SPECTROLAB DIODE, ATP, AND 150MM WAFER FAB

CONTROL DRAWINGS

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SECTION 1

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SPECTROLAB DIODE, ATP, AND 150MM WAFER FAB

SECTION 2

SEQUENCE OF OPERATIONS

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SpectrolabRenovationLC111032 CDASystemSequenceofOperations ReferenceDrawingB720PD9001A ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheAircompressorCOMP01isstartedwhenpressurereadingatPT1007locatedonWetAirReceiver CDAR1fallsbelow125psi(adjustable).TheAircompressorCOMP01isstoppedwhenpressure readingatWetAirReceiverCDAR1risesto140psi(adjustable). Onceevery24hours,blowdownvalvesEV1008andEV1009willopenandsubsequentlyclosetodrain thecondensate.Scheduleanddurationisadjustable. UnoccupiedMode: Aircompressoriskeptoff.BlowdownvalvesEV1008andEV1009arekeptclosed. Alarmsforthissystemaredisabledfromannunciating. MonitoredPoints: CDAAirflow RunStatusofCOMP01viaCOMP01controlpanel PressureatAirreceivers(2) DewpointofleavingAir CommonAlarmatCOMP01LocalControlpanel CommonAlarmatCDAA1LocalControlpanel CompressedAirpressureatendofline.(In150mmFabShownonDrawingB720PD9001C) Alarms: HighpressureatPT1007,initiallysetat155psi.(Adjustable) LowpressureatPT1007,initiallysetat120psi.(Adjustable) HighpressureatPT1004,initiallysetat155psi.(Adjustable) LowpressureatPT1004,initiallysetat120psi.(Adjustable) HighDewpointatAIT1006,initiallysetat48degF.(Adjustable) CommonAlarmviaCDAA01controlpanel. CommonAlarmviaComp01controlpanel.

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SpectrolabRenovationLC111032 N2SystemSequenceofOperations ReferenceDrawingB720PD9002C ModeControl: Systemismonitoredonly. Monitoringpoints: N2flowismeasuredbyFT2003 N2pressureismeasuredbyPT2004 Alarms: LowN2pressureatPT2004.Initiallysetatxxpsi.(Adjustable)

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SpectrolabRenovationLC111032 ProcessVacuumSystemSequenceofOperations ReferenceDrawingB720PD9003A ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: ProcessVacuumPumpisstarted. UnoccupiedMode: ProcessVacuumPumpisstopped. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: RunStatusofPVsystemviaLocalcontrolpanel VacuumpressureofsystemattankviaPT3001 CommonAlarmviaLocalcontrolpanel. Alarms: HighVacuumpressureatPT3001.Initiallysetatxxw.g.(Adjustable) CommonAlarmviaLocalcontrolpanel.

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SpectrolabRenovationLC111032 ProcessChilledWaterSystemSequenceofOperations ReferenceDrawingB720PD9004A ModeControl: Systemhasthreedistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: OnePrimary,onestandbypump(Lead/lag),shallmodulatetomaintainsystempressureas measuredatPT4010.Ifapumpfails,thelagpumpshallenergizeandresumecontrol.Pumpswill alternateviathescheduleprograminitiallysetatweeklyinterval.(Adjustable) Whentankleveldropstoasetlevel(adj.)themakeupsolenoidvalveshallopen.Whentank levelrisestoasetlevel(adj.)themakeupsolenoidvalveshallclose. Whenresistivitydropsbelowasetlevelinitiallysetat250K(Adjustable),theblowdownvalve EV4005shallopen.Whenresistivityrisesabovethesetpoint,theblowdownvalveshallclose.A minimumoperationtimeandadeadband(bothadjustable)areprogrammedintotheoperationinorder tokeepvalvefromchattering. PCWtemperaturemeasuredatTIT4009ismaintainedatsetpoint(adj.)bymodulatingvalve CV10atHeatExchanger1. Whentanklowlevelissensed,thepumpswillbecommandedtostopandanalarmwillbe generated. UnoccupiedMode: Pumpsarecommandedoff. Valvesarekeptclosed. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: PCWTank01level(analog),Highlevel/Lowlevel(binary) PCWMainSupply/ReturnPressure,Pumpdischargepressure. PumpsFault,Run,Inauto,Start/Stop,Speedcontrol. PCWblowdown,MakeupValve. PCWConductivity PCWTemperatureenteringandleavingHX1 SCHWValve PCWSupplyFlow Alarms: LossofFlow PCWSupplyTemperatureHigh PCWTank01High/lowwaterlevel PumpFailure PCWresistivityoutofspec.

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SpectrolabRenovationLC111032 DI/ROSystemSequenceofOperations ReferenceDrawingB720PD9005A ModeControl: Systemismonitoredonly. Monitoringpoints: Supply/Returnflow. Supply/Returnpressure Supply/ReturnConductivity Alarms: SupplyorReturnConductivityoutofspec.

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SpectrolabRenovationLC111032 HouseVacuumSystemSequenceofOperations ReferenceDrawingB720PD9006A ModeControl: Systemismonitoredonly. Monitoringpoints: Commonalarmderivedfromlocalcontrolpanel. Runstatusderivedfromlocalcontrolpanel.(SubjectofClimatecRFI#03) Alarms: Commonalarmderivedfromlocalcontrolpanel.

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SpectrolabRenovationLC111032 SolventWasteCollectionSystemSequenceofOperations ReferenceDrawingB720PD9007 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: Solventwaste Thesystemoperatesinalead/standbymode.Theinletvalvefortheoperatingtankiskeptopen. WhenthelevelmeasuredbyLI7001orLI7002(dependinguponleadtank)isatauserdefinedvalue, theinletvalveforthestandbytankisopenedandtheleadvalveiscommandedclosed.Asupervisory alarmisgeneratedtoprompttheusertohavethetankemptied. IfhighlevelissensedviaLAHH7001orLAH7002,analarmisgenerated. Iftheinletvalvepositionswitchesdonotmatchthecommandedstateofthevalveandalarmis generated. RR41Solventwaste Monitoringonly UnoccupiedMode: Alarmsforthecommandedstateofthevalvesaredisabledfromannunciating. Highlevelalarmisstillactive CommonalarmderivedfromRR41Solventwastedrumcontrolpanel. Monitoringpoints: Tank1,2level(analog) Tank1,2highlevel Inletvalveopen/closeandpositionswitches RR41Solventwastecommonalarm Alarms: TankhighlevelviaLAHH7001orLAH7002 Iftheinletvalvepositionswitchesdonotmatchthecommandedstateofthevalve CommonalarmderivedfromRR41controlpanel.Whendrumisfull,orwhenleakisdetected.

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SpectrolabRenovationLC111032 WasteCollectionSumpPumpSystemSequenceofOperations ReferenceDrawingB720PD9008 ModeControl: Systemismonitoredonly. SWS01,SWS02,CWWS01,CWWS02,CWWS03 Monitoringpoints: Pumprun(2)statusderivedfromlocalcontrolpanel TankHighlevelderivedfromlocalcontrolpanel Leakalarmderivedfromlocalcontrolpanel (AnaloglevelsensorissubjectofClimatecRFI#01,02) Alarms: TankHighlevelderivedfromlocalcontrolpanel Leakalarmderivedfromlocalcontrolpanel

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SpectrolabRenovationLC111032 ChemicalWastewaterSystemSequenceofOperations ReferenceDrawingB720PD9009 ModeControl: Systemismonitoredonly. Monitoringpoints: Commonalarmderivedfromlocalcontrolpanel(K2Cr207) Alarms: Commonalarmderivedfromlocalcontrolpanel(K2Cr207)

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SpectrolabRenovationLC111032 AqueousChemicalRoomChemicalWastewaterSystemSequenceofOperations ReferenceDrawingB720PD9010 ModeControl: Systemismonitoredonly. Monitoringpoints: MixedAcidCommonalarmderivedfromlocalcontrolpanel H202CDMCommonalarmderivedfromlocalcontrolpanel H202ValveBoxleak Alarms: MixedAcidCommonalarmderivedfromlocalcontrolpanel H202CDMCommonalarmderivedfromlocalcontrolpanel H202ValveBoxleak

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SpectrolabRenovationLC111032 SolventChemicalDeliverySystemSequenceofOperations ReferenceDrawingB720PD9011 ModeControl: Systemismonitoredonly. Monitoringpoints: StripperRR41Commonalarmderivedfromlocalcontrolpanel IPACDMCommonalarmderivedfromlocalcontrolpanel IPAValveBoxleak Alarms: MixedAcidCommonalarmderivedfromlocalcontrolpanel H202CDMCommonalarmderivedfromlocalcontrolpanel H202ValveBoxleak

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SpectrolabRenovationLC111032 ChemicalExhaustSystemSequenceofOperations ReferenceDrawingB720PD9013 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheScrubberfanspeedmodulatestomaintainductstaticpressurePDT13002atsetpoint(adjustable). Atentrancetoroom2049,abreakglassswitchisutilizedtoshutoffexhausttothisroom. UnoccupiedMode: Scrubberfaniscommandedoff. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: Ductpressure FanFault,Run,Inauto,Start/Stop,Speedcontrol. Alarms: Ductpressurenotatsetpointwhilefanisinoperation FanFault,Statusnotmatchingcommandedstate Fannotinauto

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SpectrolabRenovationLC111032 VOCExhaustSystemSequenceofOperations ReferenceDrawingB720PD9013 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheVOCExhaustfanspeedmodulatestomaintainductstaticpressurePDT13002atsetpoint (adjustable). Atentrancetoroom2050,abreakglassswitchisutilizedtoshutoffexhausttothisroom. UnoccupiedMode: VOCExhaustfaniscommandedoff. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: Ductpressure FanFault,Run,Inauto,Start/Stop,Speedcontrol. Alarms: Ductpressurenotatsetpointwhilefanisinoperation FanFault,Statusnotmatchingcommandedstate Fannotinauto

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SpectrolabRenovationLC111032 GeneralExhaustSystemSequenceofOperations ReferenceDrawingB720PD9013 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheExhaustfanisstarted. UnoccupiedMode: TheExhaustfaniscommandedoff. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: FanRun,Inauto,Start/Stop Alarms: Fanstatusnotmatchingcommandedstate Fannotinauto

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SpectrolabRenovationLC111032 RoomEnvironmentalSystemSequenceofOperations ReferenceDrawingB720PD9019,PD9020,PD9021 ModeControl: Systemhastwodistinctmodesforeachroom: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheWaddellBladderdampermodulatestomaintaindifferentialpressureatsetpointbetweentheroom andbarometricpressure. Thereheatcoil(andifprovideddrycoolingcoil)modulateinsequencetomaintaintemperatureatset pointforeachzone. UnoccupiedMode: Thereheatcoilanddrycoolingcoilvalvesarecommandedclosed. TheWaddellbladderdamper(s)arecommandedclosed. Monitoringpoints: Temperature Humidity Differentialpressurebetweenspaceandbarometricpressure Alarms: Differentialpressureoutoftoleranceforlongerthanaspecifiedtime(adjustable) Temperatureoutoftoleranceforlongerthanaspecifiedtime(adjustable) Relativehumidityoutoftoleranceforlongerthanaspecifiedtime(adjustable)

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Bladd er Damp er 6 6 7 7 17 9 9 9 15 15 8 8 10 10 10 16 18 11 12 12 Reheat Coil 1 1 2 2 9 4 4 4 5 5 3 3 6 6 6 10 11 7 8 8

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DryCoolingCoil 11through14 21through24 31through34 41through44 51through54 61through65 71through74 81through83 91 91 101through106 111through115 121 through126 131through136 141through145 151through152 n/a n/a n/a n/a

E
RoomTemp DegF 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68+/ 2 68 75 75 75

N
RoomRH% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5+/1.5% 43.5% 45% 45% 45%

Zone 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Room 2057N 2057S 2056N 2056S 2054 2052E 2052C 2052W 2040 2062 2046 2046 2046 2046 2046 2037 2044 2044 2049 2050

RoomName

ATPNorth ATPSouth ATPNorth ATPSouth Vestibule DiodeFab DiodeFab DiodeFab Liftoff LiftoffVestibule 150MMNE 150MMNW 150MMC 150MMSW 150MMSE Gowning Vestibule GasRoom AqueousChem SolvChem

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Room Pressure 0.05inH2O 0.05inH2O 0.05inH2O 0.05inH2O 0.025inH2O 0.05inH2O 0.05inH2O 0.05inH2O 0.05 inH2O 0.025inH2O 0.05inH2O 0.05inH2O 0.05inH2O 0.05inH2O 0.05inH2O 0.025inH2O 0.025inH2O 0.025inH2O 0.025inH2O 0.025inH2O

SpectrolabRenovationLC111032 MakeUpAirSystemSequenceofOperations ReferenceDrawingB720PD9023 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: TheDischargeairdamperiscommandedopen.Onceendswitchisprovenopenandatleastenough zonebladderdampersareopentoensureairflow,thesupplyfans(4)areenergizedandcommandedto minimumspeed.Onceallfansprovestatus,thefanspeedwillmodulatetomaintainductstatic pressure. Thepreheatcoil,coolingcoilmodulateinsequencetomaintaindischargeairtemperature.Thepreheat coilisalsomodulatedtomaintainaminimumleavingcoiltemperatureataminimumsetpoint. Dischargeairtemperatureisresetfromaminimumtomaximumvaluebasedupontherequirements fromthe20zonesassociatedwiththeunit.Uponacallfordehumidification,thechilledwatervalveis forcedfurtheropenwiththereheatcoilmaintainingdischargeairtemperature.Uponacallfor humidification,thehumidifierisenabled,withitsfivestagesofcapacity. Ifthefreezestatistripped(manualresetinitiallysetat34deg),thepreheatcoilwillbeopenedto approximately50%toprotectthecoilandanalarmwillbegenerated. UnoccupiedMode: TheSupplyfansarecommandedoff.Supplyfanspeedsignalissettozero.Allvalvesclose,humidifieris turnedoff.SupplyAirdamperiscommandedclosed.Allzonesarecommandedtounoccupiedposition (seesequenceforroomcontrol) Alarmsforthissystemaredisabledfromannunciating. Alarmsforroompressurearedisabledfromannunciating. Monitoringpoints: FanRun,Inauto,Start/Stop,Speed,Fault VFDintegration Prefilterdifferentialpressure Finalfilterdifferentialpressure Hepafilterdifferentialpressure Coolingcoilleavingtemperature Preheatcoilleavingtemperature Reheatcoilleavingtemperature SupplyAirhumidity SupplyAirtemperature SupplyAirstaticpressure Enteringairlowtemperatureswitch Alarms: Fan(s)statusnotmatchingcommandedstate Fan(s)notinauto Highfilterdifferentialpressure 6/29/2011

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SpectrolabRenovationLC111032 Freezestat VFDfault

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SpectrolabRenovationLC111032 ChilledWaterSystemSequenceofOperations ReferenceDrawingB720PD9026,9027,9028,9029,9030,9031 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: Commonloop TheChilledwaterisolationvalveiscommandedopen.Whenendswitchprovesvalveisopen,the chilledwaterpumpCHP01iscommandedtostartatminimumspeed.Oncechilledwaterpumpis proventobeoperational,thechilledwaterpumpwillmodulateinsequencewiththebypassvalveinthe commonsupplytomaintaindifferentialpressureacrossthechillerandsupplypressureinthecommon loop. Condenserwater Thecoolingtowerisolationvalvesarecommandedopen.Thecondenserwaterisolationvalveis commandedopen.Thebypassvalveiscommandedforfullbypassiftemperatureislessthan70deg, otherwiseitwillmodulateinunisonwiththecoolingtowerfanstomaintainchillerenteringcondenser temperature.Whenisolationvalvesendswitchesconfirmopen,thecondenserwaterpumpis commandedonatminimumspeed.Whenpumphasprovenon,thespeedismodulatedtomaintain pressureintheloopatsetpoint(adjustable). Chiller Whenpumpshavereachedsetpoint,thechillerisstartedanditmaintainschilledwatertemperatureat thesetpoint(adjustable,initiallysetat39deg.) Primaryloop WhenpumpCHP01isoperational,theprimaryisolationvalveisopenedandtheprimarypumpis commandedonatminimumspeed.Whenpumphasprovenon,thespeedismodulatedinunisonwith thebypassvalvetomaintainpressureintheloopatsetpoint(adjustable). Secondaryloop WhenpumpCHP01isoperational,thesecondaryisolationvalveisopenedandthesecondarypumpis commandedonatminimumspeed.Whenpumphasprovenon,thespeedismodulatedinunisonwith thebypassvalvetomaintainpressureintheloopatsetpoint(adjustable).Themixingvalveis modulatedtomaintainthesecondaryloopattemperaturesetpoint.Initiallysetat45degrees (adjustable). Tertiaryloop WhenpumpCHP01isoperational,thetertiaryisolationvalveisopenedandthetertiiarypumpis commandedonatminimumspeed.Whenpumphasprovenon,thespeedismodulatedinunisonwith thebypassvalvetomaintainpressureintheloopatsetpoint(adjustable).Themixingvalveis modulatedtomaintainthetertiaryloopattemperaturesetpoint.Initiallysetat57degrees (adjustable). UnoccupiedMode: TheChilleristurnedoff,andafteradelay(adjustable)thechilledwaterpumpsareturnedoff.Aftera furtherdelay(adjustable),theisolationvalvesareclosed.Themixingvalvesclosetothereturnwater loop. Alarmsforthissystemaredisabledfromannunciating. 6/29/2011

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SpectrolabRenovationLC111032 Monitoringpoints: FanRun,Inauto,Start/Stop,Speed,Fault VFDintegration PCHWSSupplypressure PCHWSSupply/Returntemperature SCHWSSupplypressure SCHWSSupply/Returntemperature TCHWSSupplypressure TCHWSSupply/Returntemperature CommonCHWSSupplypressure CommonSupply/Returntemperature CondenserWaterSupply/Returntemperature CondenserWaterSupply/Returnpressure Isolationvalves Bypassvalve Coolingtowervibrationswitch Alarms: Pumpstatusnotmatchingcommandedstate Pumpnotinauto PumpFault Chillerstatusnotmatchingcommandedstate Chillerfault PCHWStemperature/pressurenotwithinspecification SCHWStemperature/pressurenotwithinspecification TCHWStemperature/pressurenotwithinspecification Valvestatusnotmatchingcommandedstate Coolingtowervibrationswitch

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SpectrolabRenovationLC111032 HotWaterBoilerSystemSequenceofOperations ReferenceDrawingB720PD9033 ModeControl: Systemhastwodistinctmodes: OccupiedSystemcontrolsareoperational. UnoccupiedSystemisdisabled. Theoperatormayselectbetweenthemodes. OccupiedMode: Boilersoperateinalead/lagsequence.Theleadisolationvalveisopened,andwhenvalveendswitch provesposition,thehotwaterpumpiscommandedonatminimumspeed.Whenpumpstatusis proven,thepumpmodulatestomaintaindifferentialpressureatsetpoint(adjustable)inunisonwith thebypassvalve.Theleadboilerisstarted.IfHotwatertemperaturecannotbemaintainedorifthe leadboilerisoperatingatmorethan90%(adjustable)capacityforgreaterthan10minutes(adjustable), thelagboilerisolationvalveisopened,andwhenthevalveisconfirmedopened,thelagboileris started.Whenbothboilersareoperatingunder45%capacity(adjustable)thelagboilerisdisabled,and afteradelay,thelagisolationvalveisclosed. UnoccupiedMode: TheBoiler(s)arecommandedoff,afteranadjustabledelay,thehotwaterpumpiscommandedoff. Afterpumpisprovenoff,theisolationvalvesareclosed. Alarmsforthissystemaredisabledfromannunciating. Monitoringpoints: PumpRun,Inauto,Start/Stop HotwaterSupply/Returntemp HotwaterSupply/Returnpressure Boilerintegration VFDintegration Alarms: Pumpstatusnotmatchingcommandedstate Pumpnotinauto Isolationvalvenotmatchingcommandedstate Boilerfault VFDfault Boilerstatusnotmatchingcommandedstate

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SPECTROLAB DIODE, ATP, AND 150MM WAFER FAB

BILL OF MATERIALS

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GLOBAL CONTROLLERS (BCM) BILL OF MATERIAL TAG BCM-0001 BCM-0002 BCM-0003 LOCATION SPAN RANGE BCM PANEL BCM PANEL BCM PANEL PART NO BCM-PWS BCM-ETH BCM-MSTP DIGITAL CONTROLLERS DESCRIPTION GLOBAL CONTROLLER POWER MODULE GLOBAL CONTROLLER ETHERNET MODULE GLOBAL CONTROLLER MS/TP MODULE ACCURACY MANUFACTURER ALERTON ALERTON ALERTON

TAG LOCATION SPAN RANGE PART NO PSAC-0001 BCM PANEL PSH100AB10

POWER SUPPLIES DESCRIPTION 100VA POWER SUPPLY ENCLOSURES/PANELS DESCRIPTION NEMA1 ENCLOSURE WITH PANEL

TAG CP-BCM

LOCATION -

SPAN RANGE PART NO 567-351

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TAG SW-0001

LOCATION PC-0001

SPAN RANGE PART NO EBTV2.6-LRG

SOFTWARE DESCRIPTION ENVISION FOR BACTALK SOFTWARE-VERSION 2.6

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TAG PC-0001 PC-0001

FRONT END COMPUTER LOCATION SPAN RANGE PART NO DESCRIPTION GAS ROOM FX980 PRINTER GAS ROOM DELL MINITOWER INTEL CORE 2 DUO-2.66GHZ PROCESSOR PC

TAG SWITCH

LOCATION SPAN RANGE PART NO BCM PANEL FS605

ETHERNET SWITCHES DESCRIPTION 5-PORT FAST ETHERNET SWITCH

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ACCURACY MANUFACTURER FUNCTIONAL DEVICES

ACCURACY MANUFACTURER SIEMENS

ACCURACY MANUFACTURER NETGEAR

ACCURACY MANUFACTURER DELL DELL

ACCURACY MANUFACTURER ALERTON

CHILLED WATER SYSTEM BILL OF MATERIALS

RTD/WELLS WITH TRANSMITTERS TEMPERATURE SENSORS TAG TT-2001 TT-2002 TT-2003 TT-2004 TT-2005 TT-2006 TT-2007 TT-2008 TT-2009 TT-2010 SINGLE OR DUPLEX WELL DIMENSIONS (MM) WELL DIMENSIONS (IN) SINGLE 102 4.00 SINGLE 102 4.00 SINGLE 152 6.00 SINGLE 152 6.00 SINGLE 152 6.00 SINGLE 152 6.00 SINGLE 76 3.00 SINGLE 76 3.00 SINGLE 102 4.00 SINGLE 102 4.00 LOCATION COMMON CHILLED WATER SUPPLY TEMP COMMON CHILLED WATER RETURN TEMP CONSENSER WATER SUPPLY TEMP CONDENSER WATER RETURN TEMP PRIMARY CHILLED WATER COMMON SUPPLY TEMP PRIMARY CHILLED WATER COMMON RETURN TEMP SECONDARY CHILLED WATER COMMON SUPPLY TEMP SECONDARY CHILLED WATER COMMON RETURN TEMP TERTIARY CHILLED WATER COMMON SUPPLY TEMP TERTIARY CHILLED WATER COMMON RETURN TEMP RANGE (F) 0-100 0-100 40-130 40-130 0-100 0-100 0-100 0-100 0-100 0-100 EQUIP OP TEMP RANGE 39F 54F 80F 90F 39F 54F 45F 55F 57F 67F PART NO S479PDY40TT11PD1S S479PDY40TT11PD1S S479PDY60TT111PD1XH S479PDY60TT111PD1XH S479PDY60TT111PD1S S479PDY60TT111PD1S S479PDY30TT111PD1S S479PDY30TT111PD1S S479PDY40TT11PD1S S479PDY40TT11PD1S DESCRIPTION IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER ACCURACY 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F MANUFACTURER MINCO MINCO MINCO MINCO MINCO MINCO MINCO MINCO MINCO MINCO

PRESSURE TRANSMITTERS (GAUGE PRESSURE) TAG PT-2001 PT-2002 PT-2003 PT-2004 N/A N/A OPTIONAL ACCESSORY 47S 47S 47S 47S LOCATION CHILLED WATER COMMON SUPPLY PRESSURE CHILLED WATER COMMON RETURN PRESSURE CONDENSER WATER SUPPLY PRESSURE CONDENSER WATER RETURN PRESSURE RANGE (PSIG) 0-200 0-200 0-200 0-200 ZERO/SPAN FACTORY ADJ. 10% FACTORY ADJ. 10% FACTORY ADJ. 10% FACTORY ADJ. 10%

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PART NO. PTX1E-LCD-09 PTX1E-LCD-09 PTX1E-LCD-09 PTX1E-LCD-09

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DESCRIPTION STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER

ACCURACY 1% FULL SCALE 1% FULL SCALE 1% FULL SCALE 1% FULL SCALE

MANUFACTURER KELE KELE KELE KELE

FLOW METERS TAG FT-2001 N/A N/A N/A LOCATION CHILLED WATER COMMON RETURN FLOW RANGE (GPM) 25 - 8,119

EN

EQUIP OPERATING GPM 650

TAG PDIT-2001 PDIT-2002 PDIT-2003

N/A

N/A

N/A

LOCATION PRIMARY CHILLED WATER LOOP DIFFERENTIAL PRESSURE SECONDARY CHILLED WATER LOOP DIFFERENTIAL PRESSURE TERTIARY CHILLED WATER LOOP DIFFERENTIAL PRESSURE

RANGE (PSID) 0-100 0-100 0-100

ZERO/SPAN 2% 2% 2%

PRESSURE TRANSMITTERS (DIFFERENTIAL PRESSURE)

PART NO. 2301-100PD-3V-11-B-C 2301-100PD-3V-11-B-C 2301-100PD-3V-11-B-C

DESCRIPTION DIFFERENTIAL PRESSURE TRANSDUCER DIFFERENTIAL PRESSURE TRANSDUCER DIFFERENTIAL PRESSURE TRANSDUCER

ACCURACY 0.25 FULL SCALE 0.25 FULL SCALE 0.25 FULL SCALE

MANUFACTURER SETRA SETRA SETRA

PART NO. F-3110-211

DESCRIPTION ELECTROMAGNETIC FLOW METER

ACCURACY 0.4%

MANUFACTURER ONICON

RELAYS

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TAG R-1 R-1 R-2 R-2 R-3 R-3 R-4 R-4 R-5 R-5 R-6 R-6 R-50 R-50 R-51 R-51 R-52 R-52 CV-4 CV-5 CV-7 CV-11 CV-16 CV-17

N/A

N/A

N/A CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE

LOCATION

N/A

N/A

PART NO. VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F RIBU1C-N4 RIBU1C-N4 RIBU1C-N4 RIBU1C-N4 RIBU1C-N4 RIBU1C-N4

DESCRIPTION SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY

N/A

MANUFACTURER VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS FUNCTIONAL DEVICES FUNCTIONAL DEVICES FUNCTIONAL DEVICES FUNCTIONAL DEVICES FUNCTIONAL DEVICES FUNCTIONAL DEVICES

R
POWER SUPPLIES LOCATION N/A N/A

TAG DCP-2001 PSAC-2001

N/A

N/A

N/A

EF ER

CHILLER PLANT PANEL CHILLER PLANT PANEL ENCLOSURES/PANELS LOCATION CENTRAL PLANT CENTRAL PLANT N/A N/A

PART NO. PS5R-A24 PSH100A100AB10

DESCRIPTION 120 VAC TO 24VDC POWER SUPPLY - 7.5W DUAL 100VA POWER SUPPLY

N/A

MANUFACTURER IDEC FUNCTIONAL DEVICES

TAG CP-CHW CP-CHW

N/A

N/A

N/A

PART NO. A42N3613 A42P36

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE CONTROL PANEL

N/A

MANUFACTURER HOFFMAN HOFFMAN

CHILLED WATER SYSTEM BILL OF MATERIALS

CONTROL VALVES TAG CV-2 CV-3 CV-4 CV-5 CV-7 CV-8 CV-9 CV-11 CV-12 CV-13 CV-19 N/A N/A N/A LOCATION CHW PLANT BYPASS END-OF-LINE CHW LOOP BYPASS PRIMARY CHW LOOP ISOLATION VALVE PRIMARY LOOP CHW BYPASS SECONDARY CHW LOOP ISOLATION VALVE SECONDARY CHW LOOP BLENDING SECONDARY CHW LOOP BYPASS TERTIARY CHW LOOP ISOLATION VALVE TERTIARY CHW LOOP BLENDING TERTIARY CHW LOOP BYPASS COOLING TOWER BLOW DOWN VALVE N/A N/A PART NO. SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE DESCRIPTION CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE CONTROL VALVE N/A MANUFACTURER BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO BELIMO

DIGITAL CONTROLLERS TAG C-2001 C-2002 C-2003 C-2004 C-2005 C-2006 C-2007 N/A N/A N/A CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL CHILLER PLANT PANEL LOCATION N/A N/A

O N
PART NO. VLX-PLATINUM EXP-2200 EXP-10120 EXP-1048 EXP-1048 EXP-10120 EXP-1048

LY

FO

EF ER

EN

DESCRIPTION VLX PLATINUM CONTROLLER (32-BIT PROCESSOR) VLX PLATINUM EXPANSION MODULE (22 IN) VLX PLATINUM EXPANSION MODULE (10 IN/12 DO) VLX PLATINUM EXPANSION MODULE (10 IN/4 DO/8 AO) VLX PLATINUM EXPANSION MODULE (10 IN/4 DO/8 AO) VLX PLATINUM EXPANSION MODULE (10 IN/12 DO) VLX PLATINUM EXPANSION MODULE (10 IN/4 DO/8 AO)

N/A

MANUFACTURER ALERTON ALERTON ALERTON ALERTON ALERTON ALERTON ALERTON

PROCESS COOLING WATER SYSTEM BILL OF MATERIALS

RTD/WELLS WITH TRANSMITTERS TEMPERATURE SENSORS TAG TT-4001 TT-4002 SINGLE OR DUPLEX WELL DIMENSIONS (MM) SINGLE 102 SINGLE 102 WELL DIMENSIONS (IN) 4.00 4.00 LOCATION PROCESS COOLING WATER HX-01 SUPPLY TEMP PROCESS COOLING WATER HX-01 RETURN TEMP RANGE (F) 0-100 0-100 EQUIP OP TEMP RANGE 45F 54F PART NO S479PDY40TT11PD1S S479PDY40TT11PD1S DESCRIPTION IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER ACCURACY 0.1% @ 32F 0.1% @ 32F MANUFACTURER MINCO MINCO

PRESSURE TRANSMITTERS (GAUGE PRESSURE) TAG PT-4001 PT-4002 PT-4003 N/A N/A OPTIONAL ACCESSORY LOCATION 47S PROCESS COOLING WATER SUPPLY PRESSURE 47S PROCESS COOLING WATER RETURN PRESSURE 47S PROCESS COOLING WATER HX-01 OUTLET PRESSURE RANGE (PSIG) 0-200 0-200 0-200 FLOW METERS TAG FT-4001 N/A N/A N/A LOCATION PROCESS COOLING WATER HX-01 OUTLET FLOW RANGE (GPM) 9 - 2975 ZERO/SPAN FACTORY ADJ. 10% FACTORY ADJ. 10% FACTORY ADJ. 10%

EQUIP OPERATING GPM 400

O N

PART NO. PTX1E-LCD-09 PTX1E-LCD-09 PTX1E-LCD-09

LY

DESCRIPTION STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER

ACCURACY 1% FULL SCALE 1% FULL SCALE 1% FULL SCALE

MANUFACTURER KELE KELE KELE

PART NO. F-3106-211

DESCRIPTION ELECTROMAGNETIC FLOW METER

ACCURACY 0.4%

MANUFACTURER ONICON

CONDUCTIVITY METERS TAG AIT-4001 N/A N/A N/A LOCATION PROCESS COOLING WATER SUPPLY CONDUCTIVITY RANGE 0-200S

LEVEL INDICATING TRANSMITTERS TAG LI-4001 N/A N/A N/A LOCATION PROCESS COOLING WATER TANK LEVEL INDICATOR RANGE (ft.) 0-114.5

EQUIP OPERATING RANGE 8' (est.)

EQUIP OPERATING RANGE 250k (4S)

PART NO. Q45C2-1-4-2

DESCRIPTION CONDUCTIVITY/RESISTIVITY MONITOR

ACCURACY 0.10%

MANUFACTURER ATI

PART NO. VEGAPULS 62

DESCRIPTION LEVEL MEASUREMENT RADAR SENSOR

ACCURACY 2mm

MANUFACTURER VEGA

TAG LSLL-4001 LSHH-4001

N/A

N/A

N/A

LOCATION PCW TANK LOW LEVEL ALARM PCW TANK HIGH LEVEL ALARM

EN
LEVEL SWITCHES RANGE -

EQUIP OPERATING RANGE 12" (ABOVE TANK BOTTOM) 108" (ABOVE TANK BOTTOM)

PART NO. AZ28-4343-10'-9'-1'

DESCRIPTION LIQUID LEVEL SWITCH

ACCURACY 1mm

MANUFACTURER FLOWLINE

RELAYS

TAG R-50 R-50

N/A

N/A

N/A PCW PANEL PCW PANEL

EF ER
LOCATION N/A

N/A

PART NO. VMD1B-F24A VBD1B-F

DESCRIPTION SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS

POWER SUPPLIES N/A N/A PART NO. PSH100AB10 PS5R-A24 DESCRIPTION 100VA POWER SUPPLY 120 VAC TO 24VDC POWER SUPPLY-7.5WATTS N/A MANUFACTURER FUNCTIONAL DEVICES IDEC

TAG PSAC-4001 DCP-4001

N/A

N/A

N/A PCW PANEL PCW PANEL

LOCATION

ENCLOSURES/PANELS N/A N/A PART NO. 567-351 DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE ASSEMBLY N/A MANUFACTURER SIEMENS

TAG CP-PCW

N/A

N/A

N/A

LOCATION CENTRAL PLANT SOUTH STAIRS

R
LOCATION

DIGITAL CONTROLLERS N/A N/A PART NO. VLCA-1688 DESCRIPTION VISUAL LOGIC CONTROLLER - 12-BIT N/A MANUFACTURER ALERTON

PCW PANEL

FO

TAG C-4001

N/A

N/A

N/A

HOT WATER SYSTEM BILL OF MATERIALS

RTD/WELLS WITH TRANSMITTERS TEMPERATURE SENSORS TAG TT-3001 TT-3002 TT-3003 TT-3004 SINGLE OR DUPLEX WELL DIMENSIONS (MM) SINGLE SINGLE SINGLE SINGLE 76.2 76.2 50.8 50.8 WELL DIMENSIONS (IN) 3.00 3.00 2.00 2.00 LOCATION PRIMARY HOT WATER SUPPLY TEMP PRIMARY HOT WATER RETURN TEMP B-1 HW SUPPLY TEMP B-2 HW SUPPLY TEMP RANGE (F) 50-200 50-200 50-200 50-200 EQUIP OP TEMP RANGE 140 120 140 140 PART NO S479PDY30TT111PD1KQ S479PDY30TT111PD1KQ S479PDY20TT111PD1KQ S479PDY20TT111PD1KQ DESCRIPTION IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER IMMERSION RTD WITH TRANSMITTER ACCURACY 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F 0.1% @ 32F MANUFACTURER MINCO MINCO MINCO MINCO

PRESSURE TRANSMITTERS (GAUGE PRESSURE) TAG PT-3001 PT-3002 N/A N/A OPTIONAL ACCESSORY 47S 47S LOCATION PHW COMMON SUPPLY PRESSURE PHW COMMON RETURN PRESSURE RANGE (PSIG) 0-200 0-200 RELAYS TAG R-1 R-1 CV-25 CV-26 N/A N/A N/A HOT WATER PANEL HOT WATER PANEL CONTROL VALVE CONTROL VALVE POWER SUPPLIES TAG DCP-3001 PSAC-3001 N/A N/A N/A HOT WATER PANEL HOT WATER PANEL LOCATION N/A LOCATION N/A N/A ZERO/SPAN FACTORY ADJ. 10% FACTORY ADJ. 10%

O N

PART NO. PTX1E-LCD-09 PTX1E-LCD-09

LY

DESCRIPTION ACCURACY STAINLESS STEEL PRESSURE TRANSMITTER 1% FULL SCALE STAINLESS STEEL PRESSURE TRANSMITTER 1% FULL SCALE

MANUFACTURER KELE KELE

PART NO. VMD1B-F24A VBD1B-F RIBU1C-N4 RIBU1C-N4

DESCRIPTION SPDT RELAY RELAY SOCKET NEMA 4 RATED SPDT RELAY NEMA 4 RATED SPDT RELAY

N/A

MANUFACTURER VERIS VERIS FUNCTIONAL DEVICES FUNCTIONAL DEVICES

N/A

PART NO. PS5R-A24 PSH100A100AB10

DESCRIPTION 120 VAC TO 24VDC POWER SUPPLY - 7.5W DUAL 100VA POWER SUPPLY

N/A

MANUFACTURER IDEC FUNCTIONAL DEVICES

TAG CP-HHW CP-HHW

N/A

N/A

N/A

LOCATION CENTRAL PLANT SOUTH STAIRS CENTRAL PLANT SOUTH STAIRS

EN
ENCLOSURES/PANELS N/A

N/A

PART NO. A30N24ALP A30N24MP

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE CONTROL PANEL

N/A

MANUFACTURER HOFFMAN HOFFMAN

TAG CV-20 CV-25 CV-26

N/A

N/A

N/A

LOCATION BOILER PLANT HOT WATER BYPASS BOILER B-1 ISOLATION VALVE BOILER B-2 ISOLATION VALVE

EF ER

CONTROL VALVES N/A

N/A

PART NO. SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE

DESCRIPTION CONTROL VALVE CONTROL VALVE CONTROL VALVE

N/A

MANUFACTURER BELIMO BELIMO BELIMO

DIGITAL CONTROLLERS N/A N/A PART NO. VLCA-1688 VLCA-1688 DESCRIPTION VISUAL LOGIC CONTROLLER-12 BIT VISUAL LOGIC CONTROLLER-12 BIT N/A MANUFACTURER ALERTON ALERTON

TAG C-3001 C-3002

N/A

N/A

N/A

LOCATION

HOT WATER PANEL HOT WATER PANEL

FO

COMPRESSED DRY AIR AND N2 SYSTEM BILL OF MATERIALS

PRESSURE TRANSMITTERS (GAUGE PRESSURE) TAG PT-7001 PT-7002 PT-7003 PT-7004 N/A N/A OPTIONAL ACCESSORY 47S 47S 47S 47S LOCATION AIR RECEIVER TANK AIR-REC-01 PRESSURE AIR RECEIVER TANK AIR-REC-02 PRESSURE CDA HEADER END-OF-LINE PRESSURE N2 PRESSURE RANGE (PSIG) 0-200 0-200 0-200 0-200 ZERO/SPAN FACTORY ADJ. 10% FACTORY ADJ. 10% FACTORY ADJ. 10% FACTORY ADJ. 10% PART NO. PTX1E-LCD-09 PTX1E-LCD-09 PTX1E-LCD-09 PTX1E-LCD-09 DESCRIPTION STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER ACCURACY 1% FULL SCALE 1% FULL SCALE 1% FULL SCALE 1% FULL SCALE MANUFACTURER KELE KELE KELE KELE

CDA FLOW METERS TAG FT-7001 FT-7002 FT-7002 N/A N/A N/A LOCATION COMPRESSED DRY AIR FLOW N2 FLOW N2 FLOW RANGE (SCFH) 15 - 21,562 7 - 9,740 EQUIP OPERATING SCFH 400 400 -

CDA DEWPOINT INDICATORS TAG MT-7001 MT-7001 N/A N/A N/A LOCATION AIR RECEIVER TANK AIR-REC-02 DEWPOINT INDICATOR AIR RECEIVER TANK AIR-REC-02 DEWPOINT INDICATOR RANGE -76 - 176F EQUIP OPERATING RANGE 40F RELAYS TAG R-50 R-50 R-51 R-51 R-52 R-52 N/A N/A N/A CDA PANEL CDA PANEL CDA PANEL CDA PANEL CDA PANEL CDA PANEL LOCATION N/A N/A

O N

PART NO. F5103-1112-3CA F5102-1111-3NI INSTL82

LY

DESCRIPTION CDA INLINE THERMAL MASS FLOW METER N2 INLINE THERMAL MASS FLOW METER STAINLESS STEEL INSTALLATION KIT FOR WELDED SS

ACCURACY 1% 1% -

MANUFACTURER ONICON ONICON ONICON

PART NO. DMT3402B0A1KCAXB002A1A0B0A0 DMT348

DESCRIPTION DRY AIR RECEIVER TANK DEW POINT MONITOR DRY AIR RECEIVER PROBE WITH ISOLATION VALVE

ACCURACY 3.6F -

MANUFACTURER VAISALA VAISALA

TAG PSAC-7001

N/A

N/A

N/A CDA PANEL

LOCATION

EN

POWER SUPPLIES

N/A

PART NO. VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F

DESCRIPTION SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS VERIS VERIS VERIS VERIS

N/A

PART NO. PSH100AB10

DESCRIPTION 100VA POWER SUPPLY

N/A

MANUFACTURER FUNCTIONAL DEVICES

ENCLOSURES/PANELS

TAG CP-CDA

N/A

N/A

N/A CENTRAL PLANT

LOCATION

EF ER
N/A

N/A

PART NO. 567-351

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE ASSEMBLY

N/A

MANUFACTURER SIEMENS

DIGITAL CONTROLLERS N/A PART NO. VLCA-1688 DESCRIPTION VISUAL LOGIC CONTROLLER - 12-BIT N/A MANUFACTURER ALERTON

TAG C-7001

N/A

N/A

N/A CDA PANEL

LOCATION

N/A

FO

CHEMICAL WASTE COLLECTION SYSTEM BILL OF MATERIALS

LEVEL INDICATING TRANSMITTERS TAG LI-10001 LI-10002 N/A N/A N/A LOCATION SOLVENT WASTE TANK #1 LEVEL INDICATOR SOLVENT WASTE TANK #2 LEVEL INDICATOR RANGE (ft.) 0-114.5 0-114.5 LEVEL SWITCHES TAG LAHH-10001 LAHH-10002 N/A N/A N/A LOCATION SOLVENT WASTE TANK #1 HIGH-HIGH LEVEL ALARM SOLVENT WASTE TANK #2 HIGH-HIGH LEVEL ALARM RANGE RELAYS TAG R-50 R-50 R-51 R-51 N/A N/A N/A LOCATION CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL N/A N/A EQUIP OPERATING RANGE EQUIP OPERATING RANGE PART NO. VEGAPULS 62 VEGAPULS 62 DESCRIPTION LEVEL MEASUREMENT RADAR SENSOR LEVEL MEASUREMENT RADAR SENSOR ACCURACY 2mm 2mm MANUFACTURER VEGA VEGA

PART NO. AU18-4343-X'-X' AU18-4343-X'-X'

LY

DESCRIPTION LIQUID LEVEL SWITCH LIQUID LEVEL SWITCH

ACCURACY 1mm 1mm

MANUFACTURER FLOWLINE FLOWLINE

O N
PART NO. VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F

DESCRIPTION SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS VERIS VERIS

POWER SUPPLIES TAG DCP-10001 PSAC-10001 TX-10001 N/A N/A N/A LOCATION CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL N/A

E
N/A

ENCLOSURES/PANELS TAG CP-CWC CP-CWC N/A N/A N/A TO BE DETERMINED TO BE DETERMINED LOCATION N/A

EN

PART NO. PS5R-A24 PSH100A100AB10 X100CBB

DESCRIPTION 120 VAC TO 24VDC POWER SUPPLY - 7.5W DUAL 100VA POWER SUPPLY 100VA TRANSFORMER

N/A

MANUFACTURER IDEC FUNCTIONAL DEVICES VERIS

N/A

PART NO. A42N3613 A42P36

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE CONTROL PANEL

N/A

MANUFACTURER HOFFMAN HOFFMAN

DIGITAL CONTROLLERS N/A

FO

EF ER

TAG C-10001 C-10002 C-10003

N/A

N/A

N/A

LOCATION CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL CHEMICAL WASTE COLLECTION PANEL

N/A

PART NO. VLCA-1688 VLCA-1688 VLCA-1688

DESCRIPTION VISUAL LOGIC CONTROLLER-12 BIT VISUAL LOGIC CONTROLLER-12 BIT VISUAL LOGIC CONTROLLER-12 BIT

N/A

MANUFACTURER ALERTON ALERTON ALERTON

CLEAN ROOM SYSTEMS BILL OF MATERIALS

SPACE TEMPERATURE/HUMIDITY SENSORS TAG TE/HT-6000 TE/HT-6001 TE/HT-6002 TE/HT-6003 TE/HT-6004 TE/HT-6005 TE/HT-6006 TE/HT-6007 TE/HT-6008 TE/HT-6009 TE/HT-6010 TE/HT-6011 TE/HT-6012 TE/HT-6013 TE/HT-6014 TE/HT-6015 TE/HT-6016 N/A N/A N/A DIODE FAB - WEST 2052 DIODE FAB - CENTER 2052 DIODE FAB - EAST 2052 150MM GOWN ROOM 2037 ATP NORTH FAB 2057 ATP SOUTH FAB 2057 VESTIBULE 2054 ATP S.E. FAB 2056 ATP S.W. FAB 2056 LIFTOFF ROOM 2040 LIFTOFF VESTIBULE 2062 150MM NORTH 150MM N.W. VESTIBULE 2044 150MM WEST 150MM S.W. 150MM S.E. LOCATION RANGE (F / %RH) 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% 32-140F / 0-100% N/A PART NO HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z HMT120KA0A1D21A1C0Z DESCRIPTION SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER SPACE TEMPERATURE AND HUMIDITY TRANSMITTER ACCURACY 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% 2F / 1.7% MANUFACTURER VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA VAISALA

SPACE TEMPERATURE SENSORS TAG TE-6000 TE-6000 TE-6001 TE-6001 TE-6002 TE-6002 N/A N/A N/A SOLVENT CHEMICAL 2050 SOLVENT CHEMICAL 2050 AQUEOUS CHEMICAL 2049 AQUEOUS CHEMICAL 2049 GAS ROOM 2049 GAS ROOM 2049 LOCATION RANGE (F) 20-120 20-120 20-120 N/A

E
PART NO. S100147PDY TT115PD1A S100147PDY TT115PD1A S100147PDY TT115PD1A

O N

LY

FO

EF ER

EN

DESCRIPTION PLATINUM RTD EXPLOSION PROOF SPACE TEMPERATURE SENSOR PLATINUM RTD TEMPERATURE TRANSMITTER PLATINUM RTD EXPLOSION PROOF SPACE TEMPERATURE SENSOR PLATINUM RTD TEMPERATURE TRANSMITTER PLATINUM RTD EXPLOSION PROOF SPACE TEMPERATURE SENSOR PLATINUM RTD TEMPERATURE TRANSMITTER

ACCURACY 1% 1% 1% -

MANUFACTURER MINCO MINCO MINCO MINCO MINCO MINCO

CLEAN ROOM SYSTEMS BILL OF MATERIALS

PRESSURE TRANSMITTERS (DIFFERENTIAL PRESSURE) TAG DPT-5000 DPT-5000 DPT-5000 DPT-5000 DPT-5000 DPT-5001 DPT-5001 DPT-5001 DPT-5001 DPT-5001 DPT-5002 DPT-5002 DPT-5002 DPT-5002 DPT-5002 DPT-5003 DPT-5003 DPT-5003 DPT-5003 DPT-5003 DPT-5004 DPT-5004 DPT-5004 DPT-5004 DPT-5004 DPT-5005 DPT-5005 DPT-5005 DPT-5005 DPT-5005 DPT-5006 DPT-5006 DPT-5006 DPT-5006 DPT-5006 DPT-5007 DPT-5007 DPT-5007 DPT-5007 DPT-5007 DPT-5008 DPT-5008 DPT-5008 DPT-5008 DPT-5008 DPT-5009 DPT-5010 DPT-5011 DPT-5012 DPT-5012 DPT-5012 DPT-5012 DPT-5012 DPT-5013 DPT-5013 DPT-5013 DPT-5013 DPT-5013 N/A N/A N/A LOCATION DIODE FAB 2052 DIODE FAB 2052 DIODE FAB 2052 DIODE FAB 2052 DIODE FAB 2052 150MM GOWN ROOM 2037 150MM GOWN ROOM 2037 150MM GOWN ROOM 2037 150MM GOWN ROOM 2037 150MM GOWN ROOM 2037 ATP NORTH FAB 2057 ATP NORTH FAB 2057 ATP NORTH FAB 2057 ATP NORTH FAB 2057 ATP NORTH FAB 2057 VESTIBULE 2054 VESTIBULE 2054 VESTIBULE 2054 VESTIBULE 2054 VESTIBULE 2054 ATP S.E. FAB 2056 ATP S.E. FAB 2056 ATP S.E. FAB 2056 ATP S.E. FAB 2056 ATP S.E. FAB 2056 ATP S.W. FAB 2056 ATP S.W. FAB 2056 ATP S.W. FAB 2056 ATP S.W. FAB 2056 ATP S.W. FAB 2056 BUILDING 720 CORRIDOR 2055 BUILDING 720 CORRIDOR 2055 BUILDING 720 CORRIDOR 2055 BUILDING 720 CORRIDOR 2055 BUILDING 720 CORRIDOR 2055 LIFTOFF ROOM 2040 LIFTOFF ROOM 2040 LIFTOFF ROOM 2040 LIFTOFF ROOM 2040 LIFTOFF ROOM 2040 LIFTOFF VESTIBULE 2062 LIFTOFF VESTIBULE 2062 LIFTOFF VESTIBULE 2062 LIFTOFF VESTIBULE 2062 LIFTOFF VESTIBULE 2062 SOLVENT CHEMICAL 2050 AQUEOUS CHEMICAL 2049 GAS ROOM 2044 150MM FAB 2046 150MM FAB 2046 150MM FAB 2046 150MM FAB 2046 150MM FAB 2046 VESTIBULE 2044 VESTIBULE 2044 VESTIBULE 2044 VESTIBULE 2044 VESTIBULE 2044 RANGE (IN W.C.) 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 0 - 0.25 N/A PART NO. 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 IX3F0242STP25IW IX3F0242STP25IW IX3F0242STP25IW 2671R25WB11A1EN RPS RPS AA06 AA06 2671R25WB11A1EN RPS RPS AA06 AA06 DESCRIPTION DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP CLASS1, DIV-2 DIFFERENTIAL PRESSURE TRANSDUCER CLASS1, DIV-2 DIFFERENTIAL PRESSURE TRANSDUCER CLASS1, DIV-2 DIFFERENTIAL PRESSURE TRANSDUCER DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP DIFFERENTIAL PRESSURE TRANSDUCER STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STAINLESS STEEL WALL-MOUNT ROOM PRESSURE SENSOR STATIC PRESSURE TIP STATIC PRESSURE TIP ACCURACY .04% F.S. .04% F.S. .04% F.S. .04% F.S. .04% F.S. .04% F.S. .04% F.S. .04% F.S. .04% F.S. .01% F.S. .01% F.S. .01% F.S. .04% F.S. .04% F.S. MANUFACTURER SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS ASHCROFT ASHCROFT ASHCROFT SETRA KELE KELE VERIS VERIS SETRA KELE KELE VERIS VERIS

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CLEAN ROOM SYSTEMS BILL OF MATERIALS

POWER SUPPLIES TAG DCP-6001 PSAC-6001 N/A N/A N/A LOCATION MAU PANEL CLEANROOM CONTROL PANEL N/A N/A PART NO. PS5R-A24 PSH100A100AB10 DESCRIPTION 120 VAC TO 24VDC POWER SUPPLY - 7.5W DUAL 100VA POWER SUPPLY N/A MANUFACTURER IDEC FUNCTIONAL DEVICES

ENCLOSURES/PANELS TAG CP-CR N/A N/A N/A TO BE DETERMINED DIGITAL CONTROLLERS TAG C-6001 C-6002 C-6003 C-6004 N/A N/A N/A LOCATION CLEANROOM CONTROL PANEL CLEANROOM CONTROL PANEL CLEANROOM CONTROL PANEL CLEANROOM CONTROL PANEL N/A N/A PART NO. VLCA-1688 VLCA-1688 VLCA-1688 VLCA-1688 LOCATION N/A N/A PART NO. 567-353

LY

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE ASSEMBLY

N/A

MANUFACTURER SIEMENS

O N

DESCRIPTION VISUAL LOGIC CONTROLLER - 12-BIT VISUAL LOGIC CONTROLLER - 12-BIT VISUAL LOGIC CONTROLLER - 12-BIT VISUAL LOGIC CONTROLLER - 12-BIT

N/A

MANUFACTURER ALERTON ALERTON ALERTON ALERTON

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MAKE UP AIR UNIT (MAU-01) BILL OF MATERIALS PRESSURE SWITCHES TAG DPS-8001 DPS-8002 LOCATION MAU-01 MAU-01 SPAN RANGE (IN W.C.) 0-2 0-2 PART NO AFS-262 AFS-262 DAMPER ACTUATORS TAG DA-8001 DA-8001 LOCATION SPAN MAU-01 SUPPLY AIR DAMPER MAU-01 SUPPLY AIR DAMPER RANGE (IN-LBS) 0-360 IN-LBS PART NO S2A GMB24-3 DESCRIPTION PRE-FILTER/FINAL FILTER DIFFERENTIAL PRESSURE SWITCH HEPA FILTER DIFFERENTIAL PRESSURE SWITCH ACCURACY .02" W.C. .02" W.C. MANUFACTURER CLEVELAND CONTROLS CLEVELAND CONTROLS

RTD WITH TRANSMITTER TEMPERATURE SENSORS TAG TT-8001 TT-8001 TT-8002 TT-8002 TT-8003 TT-8003 LOCATION MAU-01 MAU-01 MAU-01 MAU-01 MAU-01 MAU-01 SPAN RANGE (F) 20-120 20-120 20-120 PART NO S450PDY18 TT111PD1A S450PDY18 TT111PD1A S450PDY18 TT111PD1A FREEZE STATS TAG FS-8001 FS-8002 LOCATION MAU-01 MAU-01 SPAN RANGE (F) 30-44 30-44 PART NO AS103759PF38N10A1W AS103759PF38N10A1W

DESCRIPTION 18" PLATINUM RTD DUCT TEMPERATURE SENSOR RTD TEMPERATURE TRANSMITTER 18" PLATINUM RTD DUCT TEMPERATURE SENSOR RTD TEMPERATURE TRANSMITTER 18" PLATINUM RTD DUCT TEMPERATURE SENSOR RTD TEMPERATURE TRANSMITTER

O N

DESCRIPTION DAMPER ACTUATOR AUX SWITCH NSR DAMPER ACTUATOR-ON/OFF CONTROL

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ACCURACY -

MANUFACTURER BELIMO BELIMO

ACCURACY @ 32F .1% .1% .1% -

MANUFACTURER MINCO MINCO MINCO MINCO MINCO MINCO

TAG LOCATION DCP-8001 MAU PANEL PSAC-8001 MAU PANEL

SPAN

RANGE

PART NO PS5R-A24 PSH100A100AB10

EF ER

TAG R-1 R-1 R-2 R-2 R-3 R-3 R-4 R-4 R-20 R-20

LOCATION MAU PANEL MAU PANEL MAU PANEL MAU PANEL MAU PANEL MAU PANEL MAU PANEL MAU PANEL MAU VFD PANEL MAU VFD PANEL

SPAN

RANGE

PART NO VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD1B-F24A VBD1B-F VMD2B-F24A VBD2B-F

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DESCRIPTION ACCURACY (F) PLATINUM RTD FREEZE STAT WITH WEATHERPROOF UTILITY BOX.9 PLATINUM RTD FREEZE STAT WITH WEATHERPROOF UTILITY BOX.9

MANUFACTURER MINCO MINCO

RELAYS

DESCRIPTION SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET SPDT RELAY RELAY SOCKET DPDT RELAY RELAY SOCKET

ACCURACY -

MANUFACTURER VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS VERIS

POWER SUPPLIES DESCRIPTION 120 VAC TO 24VDC POWER SUPPLY-7.5WATTS DUAL 100VA POWER SUPPLY ACCURACY MANUFACTURER IDEC FUNCTIONAL DEVICES

ENCLOSURES/PANELS DESCRIPTION ENCLOSURE PANEL NEMA 3R ENCLOSURE CONTROL VALVES DESCRIPTION CONTROL VALVE CONTROL VALVE CONTROL VALVE ACCURACY MANUFACTURER BELIMO BELIMO BELIMO ACCURACY MANUFACTURER HOFFMAN HOFFMAN

TAG CV-6 CV-21 CV-22

LOCATION SPAN MAU-01 COOLING COIL MAU-01 PREHEAT COIL MAU-01 REHEAT COIL

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RANGE -

TAG LOCATION CP-MAU-01 MAU-01 CP-MAU-01 MAU-01

SPAN

RANGE

PART NO A30P24 A30R2410HCR

PART NO SEE VALVE SCHEDULE SEE VALVE SCHEDULE SEE VALVE SCHEDULE

MAKE UP AIR UNIT (MAU-01) BILL OF MATERIALS DIGITAL CONTROLLERS TAG C-8001 C-8002 C-8003 LOCATION MAU PANEL MAU PANEL MAU PANEL SPAN RANGE PART NO VLX-PLATINUM EXP-10120 EXP-1048 DESCRIPTION VLX PLATINUM CONTROLLER WITH 32-BIT PROCESSOR VLX PLATINUM EXPANSION MODULE (10 IN/12 DO) VLX PLATINUM EXPANSION MODULE (10 IN/4 DO/8 AO) RTD WITH TRANSMITTER TEMPERATURE/HUMIDITY SENSORS TAG LOCATION TE/HT-8001 MAU SPAN RANGE (F/% HUM) 32-122/0-90 PART NO AH439D1N10NT1 ACCURACY MANUFACTURER ALERTON ALERTON ALERTON

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DESCRIPTION PLATINUM RTD TEMP/HUMIDITY SENSOR WITH TRANSMITTER

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ACCURACY .75%/1%

MANUFACTURER MINCO

GENERAL EXHAUST FAN SYSTEM BILL OF MATERIALS

PRESSURE TRANSMITTERS (DUCT STATIC PRESSURE) TAG PDT-11001 N/A N/A N/A LOCATION GENERAL EXHAUST FAN DUCT STATIC PRESSURE RANGE (in w.c.) 0-10 RELAYS TAG R-1 R-1 N/A N/A N/A GEF PANEL GEF PANEL POWER SUPPLIES TAG PSAC-11001 N/A N/A N/A GEF PANEL ENCLOSURES/PANELS TAG CP-GEF CP-GEF N/A N/A N/A SOUTHEAST ROOF SOUTHEAST ROOF DIGITAL CONTROLLERS TAG C-11001 N/A N/A N/A GEF PANEL LOCATION N/A LOCATION N/A N/A LOCATION N/A N/A LOCATION N/A N/A ZERO/SPAN SHIFT 0.033 PART NO. 2671-010WD-11-A1-C-D DESCRIPTION DIFFERENTIAL PRESSURE TRANSMITTER ACCURACY 1% FULL SCALE MANUFACTURER SETRA

PART NO. VMD1B-F24A VBD1B-F

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DESCRIPTION SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS

O N
PART NO. PSH100AB10

DESCRIPTION 100VA POWER SUPPLY

N/A

MANUFACTURER FUNCTIONAL DEVICES

PART NO. A20H16ALP A20P16

DESCRIPTION NEMA 4 CONTROL PANEL ENCLOSURE CONTROL PANEL

N/A

MANUFACTURER HOFFMAN HOFFMAN

E
N/A

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PART NO. VLCA-1688

DESCRIPTION VISUAL LOGIC CONTROLLER-12 BIT

N/A

MANUFACTURER ALERTON

SCRUBBER EXHAUST FAN SYSTEM BILL OF MATERIALS

PRESSURE TRANSMITTERS (DUCT STATIC PRESSURE) TAG PDT-5001 N/A N/A N/A LOCATION SCRUBBER FAN DUCT STATIC PRESSURE RANGE (in w.c.) 0-10 ZERO/SPAN SHIFT 0.033 PART NO. 2671-010WD-11-A1-C-D DESCRIPTION DIFFERENTIAL PRESSURE TRANSMITTER ACCURACY 1% FULL SCALE MANUFACTURER SETRA

TAG HS-5001

N/A

N/A

N/A

LOCATION AQUEOUS CHEMICAL ROOM EMERGENCY VENTILATION DAMPER

N/A

N/A

PART NO. ST120FN1-VSTART

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EMERGENCY VENTILATION DAMPERS

DESCRIPTION BREAK LENS EMERGENCY OPERATOR STATION

N/A

MANUFACTURER KELE

RELAYS TAG R-1 R-1 N/A N/A N/A LOCATION SCRUBBER EXHAUST PANEL SCRUBBER EXHAUST PANEL N/A N/A

POWER SUPPLIES TAG PSAC-5001 N/A N/A N/A LOCATION SCRUBBER EXHAUST PANEL N/A N/A

O N

PART NO. VMD1B-F24A VBD1B-F

DESCRIPTION SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS

PART NO. PSH100AB10

DESCRIPTION 100VA POWER SUPPLY

N/A

MANUFACTURER FUNCTIONAL DEVICES

ENCLOSURES/PANELS TAG CP-SEF N/A N/A N/A SCRUBBER FAN ROOM DIGITAL CONTROLLERS TAG C-5001 N/A N/A N/A LOCATION SCRUBBER EXHAUST PANEL N/A LOCATION N/A N/A

PART NO. 567-351

DESCRIPTION NEMA 1 CONTROL PANEL ENCLOSURE ASSEMBLY

N/A

MANUFACTURER SIEMENS

C
N/A

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PART NO. VLCA-1688

DESCRIPTION VISUAL LOGIC CONTROLLER - 12-BIT

N/A

MANUFACTURER ALERTON

SPECTROLAB DIODE, ATP, AND 150MM WAFER FAB

P&ID DRAWINGS

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VOC AND DEIONIZED WATER SYSTEMS BILL OF MATERIAL

PRESSURE TRANSMITTERS (GAUGE PRESSURE) TAG PT-9001 PT-9002 N/A N/A OPTIONAL ACCESSORY LOCATION 47S DEIONIZED WATER SUPPLY PRESSURE 47S DEIONIZED WATER RETURN PRESSURE RANGE (PSIG) 0-200 0-200 ZERO/SPAN FACTORY ADJ. 10% FACTORY ADJ. 10% PART NO. PTX1E-LCD-09 PTX1E-LCD-09 DESCRIPTION STAINLESS STEEL PRESSURE TRANSMITTER STAINLESS STEEL PRESSURE TRANSMITTER ACCURACY 1% FULL SCALE 1% FULL SCALE MANUFACTURER KELE KELE

DIFFERENTIAL PRESSURE TRANSMITTERS TAG PDT-9001 PDT-9002 N/A N/A N/A LOCATION SCRUBBER FAN DUCT STATIC @ SWS-03 SCRUBBER FAN DUCT STATIC @ VOC EXHAUST RANGE (in w.c.) 0 - 10 0 - 10 FLOW METERS TAG FT-9001 FT-9002 N/A N/A N/A LOCATION DEIONIZED WATER SUPPLY FLOW DEIONIZED WATER RETURN FLOW RANGE (GPM) 36.6 - 558 15.4 - 228 ZERO/SPAN 0.033 0.033

PART NO. 2671-010WD-11-A1-C-D 2671-010WD-11-A1-C-D

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DESCRIPTION DIFFERENTIAL PRESSURE TRANSMITTER DIFFERENTIAL PRESSURE TRANSMITTER

ACCURACY 1% FULL SCALE 1% FULL SCALE

MANUFACTURER SETRA SETRA

EQUIP OPERATING GPM

O N
PART NO. 2300-40-6R-2-1 CR4W040 2300-25-6R-2-1 CR4W025

DESCRIPTION FIXED INSERTION VORTEX FLOW METER 4" STAINLESS STEEL WELDOLET (SCH 40 PIPE) FIXED INSERTION VORTEX FLOW METER 2.5" STAINLESS STEEL WELDOLET (SCH 40 PIPE)

ACCURACY 1% 1% -

MANUFACTURER SPIRAX SARCO GEORG FISCHER SPIRAX SARCO GEORG FISCHER

CONDUCTIVITY METERS TAG AIT-9001 AIT-9002 N/A N/A N/A LOCATION DEIONIZED WATER SUPPLY CONDUCTIVITY DEIONIZED WATER RETURN CONDUCTIVITY RANGE 0-2.0 S 0-2.0 S EQUIP OPERATING RANGE 15M (0.06S) 15M (0.06S)

EMERGENCY VENTILATION DAMPERS TAG HS-9001 N/A N/A N/A LOCATION SOLVENT CHEMICAL ROOM EMERGENCY VENTILATION DAMPER N/A

PART NO. Q45C2-1-6-2 Q45C2-1-6-2

DESCRIPTION CONDUCTIVITY/RESISTIVITY MONITOR CONDUCTIVITY/RESISTIVITY MONITOR

ACCURACY 0.10% 0.10%

MANUFACTURER ATI ATI

TAG PSAC-9001 DCP-9001

N/A

N/A

N/A VOC PANEL VOC PANEL

EF ER

TAG R-1 R-1

N/A

N/A

N/A VOC PANEL VOC PANEL

LOCATION

EN

N/A

PART NO. ST120FN1-VSTART

DESCRIPTION BREAK LENS EMERGENCY OPERATOR STATION

N/A

MANUFACTURER KELE

RELAYS

N/A

N/A

PART NO. VMD1B-F24A VBD1B-F

DESCRIPTION SPDT RELAY RELAY SOCKET

N/A

MANUFACTURER VERIS VERIS

POWER SUPPLIES N/A N/A PART NO. PSH100AB10 PS5R-A24 DESCRIPTION 100VA POWER SUPPLY 120 VAC TO 24VDC POWER SUPPLY-7.5WATTS N/A MANUFACTURER FUNCTIONAL DEVICES IDEC

LOCATION

ENCLOSURES/PANELS N/A N/A PART NO. A20H16ALP A20P16 DESCRIPTION NEMA 4 CONTROL PANEL ENCLOSURE CONTROL PANEL N/A MANUFACTURER HOFFMAN HOFFMAN

TAG CP-VOC

N/A

N/A

N/A NORTHSIDE ROOF

LOCATION

R
LOCATION

DIGITAL CONTROLLERS N/A N/A PART NO. VLCA-1688 DESCRIPTION VISUAL LOGIC CONTROLLER - 12-BIT N/A MANUFACTURER ALERTON

TAG C-9001

N/A

N/A

N/A VOC PANEL

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