any components (devices) connected to the transformer output should be clearly labeled to warn operators and service personnel of the ungrounded condition. 3. Grounding All conductive metal should be effectively bonded to the equipment grounding conductor. 4. Ground Fault Detection Ground detection lights, a ground-fault circuitinterrupter (GFCI), or a line isolation monitor should be installed in the output circuit to indicate an isolation fault condition. 2.6.9 Guarding. All exposed hazardous potentials or hazardous energy levels should be guarded by shields or enclosures.
2.6.10 Bonding Conductive Metal. Exposed noncurrent-carrying conductive metal should be effectively bonded to the equipment grounding conductor as specified in section 4. 2.6.11 Output (Secondary) Grounding. The secondary(s) of transformers should be grounded (see Figure 2 below) and comply with the following: 1. 150 V or less The secondary of the transformer should have one of the conductors referenced to ground, at the transformer, with a grounding conductor. Exception: 1: Transformers feeding rectification devices. Exception: 2: Isolated power systems, see section 2.6, Isolated Power Systems. 2. Over 150 V single-phase The phase conductors should not be grounded. Exception: Transformers feeding common market equipment may have one output phase grounded provided that the secondary is isolated from the primary.
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3. Over 150 V multiphase The phase conductors should not be grounded. If the transformer is a WYE type, the center point of the secondary should be referenced to ground, at the transformer, with a grounding conductor.
Figure 2. Transformer Secondary Grounding
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Table 5 Full Load Current, Three-phase Transformers
kVA 3.0 4.0 5.0 6.0 9.0 15.0 20.0 22.0 25.0 30.0 37.5 45.0 50.0 60.0 75.0 208 V 8.3 11.1 13.9 16.7 25.0 41.6 55.5 61.1 69.4 83.3 104.1 124.9 138.8 166.5 208.2 240 V 7.2 9.6 12.0 14.4 21.7 36.1 48.1 52.9 60.1 72.2 90.2 108.3 120.3 144.3 180.4 380 V 4.6 6.1 7.6 9.1 13.7 22.8 30.4 33.4 38.0 45.6 57.0 68.4 76.0 91.2 114.0 480 V 3.6 4.8 6.0 7.2 10.8 18.0 24.1 26.5 30.1 36.1 45.1 54.1 60.1 72.2 90.2
Table 6 Full Load Current, Single-phase Transformers

kVA
0.050 0.100 0.150 0.250 0.500 0.750 1.0 1.5 2.0 3.0 5.0 7.5 9.0 10.0 15.0 20.0 25.0 30.0 37.5 45.0 50.0 60.0 75.0
24 V
2.08 4.17 6.25 10.4 20.8 31.3 41.7 62.5
120 V
0.4 0.8 1.3 2.1 4.2 6.3 8.3 12.5 16.7 25.0 41.7 62.5 75.0 83.3 125.0 166.7 208.3 250.0 312.5 375.0 416.7 500.0 625.0
208 V
0.2 0.5 0.7 1.2 2.4 3.6 4.8 7.2 9.6 14.4 24.0 36.1 43.3 48.1 72.1 96.2 120.2 144.2 180.3 216.3 240.4 288.5 360.6
240 V
0.2 0.4 0.6 1.0 2.1 3.1 4.2 6.3 8.3 12.5 20.8 31.3 37.5 41.7 62.5 83.3 104.2 125.0 156.3 187.5 208.3 250.0 312.5
277 V
0.2 0.4 0.5 0.9 1.8 2.7 3.6 5.4 7.2 10.8 18.1 27.1 32.5 36.1 54.2 72.2 90.3 108.3 135.4 162.5 180.5 216.6 270.8
380 V
0.1 0.3 0.4 0.7 1.3 2.0 2.6 3.9 5.3 7.9 13.2 19.7 23.7 26.3 39.5 52.6 65.8 78.9 98.7 118.4 131.6 157.9 197.4
480 V
0.1 0.2 0.3 0.5 1.0 1.6 2.1 3.1 4.2 6.3 10.4 15.6 18.8 20.8 31.3 41.7 52.1 62.5 78.1 93.8 104.2 125.0 156.3
VA INRUSH
240 575 950 2200 5000 11000 18000 24000
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Table 7. Transformer Summary
Protection Type (ex) Isolation (3 kVA) V/PH Pri. 120/1 208/1 208/3 480/1 480/3 120/1 208/1 277/1 480/1 208/1 277/1 480/1 208/1 277/1 480/1 480/3 120/1 240/1 208/3 Sec. 120/1 208/1 208/3 480/1 480/3 24/1 24/1 24/1 24/1 120/1 120/1 120/1 120/1 120/1 120/1 208/3 240/1 480/1 480/3 Ratio Ip:Is 1:1 1:1 1:1 1:1 1:1 1:5 1:8.7 1:11.5 1:20 1:1.7 1:2.3 1:4 1:1.7 1:2.3 1:4 1:2.3 2:1 2:1 2:1 I 25.0 14.4 8.3 6.3 3.6 8.3 4.8 3.6 2.1 4.8 3.6 2.1 14.4 10.8 6.3 3.6 25.0 12.5 8.3 Primary F A O O O O A O O O O O O O O O O A O O C P X X X X P X X X X X X X X X X P X X Secondary I 25.0 14.4 8.3 6.3 3.6 41.7 41.7 41.7 41.7 8.3 8.3 8.3 25.0 25.0 25.0 8.3 12.5 6.3 3.6 F A O O O O A A A A A A A A A A O O O O C P X X X X P P P P P P P P P P X X X X Color Code Pri. H-N B-W 2B-W 3B-W 2B-W 3B-W B-W 2BB-W 2B2BB-W 2B2BB-W 2B3B-W B-W 2B3B-W Sec. H-N B-W 2B-W 3B-W 2B-W 3B-W R-W R-W R-W R-W R-W R-W R-W B-W B-W B-W 3B-W 2B2B3B-
Control (1 kVA)
StepDown (3 kVA) StepUp (3 kVA)

Legend:
Formulas: Ep Is ---- = ---- or (Ep)(Ip) = (Es)(Is) Es Ip Ep = Primary Voltage. Es = Secondary Voltage. Ip = Primary Current. Is = Secondary Current. (E)(I) 1 PH: kVA = ----------1000 (E)(I)(1.73) 3 PH: kVA = ---------------1000
A = Acceptable. B = Black. C = Circuit Breaker. E = Voltage. F = Fuse. G = Ground. H = Hot Phase(s). I = Current. N = Neutral. O = Optional Fuses acceptable if not operator accessible P = Preferred. R = Red. W = White. X = Required.
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2.7 Plugs, Connectors and Receptacles
2.7.1 Typical Uses. Typical uses for these devices are as follows: 1. Attachment plugs and cord connectors are used on power attachment cords and cables. 2. Connectors are used for power distribution to components and subassemblies within the equipment or system. 3. Receptacles are used for Power distribution to black boxes to facilitate their replacement. Convenience outlets, when required, on the equipment. 2.7.2 General Recommendations. Attachment plugs, cord connectors, and receptacles should meet the following general recommendations: 1. Receptacles and cord connectors should not accept an attachment plug with a different voltage or current rating. Exception: a 20 A "T" slot receptacle may accept a 15 A plug of the same voltage. 2. The number of contacts should be the same as the number of connected conductors. 3. The grounding terminal should be used only for grounding purposes. 4. Female cord connectors should be used only to supply power to fixed male receptacles. Cord sets are permitted, but extension cords are not. 5. Designs should ensure that grounding reliability is maintained. 6. The grounded conductors should be terminated on the "identified" terminal of the device. The identified terminal should be white or stamped "W" or "WH." 7. The standard NEMA configuration should be used. See Figures 3 and 4. 8. Special configurations should comply with all the recommendations of this section. 2.7.3 Plugs and Connectors. Plugs and connectors should comply with the following: 1. Should be designed so that the grounding connection is made first and broken last. Exception: Nonhazardous potentials and energy levels. 2. Should have a nonconductive body or be internally grounded. 3. Should be of "DEAD FRONT" construction. 4. When disconnected, should not have hazardous potentials or energy levels on exposed contacts. 5. Power and control circuits should not be carried in the same plug or connector. 6. Input (line) and output (load) power circuits should not be carried in the same plug or connector. 7. Should be equipped with strain relief. See section 5.8, Strain Relief.
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8. Should be grounding type. Exception: When supplying power to double insulated equipment. See section 4.9, Exceptions. 9. Should be rated for not less than the amperage of the connected circuit. 10. All connectors should be keyed or otherwise identified to prevent misstating of similar connectors in adjacent areas. 2.7.4 Receptacles. Receptacles should comply with the following: 1. Voltage and current rating should not be less than that of the supply circuit. 2. When installed for convenience use, should be rated at not less than 15 A at 125 V. 3. When installed for power distribution, should not have a connected load exceeding 80% of its rating. 4. Should be grounding type specification-grade receptacles. 5. Should be enclosed. 6. Should be securely mounted to a vertical surface or to a horizontal surface with face plate down. 7. Should be accessible to service personnel. 8. Should be accessible without removing covers or opening doors when installed as a convenience outlet for operator use. 9. Should be protected by a ground-fault circuit-interrupter (GFCI) when installed in a damp or wet location (for example, hose wash-down area). 10. Should be under the control of the emergency off (EMO) circuit. 11. Faceplates should be flush with outer edges of the box. 12. Faceplate screws or faceplate screw holes should not be used for receptacle mounting unless other provisions are made to counteract the plug insertion pressure. 2.7.5 Temporary Power Taps. Temporary power taps should not be used for installation in/on equipment.
2.7.6
Multioutlet Assemblies. Multioutlet assemblies (strips) should comply with the following: 1. Should be listed or labeled by a nationally recognized testing laboratory. 2. Should contain specification grade receptacles.
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3. Should be grounded according to the recommendations in section 4, Grounding. 4. Should be a minimum size of 70 mm (2.75 in.) X 36.6 mm (1.44 in.) for NEMA receptacle installation (for example, wiremold #3000). 2.7.7 Boxes. Boxes should comply with the following recommendations: 1. All boxes should be suitable for their environment. 2. Boxes that are accessible to nonservice personnel should not have knockouts. 3. Boxes should be securely mounted. 4. Box size should be sufficient to allow free space for all enclosed conductors and devices. See ANSI/NFPA 70, Article 370. 5. Metal boxes should be grounded by the main incoming grounding conductor according to the recommendations in section 4, Grounding.
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Figure 3. NEMA Configurations for Straight Blade Wiring Devices
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Figure 4. NEMA Configurations for Locking Type Wiring Devices
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2.8 Motors
This section applies to AC and DC motors, 600 V or less, 186 watts (1/4 HP) and larger. 2.8.1 General Recommendations. Every motor and motor circuit should have the following: 1. Means of disconnecting all ungrounded conductors. 2. Circuit protection not exceeding conductor amperage rating in each ungrounded conductor. 3. Circuit arrangements so that a fault will cause circuit protection devices to open all ungrounded conductors. 4. Conductors rated for at least 125% of motor full load amperage (FLA). 5. Thermal overload protection. Exception: Portable motors 2.8.2 Labels. The following labels are recommended. 1. Thermal Protection Motors with integral thermal protection should be marked "Thermally Protected" or "TP." 2. Direction arrow Where rotation is critical, a direction arrow should be installed. 2.8.3 Mounting. Motors should be mounted so that they 1. Are accessible for lubrication, maintenance, and replacement. 2. Have sufficient air circulation to maintain temperature below 90% of rating. 2.8.4 2.8.5 2.8.6 Grounding. Motors should be grounded as specified in section 4, Grounding. Guarding. All motor driven couplings, belts, and chains should be suitably guarded. Undervoltage Protection. Undervoltage protection should be provided for all motors that could initiate hazardous equipment motion when power is returned after an undervoltage condition. Overload Protection Devices. Overload protection devices should comply with the following: 1. One of the following protective devices is recommended for all motors: A manual motor starter with thermal overload protection. A magnetic motor starter with manual reset thermal overload protection. A manual reset thermal protective device integral with the motor. An automatic reset thermal protection device integral with the motor.
2.8.7
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2. The resetting of the thermal overload device should not restart the motor unless there are no exposed moving parts (for example, enclosed refrigeration compressors, and close coupled pumps).
2.8.8
DC Motors 1. DC motors should have thermal protection integral with the motor controller. 2. Shunt and compound wound DC motors should be equipped with field loss protection to prevent excessive motor speed when this condition exists.
2.8.9 Portable Motors. Portable motors equipped with attachment plugs do not require thermal overload protection since they are considered to be protected by the receptacle branch circuit protection device. See Figure 5. 2.8.10 Single-Phase AC Motors. Single-phase AC motors should have thermal overload protection meeting the following recommendations: 1. 120 V motors protection installed in the ungrounded conductor. See Figure 6. 2. 208 V motors protection installed in both of the ungrounded conductors. See Figure 7. Exception: 208 V motors with manual motor starters may have a thermal sensor in only one ungrounded conductor; however, the starter should disconnect both ungrounded conductors.
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2.8.11 Three-Phase AC Motors. Three-phase AC motor recommendations are as follows: 1. All motors equal to or greater than 559 watts (3/4 HP) should be threephase. 2. Thermal overload protection should be installed in all ungrounded conductors. See Figure 8.
2.8.12 Motor Selection. Table 8 is to be used as a guideline to aid in balancing phase loads when selecting electric motors. Specific amperage recommendations for motors can be determined by manufacturer's specifications or by the tables in ANSI/NFPA 70.
Table 8 Motor Selection Guidelines

Motor Size 1/6 to 3/4 HP 3/4 to 5 HP 5 HP or More Recommended Voltage, Phase 120 V, 1 PH 208 V, 1 PH 208 V, 3 PH 480 V, 3 PH Typical Amperage 4.4 to 13.8 A 2.4 to 7.6 A 3.1 to 16.7 A 7.6 A and Up
2.9
Magnetic Devices
2.9.1 Relays. Relays are typically used for logic and switching in control circuits. 1. Coil should be 120 V or less. 2. Contacts should switch 120 V or less. 3. Contacts should not switch more than their rated "break" amperage.
Table 9 is provided for information only to show typical inrush and sealed currents.
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2.9.2 Contactors Contactors are typically used for switching in power circuits. 1. Coil should be 120 V or less. Exception: Coils with inrush of 240 VA or more should be in the power circuit and controlled by a pilot contactor. 2. Contacts should not switch more than their rated break amperage. 3. Contactor should be appropriately selected for inductive or resistive switching applications. 2.9.3 Motor Starters Motor starters are typically used for switching motor loads. 1. Coil should be 120 V or less. Exception: Coils with inrush of 240 VA or more should be in the power circuit and controlled by a pilot contactor. 2. Contacts should not switch more than their rated break amperage. 3. Motor starter should have thermal overloads sized for motor full load amperage (FLA). 2.9.4 Solenoids Solenoids are typically used for converting electrical signals to mechanical motion. 1. Solenoids with coil inrush of less than 240 VA may be connected in control circuits but should be separately fused. 2. Solenoids with coil inrush of 240 VA or more should be in power circuits, controlled by a contactor and individually protected for overcurrent.
Table 9 Typical Magnetic Device Coil Data (in Volt-Amps)

National Equipment Mfg. Association (NEMA) Size Contactor Manufacturer Allen Bradley Arrow Hart Cutler Hammer Furnas General Electric ITE Square "D" Westinghouse Coil State Inrush Sealed Inrush Sealed Inrush Sealed Inrush Sealed Inrush Sealed Inrush Sealed Inrush Sealed Inrush Sealed 00 60 15 135 22 81 11 54 13 144 24 198 24 118 11 160 25 0 106 17 135 22 105 42 204 26 144 24 198 24 160 30 160 25 1 185 21 135 22 154 46 204 26 144 24 198 24 170 40 160 25 2 216 30 340 62 550 86 480 49 528 60 360 41 465 80 160 25 3 578 43 720 105 900 90 480 49 1152 83 790 57 800 150 625 50 4 996 65 2800 130 960 87 1044 82 1248 87 1400 70 1490 140 625 50 5 1948 97 5500 235 1925 207 1656 125 3600 276
2800 290
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2.10 Supply Circuit Disconnecting Means
All equipment should have a supply circuit disconnecting means mounted on the equipment. See Figure 14 (section 5.8). Note: The facilities disconnecting means does not negate this recommendation. 2.10.1 Single Source of Power. Equipment should not have more than one source of power. Exception: When frequencies in addition to 60 Hz are required and ALL the expectations of section 7 are applied. 2.10.2 Disconnect Rating. The supply disconnect overcurrent protection should be rated at not more than 150%, and not less than 115% of the total normal operating full load current of the machine. 2.10.3 Disconnect Connection. Supply conductor connections to the disconnecting means should comply with the following: 1. The supply conductors should be connected directly to the disconnecting means in the main electrical control enclosure with no connection to terminal blocks or other devices. 2. There should be no exposed live parts when the disconnecting means is in the open position. 3. All ungrounded conductors of the supply circuit should be disconnected simultaneously. 4. Grounded conductors (neutral) should not be disconnected. Exception: The grounded conductor (neutral) may be disconnected for valid safety and design recommendations, providing that it is disconnected simultaneously with the ungrounded conductors. 5. Grounding conductors (earth) should not be disconnected. 2.10.4 Disconnect Mounting. The disconnecting device should not be mounted on hinged or removable access covers or doors. 2.10.5 Disconnect Handle. The disconnect handle: 1. Should not be more than 1.98 m (6.5 ft.) or less than 0.5 m (1.5 ft.) above the operating floor line. 2. Should clearly indicate the ON and OFF positions. 3. Should be accessible from the front of the enclosure. 4. Should be readily accessible by the equipment operator when it is used as the emergency off (EMO) switch. 5. Should not disengage from the disconnect device when the enclosure door is opened. 6. Mechanism of hardwired equipment should be lockable in the OFF position. 7. Mechanism should be either mechanically or electrically interlocked with the enclosure door.
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2.10.6 System Disconnecting Means. When disconnects are mounted in separate enclosures (each supplying power to one unit of a system), the following provisions should be made: 1. The disconnecting device in each of the separate system units should deenergize all hazardous potentials or hazardous energy levels within that unit. 2. A main disconnecting device should be furnished to de-energize the entire system. 2.10.7 Disconnect Type. The type of disconnecting means desired is based on equipment power specifications. 2.10.7.1 Small Equipment Single-phase equipment operating at 120 V or less with up to 2 kVA main protection should have one of the following disconnecting means: 1. Switch and fuse. See Figure 9. 2. Circuit breaker with a minimum of 5,000 amperes interrupt capacity (AIC). See Figure 10. Exception: The power attachment plug may be used as the disconnecting means for self contained (free standing) units under 0.25 kVA if they have the following: 3. A POWER ON indicator light on the unit. 4. Adequate overcurrent protection within the unit. 2.10.7.2 Large Equipment Multiphase equipment and equipment operating at 120 V with 2 kVA or more main protection should have a circuit breaker with a minimum of 10,000 AIC for the disconnecting means.
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2.11 Circuit Protection
Circuit breakers and circuit protectors are preferred over fuses as overcurrent devices for the following reasons: They can be reset without exposure to energized terminals and, therefore, can be safely reset by nontechnical personnel. They provide more assurance that ratings cannot be inadvertently changed, as when fuses are used. Multiple units (such as used on three-phase circuits) can be obtained, which open all conductors simultaneously when an overload occurs on any conductor.
2.11.1 General Recommendations. General recommendations for circuit protection devices are as follows: 1. Amperage Circuit protection devices should not exceed the amperage rating of the components and conductors they protect. See section 3, Tables 12 and 13. 2. Location in circuit Circuit protection devices should be located at the point where an ungrounded conductor connects to its supply source or to a larger conductor. Exception 1: Where all the following conditions are complied with. The conductor a) Is not over 7.6 m (25 ft.) long. b) Amperage rating is at least one-third that of the conductor from which it is supplied. c) Terminates at a single circuit protection device. d) Is protected from physical damage. Note: The conductor should not connect to any component or device before termination at the protection device. Exception 2: Where all the following conditions are complied with. The conductor a) Is not over 3.05 m (10 ft.) long. b) Amperage rating is not less than the maximum continuous load current of the circuit. c) Amperage rating is not less than the rating of the device supplied or the rating of the overcurrent protective device at the conductor termination.
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d) Does not extend beyond control panel enclosure. Note: For conductor derating factors, see section 3.2, Single Conductors. Exception 3: Where the circuit protection device protecting the larger conductor also protects the smaller conductor according to Table 12. 3. Parallel devices Circuit protection devices should not be connected in parallel to attain required amperage capacity. 4. Thermal devices Thermal devices are not designed for short circuit protection and should not be used for conductor protection. 5. Grounded conductors Circuit protection devices should not be connected in series with grounded or grounding conductors. 6. Accessibility Circuit protection devices should be readily accessible by service personnel. 7. Enclosures Circuit protection devices should be enclosed. See section 5.2, Electrical Enclosures. 8. Labeling The amperage rating of circuit protection devices should be indicated in a manner that is clear, durable, and visible after installation. 9. Resets Automatically resetting circuit protection devices are not desired. 10. Mounting Circuit protection devices should not be mounted on hinged or removable access panels. 11. Connection Circuit protection devices should be connected to the load side of the supply circuit disconnection means. 2.11.2 Clip Type Fuse Holders and Fuses. Clip type fuse holders and fuses should meet the following recommendations: 1. Use As branch circuit protection. 2. Rating Fuse holders should be rated for the amperage and voltage of the fuse and should be a minimum of 250 V for 120/208 V circuits. 600 V for 277/480 V circuits. 3. Enclosures Fuses should be installed within a NEMA type enclosure that has positive de-energization capability before opening. 2.11.3 Inline Fuse Holders and Fuses. Inline fuse holders are discouraged for installation in equipment. 2.11.4 Panel-Mounted Fuse Holders and Fuses. Panel-mounted fuse holders and fuses should meet the following recommendations: 1. Shock proof fuse holders should be used. 2. Use 120 V, 15 A or less, single-phase circuits (less than 2 kVA). 3. Rating Minimum of 125 V. 4. Wiring Fuse holders that have exposed metal when the cap is removed (non-shockproof fuse holders) should have the line conductor connected to the end terminal and the load conductor connected to the side terminal. 5. Disconnect Provision should be made for de-energization of the fuse during replacement. Appendix A Electrical and Mechanical Design Criteria 56 Revision 2.0

6. Mounting Fuse holder should have a D-punched hole, or equivalent, so that it will not rotate while the fuse is being removed. (See fuse holder
below.) 2.11.5 Circuit Breakers. Circuit breakers and circuit protectors are NOT designed and/or listed for the same function. Circuit breakers should meet the following recommendations: 1. Use Short circuit and/or overcurrent protection in any circuit. 2. Method of operation Should be manually operable and should clear a fault even if the handle mechanism were held closed. 3. ON and OFF indication Should clearly indicate ON (closed) and OFF (open) positions. 4. Mounting position Should be mounted on a vertical surface with handle up for the "ON" position. Exception: If horizontally mounted in a commercial distribution panel, the handle may be toward the center for the ON position. 5. Disconnect Should open all ungrounded conductors if a fault occurs in any phase. 6. Installation The supply conductors should be connected to the line side of the breaker. 2.11.6 Circuit Protectors (Circuit Interrupters). Circuit protectors are recognized as component appliance controls and are not interchangeable with circuit breakers because they MAY NOT provide short circuit protection. Circuit protectors should meet the following recommendations: 1. Use Supplementary (branch circuit) overcurrent protection in data processing and other nonindustrial applications. 2. Method of Operation Should be manually operable and should clear a fault even if the handle mechanism were held closed. 3. ON and OFF indication Should clearly indicate ON (closed) and OFF (open) positions. 4. Mounting position Should be mounted on a vertical surface with handle up for the "ON" position. 5. Disconnect Should open all ungrounded conductors if a fault occurs in any phase. 6. Installation The supply conductors should be connected to the line side of the protector.
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2.12 Electrical Heating Units
2.12.1 General Recommendations 1. This section applies to standalone heating units and heating units contained within equipment such as furnaces, ovens, and tanks. 2. All materials used with the unit and associated equipment should be suitable for the chemical, thermal, and/or physical environment. 3. Heating elements should be protected from physical damage. 4. Hot surfaces should be physically shielded, isolated, or insulated to protect against personnel contact. 2.12.2 Circuits 1. Heating units contained within equipment should be powered from the load side of the equipment supply circuit disconnecting means. See section 2.10, Supply Circuit Disconnecting Means. 2. Heating units contained within equipment should be controlled by the equipment control circuits. 2.12.3 Controls 1. Appropriate safety controls should be installed to shut down heating units independently of the normal machine controls. 2. Immersion heater applications may require redundant level and temperature controls.
2.13 Power Supplies

This section applies to standalone power supplies and power supplies contained within equipment. 2.13.1 Circuits 1. Power supplies contained within equipment should be powered from the load side of the equipment supply circuit disconnecting means. 2. Power supplies contained within equipment should be controlled by the equipment control circuits. 2.13.2 Protection. Power supply outputs may be protected by overcurrent and/or voltage variation circuits provided that the safety of these circuits is equivalent to that obtained by circuit breakers, circuit protectors, fuses, or thermal devices. Marking. Each power supply should have a nameplate indicating manufacturer, rating, input voltage, and output voltage(s).
2.13.3
2.13.4 Guarding. Power supplies should be securely fastened and protected from physical damage. All exposed hazardous potentials or hazardous energy levels should be guarded by shields or enclosures. 2.13.5 Ventilation. Ventilation should be adequate to dissipate the full load heat losses without creating an excessive ambient temperature. 2.13.6 Isolation. Power supplies should provide complete electrical isolation between input and output circuits. They should be designed to minimize faults that could cause unexpected hazardous potentials or hazardous energy levels to be present on circuits or components. Appendix A Electrical and Mechanical Design Criteria 58 Revision 2.0

2.13.7 Discharge. Power supplies should meet the discharge recommendations specified for capacitors in section
2.14 Grounding
2.13.8 Enclosure. Power supplies having outputs greater than 600 V DC and capable of supplying over 5 mA, through a 500 ohm test load, should be enclosed in a rigid compartment equipped with interlocks and a shorting bar. 2.13.9 Ferroresonant Regulators 1. Ferroresonant regulators should not have potentials of more than 550 V at line voltage. 2. Resonant circuits up to 275 V can be connected to other circuits if grounded and the maximum voltage to ground is less than 150 V. 3. Resonant circuits greater than 275 V potential should not be connected to any other circuit. 2.13.10 Grounding 1. Exposed noncurrent-carrying conductive metal should be effectively bonded to the equipment grounding conductor as specified in section 4, Grounding. 2. DC common should be connected to an isolated bus (isolated from ground). When referencing to ground is required, one circuit grounding conductor should be used to connect the isolated DC common bus to ground.
3.0 Conductors
Conductors that do not have hazardous potentials or hazardous energy levels and that do not directly control potential safety hazards are exempt from the recommendations of this section.
3.1
General Recommendations
Conductor size Conductors used in power or power control circuits should not be smaller than 0.823 mm2 (#18 AWG). Separation All conductors within a harness, wireway, or raceway should have insulation rated for use at the highest potential present. Parallel conductors Conductors should not be connected in parallel to attain required amperage capacity.
3.1.1 3.1.2 3.1.3
Note: Deviations should comply with ANSI/NFPA 70, Article 310-4. 3.1.4 3.1.5 3.1.6 Temperature Conductors should not be exposed to temperatures greater than 90% of their rating. Insulation Conductor insulation should be continuous and undamaged between terminations. Installation Installation of conductors should comply with the wiring methods in section 5, Electrical Enclosures and Wiring Methods.
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3.1.7 Identification: 1. Each conductor should be identified by a number, letter, or number-letter combination. 2. All common circuit conductors should have the same identification at all terminals and termination points. 3. The identification should not be used in more than one circuit.
3.2
Single Conductors
MTW (THHN/THWN). Type MTW or equivalent conductors. 1. Minimum expectations: 0.823 mm2 (#18 AWG). Stranded copper. 600 V, 90 C (194 rated insulation. F) 2. Uses Suitable for all circuits unless special insulation or shielding is required.
See ANSI/NFPA 70, Article 310. 3.2.1
3.2.2
E, EE, K, KK. Type E, EE, K, KK or equivalent conductors. 1. Minimum expectations: 0.823 mm2 (#18 AWG). Stranded copper, nickel, or silver-coated. 600 V, 90 (194 rated Teflon insulation. C F) 2. Uses Suitable only for hookup wire within control enclosures; not suitable for installation in raceways. 3. Installation Laced, harnessed, or installed in nonmetallic wireways.
3.2.3
Marking. Conductors should be durably marked on the surface at intervals not exceeding 610 mm (24 in.) to indicate 1. The maximum rated voltage for which the conductor was listed. 2. The proper type letter or letters for the conductor. 3. The manufacturer's name or trademark. 4. The size of the conductor in circular mils or AWG. Exception: Conductors having insulation that cannot be marked are permitted if the above information is marked on the conductor spool and is documented as part of the permanent equipment record.
3.2.4 3.2.5
Amperage. Conductors should be protected for their maximum amperage rating by circuit protection devices sized according to the table and notes in Table 12. Derating. The maximum amperage of conductors should be derated according to the number of conductors installed in a bundle, harness, stack, raceway, wireway, or wiring duct. See Table 12. 1. Fill. Conductors installed in raceways, wireways, and wiring ducts should comply with the following:
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2. Raceways The sum of the cross-sectional areas of all contained conductors should not exceed 25% of the interior cross-sectional area of the raceway. See Table 10. Exception: Raceway fill may be increased to 40% when modifying existing equipment. 3. Wireways The sum of the cross-sectional areas of all contained conductors should not exceed 20% of the interior cross-sectional area of the wireway. See Table 11. 4. Plastic wiring ducts The sum of the cross-sectional areas of all contained conductors should not exceed 50% of the interior cross-sectional area of the wiring duct. See Table 11. Note: The tables in Chapter 9 of ANSI/NFPA 70 provide information for calculating the fill for multiple conductor sizes and types.
Table 10 Number of Conductors in Raceways

Conductor Size mm2 2.08 3.31 5.26 8.36 13.3 21.1 26.7 33.6 42.4 53.5 67.4 85.0 Raceway Size 0.50 1.27 8 6 4 2 1 -Inches -Centimeters 0.75 1.00 1.91 2.54 15 24 11 18 7 11 3 5 2 4 1 2 2 1
AWG 14 12 10 8 6 4 3 2 1 1/0 2/0 3/0
1.25 3.18 43 32 20 10 7 4 3 3 2 1 1
1.50 3.81 58 43 27 13 9 6 5 4 3 2 2 1
Note: Table shows maximum number of MTW allowed for 25% raceway fill.
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Table 11 Number of Conductors in Wireways and Ducts
Inches 1.0 x 1.0 1.0 x 2.0 1.0 x 3.0 1.5 x 2.0 1.5 x 3.0 2.0 x 2.0 2.0 x 3.0 2.5 x 3.0 3.0 x 3.0 4.0 x 4.0 5.0 x 5.0 6.0 x 6.0 Size Centimeters 2.54 x 2.54 2.54 x 5.08 2.54 x 7.62 3.81 x 5.08 3.81 x 7.62 5.08 x 5.08 5.08 x 7.62 6.35 x 7.62 7.62 x 7.62 10.16 x 10.16 12.70 x 12.70 15.24 x 15.24
2
Wireway 8 16 24 24 36 32 48 60 72 128 200 288
Conductors Wiring Duct 20 40 60 60 90 80 120 150 180 320 500 720
Note: Table shows maximum number of 2.08 mm (#14 AWG) MTW conductors allowed for 20% wireway fill and 50% wiring duct fill.
Table 12 Maximum Amperage of Single Conductors

Conductor Size AWG mm2 18 0.82 16 1.31 14 2.08 12 3.31 10 5.26 8 8.36 6 13.3 4 21.1 3 26.7 2 33.6 1 42.4 1/0 53.5 2/0 67.4 3/0 84.97 Number of Conductors (see notes) 7-24 25-42 43-UP 9 8 6 11 10 8 15 14 11 19 16 14 25 22 18 35 30 25 48 41 34 61 52 43 70 60 50 83 71 59 96 82 68 108 93 77 124 107 89 143 123 102 Equipment Ground AWG mm2 18 0.82 16 1.31 14 2.08 12 3.31 10 5.26 10 5.26 10 5.26 8 8.36 8 8.36 8 8.36 6 13.3 6 13.3 6 13.3 6 13.3
1-6 10 13 15 20 30 40 55 70 80 95 110 125 140 160
Notes 1. All ungrounded conductors in the same bundle, harness, stack, raceway, wireway or wiring duct should be counted. 2. The grounded conductor (neutral) should be counted in single-phase and unbalanced three-phase circuits. 3. The grounding conductor should not be counted. 4. The table is based on ANSI/NFPA 70, Table 310-16, 100% loading. 5. The table is for 600 V, 90 (194 rated conductors. C F) 6. The table values are derated to 91% for 40 (104 ambient temperature and: C F) Derated to 80% for 6 conductors or loading Derated to 70% for 7-24 conductors. Derated to 60% for 25-42 conductors. Derated to 50% for 43 or more conductors. 7. Conductors derated according to this table will be compatible with the 60 (140 rating of Circuit C F) Breakers and Switches. 8. For conductors larger than 3/0, use ANSI/NFPA 70 tables with proper derating factors for temperature and number of conductors.
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3.3 Flexible Cords
Suitability. Flexible cords should be suitable for the conditions of use and location according to ANSI/NFPA 70, Article 400. Types. Flexible cords should be type S, SO, ST or STO with insulation rated for a minimum of 600 V, 60 (140 C F). Exception 1: 120 V circuits, protected at 10 A or less with no more than two current carrying conductors, may use type SJ, SJO, SJT or SJTO cords with 300 V, 60 (140 rated insulation. C F) Exception 2: Counter-top or rack-mounted equipment having 120 V circuits, protected at 10 A or less with no more than two current carrying conductors may use type SVO, SVT, or SVTO cords with 300 V, 60 (140 rated insulation. C F) 3.3.3 Marking. Flexible cords should be durably marked on the surface at intervals not exceeding 610 mm (24 in.) to indicate 1. Type designation. 2. Number of conductors. 3. Size. 3.3.4 3.3.5 3.3.6 Amperage. Flexible cords should be protected for their maximum amperage rating by circuit protection devices sized according to Table 13. Color Code. Flexible cords should comply with Table 14. Uses Permitted. Flexible cords are permitted 1. When equipped with an attachment plug and powered from an accessible receptacle outlet To connect movable equipment to facilitate frequent interchange. When the fastening means and mechanical connections of equipment are designed to permit removal for maintenance or repair. 2. When not equipped with an attachment plug, to prevent the transmission of noise or vibration. Uses Not Permitted. Flexible cords 1. Should not be used for internal machine wiring. 2. Should not be used as an extension cord. 3. Should not be used as a substitute for fixed wiring. 4. Should not be used to connect stationary equipment to power source. 3.3.8 Restrictions. Flexible cords 1. Should not be attached to equipment surfaces. 2. Should not be coiled but should be of the shortest feasible length, not to exceed 2.44 m (8 ft.). 3. Should not have any splices. 4. Should not be inaccessible.
This section only applies to the types of flexible cords listed below. 3.3.1 3.3.2
3.3.7
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5. Should not run through unprotected holes. See section 5.5, Mechanical Protection. 6. Should be installed in protected (bushed) holes that are large enough to allow cord connector (attachment plug) passage. 7. Should have strain relief at terminations to connectors or equipment that will prevent any mechanical stress on the cord from being transmitted to the conductors or terminals. See section 5.8, Strain Relief.
Table 13 Maximum Amperage of Cords and Cables

Conductor Size AWG mm2
18 16 14 12 10 8 6 4 2 0 0.75 1.0 1.5 2.5 4.0 6.0 10.0 16.0 35.0 50.0
Number of Current Carrying Conductors 2 3 4-6 7-24

10 13 18 25 30 40 55 70 95 135 7 10 15 20 25 35 45 60 80 120 5.6 8.0 12.0 16.0 20.0 28.0 36.0 48.0 64.0 90.0 4.9 7.0 10.5 14.0 17.5 24.5 31.5 42.0 56.0 84.0
Note: Conductor sizes do not represent exact dimensional equivalents.
Table 14 Conductor Color Code for Cords and Cables

Phase
1 1 1 1 1 3 3
Wires
21 1 2 3 3 4 4 5
Voltage
120 208 120 208 208/480 208/480 208/480
Phase A
Black 2 Black Black 2 Black Black Black Black
Phase B
--3 Red --Red 3 Red Blue 3 Blue 4
Phase C
----------Red Red
Neutral
White 5 --White 5 --White 5 --White 5
Ground
----Green 6 Green 6 Green 6 Green 6 Green 6
Notes: 1. For double insulated equipment only. 2. Preferred color, Brown may be used. 3. The White or Natural Gray conductor may be used if the color is permanently changed. 4. Preferred color, Orange may be used. 5. Preferred color, Natural Gray or Blue may be used. 6. Green/Yellow may be used: Green/Yellow should be Green with one or more yellow stripes. Green = 50 to 70%, Yellow = 50 to 30%. Green/Yellow is the only color internationally accepted for use as an equipment grounding conductor. Green or Green/Yellow must only be used for grounding conductors.
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3.4 Multiconductor (Jacketed) Cables
Description. Multiconductor electronic wire and cable, such as communication and control cable, instrumentation cable, electrical cable, and computer cable. Some have shields; many have PVC-insulated jackets. Restriction. The following types of cables are not acceptable for equipment wiring: 1. Armored cable (AC). 2. Integrated gas spacer cable (IGS). 3. Flat conductor cable (FCC). 4. Mineral-insulated, metal-sheathed cable (MI). 5. Metal-clad cable (MC). 6. Nonmetallic-sheathed cable (NM or NMC). 7. Shielded nonmetallic-sheathed cable (SNM). 8. Service entrance cable (SE or USE). 9. Underground feeder and branch circuit cable (UF). Notes: 1. See ANSI/NFPA 70 for definitions. 2. BX and ATC are a type of armored cable (AC). 3.4.3 Marking. Should be marked with the manufacturer's name and part number or the following data: 1. Maximum rated voltage. 2. Type. 3. Temperature rating. 4. Size. 3.4.4 3.4.5 3.4.6 Amperage. Multiconductor cables should be protected for their maximum amperage rating by circuit protection devices sized according to Table 13. Power Usage. If multiconductor cable is used for power circuits (greater than 100 V), the insulation should be rated for at least 600 V, 80 (176 C F). Connectors. Multiconductor cable connectors used in circuits having hazardous potentials or hazardous energy levels should meet all the recommendations of section 2.7, Plugs, Connectors and Receptacles. Color Code. Should comply with the following recommendations: 1. Multiconductor cables used for power circuits should comply with Table 14. 2. Multiconductor cables used for control circuits should have color code identified on drawings.
3.4.1
3.4.2
3.4.7
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3.5 Special Conductors
Other conductors installed in equipment should comply with the requirements of ANSI/NFPA 70. 3.5.1 Insulation. When required by ambient conditions, appropriate conductor insulating material should be used. For example, conductors installed on or adjacent to heat generating equipment, such as furnaces, ovens, heat treating equipment, and so on, should have UL-approved, type AVA, SFF2, or equivalent insulation. Bus Bars (Noninsulated). Noninsulated bus bars should be sized according to Table 15, which is based on the following: 1. Material copper @ 98% conductivity. 2. Temperature 40 (104 ambient. C F) 3. Current density 1000 amperes per square inch. 4. Spacing See Article 384 of ANSI/NFPA 70.
3.5.2
NEC 1994, Table 384-36 Minimum Spacing Between Bare Metal Parts
Opposite Polarity Where Mounted on the Same Surface 3/4 in. 1-1/4 in. 2 in. Opposite Polarity Where Held free in Air 1/2 in. 3/4 in. 1 in. Live Parts
<125 volts <250 volts <600 volts
to Ground* 1/2 in. 1/2 in. 1 in.
*For spacing between live parts and doors of cabinets, see section 373-11(a)(1), (2), and (3).
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Table 15 Noninsulated Bus Bar Sizes
mm 1.59 Thickness inches 0.063 Width mm 12.7 19.1 25.4 38.1 50.8 76.2 12.7 19.1 25.4 38.1 50.8 63.5 76.2 101.6 12.7 19.1 25.4 38.1 50.8 63.5 76.2 88.9 101.6 127.0 152.4 12.7 19.1 25.4 38.1 50.8 63.5 76.2 88.9 101.6 19.1 25.4 38.1 50.8 76.2 101.6 inches 0.50 0.75 1.00 1.50 2.00 3.00 0.50 0.75 1.00 1.50 2.00 2.50 3.00 4.00 0.50 0.75 1.00 1.50 2.00 2.50 3.00 3.50 4.00 5.00 6.00 0.50 0.75 1.00 1.50 2.00 2.50 3.00 3.50 4.00 0.75 1.00 1.50 2.00 3.00 4.00 mm 20.0 30.3 40.6 60.6 80.6 121.3 40.6 60.6 80.6 121.3 161.3 201.9 241.9 322.6 80.6 121.3 161.3 241.9 322.6 403.2 483.9 564.5 645.2 806.5 967.7 121.3 181.3 241.9 363.2 483.9 605.2 725.8 847.1 967.7 241.9 322.6 483.9 645.2 967.7 1290.3
2
3.18
0.125
6.35
0.250
9.53
0.375
12.7
0.500
Area 2 inches 0.031 0.047 0.063 0.094 0.125 0.188 0.063 0.094 0.125 0.188 0.250 0.313 0.375 0.500 0.125 0.188 0.250 0.375 0.500 0.625 0.750 0.875 1.000 1.250 1.500 0.188 0.281 0.375 0.563 0.750 0.938 1.125 1.313 1.500 0.375 0.500 0.750 1.000 1.500 2.000
Amperage A 31 47 63 94 125 188 63 94 125 188 250 313 375 500 125 188 250 375 500 625 750 875 1000 1250 1500 188 281 375 563 750 938 1125 1313 1500 375 500 750 1000 1500 2000
3.6
Conductor Color Code

Some local jurisdictions must adhere to NFPA-79.
Note:
See the following: ANSI/NFPA 70, Article 210-5. Grounded conductor: white or natural gray. Equipment grounding conductor: green, green/yellow, or bare. OSHA 29 CFR 1910.304. Grounded conductors and equipment grounding conductors should be identifiable and distinguishable from all other conductors.
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3.6.1 Alternating Current (AC) Conductors. AC conductors should comply with the following: 3.6.1.1 Ungrounded Conductors 1. Power circuit conductors: A continuous black outer finish along the entire length of the conductor. 2. Control circuit conductors: A continuous red outer finish along the entire length of the conductor. 3.6.1.2 Grounded Conductors (neutral) 1. 13.3 mm2 (#6 AWG) or smaller: A continuous white or natural gray outer finish along the entire length of the conductor. 2. Larger than 13.3 mm2 (#6 AWG): Any color except green, identified by a distinctive white marking at the termination points. 3.6.1.3 Grounding Conductors (earth) 1. 13 mm2 (#6 AWG) or smaller: A continuous green or green/yellow outer finish along the entire length of the conductor. 2. Larger than 13.3 mm2 (#6 AWG): Colored, marked, or taped green or green/yellow at each end and at every point where the conductor is accessible. Exception: Mechanical equipment grounding (bonding) conductors may be bare copper or copper braid. 3.6.2 Direct Current (DC) Conductors. DC conductors should comply with the following: 3.6.2.1 Ungrounded Conductors 1. Power conductors exceeding 50 V DC: Orange. 2. Power conductors, 50 V DC or less: Violet. 3. Control conductors: Blue. 3.6.2.2 Grounded Conductors (common). Brown. 3.6.2.3 Grounding Conductors (earth). Should comply with the recommendations of section 3.6 3.6.3 Exceptions to Color Code. Exceptions are allowed: 1. For internal wiring on individual components, such as motors, transformers, meters, solenoid valves, power supplies, and black boxes. For flexible cords. (See section 3.3) 2. For multiconductor cables with more than five conductors. (See Table 14) 3. When the proper color is not available for special conductors. See section 3.5. 4. To the AC color code as follows: Ungrounded control circuit conductors in small equipment, at line voltage, may be black. Grounded conductors may be further identified with a colored tracer that corresponds with the associated ungrounded conductor. Interlock control conductors wired from an external power source may be yellow. Appendix A Electrical and Mechanical Design Criteria 68 Revision 2.0

Equipment built in Europe may have brown ungrounded conductors and light blue grounded conductors. 5. To the DC color code in section 3.6 with the following restrictions: Colors other than those designated for AC circuits should be used. The colors and voltages should be identified on the drawings.
4.0 Grounding
The terms ground and grounding are used to refer to noncurrent-carrying, mechanical equipment grounding conductors, bonding jumpers, and circuit grounding conductors. Figures 12 and 13 illustrate the general layout of typical grounded systems.
4.1
Resistance
All grounding circuits within a machine should ensure a resistance of one tenth ohm (0.1 ) or less at any point. To test grounding resistance, attach one lead of a digital ohmmeter at the main grounding termination and use the other lead to probe all conductive metal. See section 4.5.
4.1.1 4.1.2
4.2 Terminations
4.2.1 The main grounding conductor should be secured to a single designated termination that will not be disturbed by any other conductor terminations. 4.2.2 Mounting hardware and cover screws that may be removed for normal servicing should not be used for grounding terminations. 4.2.3 All protective coatings, such as paint or enamel, should be removed from contact surfaces where grounding conductors and bonding conductors terminate. 4.2.4 Unless prohibited by location recommendations, an external tooth (star) lockwasher should be installed between the grounding lug and the surface to be grounded to maintain the position of the lug and to ensure effective penetration through any dirt or corrosion on the contact surface. Exception: The lockwasher is not required if the termination complies with section 2.1.
The disconnection or removal of any component (device) should not interfere with or interrupt the grounding continuity to any other component (device). 4.2.5 When terminal lugs are used for grounding, they should be a ring tongue type.
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Exception: A single, locking spade lug may be used for connection to a captive device grounding screw. 4.2.6 4.2.7 Terminal lugs used for grounding are not required to be insulated. Grounding terminations should not depend on solder or welds for mechanical strength or for electrical continuity. Exception: Multi-pin connectors with solder pins (subject to resistance check). 4.2.8 4.2.9 An insulated terminal block (barrier strip) should not be used as a grounding bus. Commercial type ground buses should be used for multiple ground connections.
4.3
4.3.1 4.3.2 4.3.3 4.3.4 4.3.5 4.3.6 4.3.7
Conductors
Grounding conductors should be green, green with a yellow tracer, or bare copper wire or braid. All grounding conductors should be stranded copper wire. Grounding conductors and connectors should be compatible in current rating to the associated ungrounded conductors and connectors. See Table 12. Metallic bases, frames, or bonds should not be used as current carrying conductors between subassemblies. Raceways, hinges, covers, enclosures, and frames should not be used in lieu of grounding or bonding conductors. The grounding conductors should be run with the current carrying conductors. The grounding conductor should not be intentionally used as a current carrying conductor.
4.4
4.4.1 4.4.2
Splicing
The grounding conductors should be unspliced and continuous from termination to termination. A terminal block, ground lug, or ground bus is acceptable for connecting two grounding conductors. Butt splices, soldered connectors, and wire nuts are undesired.
4.5
4.5.1
Conductive Metal
All machine frames, enclosures, raceways, covers, doors, or panels with components having hazardous potentials or hazardous energy levels should have a grounding conductor termination. All metal clad components mounted external to enclosures and having hazardous potentials or hazardous energy levels should have a grounding conductor termination. Examples: Transformers Solenoid valves Motors Subassemblies
4.5.2
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Lamps Switches Cable connectors Capacitors (mounting base) Outlet boxes
4.6
Receptacles
The incoming grounding conductor should terminate at the device box. A grounding conductor (jumper) should run from the termination on the box to the grounding screw on the receptacle.
4.7
Interconnecting Cables
Every cable having hazardous potentials or hazardous energy levels, which interconnects subassemblies, units, or equipment should contain a grounding conductor to assure effective grounding with any combination of connected equipment.
4.8
4.8.1
Isolation
Grounded conductor (neutral) should be isolated from grounding conductors. Exception: Reference ground at source transformer. See section 2.6, Transformers.
4.8.2
DC common should be connected to an isolated bus (isolated from ground). One circuit grounding conductor should be used to connect the isolated DC common bus to ground. Exception: Isolated DC power systems. See section 2.6, Transformers.
4.8.3
Maximum leakage current on grounding conductor should not exceed 3.5 mA. Exception: Current from an EMC filter should not exceed 5% of input current or 1 A. A label stating high grounding conductor current should be attached adjacent to the power requirement label.
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4.9
4.9.1 4.9.2
Exceptions
Totally plastic encased units designed for two wire cord. Double insulated units that are marked with one of the symbols shown below or labeled:
Double insulated, Grounding not required.
Notes: 1. 2. Dead front cap, longer grounding pin. Any of the approved flexible cords with grounding conductor. Approved strain relief. The main equipment ground should terminate first at the equipment frame on a stud, screw or ground bus. Mounting panels for electrical/electronic components having hazardous potentials or hazardous energy levels should be grounded with a grounding conductor. Bolted or hinged panels with electrical/ electronic components on them having hazardous potentials or hazardous energy levels should be grounded with a grounding conductor.
3. 4.
5.
6.
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SEMATECH Application Guide for SEMI S2-93 5.0 Electrical Enclosures and Wiring Methods
Enclosures, raceways, wire ways, and wiring ducts should be suitable for the application and compatible with the environment that the equipment is to be operated in.
5.2
Electrical Enclosures
Electrical enclosures should be NEMA type or equivalent. Supplement A.3 contains a partial list of NEMA type electrical enclosures. 5.2.1 Components. The following components should be contained in electrical enclosures: 1. Supply circuit disconnecting means 2. Branch circuit protection 3. Control transformer 4. Control relays 5. Contactors 6. Motor starters 7. Conductors 8. Distribution terminal blocks (control terminals and power terminals should be segregated) 5.2.2 Recommendations. Enclosures should have 1. Clear space for connection and testing of components 2. Clear space for future use. (15% minimum) 3. Spare terminal space. (10% minimum) 4. Barriers for all arcing devices 5. Clearances between bare terminals and grounded parts as follows: 250 V or less: 12.7 mm (0.50 in.) 251 V to 600 V: 25.4 mm (1 in.) 6. Sufficient wire bending space at terminals. See ANSI/NFPA 70, Article 373. 5.2.3 Recommendations. Enclosures should have 1. A removable panel for component mounting. 2. Hinged doors that swing horizontally and open a minimum of 165 degrees. 5.2.4 Restrictions. Enclosures should not have any 1. Components mounted on hinged doors or removable covers. Exception: Control circuit components for operator use. 2. Piping containing air, gas, or liquids. 3. Unused or ineffectively closed openings.
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5.2.5 Access. Enclosures should have access covers or doors that meet the following recommendations: 1. Covers or doors that allow access to hazardous energy levels or hazardous potentials should require a tool to open or should be interlocked. See section 6.2, Service Access Areas. 2. Covers or doors with an area of more than 0.3 m2 (3 ft.2 ) should be hinged. 5.2.6 Main Electrical Control Enclosure. When equipment geometry dictates a need for more than one power and power control device enclosure, the main electrical control enclosure should 1. Contain main supply circuit disconnecting means. See section 2.10 and Figure 14. 2. Contain all components and circuits that have hazardous energy levels or hazardous potentials after the operation of the EMO switch(es). 3. Require a tool to open.
5.3
Electrical Enclosure Wiring

All enclosure wiring should be routed, harnessed, appropriately laced, or in plastic wiring ducts. The number of conductors installed in wiring ducts should comply with section 3.2, Single Conductors. The wiring duct material should 1. Not support combustion. 2. Be nonwarping. 3. Be an insulator. 4. Be rated for the highest voltage applied to any conductor contained within.
5.3.1 5.3.2 5.3.3
5.3.4
Wiring ducts should not have exposed metal parts, except for mounting screws.
5.4
Equipment Wiring
Conductors inside of equipment should be routed, laced, harnessed, in wiring duct, in wireways, or in raceways. Conductors outside of equipment should be in approved, enclosed wireways or raceways. Note: Supplement A.3 lists acceptable raceway types.
5.4.1 5.4.2
5.4.3 5.4.4
All conductors in the same bundle, harness, raceway, wireway, or wiring duct should have insulation rated for use at the highest potential present. When AC power conductors are installed in metal raceways or wireways, all phase conductors, the grounding conductor and, where used, the grounded conductor (neutral) should be grouped together to minimize induced current. Conductors installed in raceways should not be smaller than 2.08 mm2 (#14 AWG).
5.4.5
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5.4.6 The maximum number of conductors installed in raceways, wireways and wiring duct should comply with section 3.2, Single Conductors.
5.5
Mechanical Protection
Conductors that remain energized with the supply disconnect OFF should be isolated from other conductors by jackets, conduits, or raceways. Any surfaces that conductors may contact should be free of burrs, sharp edges, threads, insulation-damaging roughness, and other deteriorating agents. All raceways and wireways should be supported within 305 mm (1 ft.) of each end and at 1.37 m (4.50 ft.) intervals. There should be at least 25.4 mm (1 in.) clearance between moving parts of equipment and flexible conduit or cables. If maintaining the clearance is impossible, a barrier should be provided. All conduit joints and fittings should be threaded, compression or rain tight, and have insulated throats or bushings.
5.5.1 5.5.2 5.5.3 5.5.4
5.5.5
5.6
Conductor Length
5.6.1 The external length of power attachment cords or flexible conduit should be as short as possible but should not exceed 2.44 m (8 ft.). 5.6.2 The length of the grounding conductor between the strain relief and the terminating screw should be such that in case of strain relief failure, the grounding conductor is the last to be under strain. 5.6.3 At least 152 mm (6 in.) of free conductor should be left inside outlet, switch, and junction boxes. 5.6.4 Wherever hardwiring makes access to a drawer or compartment difficult, wiring loops should be provided to allow access for service.
5.7
Splicing
Conductors, cords, and cables should be run without splices from termination to termination. Connections to leads on motors, solenoid valves, transformers, and so on should be made within an accessible enclosure by approved devices other than butt splices, soldered connectors, or wire nuts. For ease of maintenance, terminal blocks should be used. Exception: Wire nuts may be used in motor terminal housings that are too small to accommodate another type of connector.
5.7.1 5.7.2
5.8
Strain Relief
Strain relief should be provided for all raceways, cords, and cables. The strain relief device should comply with the following:
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5.8.1 Strength The device should be capable of withstanding a 16 kg (35 lb.) pull from any direction without allowing movement that could damage the insulation or strain the conductor terminations. Length The cord or cable jacket should extend into the strain relief device at least one cable diameter. Type The strain relief device used should be approved for use on the raceway, cord or cable. See Figure 15 for examples. Note: Type NM (two screw) connectors are not desired for use on flexible cords or cables.
5.8.2 5.8.3
6.0
6.1
Access Areas and Controls

Operator Access Areas
Definition. Any area 1. That can be accessed without the use of a tool. 2. That is defined by the manufacturer as an operator service area. 3. Where the means of access is deliberately provided to the operator. 6.1.2 Operator Exposure. Operators should not be exposed to 1. Energy levels of 240 VA or more. 2. Stored energy levels of 20 joules or more. 3. Potentials in excess of 42.4 V peak (30 V RMS) or 50 V DC in dry areas.
This section addresses access to electrical and mechanical hazards.
6.1.1
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4. Potentials in excess of 10 V AC or DC in wet areas. 6.1.3 Operator Protection. The operator(s) should be protected from electrical and mechanical hazards by one or more of the following: 1. Enclosures, shields, and covers that require a tool to open. See Table 17 for maximum opening sizes. 2. Interlock switches on doors, shields, or covers. 3. Grounded or insulated handles, levers, knobs, shields, and covers that are touched, held, or actuated in normal use.
6.2
Service Access Areas

Definition. All areas not defined as operator access areas that skilled service personnel should gain access to service or maintain the equipment. Service Personnel Exposure. Service personnel should not be exposed to 1. Inadvertent contact with hazardous potentials or hazardous energy levels. See section 6.1. 2. The unexpected energization or startup of equipment. 3. The unexpected release of stored energy.
6.2.1 6.2.2
6.2.3
Service Personnel Protection. Protection should be provided: 1. Where service is required with power on and INADVERTENT CONTACT is likely. 2. Where it is necessary to reach over, under, around, or in close proximity to hazards. 3. Where dropped tools could cause shorts and arcing.
6.2.4
Types of Protection. Protection should be provided by one or more of the following: 1. Lockable energy isolating devices. 2. Interlocks. 3. Grounded or insulated handles, levers, and knobs. 4. Grounded or insulated shields and covers. 5. Access holes through shields and covers. 6. Remote or external test points. 7. Insulated potentiometer extensions. 8. Separation of low voltage and line voltage terminal blocks and relays.
6.2.5
Manual Adjustments. Equipment requiring manual adjustments should be so designed that adjustment does not expose personnel to electrical or mechanical hazards. Maintenance Access. Maintenance access should be provided for servicing equipment. 1. Machines that require service and have access covers should have a minimum of 711 mm (28 in.) clear space. This does not apply to movable units. 77 Appendix A Electrical and Mechanical Design Criteria
6.2.6
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Note: Clear space is measured from equipment protrusions and auxiliary units to the walls or other fixed obstructions. 2. Large equipment like automatic transfer machines, web coaters, stacker cranes, and conveyors should be equipped with maintenance cat walks, access ladders, crossovers, and so on to facilitate safe access to valves, motors, dampers, pumps, motor drives, and other components. 6.2.7 Working Space. Sufficient working space should be provided for servicing electrical equipment having energized hazardous potentials or energy levels. 1. Depth Working space should be at least 914 mm (36 in.). When voltages exceed 150 V to ground, the depth may have to be increased. See ANSI/NFPA 70, Article 110. 2. Width Working space should be 760 mm (30 in.) wide in front of the exposed voltage. 3. Access There should be at least 711 mm (28 in.) of clear access to the working space. 4. Clear space Working space should remain clear and should not be used for equipment or storage.
6.3
General Recommendations
6.3.1 General Recommendations Equipment should have adequate operator controls. 1. The quantity and type of controls are dictated by equipment size and complexity. 2. "Power On" conditions and equipment operation status should be visually and reliably indicated. 3. Visual and/or audible signals should alert operators to conditions that are unsafe or require intervention. 4. Circuit breakers or circuit protectors should not be used as operator controls for on/off or start/stop functions. 5. Control switches should comply with 2.3. 6.3.2 Start (ON) Switch 1. Operator controlled equipment should have a start (ON) switch. 2. The switch should be located or designed to prevent accidental operation. 3. The switch should be a momentary contact push button with recessed or flush type head. 6.3.3 Stop (OFF) Switch. 1. Operator controlled equipment should have a stop (OFF) switch. 2. The switch should be located or designed to prevent accidental operation. 3. The switch should be a momentary contact push button with extended type head. 4. Mushroom head switches should not be used. 5. The switch should take precedence over the associated start (ON) switch. TEST: See item 4 under section 6.5. Appendix A Electrical and Mechanical Design Criteria 78 Revision 2.0

6.3.4 Two Hand Cycle Start Controls. When dual series-connected hand controls are required to isolate the operator from hazards, the hand controls and/or control circuit should comply with the following: 1. The hand controls should be momentary contact push button switches with black or green heads. 2. Each hand control should be protected against unintended operation. 3. Each hand control should be arranged by design, construction, and/or separation so that the use of both hands is required to start the machine cycle. Typically, they should be mounted at least 610 mm (24 in.) apart in the same vertical and horizontal planes. 4. Both hand controls should be depressed within one second of each other for the machine to cycle. 5. Both hand controls should be held depressed until the hazard no longer exists. 6. The control system should incorporate an anti-repeat feature that limits the machine to one cycle for each depression of the hand controls. 7. The control system should incorporate an anti-tie-down feature that requires the release of both hand controls between cycles. 8. For typical circuit, see Figure 16.
Note: Timer 1TR should be: one second, fixed, time delay on release.
6.4
6.4.1
Machine Controls
Undervoltage Protection. Undervoltage protection should be provided for all equipment that could initiate a hazardous motion when power returns after an undervoltage condition. Solid State and Programmed Controls. Solid state and programmed controls may be used for machine controls. Circuits which are critical to personnel or equipment safety, however, should be directly controlled by fail-safe electromechanical devices. Deviations should comply with NEMA ICS 1.1.
6.4.2
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6.5 Fail-Safe Controls and Switching Devices
All controls and switching devices should be applied in a fail-safe design that complies with the following: 1. Should start through energization. 2. Should stop through de-energization. 3. Stop switches should take precedence over associated start switches. 4. TEST: Hold stop/off switch open. Close start/on switch. Equipment should not start, power up, turn on or cycle.
6.5.1
6.6
Control Location
Operator Controls. Operator controls should be within easy reach in normal operating position. Non-operator Controls. Non-operator controls should be located such that accidental or unauthorized operator adjustment or operation is unlikely and will not create a hazard. Control Enclosures. Control enclosures should be designed to prevent accidental operation of controls by the equipment or the operator. It should be securely mounted in a clean and dry location.
6.6.1 6.6.2
6.6.3
7.0 Control Circuits

Circuits that do not have hazardous potentials or hazardous energy levels and that do not directly control potential safety hazards are exempt from this section. 7.1.1 7.1.2 Fail-Safe Design. Circuits should be so designed that a failure of any component in the system will prevent unsafe operation of the system. Connection of Control Devices. Control devices should be connected as follows: 1. Contacts should not be connected in parallel to attain required amperage capacity. 2. Control device contacts should open all ungrounded conductors of a circuit. 3. Indicator lamps and operating coils of control devices should have one terminal directly connected to the grounded side of the circuit. 4. Switches, contacts, and other control devices should be connected to the ungrounded side of the circuit. Exception: Motor overload relay contacts may be connected to the grounded side of the circuit if no part of the circuit extends beyond the control enclosure.
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7.1.3 Emergency Stop (E-Stop). Automated equipment and systems having hazardous mechanical interfaces may require unique and special E-Stop controls that remove the physical hazard at the interface but do not shut off the associated equipment. E-Stop controls should 1. Not be used in place of an EMO. 2. Be accessible to the person located at the hazardous interface position. 3. Stop all hazardous mechanical motion at the equipment interface. 4. Not create any unsafe conditions. 5. Be designed to stop through de-energization, rather than energization of circuits. 6. Take precedence over associated start controls. E-Stop must be clearly distinguishable from an EMO. Exception: The label should read "EMERGENCY STOP." 7.1.4 Shunt Trip Units. Shunt trip units should not be used in control circuits because they are not fail-safe. 7.1.5 Multiple Sources of Power. Equipment with multiple sources of power (see section 2.10) should comply with ALL of the following recommendations: 1. Each source of power should have a separate main electrical control enclosure. See section 5.2. 2. Each main electrical control enclosure should Be clearly and permanently labeled. (See section 1.2.) Have a lockable supply circuit disconnecting means that is interlocked with the enclosure door and de-energizes all hazardous potentials and hazardous energy levels within that enclosure. Have an EMO contactor that de-energizes all hazardous potentials and hazardous energy levels leaving that enclosure. Have an interlock circuit such that loss of power from any source will trip the EMO circuit. 3. Hazardous potentials from each main electrical control enclosure should be contained in separate conduit, cables, enclosures, and junction boxes. 4. Control circuits should Be supplied by the 60 Hz power source. Have nonhazardous potentials.
7.2
Large Equipment and Systems

1. Multiphase equipment and equipment operating at 120 V with 2 kVA or more main protection. 2. Two or more units connected together to form a system.
7.2.1
Recommended Control Circuits. Control circuits in large equipment and systems should comply with the following: 1. Equipment and systems should have an EMO control circuit.
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2. Equipment and systems should have a power control circuit. 3. An EMO contactor should be used to minimize the hazardous potentials and hazardous energy levels inside the electrical enclosure when the EMO switch is operated. Notes: 1. See Figure 28. 2. EMO circuits and power control circuits at same voltage level may be combined. 7.2.2 Control Circuit Limits. Control circuit limits for large equipment and systems are as follows: 1. EMO control circuit should not be over 24 V, nominal, or 240 VA. 2. Power control circuits should not be over 120 V AC or 50 V DC. Notes: 1. To minimize exposure to operators and service personnel, all control circuits should be limited to 24 V. 2. Circuits over 24 V should be designed, built, installed, enclosed, grounded, protected, and inspected for strict compliance with this standard. 7.2.3 AC Control Circuits. AC control circuits in large equipment and systems should be derived from a control transformer that complies with all the recommendations of section 2.6 and the following: 1. Should be sized to support the VA inrush of the circuit components. See Table 6 in section 2.6 and Table 9 in section 2.9. 2. Should be connected to the load side of main supply disconnect. 7.2.4 DC Control Circuits. DC control circuits in large equipment and systems should comply with the following: 1. Should be designed for complete electrical isolation between AC and DC circuits. 2. Should be properly protected for overcurrent. 3. Should be powered from the load side of the main supply disconnect.
7.3
System Circuit Recommendations

Units Mounted in or on other Units. Units in this type of system 1. Should have the same source of power. (See section 2.10.) 2. Should have the same supply circuit disconnecting means. (See section 2.10.) 3. Should have the same EMO circuit.
7.3.1
7.3.2
Multiple Units With Interconnecting Circuits. Multiple units having interconnecting circuits with hazardous potentials or energy levels 1. Should have the same source of power. (See section 2.10.)
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2. Should have the same supply circuit disconnecting means. (See section 2.10.) 3. Should have the same EMO circuit. (See sections 7.1 and 7.3.) 7.3.3 Multiple Units Mounted Separately. Multiple units mounted separately with NO interconnecting circuits with hazardous potentials or energy levels 1. May have separate sources of power. 2. May have separate supply circuit disconnecting means. 3. May have separate EMO circuits.
8.0 Temperature Limits

8.1 Conductors
Conductors should not be exposed to a temperature greater than 90% of their rating.
8.2
Components
Components should not be exposed to temperatures greater than 90% of their rating.
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SEMATECH Application Guide for SEMI S2-93 APPENDIX SUPPLEMENT A.1 TYPICAL GRAPHIC SYMBOLS
Figure 18 Typical Graphic Symbols for Electrical Diagrams, Part 1
Appendix Supplement A.1 Typical Graphic Symbols
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SEMATECH Application Guide for SEMI S2-93 Appendix Supplement A.2 Typical Circuits
Figure 23 Typical 120/208 Volt Facilities Power
Figure 24 Typical 277/480 Volt Facilities Power
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Appendix Supplement A.2 Typical Circuits
Figure 25 Typical 120 Volt Single-Phase Circuit
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Figure 26 Typical 208/480 Volt Single-Phase Circuit
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Figure 27 Typical 208/480 Volt Three-Phase Circuit
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Figure 28 Typical 208/480 Volt Three-Phase Circuit
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APPENDIX SUPPLEMENT A.3 ENCLOSURE RACEWAY TYPES

Partial List of NEMA Type Electrical Enclosures
General Purpose (Type 1) A general purpose enclosure is primarily intended to prevent accidental contact with the enclosed apparatus. It is suitable for indoor applications where it is not exposed to unusual service conditions. Weatherproof (Type 3) A weatherproof enclosure is intended to provide suitable protection against specified weather hazards. It is suitable for outdoor use. Watertight (Type 4) A watertight enclosure is designed to exclude water applied in the form of a hose stream. It is suitable for application where the apparatus may be subjected to a stream of water during cleaning operations. Watertight-Corrosion Resistant (Type 4X) A watertight-corrosion resistant enclosure is intended for indoor and outdoor use to provide protection against corrosion, windblown dust and rain, splashing water, and hose directed water. Hazardous Locations, Class I (Type 7) These enclosures are designed to meet the application requirements of ANSI/NFPA 70 for Class I Hazardous Locations. The type designation is incomplete without a suffix letter or letters (A, B, C, or D) that indicate the particular group or groups of hazardous locations (as defined in ANSI/NFPA 70) for which the enclosure is designated. Hazardous Locations, Class II (Type 9) These enclosures are designed to meet the application requirements of ANSI/NFPA 70 for Class II Hazardous Locations. The type designation is incomplete without a suffix letter or letters (E or G) that indicate the particular group or groups of hazardous locations (as defined in ANSI/NFPA 70) for which the enclosure is designed. Industrial Use (Type 12) An industrial use enclosure is designed for use in those applications where it is desired to exclude such materials as dust, lint, fibers, and oil seepage, or coolant seepage. Dust-Proof (Type 13) A dust-proof enclosure is intended primarily to prevent accidental contact with the enclosed apparatus and is so constructed that dust that may enter will not interfere with the operation of the apparatus. The construction of the enclosure can be defined only in relation to the apparatus and to the amount and kind of dust present.
Acceptable Raceway Types

See ANSI/NFPA 70 for definitions.
Rigid metal conduit Rigid nonmetallic conduit Electrical metallic tubing Liquid-tight flexible metal conduit Liquid-tight flexible nonmetallic conduit
Note: Flexible metal conduit or flexible metallic tubing without nonmetallic jacket should not be used.
Appendix Supplement A.3

Enclosure Raceway Types
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Appendix B Liquid hazardous Chemical Design Criteria
Appendix B
Design Criteria for Equipment Using Liquid Hazardous Chemicals
This appendix consists of a set of supplemental safety criteria intended to enhance and expand upon liquid hazardous chemical distribution and control topics addressed throughout the body of the guidebook. It is strongly recommended that the equipment manufacturer review the contents of this appendix for applicability to the equipment design in question. The safety philosophy set forth in these guidelines is that potential hazards in the operation and maintenance of equipment be identified and engineered out of equipment during the design and construction phases. Where identified hazards cannot be eliminated, no single-point failure or operational error should allow immediate exposure of personnel, facilities, or the community to hazards or directly result in injury, death, or equipment loss. All equipment should be failsafe or of a fault-tolerant design.
1.0 General Safety

1.1 Equipment designed to use wet chemicals should provide a method for purging chemicals from the internal components before performing maintenance procedures. Spill and leak containment should be provided for all liquids used in the tool.
1.2
2.0 Components
2.1 All electrical and pneumatic components of a chemical tool should be Shielded from splashing or spillage. Provided with adequate enclosures, based on the potential exposure (e.g., splash-proof, water-tight, or Class 1, Groups A through D as applicable, explosion-proof, etc.). 2.2 All components that could be exposed to flammable vapors should maintain ground continuity to eliminate the possibility of buildup and discharge of static electricity. At a minimum, the components should meet Article 500 of the National Electrical Code (Class 1, Electrical Components and Wiring) and at least one of the following: Be free of or isolated from ignition sources or open electrical components. Contain intrinsically safe electrical components and/or contain sealed nitrogen-purged electrical enclosures according to Article 500-1 of the National Electrical Code. Rendered safe by a) Providing an exhaust monitor that will place the tool in a safe condition upon exhaust failure (e.g., to drop power to the tool and cover the tanks).
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b) Providing a flammable vapor detector which upon detection of 10% of the lower flammable limit (LFL) will warn of the condition and will place the tool in a safe condition upon detection of 20% of the LFL. 2.3 Tanks, support structures, piping components, drip pans, exhaust plenums, and ducts used for flammable solvents should, if technically feasible, be built using ferrous materials according to NFPA regulations. If these components must be made of combustible materials because of corrosion concerns (e.g., contact with flammable/corrosive process chemicals), appropriate fire suppression (e.g., water, CO2) should be supplied for portions of the tool in which combustible material is used. Ferrous materials are preferred for other structural components (facades, decks, backboards) where possible. Plastic filter housing should not be used for flammable liquids. Piping components and filter housing should not be exposed to temperatures or pressures exceeding the manufacturer recommendations. Sources of heat s include heated chemicals, external heating, and heat produced by chemical reaction. Particular attention should be paid to the heat potentially released when certain chemicals mix with water in drain systems. Fail-safe over-temperature protection should be provided to prevent heated chemicals from exceeding the temperature rating of the tooling components. (See SEMI S3, Heated Chemical Baths.) Fittings, unions, filter housings, flexible piping, pumps, and waste lift stations that handle toxic, reactive, or corrosive liquids at elevated pressure should be shrouded or located within an enclosure designed to contain leaks. Welded ferrous metal piping systems are excluded. Shrouds should be considered to protect personnel when working within the enclosure. Metal compression tubing fittings should be comprised of parts produced by a single manufacturer.
2.4 2.5
2.6
2.7
2.8
3.0 Chemical Sensing

3.1 Equipment designed for wet chemical use should contain and sense internal leaks. The sensing equipment should provide an audible and visual alarm and shut down the chemical supply upon leak detection. Tanks should be either drained or provided with secondary containment that can hold at least 110% of the volume of the tank. To protect downstream waste lines, cooling capability should be provided on drain lines that carry hot chemicals from heated tanks. The tool may be allowed to finish processing the run after a leak is detected only if at least 110% leak containment is provided. Equipment using flammable chemicals should conform to all NEC and NFPA requirements regarding sensing devices and functions.
3.2
4.0 Exhaust
4.1 The use of internally or externally adjustable ventilation is discouraged. Equipment should be designed to distribute exhaust using properly sized plenums and ducts. If there is no practical way to avoid the use of dampers, they should be capable of being locked out after the exhaust capture has been tested and accepted by the end-user.
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4.2 4.3 Equipment ventilation design should minimize exhaust volume recommendations while maintaining required velocity. Tool exhaust should be designed to function properly within the limits of the enduser static pressure capabilities. The equipment manufacturer should consult s with the end-user to confirm the site exhaust capabilities. s All tool enclosures should be designed to provide sufficient exhaust ventilation to ensure that the concentration of flammable vapors is <20% of the LFL. If this cannot be assured by design, flammable vapor detectors should be installed in any portion of the tool in which flammable vapors can exceed 20% LFL. The detectors should be capable of placing the tool in a safe standby condition if the detection limit is exceeded. Tools should be designed to trap or scrub condensate which could have a destructive effect on the end-user exhaust system. s
4.4
4.5
5.0 Tanks
5.1 5.2 Tanks should be built using chemically compatible materials. For flammable chemicals, a ferrous alloy such as stainless steel should be used. To minimize leakage, tank penetrations (e.g., resistance temperature detector resistivity probes, bubbler tubes, and heating coil lead probes) should be constructed of material compatible with the tank. Where tank heaters penetrate the tank below the fluid level, the construction materials should have a coefficient of expansion that precludes opening of the joint during heat up and cool down. Tanks with surrounding jacket heaters should have walls of sufficiently thick material or reinforcement to prevent deformation or buckling from thermal stress. Tanks with bulk supplied chemicals should have a momentary fill switch and a fail-safe high-level sensor or a gravity drain overflow. Automated wet stations should provide overfill protection by means of a high-level sensor interlocked to close the supply valve. In tanks where agitation is provided by pressurized gas, the tubes or manifold discharge holes should point downward. Gas flow should be adjusted to the minimum acceptable flow when the tank is full using a lockable or tamper-proof needle valve and a separate on/off valve. Tanks containing flammable process chemicals should use an inert gas such as nitrogen for agitation. Chemical agitation lines should have a check valve to prevent back flowing into the gas supply line during pressure loss. The check valve and gas line should be compatible with the process chemical. The discharge holes on a filter recirculator distribution loop should be directed to the bottom of the tank. All chemical tanks should be covered when not in use. Automated tools should close covers automatically in case of an exhaust failure. To reduce emissions, it is recommended that chemical tanks be capable of being covered when not in use. In tools where incompatible chemicals are used or in which both combustible liquids and DI water are used or in which condensation can come in contact with combustible liquids, all tanks, plenums, and secondary containment should be designed to ensure that they will not become mixed.
5.3
5.4
5.5
5.6
5.7 5.8 5.9
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Appendix C
Hazardous Gas and Liquid Dopant Design Criteria
Appendix C
Design Criteria for Equipment Using Hazardous Gases and Liquid Dopants
This appendix consists of a set of supplemental safety criteria intended to enhance and expand upon hazardous gas and liquid dopant distribution and control topics addressed throughout the body of the guidebook. It is strongly recommended that the equipment manufacturer review the contents of this appendix for applicability to the equipment design in question. The safety philosophy set forth in these guidelines is that potential hazards in the operation and maintenance of equipment be identified and engineered out of equipment during the design and construction phases. Where identified hazards cannot be eliminated, no single-point failure or operational error should allow immediate exposure of personnel, facilities or the community to hazards, or directly result in injury, death, or equipment loss. All equipment should be failsafe or of a fault-tolerant design.
1.0 General Safety

1.1 Equipment designed to use HPM gases or liquid dopants should be provided with a method for purging chemicals from the internal components before performing maintenance procedures. Spill or leak containment should be provided for all liquids in the tool.
1.2
2.0 Components
2.1 Hardware - Pressurized Gas Systems 2.1.1 Control Assemblies Should be provided by the equipment manufacturer and leak tested. Should be labeled for the specific gas to be used. Each component of panel-mounted assemblies should be labeled and identified on an accompanying diagram. Certification of pressure and vacuum testing should be supplied. 2.1.2 2.1.3 All wetted surfaces should be compatible with gases contained. All components should be pressure rated as follows: High pressure: 1.5 times maximum cylinder pressure Low pressure: 2 times maximum delivery pressure. 2.1.4 Components and tube fittings should be welded in sub-assemblies wherever feasible, with face seal fittings to be used between subassemblies.
Appendix C
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2.1.5 Components installed downstream of a regulator should have a high pressure rating unless protected by redundant pressure sensing and a high pressure, normally-closed pneumatic valve, which should shut when delivery pressure exceeds 1.5 times normal. The pressure sensors should be installed adjacent to the regulator output. Process gas shut off valves should have a packless diaphragm or bellows seal with a static seat seal with non-rotating stem tip. Unless otherwise noted, valve operators should be normally-closed pneumatic with 60-80 psig (5 - 6.5 bar) actuation pressures to open. Other designs which provide equivalent reliability are acceptable. Components subject to plugging, such as filters and flow controllers, should be provided with evacuation and purge capability on both sides. If a bypass is used for this purpose, the bypass valve should Be pressure rated the same as any shutoff valve being bypassed. Be interlocked to prevent opening while gas supply valve is open. 2.1.8 Piping in HPM gas systems under pressure should include at least one of the following: 2.1.8.1 For tools where process chambers operate under vacuum, piping with HPM gases under pressure should have Containment in an exhausted enclosure or coaxial piping. Process chamber vacuum monitor interlocked to prevent gases from flowing unless base pressure recommendations are met. 2.1.8.2 For tools in which the process chambers operate at atmospheric pressure, piping with HPM gases under pressure should provide Containment in an exhausted enclosure or coaxial piping. Gas leak detection located as close as possible to the scavenger area of the tool. 2.1.9 The gas isolation box and the equipment gas panel enclosure should be sized to provide adequate clearance for operation of manual controls and the removal, replacement, and testing of components using standard tools.
2.1.6
2.1.7
2.1.10 All gas wetted surfaces should be cleaned for oxygen service as a minimum and purged with dry nitrogen and capped. 2.1.11 Access 2.1.11.1 An access door is an opening sized to permit access to all components within an equipment gas panel enclosure or gas isolation box. Access doors to enclosures housing HPM should be interlocked according to SEMI S2-93, section 5, SafetyRelated Interlocks. 2.1.11.2 An access port is an opening sized to permit one hand operation or routine operation of a component. Interlocking is not required if the system complies with section 10.1 of this guide.
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Appendix C

2.2 Hardware - Liquid/Vapor Systems Including Bulk Delivery Systems 2.2.1 Control Assemblies 2.2.1.1 Should be vendor-supplied and leak tested to 2X the liquid vapor pressure and carrier gas maximum pressure. 2.2.1.2 Certification of leak testing should be supplied. 2.2.1.3 Should be labeled for the specific liquid or vapor to be used. 2.2.1.4 Each component should be labeled and identified on an accompanying diagram. 2.2.2 2.2.3 2.2.4 All wetted surfaces should be compatible with the liquids and/or vapors contained. All components should be pressure rated according to 2X the maximum carrier gas pressure or the liquid vapor pressure, whichever is higher. Flexible hose may be used in non-combustible liquid systems. Ferrous material is necessary for flammable sources and carrier gases. When ferrous tubing cannot be used because of compatibility concerns, flexible tubing inside a protective jacket should be used (e.g., Teflon with braided stainless steel shielding). Components and tube fittings should be made in welded subassemblies where feasible, with face seal fittings to be used between subassemblies. Manual shutoff valves on source container ports may be plug or ball type with sliding seals. Other types of valves with equivalent reliability are acceptable. Process liquid/vapor shutoff valves should have packless bellows or diaphragm seal with a static seat seal with non-rotating stem tip. Unless otherwise noted, valve operators should be normally closed pneumatic with 60-80 psig (5 - 6.5 bar) actuation pressures. Other valve designs that provide equivalent reliability are acceptable. Bubblers using flammable or otherwise hazardous carrier gases should incorporate redundant shutoff valves in the gas supply to the source container. Redundant valves are preferred in most delivery systems but are not recommended where condensation is possible. Container assemblies should be secured in the source compartment and positioned to provide visibility if a viewing port is provided. Source container should be able to be changed without disturbing fittings in any rigid portion of the assembly.
2.2.5
2.2.6
2.2.7
2.2.8
2.2.9
2.2.10 Purge and relief vents should terminate inside the exhaust duct and should contain no components or restrictions. 2.2.11 The source compartment should be sized to provide adequate clearance for the operation of manual valves and removal, replacement, and testing of components using standard tools. 2.2.12 A mechanism for removing all liquids or vapors in the delivery lines before disconnecting the source container or other components is recommended. For highly toxic liquid source lines, automatic and monitored vacuum/pressure purging is recommended before bubbler or line disconnects.
Appendix C
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2.2.13 Acceptable methods for source liquid replenishment are Direct replacement of the source container. Manual or automatic refill from another container through delivery lines. 2.2.14 Where the carrier gas or source liquid is flammable or flammable under operating conditions, the recommendations in section 8 of this appendix should be met.
3.0 Labeling
3.1 Labeling recommendations are as follows: Caution signs stating that toxic gas delivery systems are to be shut down and purged before entry and that only trained personnel are allowed access are recommended on each gas isolation box and equipment gas panel enclosure. Gas, vapor, and liquid lines should be clearly labeled at entry and outlet and within compartments as necessary for clear identification. Valves should be labeled (numbered) as referenced in piping diagram and equipment manual Piping diagrams identifying each line and component by their contents should be readily available. Leak detectors should be labeled with the sensor identification and the chemical being monitored. A diagram of the tool layout with the location of each sensor should be posted. Exhaust failure and leak detector alarms, if present, should be labeled clearly identifying the alarm condition and the appropriate action to be taken. Interlocked doors and panels should be clearly labeled as such.
4.0 Exhaust Ventilation

Exhaust air recommendations should conform to section 10, Ventilation and Exhaust, of this guide. 4.1 The following should be exhausted: 4.1.1 Each gas isolation box and equipment gas panel enclosure (external cylinder gas supply) utilizing HPM gases (NFPA rating of 3 or 4 for health fire or reactivity). Each tool cylinder gas compartment (internal cylinder gas supply) using HPMs. Each liquid source compartment including cabinets for liquid replenishment systems. Any portion of the tool that contains HPMs above atmospheric pressure that is not in coaxial piping. A lip exhaust around process chambers open to atmosphere during loading (i.e., process chambers without loadlock chambers). 103 Revision 2.0 Appendix C
4.1.2 4.1.3 4.1.4 4.1.5

4.1.6 4.1.7 Vacuum pump discharges per the recommendations of sections 10.7 and 10.8 of SEMI S2-93. Vacuum pump enclosure as part of the equipment installation (if requested by the end-user). One drop can exhaust both the vacuum pump discharge and the enclosure.
4.2 4.3
Exhaust flow rates for the first four items above should be according section 10.5 of this guide. Exhaust flow rate for pyrophoric gases should be at least 100 linear feet per minute (lfm). NOTE: Current research suggests that air velocity may not be a significant factor in mitigating the hazard of pyrophoric gas ignition; however, best practice currently encourages this minimum exhaust velocity.
4.4 4.5
Exhaust air flow should meet the recommendations of the most hazardous gas in the enclosure. The lip exhaust recommended for process chambers open to atmosphere during loading should provide sufficient volume to remove toxic out-gassing when the chamber is opened. Slot exhausts should have 2000 fpm (10 m/s) minimum slot velocity and should provide adequate capture velocity across the entire opening. Exhaust air flow through enclosures should be sufficient volume, velocity, and even distribution to ensure that no dead spaces allow gas pockets to develop in case of a leak. Exhaust air flow should minimize the impingement of a corrosive gas leak on other components. Each exhaust drop should be monitored according to section 10.9 of this guide.
4.6
4.7 4.8
5.0 Toxic/Corrosive Gas

5.1 Gas Isolation Box (when part of the equipment) Each toxic (NFPA Health Hazard = 2, 3, or 4) gas delivery system containing a gas isolation box adjacent to the equipment gas panel enclosure should allow for local shutoff, purging of the toxic gas supply to the tool and lockout/tagout capability. Note: This section applies to manufacturers of gas isolation boxes or equipment suppliers who incorporate a gas isolation box in their tool. 5.1.1 Common Exhaust - The gas isolation section may share a common exhaust with the equipment gas panel enclosure. A barrier between the gas isolation section and the equipment gas panel enclosure should provide adequate exhaust velocity and distribution for the gas isolation section. Redundant Shutoff Valves - Each delivery line in the isolation box should contain two shutoff valves with a pressure/vacuum indicator to monitor the section between the valves for maintenance of vacuum isolation. The first valve should be a high pressure shutoff valve. Note: The intent if the pressure/vacuum indicator is to allow a person working within the compartment to assure that the gas lines are purged and the upstream valves are not leaking.
5.1.2
Appendix C
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5.1.3 Gas Line Location - Locate corrosive gas lines in the isolation box so that exhaust air flow will minimize the impingement of a corrosive gas leak on other components in box. Isolation Box Construction - The box should be constructed of noncombustible materials with exhaust air flow according to section 4 of this appendix. The access door should be interlocked to shut gas flow when opened, according to section 5 of this guide. Hardware should consist of the following: 5.1.5.1 The box should be able to accept a double-walled inlet line from the source gas cabinet. 5.1.5.2 A high pressure pneumatic shutoff valve. 5.1.5.3 A pressure/vacuum gauge or indicator visible from the exterior of the isolation box through an opening or fire-retardant transparent panel. Pressure transducers and remote display are an acceptable alternative. 5.1.5.4 A second pneumatic shutoff valve. 5.1.5.5 An automatic purge/vent mechanism capable of evacuation and pressure cycling. A nitrogen eductor discharging into the exhaust duct is the preferred vacuum source. The nitrogen purge and eductor inputs should contain a means of preventing back flow. Incompatible gases should have independent purge sources and be interlocked to prevent mixing of purge/exhaust streams. Interlock vent valves with high pressure valves to prevent potential cylinder discharge and with eductor nitrogen input to prevent air/gas reactions. 5.1.5.6 The tool gas compartment should be capable of accepting a double-walled outlet line. 5.1.6 Controls - Typical controls for a gas isolation box are shown in Figure 1.
Exhaust
5.1.4
5.1.5
NC
NO COM
Cylinder N2
Cylinder or House N2
HP Gas In Gas Out
Figure 1 Gas Isolation Box

(see page 116 for symbol legend)
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Appendix C

5.2 Equipment Gas Panel Enclosure Gas lines, fittings, and components within the tool that may be subjected to above atmospheric pressure during normal tool operations or in a single failure mode are to be segregated into a dedicated compartment or enclosure. 5.2.1 Construction - The compartment should be constructed of noncombustible materials with exhaust air flow according to section 4 of this appendix. Components - Components for each gas supply should include redundant shutoff valves, pressure/vacuum sensing, flow controls, and a means of preventing back-pressure or back-flow from the manifold or reaction chamber in a failure mode. Gas Line Location - Locate corrosive gas lines so that exhaust air flow will minimize the impingement of a corrosive gas leak on other components. Access doors and ports should be as defined in the Glossary. Recommended Compartments - Only one equipment gas panel enclosure is recommended if it meets the recommendations of the most hazardous gas present. Low-Toxic Gases - The following is recommended for HPM gases with an NFPA health hazard = 0 or 1. 5.2.5.1 A low pressure pneumatic shutoff valve. 5.2.5.2 For inert purge gases, one of the following: A low pressure normally closed pneumatic shutoff valve where a purge gas flow after tool shutdown would introduce a safety hazard. A low pressure normally open pneumatic valve where failure of the purge gas would introduce a safety hazard. 5.2.5.3 The recommended flow controls. 5.2.5.4 A mechanism to prevent backflow. 5.2.6. Toxic Gases - For HPM gases with an NFPA health hazard rating of 2,3, or 4, the following is recommended. 5.2.6.1 Toxic gas delivery line terminating in the compartment. The point of termination should accommodate coaxial line. 5.2.6.2 Redundant low pressure pneumatic shutoff valve to cycle on and off as the tool calls for gas. 5.2.6.3 An optional point-of-use filter per process recommendations, with purging capability according to section 2.1, Components Hardware - Pressurized Gas Systems. 5.2.6.4 A pressure/vacuum sensor to verify line pressure and purge sequences, readable without opening gas compartment access door. A pressure transducer and remote display are an acceptable alternative. (See section 5.1.5.3 of this appendix). 5.2.6.5 Tool flow controls with purging capability according to section 2.1 of this appendix.
5.2.2
5.2.3
5.2.4
5.2.5.
Appendix C
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5.2.6.6 A check valve or pneumatic shutoff valve to prevent backflow where manifold pressure is above atmospheric during normal tool operations. 5.2.6.7 Capability of locking out process gas flow to individual chambers on multi-chamber tool to allow for maintenance operations on selected chambers during normal tool operations. 5.2.7 Controls - Typical controls for an equipment gas panel enclosure are shown in Figure 2.
Figure 2 Typical Controls for Tool Gas Compartment

5.3
Internal Cylinder Toxic Gas Supply Systems This section applies to tools using HPM gases (NFPA health hazard = 2/3/4) supplied from a cylinder regardless of pressure, which are housed within the tool (e.g., ion implanters). 5.3.1 Cylinder Gas Supply System - The cylinder gas supply system should consist of 5.3.1.1 A metal compartment containing all cylinders, gas lines, fittings, and components under positive pressure. Access doors to the compartment should be interlocked to shut off gas flow when the door is opened, according to section 5 of this guide. 5.3.1.2 Gas cylinders should be secured in place with metal constraining devices. The cylinders should be equipped with normally closed pneumatic valves with manual shutoff capabilities. 5.3.1.3 A remotely controlled cross-purge assembly, securely mounted, with the following components: A CGA cylinder connection with flexibility to allow for cylinder variations, as with a tubing coil. A high pressure, normally closed, pneumatic isolation valve. A high pressure, normally closed, pneumatic inert purge gas valve connected to an eductor or a vacuum pump and a vacuum monitoring device.
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Appendix C

A high pressure, normally closed, pneumatic inert purge valve. The eductor discharge line to exhaust should be one size larger than the vacuum inlet. A pressure/vacuum sensor to monitor purge cycles and abort the sequence if not correct. 5.3.1.4 A pressure regulator with the following components: An inlet particulate filter, if not included in the regulator. A metal tied diaphragm. A bonnet vent line to exhaust. A reduced pressure indicator. (Note: A pressure regulator is not required for cylinders with gases at subatmospheric pressures.) 5.3.1.5 Two pressure sensors set at 2X the delivery pressure of 10 psig (1.7 bar) minimum, to shut the cylinder valve and isolation valve on excess pressure. 5.3.1.6 A gas filter per process recommendations. 5.3.1.7 A high pressure, pneumatic, shutoff valve. 5.3.2 Typical Controls - A typical cylinder gas supply system is shown in Figures 3 and 4.
Exhaust
Exhaust
House N2 PT HP HP Cylinder N2
Tool Control Bypass
House N2 PT HP
Tool Control Bypass
HP
OPT IPT
HP
IPT
To Process
MFC
HP Cylinder N2
To Process
Figure 3 Typical Controls for High Pressure Toxic Internal Cylinder Gas Supply
Figure 4 Typical Controls for Subatmospheric Pressure Toxic Internal Cylinder Gas Supply
Appendix C
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5.4 Liquid and Vapor Dopant Supply Systems This section applies to tools using toxic vapor supplied from evaporation or bubbler sources and to liquid dopant injection systems. 5.4.1 Source Compartments - The following are recommendations for source compartments: 5.4.1.1 Toxic liquid sources and related delivery controls should be housed in non-combustible compartment with exhaust air flow according to section 4, Exhaust Ventilation. Where source containers are refilled by piping from a supply container, this container should be located in a similar compartment. 5.4.1.2 The compartment exhaust should be interlocked according to section 5 of this guide to isolate the source container and, if recommended, drop power. 5.4.1.3 If spillage or leakage is possible and secondary containment is not provided, the compartment should contain 110% of the liquid volume of the source container. 5.4.1.4 Liquid or vapor leak detection. 5.4.2 Source Containers - The following are recommendations for source containers: 5.4.2.1 Source containers should be DOT/UN approved shipping containers unless specifically designed for bulk replenishment system. 5.4.2.2 Ports should have shutoff valves to isolate the source when the container is removed and transported. 5.4.2.3 Port fittings must be designed to prevent interchanging of connections fittings (i.e., connecting containers to the wrong line or reversing the inlet and outlet connections.) 5.4.2.4 Containers with automatic refilling should have an interlocked high level sensor appropriately interlocked with the dispense system to prevent overfilling. 5.4.2.5 Containers should have secondary containment capable of containing 110% of the liquid volume, equipped with a viewing port and a means of detecting a leak. 5.4.3 Carrier Gas Supply System The following are recommendations for carrier gas supply systems: 5.4.3.1 Carrier gases may be used to transport vapors in a bubbler system. 5.4.3.2 An inert carrier gas should be used as a purge source. 5.4.3.3 The carrier gas supply system should include: A pressure regulator sized to provide a maximum delivery pressure lower than the allowable pressure rating of the source container. A pressure indicator located at the source cabinet. A check valve to prevent reverse flow. 109 Revision 2.0 Appendix C

A pressure relief device, if any component of the delivery or replenishment system does not comply with section 2.2.1. This device should relieve three-fourths of the working pressure of the lowest rated component and discharge into the compartment exhaust. 5.4.3.4 A typical inert carrier gas control system is shown in Figure 5.
Exhaust
N2
To Source Container
Figure 5 Typical Controls for Inert Gas for Liquid Source Vapor Supply System
5.4.4
Liquid Dopant Sources 5.4.4.1 Liquid injection systems should be designed to allow purging before maintenance or servicing. For highly toxic liquid source lines, automatic and monitored vacuum/pressure purging is recommended before maintenance or servicing. 5.4.4.2 The delivery line should contain a shutoff valve and means of verifying that the line has been purged before maintenance activities, according to section 2.2. 5.4.4.3 A typical evaporation system is shown in Figure 6.
Exhaust Bypass OPT Liquid Dopant LFC ICV To Process
N2 Purge Gas MFC Inert Gas
To Pump
Figure 6 Typical Controls for Liquid Dopant Injection Compartment

5.4.5
Evaporation Systems - The following are recommended: 5.4.5.1 Evaporation systems should be designed to allow purging before maintenance or servicing For highly toxic liquid source lines, automatic and monitored vacuum/pressure purging is recommended before maintenance or servicing.
Appendix C
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5.4.5.2 The deliver line should contain a shutoff valve according to section 2.2. 5.4.5.3 A typical evaporation system is shown in Figure 7.
Exhaust From Replenishment System (optional)
To Process (vacuum)
Liquid Source Container
Secondary Containment With Viewport
Figure 7 Typical Controls for Liquid Source Vapor Supply Evaporator

5.4.6
Bubbler Systems - The following are recommended: 5.4.6.1 The carrier gas supply should have a flow control device. 5.4.6.2 A bypass should be provided to purge the bubbler before a change. For highly toxic liquids, automatic and monitored vacuum/pressure purging is recommended. Bubbler systems should be designed to allow for purging lines and bubblers for maintenance and servicing. 5.4.6.3 Non-inert carrier gases should be purged from the bubbler before a change. 5.4.6.4 Carrier gas supply and delivery lines should both contain shutoff valves, according to section 2.2.
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Appendix C

5.4.6.5 A typical bubbler system with an inert carrier gas is shown in Figure 8.
Exhaust
N2
MFC Bypass
To Process (atmospheric) From Replenishment System (optional)
Secondary Containment With Viewport
Figure 8 Liquid Source Vapor Supply Bubbler with Inert Carrier Gas
5.4.6.6 A typical bubbler system with a flammable carrier gas is shown in Figure 9.
Exhaust
To Process
N2
H2
Secondary Containment with Viewport
Figure 9 Liquid Source Vapor Supply Bubbler System with Flammable Carrier Gas
5.4.7
Liquid Replenishment Systems - The following are recommended: 5.4.7.1 Containers should be DOT/UN approved shipping containers. 5.4.7.2 The source container should have shutoff valves and noninterchangeable fittings, according to section 5.4, Source Containers. 5.4.7.3 The source outlet line should be designed to minimize spillage of liquid during a reservoir change.
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5.4.7.4 Provide a vent to exhaust any positive pressure before a reservoir change. 5.4.7.5 Provide a pressure relief valve set at < 3/4 of the design pressure rating of the lowest rate component in the system. 5.4.7.6 Input and delivery lines should both contain shutoff valves, according to section 2.2.6. 5.4.7.7 Capability should be provided to purge all liquid from the lines for canister replacement. 5.4.7.8 A typical replenishment system is shown in Figure 10.
Exhaust
N2
To Liquid Source
Liquid
Secondary Containment with Viewport
Figure 10 Liquid Source Supply Liquid Replenishment System

6.
Interlocks and Controls

6.1 Failure Detection - When a failure is detected 6.1.1 6.1.2 The interlock circuit should shut off the chemical flow. The interlock circuit should be designed to interface with external controls (e.g., normally closed 24 VDC circuit to actuate a central alarm system). Tool circuits should remain intact to allow removal of residual chemicals.
All interlocks and controls should be fail-safe according to SEMI S2-93.
6.1.3 6.2
Shutoff, External Gas Supply System - Failure detection shutoff for a tool with an external gas supply system should be as follows. 6.2.1 A tool shutdown shuts the gas off at the high pressure valve in the isolation box (when provided) or the first facilities control valve upstream of the equipment and at least one other low pressure valve simultaneously. A tool shut down circuit opens upon 6.2.1.1 Normal tool shutdown. 6.2.1.2 Loss of process vacuum. 6.2.1.3 Loss of vacuum pump purge gas or dilution of flammable or pyrophoric gases.
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6.2.1.4 Loss of tool exhaust. 6.2.1.5 Loss of vacuum pump enclosure exhaust, when provided. 6.2.1.6 Vacuum pump enclosure door open, when provided. 6.2.1.7 Tool gas compartment door open. 6.2.1.8 Actuation of gas detector alarms where requested by the enduser. 6.2.2 A system shutdown shuts the gas off at the first facilities control valve upstream of the equipment and at the tool as described above. A system shutdown circuit opens upon 6.2.2.1 Loss of electricity. 6.2.2.2 Tool emergency shutdown. 6.2.2.3 Failure of any device of component in the circuit. 6.2.2.4 Loss of exhaust to the gas isolation box. 6.2.2.5 Gas leak detection. 6.2.2.6 Gas isolation box access door open. 6.2.2.7 Toxic gas high delivery line pressure signal from the gas source. 6.2.3 Shutoff, Internal Gas Supply System - Failure detection shutoff for a tool with an internal supply system should be as follows: 6.2.3.1 Shutoff is a system shutdown that closes the cylinder valve and the high pressure valve. 6.2.3.2 A system shutdown circuit opens upon All of applicable items in section 6.2 of this appendix Loss of cylinder gas compartment exhaust. Cylinder gas compartment door open, unless the tool is interlocked to shut down gases to gain access to the gas compartment or if the system complies with section 10.1 of this guide. Toxic gas high delivery pressure, unless components exposed are rated for 1.5X cylinder pressure. Actuation of gas detector alarm when requested by the enduser. 6.2.4 Shutoff, Liquid and Vapor Dopant System - Failure detection shutoff for a tool with a liquid or vapor dopant system should be as follows: 6.2.4.1 Shutoff is a system shutdown which closes the carrier gas supply valve or liquid pump and the delivery valve. 6.2.4.2 A system shutdown circuit opens upon: All of applicable items in section 6.2 of this appendix Loss of liquid source cabinet exhaust. Liquid source cabinet door open, unless the system complies with section 10.1 of this guide.
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Actuation of liquid leak detection. The system complies with section 10.1 of this guide. 6.2.5 6.2.6 Manual Reset - The interlock circuit should remain open until manually reset. Alarm and Monitoring - Provisions for both a local alarm and a remote central monitoring system should be provided.
7.
Vacuum Pumps
7.1 7.2 The vacuum pump should be approved by the vendor for the process gases used. Dry pumps are preferred. Wet pumps should use an oil compatible with the process gases used. 7.2.1 7.2.2 7.3 7.4 7.5 For oxygen or other reactive gases, a perfluorinated oil is recommended. Connections should be provided for sealed oil changing carts.
Vacuum piping should be compatible with the gases contained. Metallic piping is recommended for flammable and pyrophoric gases. Where residues may collect, the vacuum piping should be accessible for inspection and cleaning Vacuum pumps handling highly toxic gases or vapors with NFPA health, flammability or reactivity rating of 3 or 4 should be nitrogen purged with purge flow monitoring and interlocking of all branches of the nitrogen lines. Isolation of cryo pumps from process chamber before the introduction of toxic, flammable, or pyrophoric gases is recommended.
7.6
8.
Flammable Gas/Vapor Recommendations (NFPA: Flammability = 3 or 4)

8.1 General Recommendations 8.1.1 8.1.2 8.1.3 All applicable Toxic Gas recommendations in section 5 should be met. Flammable gases and vapors should be isolated from oxidizers and sources of ignition. Electrical components within the equipment gas panel enclosure and in any space with flammables under pressure should comply with one of the following: 8.1.3.1 Be designed according to the National Electric Code, Articles 500 and 501, meeting Class I, Division 2, Group B, C, or D requirements, or 8.1.3.2 Be intrinsically safe according to NFPA 493, or 8.1.3.3 Be rendered safe by a combination of items 1 and 3 or 2 and 3 below:
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1. A monitored exhaust to drop power to the affected spaces and shut off gases on loss of exhaust. 2. Nitrogen purged enclosures according to NFPA 496. Nitrogen purge flow should be monitored to drop power to the affected spaces and shut off gases on loss of flow. 3. Flammable gas leak detection to drop power to the affected spaces and shut off gases on sensing 20% of the LFL. 8.2 Introduction of Flammable Gas/Vapor 8.2.1 The system should be designed with the capability to 8.2.1.1 Purge air or oxygen or other oxidizer from the tool by a fixed purge control program, or 8.2.1.2 Ensure that the ignition temperature for the gas is exceeded and that excess oxygen is available to guarantee complete combustion. 8.2.2 Chambers within the tool where combustion of the gas is possible should be designed to contain the maximum reaction pressure possible or have adequate explosion relief. Flammable gas discharges from the tool should meet one of the following criteria: 8.2.3.1 Diluted with an inert gas to below 20% of the LFL before discharge into the exhaust system; the inert gas flow must be interlocked as in section 8.5, Pyrophoric Gas. (Exception: Hydrogen may be diluted to 5% in nitrogen before discharge.) 8.2.3.2 Ignited by an approved burn-off unit containing a sensing unit that ensures automatic shutoff of flammable gas and inert gas purge on loss of ignition temperature.
8.2.3
9.
Pyrophoric Gases
9.1 All applicable recommendations of section 5, Toxic Gas, should be met, except that exhaust air flow within all enclosures containing silane under pressure should exceed 100 lfm at all potential leak sites. Potential leak sites should be located in a free-flowing, non-baffled air stream and should be accessible for exhaust air flow measurement. Silane should be diluted in nitrogen to 2% before discharge into an exhaust air stream, or an approved, monitored burn-off system should be provided. Nitrogen supply to vacuum eductors should be sequenced and interlocked to purge air/oxygen from the vent line before venting silane. Where monitored burn-off systems are not installed, temperatures should be sensed at the point of connection to the facilities exhaust duct and at the point of mixing with dilution air if these points are separated. When temperatures exceed 25% above normal maximum operating temperatures, the interlock circuit should be opened and the alarm circuit closed to the local alarm and the remote central monitoring system.
This section applies to tools using detonable pyrophorics: >2% silane (disilane).
9.2
9.3
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9.4 Vacuum pumps should be nitrogen purged according to the manufacturer s recommendations. Purge gas flow should be monitored to shut off Silane flow if insufficient. Vacuum pump discharges should be nitrogen diluted to 2% silane before discharge to the exhaust system. 9.5.1 9.5.2 9.5.3 9.6 This dilution level should be provided for all systems running at maximum flow and be interlocked. Provide flow restrictors in all purge/bypass lines to ensure silane dilution to <2%. Pump discharge lines should be accessible for regular inspection for buildup of reaction residues.
9.5
Vacuum tools should be protected against accumulation of silane in the process chamber. 9.6.1 9.6.2 After silane shutoff, but before venting, a leak-check sequence should be performed to determine silane valve leak-through. If leak-through is detected, the tool should be interlocked to remain under vacuum until corrective action is taken.
10. Oxidizer Gas Recommendations (NFPA Oxidizer)

10.1 10.2 Oxidizer gases should be isolated from flammable and pyrophoric gases. Gas flows should be interlocked to controls such as purge, pressure/vacuum, or temperature sensing to prevent flow unless safe reaction conditions are present.
11. Corrosive Gas Recommendations

11.1 11.2 Corrosive gas recommendations are covered, in general, in section 5 of this appendix. Corrosive gas eductor vent discharges in the gas isolation box should be continuously purged to preclude moisture.
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Symbols and Abbreviations
PRESSURE REGULATOR MFC LFC ICV PT IPT MASS FLOW CONTROLLER LIQUID FLOW CONTROLLER INJECTION CONTROL VALVE PRESSURE TRANSDUCER INDICATING PRESSURE TRANSDUCER FILTER NO----NORMALLY OPEN NC----NORMALLY CLOSED COM---COMMON HP----HIGH PRESSURE LP----LOW PRESSURE OPT---OPTIONAL
Symbols Legend
Appendix C
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Sematech Safety Guide - Silane

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SEMATECH Application Guide 2.

SEMI S2-93 and SEMI S8-95

To purchase a copy of this guidebook, contact

To purchase a copy of SEMI S2-93 or SEMI S8-95, contact

William J. Spencer Chairman and Chief Executive Officer SEMATECH

i Revision 2.0 Foreword

ii Acknowledgements Revision 2.0

iii Revision 2.0 Preface

iv Preface Revision 2.0

v Revision 2.0 Preface

WHILE EVERY ATTEMPT HAS BEEN MADE TO REFERENCE KNOWN APPLICABLE

vi Disclaimer Revision 2.0

PART ONE: S2-93 APPLICATION GUIDE

PART TWO: S8-95 APPLICATION GUIDE

ix Revision 2.0 Table of Contents

Application Guide for

SEMATECH Application Guide for SEMI S2-93

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SEMATECH Application Guide for SEMI S2-93

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SEMATECH Application Guide for SEMI S2-93

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SEMATECH Application Guide for SEMI S2-93

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SEMATECH Application Guide for SEMI S2-93

Table 5.4 Mesh Shield Sizes

SEMATECH Application Guide for SEMI S2-93

SEMATECH Application Guide for SEMI S2-93

The equipment manufacturer should provide documentation identifying the following:

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Typical Location Monitored

Equipment Typically Used for Survey

Visible Light and Near-IR

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Ventilation and Exhaust

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TABLE 10.5 ENCLOSURE TESTING METHODS

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Heated Chemical Baths