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Harald Schenk
Fraunhofer IPMS
MEMS design and layout in-depth know-how in physical domain simulation, including coupled domain simulation reduced order models tools: ANSYS, COMSOL, MATLAB, SIMULINK, MATHEMATICA, CADENCE ASIC design and layout Complete analog, digital and mixed-signal design & simulation integration of actuators and sensors MEMS-on-CMOS OLED-on-CMOS tool: CADENCE
Fraunhofer IPMS
geometry, environment
Fraunhofer IPMS
stress distribution
optimization
Finite Element Analysis: Model of a mirror plate suspended by 8 distributed spings to enhance dynamic mirror flatness
Fraunhofer IPMS
1D-Translational Mirror
intended eigenmode
interfering eigenmode
Fraunhofer IPMS
FEA: Pressure and fluid flow profile of an resonant rocking micro plate
Fraunhofer IPMS
3D-combfinger capacitance
deflected
field distribution
3D-FEM model
3D FEA 2D FEA fit analytic hybrid
C/F
0.5 a) 0 0 5 10 x /o 15 20 25
Fraunhofer IPMS
Vo rs ch
g la
piezoresistive sensor
Fraunhofer IPMS
Fraunhofer IPMS
Bragg mirror
optical quality
MTF
0.6 kx / kmax
0.8
1.0
Fraunhofer IPMS
current / mA
120.0 110.0 100.0 90.0 80.0 70.0 60.0 50.0 40.0 30.0 20.0 0 6.4 6.3 10 20 30 40 50 60 70
resistance / kOhm
temperature / C
tim e / s
Fraunhofer IPMS
load: current density 2 coil structure on moveable mirror plate (1) and fixed frame (2) 2D-simulation in side view magnetic force 1
Fraunhofer IPMS
System Design
Controller circuit
network based approach system response dynamics controller circuit synthesis
network model of the MEMS device
System response
heuristic controller
step response
Fraunhofer IPMS
control unit
row clock
column clock
column addressing
column driver
pixel area
USB
15mm
Schnittstelle ProjektorDemonstrator
JTAG
38mm
row addressing
active matrix
0 200 V
DC/DC 200V
FPGA / MSP
Quarz
control logic
row driver
200 V
Jumper
5V
HV - Erzeugung Kanal X
Frequenzteiler Kanal Y
PLL
PLL
Charging Amplifier
Charging Amplifier
PD
OPV Gain 10 20
PD
OPV Gain 10 20
Piezo (optional)
Piezo (optional)
Mirror
(optional)
Fraunhofer IPMS
Fraunhofer IPMS
RAM 8kx8
Flash 8kx16
controller/ processor
Fraunhofer IPMS
Ana NVM
+ + + + + + + + + + + + + + + + + + + + + -
6 6 6 6 6 6 6 6" 6 8 8" 8 8 8 8
Major application
MEMS, mixed-sig mixed-sig, sensor MEMS Controller, mixed-sig, OLED, sensor,... analog, mixed-sig, sensor,... analog, mixed-sig, MEMS, ... analog, mixed-sig, digital analog, mixed-sig, sensor, display OLED-on-CMOS, sensor MEMS control, transponder, display, OLED-on-CMOS MEMS control, sensor, OLED-on-CMOS sensor, OLED-on-CMOS, display analog HS I/O (1.25Gbps) analog HS I/O (1.25Gbps) analog HS I/O (1.25Gbps) analog HS I/O (3.125Gbps) Prog.: non-volatile storage
Source
I(P)MS
silicon foundry
customer (IDM)
MS: mixed-signal/analog
: wafer diameter
Fraunhofer IPMS
Contact
Dr. Harald Schenk deputy director Fraunhofer Institute for Photonic Microsystems Maria-Reiche-Str. 2 D-01109 Dresden Germany
Fraunhofer IPMS