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FEATURES
High performance accelerometer 70 g, 250 g, and 500 g wideband ranges available 22 kHz resonant frequency structure High linearity: 0.2% of full scale Low noise: 4 mg/Hz Sensitive axis in the plane of the chip Frequency response down to dc Full differential signal processing High resistance to EMI/RFI Complete electromechanical self-test Output ratiometric to supply Velocity preservation during acceleration input overload Low power consumption: 2.5 mA typical 8-terminal, hermetic ceramic, LCC package
Using the Analog Devices, Inc. proprietary fifth-generation iMEMs process enables the ADXL001 to provide the desired dynamic range that extends from 70 g to 500 g in combination with 22 kHz of bandwidth. The accelerometer output channel passes through a wide bandwidth differential-to-singleended converter, which allows access to the full mechanical performance of the sensor. The part can operate on voltage supplies from 3.3 V to 5 V. The ADXL001 also has a self-test (ST) pin that can be asserted to verify the full electromechanical signal chain for the accelerometer channel. The ADXL001 is available in the industry-standard 8-terminal LCC and is rated to work over the extended industrial temperature range (40C to +125C).
15 12 9 6
RESPONSE (dB)
APPLICATIONS
Vibration monitoring Shock detection Sports diagnostic equipment Medical instrumentation Industrial monitoring
GENERAL DESCRIPTION
The ADXL001 is a major advance over previous generations of accelerometers providing high performance and wide bandwidth. This part is ideal for industrial, medical, and military applications where wide bandwidth, small size, low power, and robust performance are essential.
100k
ADXL001
VDD2
MOD
DIFFERENTIAL SENSOR
DEMOD AMP
OUTPUT AMPLIFIER
XOUT
SELF-TEST
ST
COM
Figure 2.
Rev. A
Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 2010 Analog Devices, Inc. All rights reserved.
07510-001
REVISION HISTORY
2/10Rev. 0 to Rev. A Added -250 and -500 models ............................................ Universal Changes to Table 1 ............................................................................ 3 Changes to Table 2 ............................................................................ 4 Added Figure 9 through Figure 18 ................................................. 8 Changes to Ordering Guide .......................................................... 14 1/09Revision 0: Initial Version
Rev. A | Page 2 of 16
ADXL001 SPECIFICATIONS
SPECIFICATIONS FOR 3.3 V OPERATION
TA = 40C to +125C, VS = 3.3 V 5% dc, acceleration = 0 g, unless otherwise noted. Table 1.
Parameter SENSOR Nonlinearity Cross-Axis Sensitivity Resonant Frequency Quality Factor SENSITIVITY Full-Scale Range Sensitivity OFFSET Zero-g Output NOISE Noise Noise Density FREQUENCY RESPONSE 3 dB Frequency 3 dB Frequency Drift Over Temperature SELF-TEST Output Voltage Change Logic Input High Logic Input Low Input Resistance OUTPUT AMPLIFIER Output Swing Capacitive Load PSRR (CFSR) POWER SUPPLY (VS) Functional Range ISUPPLY Turn-On Time Conditions Min ADXL001-70 Typ Max 0.2 2 22 2.5 IOUT 100 A 100 Hz Ratiometric 70 16.0 1.35 10 Hz to 400 Hz 10 Hz to 400 Hz 1.65 85 3.3 32 2 1.95 1.35 +70 250 4.4 1.65 95 3.65 32 2 1.95 1.35 2 Min ADXL001-250 Typ Max 0.2 2 22 2.5 +250 500 2.2 1.65 105 4.25 32 2 1.95 2 Min ADXL001-500 Typ Max 0.2 2 22 2.5 +500 2 Unit % % kHz
400 2.1 0.66 To ground IOUT = 100 A DC to 1 MHz 3.135 2.5 10 30 0.2 1000 0.9 6 5 3.135 50 VS 0.2 30 0.2 1000 2.1
mV V V k V pF V/V V mA ms
2.5 10
2.5 10
Rev. A | Page 3 of 16
ADXL001
SPECIFICATIONS FOR 5 V OPERATION
TA = -40C to +125C, VS = 5 V 5% dc, acceleration = 0 g, unless otherwise noted. Table 2.
Parameter SENSOR Nonlinearity Cross-Axis Sensitivity Resonant Frequency Quality Factor SENSITIVITY Full-Scale Range Sensitivity OFFSET Zero-g Output NOISE Noise Noise Density FREQUENCY RESPONSE 3 dB Frequency 3 dB Frequency Drift Over Temperature SELF-TEST Output Voltage Change Logic Input High Logic Input Low Input Resistance OUTPUT AMPLIFIER Output Swing Capacitive Load PSRR (CFSR) POWER SUPPLY (VS) Functional Range ISUPPLY Turn-On Time Conditions Min ADXL001-70 Typ Max 0.2 2 22 2.5 IOUT 100 A 100 Hz Ratiometric 70 24.2 2.00 10 Hz to 400 Hz 10 Hz to 400 Hz 2.5 55 2.15 32 2 3.00 2.00 +70 250 6.7 2.5 60 2.35 32 2 3.00 2.00 2 Min ADXL001-250 Typ Max 0.2 2 22 2.5 +250 500 3.3 2.5 70 2.76 32 2 3.00 2 Min ADXL001-500 Typ Max 0.2 2 22 2.5 +500 2 Unit % % kHz
1435 3.3 0.66 To ground IOUT = 100 A DC to 1 MHz 3.135 4.5 10 30 0.2 1000 0.9 6 9 3.135 50 VS 0.2 30 0.2 1000 3.3
mV V V k V pF V/V V mA ms
4.5 10
4.5 10
Rev. A | Page 4 of 16
ADXL001
RECOMMENDED SOLDERING PROFILE
Table 3. Soldering Profile Parameters
Profile Feature Average Ramp Rate (TL to TP) Preheat Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) Time (TSMIN to TSMAX), ts TSMAX to TL Ramp-Up Rate Time Maintained Above Liquidous (tL) Liquidous Temperature (TL) Liquidous Time (tL) Peak Temperature (TP) Time Within 5C of Actual Peak Temperature (tP) Ramp-Down Rate Time 25C to Peak Temperature (tPEAK) Sn63/Pb37 3C/sec maximum 100C 150C 60 sec to 120 sec 3C/sec 183C 60 sec to 150 sec 240C + 0C/5C 10 sec to 30 sec 6C/sec maximum 6 minute maximum Pb-Free 3C/sec maximum 150C 200C 60 sec to 150 sec 3C/sec 217C 60 sec to 150 sec 260C + 0C/5C 20 sec to 40 sec 6C/sec maximum 8 minute maximum
tP
CRITICAL ZONE TL TO TP
TEMPERATURE (T)
TL
TSMAX TSMIN
tL
tS
PREHEAT
RAMP-DOWN
tPEAK
TIME (t)
Rev. A | Page 5 of 16
07510-022
Drops onto hard surfaces can cause shocks of greater than 4000 g and can exceed the absolute maximum rating of the device. Exercise care during handling to avoid damage.
ESD CAUTION
Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability.
Rev. A | Page 6 of 16
ST
ADXL001
TOP VIEW (Not to Scale)
Rev. A | Page 7 of 16
PERCENT OF POPULATION
10 20 30 40 50 60
15 20 25
PERCENT OF POPULATION
10 15 20 25 30 35 40 45 0 0 5
PERCENT OF POPULATION
10
ADXL001
0.07 0.06 0.05 0.04 0.03 0.02 0.01 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07
07510-006 07510-005
0.07
15.3
15.4
15.5
15.6
15.7
15.8
15.9
VOLTS
(mV/g)
16.1
16.2
16.3
16.4
16.5
16.6
16.7
16.8
07510-007
Rev. A | Page 8 of 16
PERCENT OF POPULATION PERCENT OF POPULATION
PERCENT OF POPULATION
10
15
20
25
30
10
15
20
25
30
35
10
15
20
25
0
4.30 4.32 4.34 4.36 4.38 4.40 4.42 4.44 4.46 4.48 4.50 4.52 4.54
07510-024
0
15.2 15.3 15.4 15.5 15.6 15.7 15.8 15.9
4.30
4.32
4.34
4.36
4.38
4.40
4.42
(mV/g)
(mV/g)
(mV/g)
4.44
4.46
4.48
4.50
4.52
4.54
4.56
07510-025
PERCENT OF POPULATION
PERCENT OF POPULATION
PERCENT OF POPULATION
10
15
20
25
10
15
20
25
30
10
15
20
25
30
0
2.17 2.17 2.18 2.19 2.20 2.21 2.18 2.19 2.20 2.21 2.22 2.23 2.24 2.23 2.24 2.25 2.26 2.27
07510-027 07510-026
360
365
370
375
380
385
390
395
(mV/g)
(mV/g)
(mV)
2.22 2.25 2.26 2.27 2.28 2.29
400
405
410
415
420
425
430
435
440
07510-009
Rev. A | Page 9 of 16
PERCENT OF POPULATION
30 20 25 35 40 25 10 15 30 0 5
PERCENT OF POPULATION
20 10 15
PERCENT OF POPULATION
20
30
10
15
25
0 55 56 57 58 59 60 61 (mV)
0
110 112 114 116 118 120 122 124
2.000
2.075
2.150
2.225
2.300
2.375
(mV)
(mA)
2.450
126 128
62
2.525
130
63
2.600
2.675
2.750
2.825
2.900
ADXL001
07510-010
ADXL001
40 35
PERCENT OF POPULATION
30 25 20 15 10
07510-011
5 0
2.100
2.175
2.250
2.325
2.400
2.475
2.550
2.625
2.700
2.775
2.850
2.925
3.000
M10.0s 42.80%
A CH2
1.38V
(mA)
Rev. A | Page 10 of 16
07510-012
MECHANICAL SENSOR
The ADXL001 is built using the Analog Devices SOI MEMS sensor process. The sensor device is micromachined in-plane in the SOI device layer. Trench isolation is used to electrically isolate, but mechanically couple, the differential sensing elements. Single-crystal silicon springs suspend the structure over the handle wafer and provide resistance against acceleration forces.
ANCHOR MOVABLE FRAME
PLATE CAPACITORS
ACCELERATION
FIXED PLATES
MOVING PLATE
ANCHOR
Rev. A | Page 11 of 16
07510-019
VDD2 VDD
7
DNC
Figure 21. XOUT Increases with Acceleration in the Positive X-Axis Direction
XOUT
ADXL001
DNC COM
3 4 2
XOUT
6
ST
ST
07510-023
SELF-TEST
The fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. When the digital self-test input is activated, the ADXL001 changes the voltage on the fixed fingers in these forcing cells on one side of the moving plate. This potential creates an attractive electrostatic force, causing the sensor to move toward those fixed fingers. The entire signal channel is active; therefore, the sensor displacement causes a change in XOUT. The ADXL001 self-test function verifies proper operation of the sensor, interface electronics, and accelerometer channel electronics. Do not expose the ST pin to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for instance, if there are multiple supply voltages), then a low VF clamping diode between ST and VS is recommended.
2.0
1.0 3.2
3.7
4.2
4.7
07510-002
5.2
5.7
Figure 22. Typical Zero-g Bias Levels Across Varying Supply Voltages
Self-test response in gravity is roughly proportional to the cube of the supply voltage. For example, the self-test response for the ADXL001-70 at VS = 5 V is approximately 1.4 V. At VS = 3.3 V, the self-test response for the ADXL001-70 is approximately 400 mV. To calculate the self-test value at any operating voltage other than 3.3 V or 5 V, the following formula can be applied: (ST @ VX) = (ST @ VS) (VX/VS)3 where: VX is the desired supply voltage. VS is 3.3 V or 5 V.
Rev. A | Page 12 of 16
ELECTROMAGNETIC INTERFERENCE
The ADXL001 can be used in areas and applications with high amounts of EMI or with components susceptible to EMI emissions. The fully differential circuitry of the ADXL001 is designed to be robust to such interference. For improved EMI performance, especially in automotive applications, a 1000 pF output capacitor is recommended on the XOUT output.
Rev. A | Page 13 of 16
R 0.008 (4 PLCS)
0.019 SQ
Figure 23. 8-Terminal Ceramic Leadless Chip Carrier [LCC] (E-8-1) Dimensions shown in inches
ORDERING GUIDE
Model 1 ADXL001-70BEZ ADXL001-70BEZ-R7 ADXL001-250BEZ ADXL001-250BEZ-R7 ADXL001-500BEZ ADXL001-500BEZ-R7 EVAL-ADXL001-250Z EVAL-ADXL001-500Z EVAL-ADXL001-70Z
1
Temperature Range 40C to +125C 40C to +125C 40C to +125C 40C to +125C 40C to +125C 40C to +125C
Package Description 8-Terminal LCC 8-Terminal LCC 8-Terminal LCC 8-Terminal LCC 8-Terminal LCC 8-Terminal LCC Evaluation Board Evaluation Board Evaluation Board
111808-C
Rev. A | Page 14 of 16
ADXL001 NOTES
Rev. A | Page 15 of 16
ADXL001 NOTES
2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D07510-0-2/10(A)
Rev. A | Page 16 of 16