SEMASPEC Test Method for Determination of Valve Flow Coefficient for Gas Distribution System Components

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Technology Transfer 90120394B-STD

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1996 SEMATECH, Inc.

SEMASPEC Test Method for Determination of Valve Flow Coefficient for Gas Distribution System Components
Technology Transfer # 90120394B-STD SEMATECH

February 22, 1993

Abstract: This SEMASPEC establishes a test method for determining the flow coefficient (CV) of a valve for use in gas service. Application of this test method is expected to yield comparable data among components test for the purposes of qualification for installation. This document is in development as an industry standard by Semiconductor Equipment and Materials International (SEMI). When available, adherence to the SEMI standard is recommended.

Keywords:

Equipment, Equipment Performance, Valves, Facilities, Gas Distribution Systems, Specifications, Components, Component Testing, Flow Rates

Authors:

Jeff Riddle

Approvals:

Jeff Riddle, Project Manager Venu Menon, Program Manager Jackie Marsh , Director of Standards Program Gene Feit, Director, Contamination Free Manufacturing John Pankratz, Director, Technology Transfer Jeanne Cranford, Technical Information Transfer Team Leader

1 SEMASPEC #90120394B-STD SEMASPEC Test Method for Determination of Valve Flow Coefficient for Gas Distribution System Components 1. Introduction Semiconductor cleanrooms are serviced by high-purity gas distribution systems. This document presents a test method that may be applied for the evaluation of one or more components considered for use in such systems. 1.1 1.1.1 Purpose The purpose of this document is to define a method for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. This document establishes a test method for determining the flow coefficient (Cv) of a valve for use in gas service. ScopeThis procedure applies to all valves used in gas service. The generally accepted procedure for determining Cv is to determine its value using water and to assume equivalence in gas service. Since a water-determined flow coefficient can differ from a gas determined coefficient, the Cv should be determined using a gas-based test procedure for components utilized in gas service. Limitations This procedure is not intended to be used for regulators because it may misrepresent the performance of a regulator; i.e., it will give a flow coefficient at fully open, nonregulating conditions. This method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience. Reference Documents MFC1M791 582 Glossary of Terms Used in the Measurement of Fluid Flow in Pipes, ANSI/ASME 1988

1.1.2 1.2

1.3 1.3.1

1.3.2 2. 2.1 2.2 2.3 2.4

Fluid Controls Institute.2 Recommended Voluntary Standards for Measurement Procedure for Determining Control Valve Flow Capacity

Fluid Controls Institute. Recommended Voluntary Standard Formulas for Sizing Control Valves ISA S39.13 Standard Control Valve Sizing Equations For Incompressible Fluids

Available from American Society of Mechanical Engineers/American National Standards Institute (ASME/ANSI) Available from Fluid Controls Institute, P.O. Box 9036, Morristown, NJ 07960

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2 2.5 2.6 2.7 2.8 3. 3.1 3.2 ISA S39.2 Standard Control Valve Capacity Test Procedure for Incompressible Fluids ISA S39.3 Standard Control Valve Sizing Equations For Compressible Fluids ISA S39.4 Standard Control Valve Capacity Test Procedure For Compressible Fluids ISA 575.02 Control Valve Capacity Test Procedure Terminology dPdifferential pressure across test valve, measured in kPa (psi). flow coefficient (Cv)the number of standard cubic meters of air per minute that can flow through the valve at a pressure drop of one psi. [Note: The maximum Cv is determined with the test component in a fully open position. However, intermediate flow coefficients can also be determined.] Nthe numerical constant for the units of measurement used in the general sizing equations. N is 4.17 when q is expressed in m3/hr, P is expressed in kPa, and T is expressed in K. [Note: N is 1,360 when q is expressed in scfh, P in psia, and T in R.] Pabsolute pressure at upstream test manifold tap, expressed in kPa (psia). [P(abs) = P(gauge) + barometric pressure] psipounds per square inch. psiapounds per square inch absolute. psidpounds per square inch differential. psigpounds per square inch gauge. qvolumetric flow rate. scfhstandard cubic feet per hour. Sgthe specific gravity of a gas relative to air; Sg approximately equals the ratio of the mass of a gas to the mass of an equal volume of air at a specified temperature. [Specific gravity of air = 1.0 at 15.6 C (60 F).] Tabsolute temperature of test gas, K (or R). test parametersthe standard cubic meter is taken at 101.3 kPa and 15.6 C, and the standard cubic foot is taken at 14.73 psia and 60 F. xthe ratio of differential pressure to absolute inlet static pressure, dP/P.

3.3

3.4 3.5 3.6 3.7 3.8 3.9 3.10 3.11

3.12 3.13 3.14

Available from Instrument Society of America, 67 Alexander Dr., Researach Triangle Park, NC 27709

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3 4. 4.1 4.1.1 Test Protocol Test Conditions PrecautionsThis test method may involve hazardous materials, operations, and equipment. This test method does not purport to address the safety considerations associated with its use. It is the responsibility of the user to establish appropriate safety and health practices and determine the applicability of regulatory limitations before using this method. Test pressure is to be 414 kPa gauge (60 psig) or the maximum pressure rating of the valve, whichever is lower. ActuationThe test is to be conducted with the valve fully open. The test gas is to be clean, dry air. Other gas is allowed only with appropriate correction factors. Apparatus MaterialsA clean gas supply filtered to <0.02 m is required. Instrumentation A flow meter, a temperature transducer or gauge, an upstream pressure transducer or gauge, differential pressure transducer or gauge, a test specimen, and two throttling valves are required. Instruments shall be calibrated regularly per manufacturer's instructions. Setup and Schematic Construct a test stand for the measurement of gas flow rates for known pressure drops across the test valve according to the schematic drawing shown in Figure 1. Nitrogen gas supply from a liquid nitrogen source is filtered by a 0.01 m filter before it is delivered to the test valve through a throttling valve. The test valve is isolated between two throttling valves to allow for careful control of pressure drop across the test component. Inlet pressure is measured immediately upstream of the test valve by a pressure gauge, with an accuracy of 0.25 percent. Pressure drop across the test specimen is measured by an electronic differential pressure transmitter capable of reading 0 to 50 in. H2O across the test device. Flow measurement is carried out downstream of the throttling valve located downstream of the test piece by a mass flow meter (MFM) or laminar flow element (LFE). Both the differential pressure transmitter and its digital readout should be calibrated before their use to display pressure drop in kPa. The LFE or MFM is calibrated using known gas flow rates and measuring pressure drop across the unit using an inclined manometer. Temperature of the gas is measured at two locations by thermocouples installed both upstream of the test valve and downstream of the LFE. The thermocouples are connected to a digital readout unit to directly display and read the inlet and outlet gas temperatures. 4.2.3.2 Table 2 shows the piping requirements for a standard test section configuration (see Section 5.3).
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4.1.2 4.1.3 4.1.4 4.2 4.2.1 4.2.2 4.2.2.1

4.2.2.2 4.2.3 4.2.3.1

Technology Transfer # 90120394B-STD

4 4.2.3.3 Figure 2 gives the recommended pressure connection to be followed in constructing the test apparatus. Install a pressure connection whose diameter is about 7 percent of the pipe diameter (see Section 5.4).

Figure 1

Valve Flow Coeffiecient Test Schematic

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Technology Transfer # 90120394B-STD

5 4.3 4.3.1 4.3.2 4.3.3 Test Procedures Assemble the test valve into the test apparatus. Record the barometric pressure. Open the test valve fully. Adjust the upstream and downstream throttling valves so that the initial pressure on the valve is 414 kPa gauge (60 psig) and the ratio of differential pressure to absolute inlet pressure (x) is 0.01. Record P1, DP1, q, T, and barometric pressure. Repeat steps in Sections 4.3.3 and 4.3.4 for xvalues of 0.015 and 0.02. Calculate Cvi using the following formula for each x value, xi:

4.3.4 4.3.5 4.3.6

0.5 C vi = [ qi / N Pi ] ( T i S g / xi )

4.3.7

Calculate the valve Cv using the following formula:

n Cvi i =1 , where n = 3 Cv = n

4.4 4.4.1

Data Analysis Complete Table 3. (See Section 5.)

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6 5. 5.1 Illustrations See Figure 1 for schematic diagram.

Table 1 T P q P(H) Temperature Pressure Flow rate Differential pressure of housing P(T) Differential pressure of total P(C) Differential pressure of cartridge

Definitions of the Symbols Used (K) (kPag) (Nm3/hr) (kPad) degrees Kelvin kiloPascal, gauge normal cubic meters per hour kiloPascal, differential

(kPad)

kiloPascal, differential

(kPad)

kiloPascal, differential

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Technology Transfer # 90120394B-STD

Table 2
A *, ** At least 18 nominal pipe diameters of straight pipe B 2 nominal pipe diameters of straight pipe.

Piping RequirementsStandard Test Sections

C 6 nominal pipe diameters of straight pipe D At least 1 nominal pipe diameter of straight pipe Standard Test Section Configuration

Figure 2

Recommended Pressure Connection4

Reprinted by permission. Copyright Instrument Society of America 1988. From ANSI/ISA-S75.02-1988.

Technology Transfer # 90120394B-STD

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8 Table 3 Valve Flow Coefficient Data Table

Valve Identification____________________________________ Test Number__________________ Date Operator Name __________________ __________________

Barometric Pressure __________________ kPa N = 4.17 (air at 15.6 C and 101.3 kPa) Sg = 1.0 (air) n 1 2 3 Equation:
Cv = Cv 1 + Cv 2 + Cv 3 3

T (K)

P (kPa-a)

P (kPa-d)

x (P/P)

q (Nm3/hr)

Cvn

Enter Values:
Cv = + 3 +

Result: Cv = NOTICE: SEMATECH DISCLAIMS ALL WARRANTIES, EXPRESS OR IMPLIED, INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. SEMATECH MAKES NO WARRANTIES AS TO THE SUITABILITY OF THIS METHOD FOR ANY PARTICULAR APPLICATION. THE DETERMINATION OF THE SUITABILITY OF THIS METHOD IS SOLELY THE RESPONSIBILITY OF THE USER.

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Technology Transfer # 90120394B-STD

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