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Meander Inductor Port 1 probed Gate RF Source Gate Signal Source VGS VS Gate Drain Drain SiO 2 Interdigital

gates Port 2 open

VD

VGD

Channel width, W Interdigital gates A (CrAu) SiO 2 B A B Drain SiO 2

S.I.GaAs Schematic cross-sectional view between A and B C CrAu SiO 2 D Meander C W D Drain Inductor

n-AlGaAs GaAs Schematic cross-sectional view between C and D

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