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MEMS INTELLI-CAR (E)

KARTHIK.J.SHANKAR N.D.VIGNESHWAR III YEAR, (ECE)

ADHIPARASAKTHI ENGINEERING COLLEGE MELMARUVATHUR KANCHIPURAM (DT) Contact: shurukarthick@gmail.com 8015977836 ndvigneshwar@gmail.com

MEMS Intelli-car(e)
As allowing a breakthrough technology, unparalleled synergy between provide something so complex and yet simple. This paper gives an overview of the technologies used in brief and then proceeds towards making an image out of the haze. We then discuss about the feasibility of the project. We look at a few among the thousands of potential applications that it is capable of. We also discuss how its future looks. Creative people from all technical disciplines have important contributions to make as the tech tool of MEMS is powerful to make dreams come true. Think small, Make it Large

previously unrelated fields, many new MEMS will emerge, expanding beyond that which is currently identified or known. And this is precisely the reason why this field has become popular and powerful in such a short span of time. This field is the study of small mechanical devices and systems MicroElectroMechanicalSystems is an

integration of micro electronics and macro mechanics that holds the capacity to convert physical stimuli, events, and parameters to electrical, mechanical, and optical signals and vice versa. MEMS are a logical extension of microelectronics incorporating and IC

technology1-3,

traditional

electronics with mechanical systems like sensors and actuators. Our design of the concept creation MEMS Intelli-car(e) is an integration of the major advancements in the MEMS field viz. Pico satellites and Automotive MEMS along with a Revolutionary communication and tracking system(GPS). Since all three technologies have been proved effective in their own right, an integration should be considered feasible, possible and a I. Introduction This field is the study of small mechanical devices and systems. They range in size from a few microns to a few millimeters. The field is described by a wide variety of other names: Micromechanics, Micro

System Technology, Micro Machines etc. It encloses all aspects of science and

technology. MicroElectroMechanicalSystems is an

necessity. This concept is a dream effort to

integration of micro electronics and macro 2

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mechanics that holds the capacity to convert physical stimuli, events, and parameters to electrical, mechanical, and optical signals and vice versa. The root of MEMS can potentially give rise to a tree of applications that include intelligence control, decisionmaking abilities, evolutionary learning, unaided adaptation, self-organization, etc. Apart from the field of diagnostics, signal processing, and data acquisition features, MEMS can also perform actuation and sensing. Things behave quite differently in the micro domain. At these size scales, the standard constructs of classical physics do not always hold true. Due to MEMS' large surface area to volume ratio, surface effects such as

micro actuators and expanding the space of possible designs and applications. It promises to revolutionize nearly every product category by bringing together silicon-based micromachining microelectronics technology, with making

possible the realization of complete systemson-a-chip. Creative people from all technical disciplines have important contributions to make. Hope we will succeed in our little effort to visualize a dream using this path-breaking technology. This micro presentation will help focus on a few macro applications from a universe of opportunities! II. Components MEMS can include two or more of the following subsystems: sensors, actuators, a power supply, a central processing unit (CPU) or microprocessor, and a

electrostatics, friction and wetting dominate volume effects such as inertia and thermal mass. And forces like surface tension that depend upon an edge become enormous. An ant carrying many times its weight or a water bug walking on the surface of a pond are just two manifestations of this different micro world MEMS is an enabling technology allowing the development of smart products,

communication

interface.

augmenting the computational ability of microelectronics with the perception and control capabilities of micro sensors and

MEMS Intelli-car(e) 3

PMMA (polymethyl methacrylate) plastic with synchrotron radiation through a mask. Exposed PMMA is then washed away, leaving vertical wall structures with

spectacular accuracy. Metal is then plated into the structure, replacing the PMMA that was washed away. becomes the final part. ii. It consists of microstructures, micro sensors, microelectronics, and microactuators. Electro Discharge Machining This metal piece

Matsushita has developed a new Electro Discharge Machine with the capability to make very small, precise parts out of almost any material that conducts electricity. This machine detects signals. uses standard machine shop

Microstructure builds the framework of the system. Microsensor

tooling, and is compatible with machine shop production techniques. iii. Silicon Surface Micromachining:

Microelectronics processes the signals and gives commands to the Microactuator which performs the task of reacting to these signals in the designed manner. III. Fabrication Fabrication is the heart and soul of any MEMS -based product. Micromechanical parts tend to be rugged, respond rapidly, use little power, occupy a small volume, and are often much less expensive than conventional macro parts. The following are the widely preferred techniques used: i. LIGA: (in German, Lithographie, Galvanoformung, Abformung)The LIGA process exposes

Silicon surface micromachining uses the same equipment and processes as the electronics semiconductor industry. This has led to a very rapid evolution of silicon surface micromachining. This technique deposits layers of sacrificial and structural material on the surface of a silicon wafer. Texas Instruments has built a large array of mirrors by depositing and patterning aluminum over a sacrificial polymer layer. This system is being developed for

projection TV.

MEMS Intelli-car(e) 4

iv. Silicon Bulk Micromachining: This process uses the whole bulk of the semiconductor material. A large number of structures can be made using the etch stop planes in crystalline silicon. This mirror can be integrated with other structures by wafer bonding. Such structures are being used by the automobile industry for air bag

wafer usually includes a set of alignment marks, which are high precision features that are used as the reference when positioning subsequent patterns. Pico Satellites: They are a major leap ahead as far as MEMS enthusiasts are concerned. The dimensions of a pico satellite are roughly half the size of a multi-functionality keyboard. The first picosatellite fitted with MEMS for all major functions was launched by the Aerospace Corporation. It measured

deployment. These techniques combined with wafer bonding and boron diffusion allows complex mechanical devices to be fabricated using intra-model alignment process.

2.5x7.5x10 cm. The satellite weighed just a little over 250 Gms. This satellite was launched on the 26th of January 2000. This was the first time a device used MEMS RF switches for long distance communication. Communication to the remote object was established in a fortnight. The satellite stayed in orbit for a couple of months before it was brought back. During the stay, the satellite monitored atmospheric conditions and was in constant contact with the ground control room. Alignment: In order to make useful devices the patterns for different lithography steps that belong to a single structure must be aligned to one another. The first pattern transferred to a Just as the world seems to have been shrunk in size due to the telephone, internet and other communication modes, the larger picture is to shrink the universe. Constant communication to a distant object that is able to fulfill all its requirements on its own

MEMS Intelli-car(e) 5

without any help is the next best thing in space research technology. The small size of a pico satellite makes it use specific eliminating unwanted expenditure to obtain useless data. Surveillance cost can be drastically reduced using this technology. The use of easy-to manufacture MEMS chips combine to form a robust working mechanism. The cost efficiency of MEMS

The Global Positioning System (GPS) is a satellite-based navigation system made up of a network of 24 satellites placed into orbit by the U.S. Department of Defense. GPS was originally but intended in the for military the

applications,

1980s,

government made the system available for civilian use. GPS works in any weather conditions, anywhere in the world, 24 hours a day. Working: GPS satellites circle the earth twice a day in a very precise orbit and transmit signal information to earth. GPS receivers take this information and use triangulation to calculate the user's exact location.

induces into the picosatellite its properties of size and space conservation along with the required degree of precision and ruggedness for its active working in the long term. The pico satellite we propose to be used will be the size of a computer monitor which will have a TFSA(Thin Film Solar array). This film can provide the energy requirements for a long duration of time making it potentially maintenance-free.

Essentially, the GPS receiver compares the time a signal was transmitted by a satellite with the time it was received. The time difference tells the GPS receiver how far away the satellite is. Now, with distance measurements from a few more satellites, the receiver can determine the user's position and display it on the unit's electronic map. Here are some other interesting facts about the GPS satellites :A GPS satellite weighs

Picosat showing an attached foldable Thin film Solar Array

approximately 2,000 pounds and is about 17 feet across with the solar panels extended.

MEMS Intelli-car(e) 6

Transmitter

power

is

only

50

watts

MEMS Sensors: The sensors designed using MEMS are well suited for high volume applications that demand high-performance sensors at low costs. They also provide a high degree of reliability and consistency. Each sensor contains thousands of tiny drums on the surface of a silicon chip where each is only as large as the width of a human hair. The drum structure consists of a thin nitride membrane and aluminium electrode

.Signal:GPS satellites transmit two low power radio signals in the UHF band. The signals travel by line of sight, meaning they will pass through clouds, glass and plastic but will not go through most solid objects such as buildings and mountains. A GPS signal contains three different bits of information a pseudorandom code, ephemeris data and almanac data. The pseudorandom code is simply an I.D. code that identifies which satellite is transmitting information. Ephemeris data tells the GPS receiver where each GPS satellite should be at any time throughout the day. Each satellite transmits ephemeris data showing the orbital information for that satellite and for every other satellite in the system. Almanac data, which is constantly

suspended over a cavity.

transmitted by each satellite, contains important information about the status of the satellite (healthy or unhealthy), current date and time. This part of the signal is essential for determining a position. MEMS accelerometers are quickly replacing conventional accelerometers for crash air-bag deployment systems in

automobiles. The conventional approach uses several bulky accelerometers made of discrete components mounted in the front of the car with separate electronics near the airbag; this approach costs over $50 per automobile. MEMS have made it possible to

MEMS Intelli-car(e) 7

integrate the accelerometer and electronics onto a single silicon chip at a cost between $5 to $10. These MEMS accelerometers are much smaller, more functional, lighter, more reliable, and are produced for a fraction of the cost of the conventional macroscale accelerometer elements. MEMS devices are extremely small -- for example, MEMS has made possible

excellent materials properties, which make it an attractive choice for many high-performance mechanical applications; for example, the strength-to-weight ratio for silicon is higher than many other

engineering materials which allows very high-bandwidth mechanical devices to be realized. Instead, the deep insight of MEMS is as a new manufacturing technology, a way of making complex electromechanical

electrically-driven motors smaller than the diameter of a human hair (right) -- but MEMS is not primarily about size. MEMS is also not about making things out of silicon, even though silicon possesses

systems using batch fabrication techniques similar to those used for integrated circuits, and uniting these electromechanical

elements together with electronics.

MEMS Intelli-car(e) 8

Figure showing an automobile designed by Mario H Castro Cedano (Rochester Institute of technology) using MEMS sensors. The car is fit with 12 independent sensor units made using MEMS. Each sensor acts as if it has a mind of its own by responding selectively to changes in pressure, flowdirection and temperature. Each sensor is unique and has the ability to perform accurately only that for which it is designed. Thus no 2 sensors on the car are same although they detect the same

What if: 1. your car can tell you your exact position on the surface of the earth? 2. Your car can tell you where the roads are blocked or about traffic congestion to help you avoid those routes? 3. Your car can give speeds of all other vehicles on the road to help you keep from bumping into the slow ones? 4. Your car can track those who are near and dear to you? 5. Your car can find the way out of nowhere when youre lost? 6. Your car can tell you how much distance you can travel without having to re-fill? 7. Your car can find the nearest filling station for you? 8. Your car can tell you about the weather in

quantities. Now we shall shift our focus onto the GPS sensor and inertial navigator present next to the steering wheel. The sensor is made of RF switches that are used for high frequency communication businesses and other

your locality? All this and more is possible by our proposed plan of integrating Pico-satellites, GPS and the MEMS car. The car has a GPS sensor that has RF switches to communicate with the satellites. These satellites are planned to be the picosatellites that are constructed using MEMS. These satellites also have RF switches in them to establish connection on a specific frequency band. The picosatellites can be designed to perform the various functions of a GPS satellite. These Satellites cost roughly one-

multimedia consumers at a reasonable cost. Automotive intelligence (AI): The term is used by us to describe a pioneering idea that can take the Automobile industry by storm. Driving a car will never be the same with our proposed plan of creating an internet-like revolution in this field. We have so far discussed about 3 non-related or weakly linked technologies each of which has been tried and tested and have managed to live up to the expectations.

tenth of that of a normal GPS satellite.

MEMS Intelli-car(e) 9

Applications: 1. The police are on the look-out for a vicious criminal on the run in a fast paced car. The police car is equipped with our proposed lay-out of full fledged technology. The criminal can be tracked without his knowledge on the touch of a button. The processes that follow are the routine police formalities that include chase, interrupt and capture. 2. A severe case of rash driving leaves 2 people badly hurt. The police retrieve the satellite data from the cache as to find whose car was on the road at the time of the accident. With the proven accuracy of the satellite tracking system, it can be used as evidence against the offender and help the victim get speedy justice. 3. A VVIP car needs to have as many as 12 cars to ensure fool-proof security to the person. With an intelligent automobile that can find suspicious movements in a radius of 1.5 km around the car, the security might be reduced to just 2 cars to prevent any mishap. 4. Remember that in Mumbai (26 June 2005) 5 cars were completely immersed in water and all occupants (16 in all) had been suffocated to death. Add the incident in Chennai of CO poisoning and we are forced to think whether there is a way out of this at

all? Yes, we have a solution. An intelligent car tells you that the weather might become worse in a short time, so you can plan your safety and using the same system, locate an inn or a motel to spend the time safely. 2 days later, after the water has receded, switch on the s-o-c and locate the nearest car repair centre to straighten the problems due to the water. As for the incident in Chennai, it does not need a GPS satellite to prevent a mishap. The car has an exhaust gas sensor that displays a critical error message as soon as reverse gas-flow is detected. These are micro examples of this project with macro-potentials. Even if used to half of its potential, this may create a revolution in automotive industry and put the roads in order. There is immense scope for further expansion of such applications to make work easy for the cops and provide state-ofthe-art technology to the common man at affordable prices.

MEMS Intelli-car(e) 10

made for application in cars. The main challenge lies in expanding this innovative technology to other automobiles as well. More innovation is still possible in cars. The development

WORKING MODEL OF MEMS INTELLIGENTCAR:

Future Trends:

The present day technology and all aspects concerned with MEMS are tailor

Of a technology that requires the car-users

MEMS Intelli-car(e) 11

to prove their identity before logging into their respective cars is an example .This approach may further result in a reduction in the car thefts happening in and around the world. A web-cam like device can be developed which can be used by car-drivers to communicate with their loved ones. Car accidents due to brake failure can also be prevented. Every Theory is always perfect until it has been verified practically. This ambitious project needs years of research and tonnes of investment. This is the only barrier between us and the next level of transport.

field has become popular and powerful in such a short span of time. The victory of MEMS lies in the fact that it has been able to hold to it s ground, when even smaller

technologies such as nanotechnology are ruling the roost. And that is why MEMS is an everlasting indispensable field. MEMS devices are extremely small -- for example, MEMS has made possible electricallydriven motors smaller than the diameter of a human hair -- but MEMS is not primarily about size. MEMS is also not about making things out of silicon, even though silicon possesses excellent materials properties, which make it an attractive choice for many high-

Conclusion: This is only a very brief overview of the MEMS field. MEMS is still the subject of broad and diverse research efforts. A

performance mechanical applications. Instead, the deep insight of MEMS is as a new manufacturing technology, a way of making complex electromechanical systems using batch fabrication techniques similar to those used for integrated circuits, and uniting these electromechanical elements together with electronics. Bibliography 1. W.S.N. Trimmer, Microbots and Micromechanical Systems, Sensors and Actuators, September 1989. 2. G. Stix, Little Big Science, Scientific American, September 2001.

significant growth area for MEMS today is in telecommunications where the technology is being used for wireless applications as well as in optical networks. As a breakthrough technology, allowing unparalleled synergy between previously unrelated fields, many new MEMS

applications will emerge, expanding beyond that which is currently identified or known. And this is precisely the reason why this

MEMS Intelli-car(e) 12

3. M.J. Madou, Fundamentals of Micro fabrication, CRC Press LLC, Boca Raton, Florida, 4. Lyshevski, Sergey Edward. MEMS and NEMS Systems, Devices, and Structures. CRC 5. Ramakrishnan, Srinivas, Collis, S. Scott. Turbulence Control Simulation. MicroElectroMechanical Institute of Systems. and

6.

National

Standards

Technology. 7. What is MEMS Technology? MEMS clearing house. 8. MARIO H. CASTRO-CEDENOs project on Automotive MEMS Mario H. Castro-Cedano is Assistant Professor in the Department of

Mechanical and

Manufacturing

Engineering Technology and Packaging Science at the Rochester Institute of Technology (RIT) in Rochester, NY.

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