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HV
UHV and UHV-T positioners are delivered without evacuation and bake-out process. This must be done at the customer's site.
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
feedthrough
cable length from positioner to sensor module should be as short as possible (max. 100cm)
If you don't need an internal sensor feedback the sensor module can be omitted. You can than choose between the different controllers like HCU, MCS, or AVC according to the required resolution.
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
Feedthrough Options
The feedthrough for a positioning system depends on the level of vacuum, on the number of positioners and on the available flange. For each open-loop positioner we need two pins (HVOUT and HV-GND) and for each positioner with integrated nano sensor we need at least 10 pins. We recommend to use 12 pins, so that we can connect to the calibration of the sensor (SSCL, S-SDA). There are three variants of feedthroughs for single positioners that are all compatible regarding the gender, the pin layout and the tappets.
High vacuum
controller
positioner
male female male female 1 tappet 2 tappets same side red point opposite to red point 14 pin Lemo feedthough with Lemo plugs
controller positioner male female male female 1 tappet 2 tappets same side red point opposite to red point 14 pin UHV feedthough with Lemo plugs
controller positioner male female male female 1 tappet 2 tappets opposite to red point opposite to red point 14 pin UHV feedthough with stainless steel plugs
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
DN40CF flange
For vacuum level down to 10 -6 mbar LEMO feedthroughs are used. These feedthroughs use an o-ring and are tightened by a screw nut from the vacuum side. Here you see a DN40CF flange with a hole of 16.1mm for a LEMO feedthrough. The atmospheric plug is always straight. Our standard delivery for the vacuum plug is right-angle. If you prefer to have a straight plug in the vacuum chamber please add a -GG to the order code. We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough and the complete cabling. We can deliver the according flange on request. Order code
LEMO-VF-CON-6 LEMO-VF-CON-14 LEMO-VF-CON-16 LEMO-VF-CON-32
used for
up to three open-loop positioners one positioner with integrated nano sensor one positioner with integrated nano sensor up to three positioners with integrated nano sensor
The size 1B needs a hole with a diameter of 12,1mm in the flange where it could be tightened. The hole for the 2B series needs a diameter of 16,1mm in the flange.
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough welded into the flange and the complete cabling. Order code
ALB-VF-SJG-CONUHVT-10 ALB-VF-SJG-CONUHV-10 ALB-VF-SJG-CONUHVT-14 ALB-VF-SJG-CONUHV-14 ALB-VF-SJG-UHVTCON-28 ALB-VF-SJG-CONUHV-28 ALB-VF-SJG-CONUHVT-42 ALB-VF-SJG-CONUHV-42 ALB-VF-SJG-UHVTCON-56 ALB-VF-SJG-UHVCON-56 ALB-VF-SJG-UHVT-
one positioner (-UHVT) brass, nickel, chrome with integrated nanosensor (-S) one positioner (-UHV) with integrated nano sensor (-S) two positioners -S-UHVT two positioners -S-UHV three positioners -S-UHVT three positioners -S-UHV four positioners -S-UHVT four positioners -S-UHVT five positioners stainless steel
14
DN16CF
28 28 42 42 56 56 70
brass, nickel, chrome stainless steel brass, nickel, chrome stainless steel brass, nickel, chrome stainless steel brass, nickel, chrome
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
CON-70 ALB-VF-SJG-CONUHV-70 ALB-VF-SJG-CONUHVT-84 ALB-VF-SJG-CONUHV-56 ALB-VF-SJG-CONUHV-168 70 84 56 168 DN63CF DN63CF DN63CF DN63CF
-S-UHV five positioners -S-UHV six positioners -S-UHV six positioners -S-UHV twelve positioners -S-UHV stainless steel brass, nickel, chrome stainless steel stainless steel
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
DN40CF flange with a D-SUB15 feedthrough We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough welded into the flange and the complete cabling. Order code
ALL-VF-CON-15
one positioner (-UHVT) body material: PEEK with integrated nanosensor (-S) or up housing (optional): aluminium to three open-loop positioners one positioner (-UHV) with integrated nanosensor (-S) or up to three open-loop positioners body material: PEEK housing (optional): alumium
ALL-VF-CON-UHV-15 15
DN40CF
ALL-CON-UHV-15
15
DN40CF
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de
September 2011
Two MCS-3S-LEMO1B sensor modules with two LEMO 1B plugs on a DN40CF flange for connecting two -UHV or -UHVT positioners to each sensor module.
SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de