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Advanced Semiconductor Devices Lecture 6

Lecture outline
Review Basic two-terminal MOS structure Regions of operation Solution for charges and potentials Approximations for regions of operation Surface potential model in moderate inversion MOS Capacitor MOS Capacitor in moderate inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Voltage and charge balance


Total charge in semiconductor body

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Electron charge density


Surface electron charge density

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Charge inversion
Inversion charge basis of current transport

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Regions of operation
Flatband

Accumulation

Depletion and inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Charge density and Poisson equation


Solution for semiconductor charge

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Charge density and Poisson equation


Charge density as a function of distance

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution of Poisson equation

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution of Poisson equation

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution for surface electric field

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution for semiconductor charge

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Charge and potential balance

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Semiconductor charges and potentials

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution for gate voltage

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Solution for gate voltage

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Accumulation
Condition for charge accumulation

Approximate solution for charge accumulation

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Depletion

Condition for depletion Approximation for gate voltage in depletion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Gate voltage and surface potential in inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Weak inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Weak inversion

On the border of moderate inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Weak inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Strong inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Moderate inversion

Need a simple solution for semiconductor charges and potentials in moderate inversion !!!

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Moderate inversion

Need a simple solution for semiconductor charges and potentials in moderate inversion !!!

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Moderate inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Moderate inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Approximation for surface potential in moderate and strong inversion

Obtained explicit approximation for the surface potential as a function of gate voltage in moderate and strong inversion regions!!!

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

Moderate and strong inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor in accumulation

Semiconductor charge capacitance exponentially increasing for large negative surface potential Therefore, in accumulation

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor in depletion and weak inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor in depletion and weak inversion

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor in moderate and strong inversion

Use surface potential as a function of gate voltage in moderate and strong inversion regions

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 6

MOS Capacitor in moderate and strong inversion

Obtained MOS capacitor model in all regions of operation Can obtain model parameters from experimental measurements of gate capacitance
V. Ariel 2013 Advanced Semiconductor Devices Lecture 6