Proceedings of the 4th International Conference on

Nanostructures (ICNS4)

12-14 March 2012, Kish Island, I.R. Iran

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Development of Hydrogen Sensor Using Highly-Ordered TiO2 Nanotube Arrays

N. M. Mohamed *, N. Soriadi , F. A. Hussin a Department of Fundamental & Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia b Department of Electrical & Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia *noranimuti_mohamed@petronas.com.my
a b b

Palladium Modified Hybrid Thin Film as Hydrogen Sensors

R. Ghasempour a, A. Iraji zad a, b* a Institute for Nanoscience and Nanotechnology, Sharif University of Technology, Tehran, 14588, Iran b Department of Physic, Sharif University of Technology, Tehran, 14588, Iran * Iraji@sharif.edu

As the demand for hydrogen analyzer increasing in medical diagnostics, accurate and fast response hydrogen detection is critical especially for the detection of different type of health problems. Highlyordered TiO2 nanotube array has been chosen as the sensing element in the hydrogen sensor because of its highly sensitive electrical resistance to hydrogen over a wide range of concentration. Investigations were carried out to determine the optimum pore size of nanotubes and the operating temperature that can give the highest sensitivity for detection of very low concentration of hydrogen. Nanotubes array with the average pore size ranging from 58 nm to 75 nm were fabricated by the electrochemical anodic anodization followed by annealing process and tested at two different operating temperatures and varying hydrogen concentration from 10 ppm to 100 ppm. Highest sensitivity was found with operating temperature of 300C as a result of enhanced dissociative chemisorption of hydrogen onto TiO2 nanotube surface. TiO2 nanotubes with smaller pore size show the higher sensitivity to hydrogen compared to the larger ones as they can provide larger surface area for chemisorption to occur for detection of contained hydrogen with concentration as low as 10 ppm. Keywords: TiO2 nanotubes; Sensitivity; Anodization; Pore size; Annealing APP 105

WO3/MWNTs (multi walled nanotubes) and Pd modified hybrid gas sensitive films were fabricated on alumina substrate by spin-coating method. Structure, morphology WO3/MWNTs and Pd modified hybrid films were studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM ) and X-ray diffraction (XRD). Our results show that WO3 nanoparticles were nucleated on oxygenated group of f-MWNTs surface in hybrid suspension. The existence of PdO in Pd modified hybrid thin film has been proved by XRD results. After coating and annealing the films at 350 C, the conductance measurement of the hybrid WO3/MWNTs and Pd modified films indicates predominance hydrogen sensitivity in Pd modified films at 200 oC. Gas sensing results show that the Pd modified hybrid structure has rather fast, reversible response to hydrogen concentrations 6000 ppm than hybrid film. Our results indicate adding Pd to hybrid thin film decrease operating temperature. Gas sensitivity behaviour has discussed according to increase in surface area as well as development of two types of depletion layers, one at the n-WO3/ p-MWNTs hetero junction and the other at WO3 grain boundaries. Pd catalyst into WO3 matrix improves dissociation of hydrogen, and therefore accelerates the chemical reaction between Pd and WO3. Keywords: Hybrid structure; Hydrogen sensors; Tungsten trioxide; Multiwalled carbon nanotubes; Palladium APP 107

Annealing Effect on Hydrogen Sensitivity of Electrodeposited Pd/Pororus Si

F. Razia, A. Iraji zada, b* a Department of Physics, Sharif University of Technology, Tehran 111559161, Iran b Institute for Nanoscience and Nanotechnology, Sharif University of Technology, Tehran 11155-8639, Iran *iraji@sharif.edu

PalladiumDoped SnO2 Nanostructure Thin Film Prepared Using SnCl4 Precursor for Gas Sensor Application
S. A. Hoseinia*, M. Abdul Muhsien b, H. H. Hamdanc a Thin Films and Nano Electronics Lab, School of Electrical and Computer Engineering, University of Tehran, Tehran, 143957131, Iran. b Physics Department, College of Science, Al-Mustansiryah University, Baghdad, Iraq c Physics Department, College of Science, Baghdad University, Baghdad, Iraq *sahosseini@ut.ac.ir

We study annealing effect on hydrogen sensing properties of porous silicon (PS) samples coated by a continuous Pd layer using electrochemical method. Variation of sample current as sensitivity parameter on Schottky like Pd/PS configuration at room temperature indicate good gas sensitivity but very weak reversibility. Annealing process improve sensitivity and reversibility but increase response time. Based on scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) data we conclude that the increase in gas sensitivity is due to Pd crystallization that enhances the number of diffused hydrogen atoms that reach to the PdxSi/Si interface. Annealing process remove some defects that act as hydrogen traps and results irreversibility in the unannealed samples. On the other hand, heat treatment increases the response time due to formation of thicker oxide and silicide layers. Keywords: Pd; Electrodeposition; Porous silicon; Hydrogen gas sensor; Schottky like based gas sensor

Palladiumdoped SnO2 thin film was deposited by chemical spray pyrolysis on glass substrate to be a fast ethanol and methanol vapors and carbon dioxide gas sensor. The prepared SnO2 films were doped by dipping in palladium chloride PdCl2 dissolved in ethanol C2H5OH. The structural, optical and electrical properties of the prepared films were studied. Also the surface morphology was studied by scanning electron microscopy (SEM). The sensitivity and response time behaviors of the SnO2 based gas sensor to ethanol and methanol vapors and carbon dioxide gas were investigated. The film sensitivity dependence on the temperature and gas concentration tests was performed and the optimum operation temperature, in an applied voltage constant at 2V, was determined at around 250C. Keywords: SnO2; Spray pyrolysis; Electrical properties; Gas sensor; Palladium catalyst Abstract Book |INST| Sharif University of Technology|

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