Scribd Logo
Importer

Bienvenue sur Scribd !

  • Selfsys, Nano-Tera 2013, Bern

    Transféré par

    nanoteraCH
    331 vues39 pages
    Fluidic-mediated self-assembly for hybrid functional micro/nanosystems The ultimate goal is to self-assemble free-floating N/MEMS building blocks in a liquid, and then deploy the assembled parts onto surfaces, the environment or the human body, where they fulfill an application-specific functionali. This fluidic-based self-assemly forms the basis for future intelligent systems manufacturing beyond robotic assembly, flip-chi, etc. The expected outcomes are cost-efficient yet flexile and form an exemplary combination of high numbers (tera) of ultra-small components (nano/micro) to be assembled into complex systems. The project involves an intimate interaction between advanced micro/nanoengineering, surface functionalization, microfluidics sensor/actuator and micro/nanorobotic concepts, as well as modeling and computer-aided design.The fist phase of the research focuses on the setting-up of the free-floating and guided fluidic assely technology. The work will then be devoted to the implementation of the enabling technology for two applications that have been identified one targeting the assembly of RFID micro-tags with other M/NEMS in a massive parallel way, the other aiming at the assembly of liquid-containing micro-capsules that can be triggered for liquid release. In general, such integrated systems can enable non-invasive smart drug delivery devices, self-assembling implants, surgical microrobots, smart clothing, ultra-small wireless sensor nodes for environmental monitoring and proactive maintenance of complex civil and mechanical structures.

    Copyright

    © Attribution Non-Commercial (BY-NC)

    Formats disponibles

    PDF, TXT ou lisez en ligne sur Scribd

    Avez-vous trouvé ce document utile ?

    Ce contenu est-il inapproprié ?

    Signaler ce document
    Fluidic-mediated self-assembly for hybrid functional micro/nanosystems The ultimate goal is to self-assemble free-floating N/MEMS building blocks in a liquid, and then deploy the assembled parts onto surfaces, the environment or the human body, where they fulfill an application-specific functionali. This fluidic-based self-assemly forms the basis for future intelligent systems manufacturing beyond robotic assembly, flip-chi, etc. The expected outcomes are cost-efficient yet flexile and form an exemplary combination of high numbers (tera) of ultra-small components (nano/micro) to be assembled into complex systems. The project involves an intimate interaction between advanced micro/nanoengineering, surface functionalization, microfluidics sensor/actuator and micro/nanorobotic concepts, as well as modeling and computer-aided design.The fist phase of the research focuses on the setting-up of the free-floating and guided fluidic assely technology. The work will then be devoted to the implementation of the enabling technology for two applications that have been identified one targeting the assembly of RFID micro-tags with other M/NEMS in a massive parallel way, the other aiming at the assembly of liquid-containing micro-capsules that can be triggered for liquid release. In general, such integrated systems can enable non-invasive smart drug delivery devices, self-assembling implants, surgical microrobots, smart clothing, ultra-small wireless sensor nodes for environmental monitoring and proactive maintenance of complex civil and mechanical structures.

    Droits d'auteur :

    Attribution Non-Commercial (BY-NC)
    Téléchargez comme PDF, TXT ou lisez en ligne sur Scribd
    Signaler comme contenu inapproprié
    331 vues39 pages

    Selfsys, Nano-Tera 2013, Bern

    Transféré par

    nanoteraCH
    Fluidic-mediated self-assembly for hybrid functional micro/nanosystems The ultimate goal is to self-assemble free-floating N/MEMS building blocks in a liquid, and then deploy the assembled parts onto surfaces, the environment or the human body, where they fulfill an application-specific functionali. This fluidic-based self-assemly forms the basis for future intelligent systems manufacturing beyond robotic assembly, flip-chi, etc. The expected outcomes are cost-efficient yet flexile and form an exemplary combination of high numbers (tera) of ultra-small components (nano/micro) to be assembled into complex systems. The project involves an intimate interaction between advanced micro/nanoengineering, surface functionalization, microfluidics sensor/actuator and micro/nanorobotic concepts, as well as modeling and computer-aided design.The fist phase of the research focuses on the setting-up of the free-floating and guided fluidic assely technology. The work will then be devoted to the implementation of the enabling technology for two applications that have been identified one targeting the assembly of RFID micro-tags with other M/NEMS in a massive parallel way, the other aiming at the assembly of liquid-containing micro-capsules that can be triggered for liquid release. In general, such integrated systems can enable non-invasive smart drug delivery devices, self-assembling implants, surgical microrobots, smart clothing, ultra-small wireless sensor nodes for environmental monitoring and proactive maintenance of complex civil and mechanical structures.

    Droits d'auteur :

    Attribution Non-Commercial (BY-NC)
    Téléchargez comme PDF, TXT ou lisez en ligne sur Scribd
    Signaler comme contenu inapproprié
    sur 39

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Rational: Assembly challenge of N/MEMS!


    Today! Many different kinds of micro/ nano devices, MEMS, S&A, CMOS, OLED, etc! The challenge of tomorrow! Finding a way to assemble the bricks into functional micro/nanosystems!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Fluid-mediated self-assembly!
    Competences needed:!

    MEMS Modeling Surfaces

    10 mm
    Control

    Microuidics

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Massimo Mastrangeli
    (EPFL)

    Maurizio Gullo
    (EPFL)

    Jonas Goldowsky
    (CSEM)

    Loic Jacot-Descombes
    (EPFL)

    Grgory Mermoud
    (EPFL)

    Felix Schill
    (EPFL)

    Olgac Ergenemann
    (ETHZ)

    Christian Peters
    (ETHZ)

    Venky Nagaiyanallur
    (ETHZ)

    Gilles Cherix
    (ICARE)

    Cathrein Hckstdt
    (ETHZ)

    Nicolas Spencer
    (ETHZ)

    Christopher Hierold
    (ETHZ)

    Laurent Sciboz
    (ICARE)

    Bradley Nelson
    (ETHZ)

    Helmut Knapp
    (CSEM)

    Alcherio Martinoli
    (EPFL)

    Juergen Brugger
    (EPFL)

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Assembling techniques & case studies!

    Fluidic-mediated self-assembly for hybrid functional micro/nanosystems SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems ! !

    Outline!
    SELFSYS objectives! Methodology and team! MEMS fabrication!
    Inkjet printing, magnetic microcapsules, surface functionalization!

    Fluid-mediated parallel assembly, yield! Control system, modeling & automation! Liquid encapsulation & release! Target applications!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Microcapsules made by SU-8 photolithography!


    Bi-color cylinders! Half-capsules!
    Si wafer, surface activation! Blue SU-8! Transparent SU-8! Exposure and bake! SU-8 development! Surface functionalization! Release!
    Hollow part!

    ! ! ! ! ! !

    Hydrophilic Hydrophobic

    Hydrophobic

    Hydrophilic

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    PhD thesis 2013 Jacot-Descombes

    SU-8 hemispheres by inkjet printing!


    Inkjet printing process! 900 hemispheres Angle: 90 2 Yield above 98%

    Shape prediction and experimental results!

    SEM images

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Jacot-Descombes et al. JMM 2012

    Hollow hemispheres!
    Silicon connement platforms and central pillars! Inkjet printed half-capsules!

    100 m SEM image

    300 m SEM image

    50 m

    1 mm Optical image

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Jacot-Descombes, IEEE NEMS 2013

    SU-8 capsules with integrated silicon dies!

    Inkjet printing of SU-8 on silicon chip and subsequent surface releasing! Enables integration of e.g. RFID dies into functional polymer MEMS!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    MicroNanoLeLers (submiLed)

    Fabrication of magnetic half capsules!

    Support

    Support H

    Support 160C Thermal Curing

    Ink-Jet Printing of MPC H

    Particle Alignment

    100m

    100m

    100m

    Super-paramagnetic nanoparticles embedded in uncured polymer matrix! Inkjet printing of the magnetic composite!

    Alignment of nanoparticles by applying magnetic elds! Thermal curing for fabrication of features beyond exposable resist thickness!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Ergenemann et al (in prep)

    11

    Fabrication of magnetic half capsules!


    FIB cuts No magnetic field applied No change with direction Good dispersion 30 mT applied Parallel to the alignment 30 degrees to the alignment

    D=200m

    2m

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Ergenemann et al (in prep)

    12

    Covalent grafting of a polymer onto SU-8!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    SU-8 surface functionalized with DNA!


    Using DNA hybridizaYon as a means to self-assembly
    PAA-g-ssSNA Poly acrylic acid (PAA) coupled to ssDNA through EDC chemistry. PAA MW: 1080000 g/mol

    100 m Fluorescence microscopic image of a paLern of labeled DNA on SU8


    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Nagaiyanalluret al (in prep)

    Outline!
    SELFSYS objectives! Methodology and team! MEMS fabrication!
    Inkjet printing, magnetic microcapsules, surface functionalization!

    Fluid-mediated parallel assembly, yield! Control system, modeling & automation! Liquid encapsulation & release! Target applications!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Self-assembled pairs of SU-8 micro-cylinders!

    Diameter 100 micrometers


    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    16

    Fluid-mediated self-assembly!
    Study with hundreds of bicolor cylinders (100 m):!

    Micro-capsules with liquid encapsulation:!

    Optical images
    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Release in IPA
    17

    J-Descombes, MarYn et al (in prep)

    Microcapsules with improved sealing!


    Immiscible liquid energy minimization (ILEM) polymer deposition

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    J-Descombes et al. MNE 2012

    18

    Studying the assembly dynamics ...!


    ... by mul$ple opYcal traps
    FuncYonalised SU8 test MEMS

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Gullo et al, IEEE MEMS 2013

    19

    Hydrophobic Attraction!

    20pN aLracYve force for 10m disk surface

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Gullo et al, IEEE MEMS 2013

    20

    Outline!
    SELFSYS objectives! Methodology and team! MEMS fabrication!
    Inkjet printing, magnetic microcapsules, surface functionalization!

    Fluid-mediated parallel assembly, yield! Control system, modeling & automation! Liquid encapsulation & release! Target applications!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Assembly -plant!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Feeding of microcapsules!
    Transfer of MEMS to functional uid (blue)! Control concentration of MEMS in liquid!

    Carrier liquid! outlet!

    Carrier liquid &! MEMS inlet!

    g Functional uid &! MEMS outlet!

    Functional uid inlet!


    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Goldowsky et al, (submiLed to JMM)

    Assembly and sorting!

    Focusing electrode!

    Sorting ! electrode!
    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Goldowsky et al. (in prep)

    Outline!
    SELFSYS objectives! Methodology and team! MEMS fabrication!
    Inkjet printing, magnetic microcapsules, surface functionalization!

    Fluid-mediated parallel assembly, yield! Control system, modeling & automation! Liquid encapsulation & release! Target applications!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Automated modeling of self-assembling systems!


    The M3 framework Fundamental assumption All behavioral changes can be interpreted as the result of an interaction
    Input: spatial trajectories

    x1 x2

    x3

    Con;nuous state (e.g., pose in space)

    Discrete state (state machine)

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Mermoud, Mastrangeli et al, (in prep)

    Model and control of the SELFSYS microchamber!


    FEM Eigenfrequencies
    10 mm

    Control space

    1st: 42.4 KHz


    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Goldowsky et al, (submiLed to JMM) 27

    Model and control of the SELFSYS microchamber!


    CFD simula;ons Laminar ow (Re ~ 100) 2-phase ow (water/air) AcousYc actuaYon (45 KHz) ParYcle tracking
    5 mm

    Air sockets

    water

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    28 Goldowsky et al, (submiLed to JMM)

    Model and control of the SELFSYS microchamber!


    Fluid dynamics Laminar ow (Re ~ 100) 2-phase ow (water/air) AcousYc actuaYon (45 KHz) ParYcle tracking secondary streaming

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    29 Goldowsky et al, (submiLed to JMM)

    HOW CAN WE WATCH THE MICRO PARTS MOVING AND CONTROL THE SYSTEM WITH A FEEDBACK LOOP?!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    The Lily platform: centimetric uidic self-assembly!

    FloaYng, passive, self-aligning 4 remotely-controlled inlets MagneYc latching 2 main agitaYon modes ParasiYc uidic propulsion for bang/bang control

    Blocks

    Arena

    Overhead camera Data aquisiYon by SwisTrack M3 computaYonal framework

    Real-;me tracking

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Mermoud et al. ICRA 2012

    SELFSYS platform: micrometric uidic self-assembly!

    2 cm
    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    32

    Monitoring the micrometric uidic self-assembly! High speed video of selfassembling microcapsules Tracking of self-assembling microcapsules

    200 m

    200 m

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Mastrangeli et al, (in prep)

    33

    Magnetically Guided Self-Assembly!


    Half capsules with magnetic nanoparticles! Programming easy axis by aligning nanoparticles! Parts align with an applied magnetic eld! They attract each other due to magnetic forces ! Selective binding for self assembly!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Ergenemann, Peters et al. MEMS 2013

    Parallel manipulation of magnetic capsules!


    Forming chains of magnetic parts when in-plane magnetic fields are applied (left) Separating parts by applying out-of-plane magnetic fields (right)

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Ergenemann et al. (in prep)

    35

    Envisioned applications!

    2 industrial partners interested

    Drug delivery!
    Triggered, local, timed release!

    PAT (process analytical technologies)!


    Use capsules as distributed sensors! Remote readout!

    Bioreactor process monitor! Food quality control!


    ! Fluidic-mediated self-assembly for hybrid functional micro/nanosystems SELFSYS -! Fluid-mediated self-assembly for hybrid functional micro/nanosystems ! !
    36

    Liquid released upon external (self)trigger!

    Release in IPA Other options: - Heat - Valve - Other chemical reaction - Biodegradation
    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    PhD thesis L. Jacot-Descombes

    Summary!

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Liquid lled micro-capsules. Ready to measure. Ready to release.

    SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!

    Vous aimerez peut-être aussi