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International Journal of Machine Tools & Manufacture 47 (2007) 335342 www.elsevier.com/locate/ijmactool

Inuence of tool vibration on machining performance in electrochemical micro-machining of copper

B. Bhattacharyya, M. Malapati, J. Munda, A. Sarkar
Department of Production Engineering, Jadavpur University, Kolkata 700 032, India Received 28 June 2005; received in revised form 15 March 2006; accepted 17 March 2006 Available online 5 May 2006

Abstract Electrochemical micro-machining (EMM) appears to be promising as a future micro-machining technique since in many areas of applications, it offers several advantages, including biomedical and MEMS applications. A suitable micro-tool vibration system has been developed, which consists of tool-holding unit, micro-tool vibrating unit, etc. The developed system was used successfully to control material removal rate (MRR) and machining accuracy to meet the micro-machining requirements. Micro-holes have been produced on thin copper workpiece by EMM with stainless-steel micro-tool. Experiments have been carried out to investigate the most effective values of process parameters such as micro-tool vibration frequency, amplitude and electrolyte concentration for producing micro-hole with high accuracy and appreciable amount of MRR. From the experimental results and SEM micrographs, it is evident that the introduction of micro-tool vibration improves EMM performance characteristics. Lower electrolyte concentration in the range of 1520 g/l reduces stray current effects. Hertz (Hz) range of tool vibration frequency improves the removal of sludge and precipitates from very small interelectrode gap. The 150200 Hz range of tool vibration frequency can be recommended for EMM, which provides a better electrochemical machining in the narrow end gap. Compared to kHz range, Hz range micro-tools vibration improves the MRR and accuracy in EMM. r 2006 Elsevier Ltd. All rights reserved.
Keywords: Electrochemical micro-machining; Tool vibration; Copper

1. Introduction Electrochemical machining (ECM) has seen a resurgence of industrial interest within the last couple of decades due to its many advantages such as no tool wear, stress free and smooth surfaces of machined product and ability to machine complex shape in electrically conductive materials, regardless of their hardness. When this ECM process is applied to the micro-machining range for manufacturing ultra-precision shape, it is called electrochemical micromachining (EMM). Micro-machining may literally mean the machining of the dimension between 1 and 999 mm. However, as a technical term, it also means the smaller amount of machining that cannot be achieved directly by a conventional technique [1]. Micro-machining technology plays an increasingly decisive role in the miniaturization of
Corresponding author. Tel.: +91 33 483 3353; fax: +91 33 414 6153.

E-mail address: bb13@rediffmail.com (B. Bhattacharyya). 0890-6955/$ - see front matter r 2006 Elsevier Ltd. All rights reserved. doi:10.1016/j.ijmachtools.2006.03.005

components ranging from biomedical applications to chemical micro-reactors and sensors. EMM appears to be promising as a future micro-machining technique since in many areas of applications, it offers several advantages that include high material removal rate (MRR), better precision and control, rapid machining time, reliable, exible, environmentally acceptable and it also permits proper machining of chemically resistant materials like titanium, copper alloys, super alloys and stainless steel, which are widely used in biomedical, electronic and MEMS applications [25]. Machining accuracy can be improved by hybridized ECM with low-frequency tool vibration [6]. Proper removal of sludge and precipitates from the very narrow machining gap in EMM is a challenge to the researchers for improving the machining accuracy. However, to exploit the full potential of EMM, research is still needed to improve the machining accuracy by controlling the different machining parameters. It necessitates the development of a suitable micro-tool vibration system in

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EMM for effective micro-machining operation. Keeping in view of the above requirements, a unique hybridized EMM set-up has been developed with a micro-tool vibration system. To study the effects of micro-tool vibration in EMM, experiments have been planned to investigate the inuence of micro-tool vibration frequencies on MRR and accuracy during micro-machining. 2. Experimental set-up Considering the inuence of predominant process characteristics, a well-planned research programme has been considered for experimentation in the developed EMM system [7]. The developed system consists of various sub-components, e.g. mechanical machining unit, microtool vibrating unit, electrical power and controlling system, controlled electrolyte ow system, etc. [8]. Fig. 1 represents a schematic diagram of the various system components of the micro-machining system. Electrical power and controlling system comprises of pulse generating unit, microprocessor and stepper motor along with controlling units. Pulsed generating unit is utilized to provide required pulse nature of power supply for micro-machining operation that improves the accuracy and surface nish of the machined job. Stepper motor is used to give the feed motion to the micro-tool and it is controlled by Intel 8085 microprocessor. In EMM process, the electrolyte must have good chemical stability, less throwing power, safe, low viscosity and high conductivity for achieving good surface nish and accuracy. After machining, the electrolyte is then passed through a settling tank and a lter, which removes the foreign material presented in the electrolyte. The electrolyte is directed through the nozzles to the machining zone with a low-pressure setting without affecting the stability of the micro-tool and in turn the shape accuracy. 3. Micro-tool vibration system In electrochemical micro-machining, the inter-electrode gap (IEG) is very small and narrow for achieving higher

machining accuracy in the micro-machining domain [9]. The IEG should be maintained in the range of 515 mm for effective machining operation. Reaction products that are formed during machining are removed from IEG by means of low-pressure electrolyte jet. During this process, there may be possibility of striking reaction products in between micro-tool and work piece that may cause for generation of micro-sparks, which in turn reduces machining accuracy. These sparks can be avoided using acidic electrolyte and vibration of the micro-tool. Acidic electrolyte does not produce any insoluble reaction products during machining but causes chemical reaction with work piece material. Piezo-electric transducer (PZT) can be used for vibrating micro-tools, which may enhance the end gap and improve the circulation of electrolyte that may result in reduction or elimination of micro-spark generation [10]. To carry out the experiments with vibrating micro-tool, a micro-tool vibration system is developed. This developed system consists mainly of two sub-units, as follows: (i) tool holder unit and (ii) tool vibrator unit.

3.1. Tool holder unit To avoid chemical reaction with the electrolyte and provide electrical insulation, the tool holder unit is made of perspex material. The upper cylindrical portion of the tool holder unit, i.e. threaded portion is mounted in the toolfeeding unit. The lower portion of this cylindrical rod is joined with an upper disc and the upper disc is coupled with another lower disc of same diameter. The PZT plate is placed in between upper and lower discs with the help of a supporting plate. A copper rod is soldered with the Piezoelectric ceramic plate, on which the micro-tool is mounted. Another hollow cylindrical rod is used to support the micro-tool. Electrical wires are connected with the Piezoelectric ceramic plate as well as with the micro-tool separately. The wires from the Piezo-electric ceramic plate

Fig. 1. Details of the EMM experimental set-up.

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are connected with an audio oscillator circuit to get required electrical pulses that create desired vibration, which in turn vibrates the micro-tool. 3.2. Tool vibrator unit In tool vibrator unit, Piezo-electric ceramic transducer and audio oscillator were used for giving vibration to the micro-tool. The oscillator supplies frequency and amplitude of vibration needed for the experiments. Piezo-electric ceramic element used for experiments was made by Mobicon Tweeter Ltd. Diameter of the plate used was 20 mm. The lower supporting plate was made of brass and upper plate was made of the ceramic material. A printed circuit board was engraved on the ceramic plate. The PZT used for experiments has resonant frequency of 6.5 kHz. Table 1 exhibits the detailed specication of the PZT used for the development. 3.2.1. Oscillator circuit An oscillator is a device that incorporates active and passive circuit elements to generate sinusoidal or other repetitive waveforms. An oscillator circuit delivers an output voltage of a given waveform without the application of an external input signal. It converts direct current (DC) power supply to the alternating current (AC) power in the load. In electrochemical micro-machining, an audio oscillator was used to vibrate the micro-tool tip to achieve better MRR with high accuracy and surface quality. Transistortype audio oscillator is used for this purpose and it works on wien-bridge principle. Amplitude of vibration can also be varied from 1 V-RMS to 8.5 V-RMS. Piezo-electric ceramic plate is vibrated in different frequencies and amplitudes by varying the frequencies and amplitudes of the oscillator. As the micro-tool is connected to the Piezoelectric ceramic plate, tool also vibrates according to the frequency and amplitude generated by the oscillator. 3.3. Specication of micro-tool vibration system (i) Range of diameter: 50250 mm. (ii) Range of frequency: Hertz range: 25300 Hz Kilo-Hertz range: 2.525 kHz. (iii) Range of amplitude: 1 8.5 V-RMS.

4. Experimental planning To analyse the inuence of micro-tool vibration during EMM operation on the desired performance characteristic, i.e. material removal and machining accuracy, proper scheme has been designed with the utilization of EMM experimental set-up with vibrating micro-tool unit. Microtools of three different diameters were chosen for the experimentation, i.e. + 237.2 mm, + 112 mm and + 102.5-mm stainless-steel tool. The work-piece specimens were 15 mm 10 mm 0.15 mm bare copper plates. The electrolyte used for experimentation was fresh aqueous solution of sodium nitrate (NaNO3) having concentrations of 15, 20 and 25 g/l. Variable rectangular DC pulsed supply was used for experimentations. The MRR and accuracy was observed for various sets of experiments with different combinations of process parameters. It was found from the previous research that with 3 V, 55 Hz frequency power supply and around 20 g/l electrolyte concentration desired machining accuracy can be achieved with highest possible amount of material removal [11]. So applied machining voltage of 3 V and power supply frequency of 55 Hz were selected for experiments. Micro-tool feed rate was maintained as low as possible, i.e. 0.144 mm/min, which is the most appropriate value for the existing EMM set-up that can enhance the micro-machining accuracy. Pulse on time was selected twice the off time, i.e. in 2:1 ratio in order to achieve higher MRR. Hz range i.e. 50, 100, 150 and 200 Hz and kHz range, i.e. 3, 8, 13, 18 and 23 kHz vibration frequencies were selected for the micro-tool vibrating unit. Two sets of amplitude, i.e. 4.5 and 8 V-RMS, were selected for performing the experiments. The amplitudes were measured by true RMS multimeter. So the values are in V-RMS unit. Machining accuracy was measured in terms of overcut phenomena. Micro-hole inspection and measurement were performed with the help of measuring microscope (Olympus, Japan) and the radial over-cut of the machined micro-holes was noted. The weight of test pieces was measured before and after machining by using precision weighing machine (Mettler Toledo, Switzerland) and machining time was noted with the help of stopwatch (Baker, India) for calculating MRR. For studying the effects of various predominant process parameters, i.e. electrolyte concentration, micro-tool vibration frequency on accuracy, micro-machined holes were viewed through scanning electron microscope (SEM) and SEM micrographs were further analysed.

Table 1 Specications of PZT Type Resonant frequency (kHz) 6.5 Resonant impedance (O max) 250 Capacitance (PF at 1 kHz) 12 000 Input voltage (pp max V) 30 D (mm) T (mm)

MT-20T-6.5B1

20

0.45

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5. Experimental results and discussions Experiments have been carried out on the EMM experimental set-up with vibrating micro-tool system to predict the inuence of micro-tool vibration frequency and electrolyte concentration on MRR and accuracy. Experimental results are plotted in the form of graphs to exhibit the inuence of the machining parameters along with micro-tool vibration on MRR and accuracy. An attempt has been made to nd out an optimal combination of machining parameters for effective and efcient electrochemical micro-machining. Figs. 2 and 3 exhibit the comparison graph, with and without the tool vibrating system. Fig. 2 shows the inuence of electrolyte concentration on MRR with and without tool vibration and other parameter settings are 55 Hz frequency of power supply, 3 V machining voltage and the pulse onoff ratio of 2:1. From gure, it is observed that the values of MRR are almost same in both the cases, i.e. with and without micro-tool vibration. Fig. 3
2.5

indicates the inuence of electrolyte concentration on overcut with and without micro-tool vibration under the same parametric conditions. From the gure, it is observed that over cut is much less when the micro-machining operation is performed with tool vibration system. The micro-tool vibration creates pressure waves in the electrolyte and promotes better circulation of electrolyte and removal of sludge and precipitates from the narrow zone of micromachining, which improves the overall machining performance. 5.1. Inuence of micro-tool vibration frequency of kHz range on machining performance The rst sets of experiments are performed with the micro-tool vibration frequencies in kHz range, i.e. 3, 8, 13, 18 and 23 kHz at 15 and 20 g/l electrolyte concentrations. Fig. 4 exhibits the effect of micro-tool vibration frequency on MRR at 3 V machining voltage, 55 Hz frequency of power supply, 0.144 mm/min tool feed rate and pulse onoff ratio of 2:1 for 15 and 20 g/l electrolyte concentrations. It is observed from the gure that for 20 g/l electrolyte concentration, MRR is more than 15 g/l electrolyte concentration. At higher concentration, large number of ions associated with machining increase machining current and it results in high current density, which in turn increases the MRR. From the graph, it is observed that the MRR lines for both the electrolyte concentrations are more or less horizontal, which clearly reveals the fact that micro-tool vibration at these kHz ranges has no inuence on the material removal mechanism. Tool vibration in the range of kHz does not produce any better ushing effect and circulation of electrolyte during machining in the very narrow end gap. Fig. 5 depicts the inuence of tool vibration frequency on overcut under the same parametric conditions as that of the previous experiment. In 15 g/l electrolyte concentration, over-cut is low. At 15 g/l concentration, ions associated with machining are more because ions are concentrated in
2.5
Voltage --- 3V Feed Rate0.144 mm/min Electrolyte---- NaNO3

MRR (mg/min)

1.5

Voltage --- 3V Feed Rate0.144 mm /min Electrolyte---- NaNO3

Without tool vibration 200 Hz tool vibration

0.5

0 10 15 20

Electrolyte Concentration (g /l )

Fig. 2. Inuence of electrolyte concentration on material removal rate with and without tool vibration.

0.35 0.3

2
0.25 Overcut (mm) 0.2 0.15 0.1 0.05 0 10 15 20 Electrolyte Concentration (g/l)
Without tool vibration 200 Hz tool vibration

Voltage --- 3V Feed Rate0.144 mm /min Electrolyte---- NaNO3

MRR (mg/min)

1.5

0.5
Conc. 15 g/lit Conc. 20 g/lit

0 3 8 13 Frequency (kHz) 18

23

Fig. 3. Inuence of electrolyte concentration on over-cut with and without tool vibration.

Fig. 4. Inuence of micro-tool vibration frequency on material removal rate.

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0.3 0.25 Overcut (mm) 0.2 0.15 0.1 0.05 0 3 8 13 Frequency (KHz) 18

339

Voltage --- 3V Feed Rate0.144 mm/min Electrolyte---- NaNO3

Conc. Conc.20g/lit 15g/lit Conc. Conc.15g/lit 20g/lit

23

Fig. 5. Inuence of micro-tool vibration frequency on over-cut.

Fig. 6. SEM micrograph of machined micro-hole with vibrating microtool frequency of 13 kHz.

the machining zone and in turn reduces the overcut. Maintaining proper tool feed and sludge removal also helps to reduce overcut. From the graph, it is observed that the trends of overcut for both the electrolyte concentrations are more or less horizontal, which clearly reveals the fact that micro-tool vibration at these kHz ranges has no signicant effect on the machining accuracy. Better ushing effect cannot be achieved with tool vibration in the range of kHz. Fig. 6 shows SEM micrograph of machined micro-hole at 3 V machining voltage, 55 Hz voltage frequency and 15 g/l electrolyte concentration with a vibrating micro-tool frequency of 13 kHz. The SEM micrograph shows the shallow portion around the machined micro-hole caused due to uncontrolled material removal for the effect of stray current. In smaller time period of micro-tool vibrations, electrolyte cannot be circulated properly in the narrow machining zone to ush away the sludge and gas bubbles from the end gap, which results in uncontrolled dissolution from the work piece during machining. Fig. 7 shows the SEM micrograph at 23 kHz vibrating tool frequency under the same parametric conditions. Effects of micro-sparks and uneven material removal are observed clearly from the SEM micrograph. In this case the time period of micro-tool vibration is much more less, hence it is difcult to remove the micro-sludge and precipitates from the very narrow machining zone completely during machining. The generation of microsparks due to presence of sludge in the end gap produces uneven material removal over the periphery of machined micro-hole. 5.2. Inuence of micro-tool vibration frequency of Hz range on machining performance It was seen that kHz range micro-tool vibration frequency had no signicant effect on MRR and overcut. So next sets of experiments were conducted with Hz range frequency of micro-tool vibration. The selected frequencies at which experiments were carried out are 50, 100, 150 and

Fig. 7. SEM micrograph of machined micro hole with vibrating microtool frequency of 23 kHz.

200 Hz. Two different amplitudes of tool vibration frequencies were selected for the experiments. The comparisons between MRR and overcut in these two values of amplitudes, i.e. 4.5 and 8 V-RMS, with 20 g/l electrolyte concentration are shown in Figs. 8 and 9. Fig. 8 indicates that the values of MRR are almost same in both the amplitudes of tool vibration. As compared to the experimental results with kHz range of tool vibration as shown in Figs. 4 and 5, the present set of experiments with tool vibration in the Hz range produce higher MRR and lower overcut. The introduction of micro-tool vibration in the Hz range during EMM process destroys the passive layer from the effective machining area of work piece surface and thereby improves the electrochemical machining actions, which results in more controlled dissolution. Fig. 9 indicates the inuence of micro-tool vibration in the Hz range with amplitudes of vibration 4.5 and 8 V-RMS on over-cut phenomena. From the gure, it can be observed that over-cut is about 40% less at the amplitude of 4.5 VRMS than the amplitude of 8 V-RMS. This improvement

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2.5
Voltage --3V Amplitude---4.5 V-RMS Electrolyte--NaNO3

Amplitude 4.5 V-RMS Amplitude 8 V-RMS

MRR (mg/min)

MRR(mg/min)

1.5

1.5

1 Conc. 15g/lit Conc. 20g/lit 0 50 100 150 Frequency(Hz) 200 Conc. 25g/lit

0.5

0.5
Voltage --- 3V Feed Rate0.144 mm/min Electrolyte---- NaNO3
50 100 150 200

0 Frequency (Hz)

Fig. 8. Inuence of micro-tool vibration frequency on material removal at different amplitudes.

Fig. 10. Inuence of micro-tool vibration frequency on material removal rate.

0.14 0.12 0.1

0.16 0.14 0.12

Voltage --- 3V Amplitude----4.5 V-RMS Electrolyte---- NaNO3

Conc. 15g/lit Conc. 20g/lit Conc. 25g/lit

Overcut (mm)
Voltage --- 3V Feed Rate0.144 mm/min Electrolyte---- NaNO3
0 50 100 150
Amplitude 8 V-RMS Amplitude 4.5 V-RMS

Overcut ( mm)

0.08 0.06 0.04 0.02 0 200 250

0.1 0.08 0.06 0.04 0.02 0 50 100 150 200

Frequency(Hz)

Frequency (Hz)
Fig. 11. Inuence of micro-tool vibration frequency on over-cut.

Fig. 9. Inuence of micro-tool vibration frequency on over-cut at different amplitudes.

in the machining rate and accuracy is due to the micro-tool vibration, which creates pressure waves in the electrolyte and promotes better circulation of electrolyte and removal of sludge and precipitates from the narrow zone of micromachining. The experimental results indicate that the micro-tool vibration in the Hz range improves machining accuracy. The graph also indicates the signicant effect of the lower amplitude value of tool vibration on the overcut. The result is due to that the higher amplitude value of the tool vibration causes a greater stray current during the microtool motion and leads to increase the material removal from the sides of the micro-hole. Hence, the next sets of experiments have been carried out with tool vibration amplitude of 4.5 V-RMS. Fig. 10 exhibits the effect of micro-tool vibration frequency on MRR at a particular machining condition, i.e. 4.5 V-RMS vibration amplitude, 3 V machining voltage, 55 Hz frequency of power supply, 0.144 mm/min feed rate and pulse onoff ratio of 2:1. The graph shows higher

MRR at higher electrolyte concentration. At higher concentration, more ions associated with machining in turn increase current density, which causes higher MRR. From gure, it is observed that MRR is increasing linearly with micro-tool vibration frequency, except at 100 Hz for all electrolyte concentrations. Fig. 11 shows the overcut phenomenon for different micro-tool vibration frequencies under the same machining condition as set in the previous set of experiments. The gure shows higher electrolyte concentration causes higher overcut. At higher concentrations, ions associated in the machining process are more and may not be concentrated properly and sometimes formation of passive layers on the machining zone also turns aside the actual material removal area. The chances of stray machining due to stray current are also more in higher electrolyte concentrations. With higher micro-tool vibration frequency in Hz range, sludge removal from the narrow machining zone is also easier due to the generation of pressure waves, which improves machining efciency. With increasing micro-tool

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6. Conclusions The present research consists of experimental investigation on the EMM with vibrating micro-tool and analysis of the acquired data to study the inuence of micro-tool vibration on EMM criteria such as MRR and over-cut phenomena. The micro-machining capability of EMM with the developed micro-tool vibration system is examined through experimentations, considering the different vibrating frequencies. From the experimental results, it can be concluded that there is no signicant effect of high frequency i.e. 3 to 23 kHz range of micro-tool vibration on MRR and over-cut in EMM and it is clear that low-frequency vibration signicantly increases the MRR and accuracy during micro-machining operation of copper test pieces. Electrolyte concentration has a signicant effect on MRR and accuracy. MRR increases with the increase of electrolyte concentration, but the increase of MRR reduces the accuracy of the product. It is observed from the analysis of the test results that around 150200 Hz range of micro-tool vibration frequency and 1520 g/l range of electrolyte concentration, better accuracy can be achieved with higher amount of material removal. The inuence of stray current effect on machining accuracy also highlights the need for proper insulation of micro-tool and selection of suitable parametric combination. The detailed analysis of SEM micrographs of the machined micro-holes establishes the optimal setting of micro-tool vibration frequency and electrolyte concentration, which is essential to achieve higher machining accuracy and better surface integrity of the micro-machined products. In normal EMM operation, machined products could not be ushed away from the narrow machining gap, as electrolyte is normally kept stagnant. Compared to normal EMM operation without tool vibration, it is evident that MRR and accuracy are better during EMM operation with micro-tool vibration. It generates small pressure waves in the machining zone that destroy the passive layer from the copper test-piece surface, which improves the ow direction of current ux results in higher and controlled MRR that leads to better accuracy. This also permits the use of high current densities in order to improve the quality of the machined micro-products. Hence, it is clear from the present investigation into EMM that the introduction of the micro-tool vibration during the EMM process provides a new and improved method for EMM.

Fig. 12. The SEM micrograph of machined hole (vibrating frequency: 100 Hz, electrolyte concentration: 20 g/l).

Fig. 13. The SEM micrographs of micro-hole (vibrating frequency: 150 Hz and electrolyte concentration: 25 g/l).

vibration frequency, over-cut diminishes, except at 100 Hz. From Figs. 10 and 11, it can be concluded that around 1520 g/l electrolyte concentration and 150200 Hz microtool vibration frequency, lowest overcut with optimized MRR can be achieved. Fig. 12 shows the SEM micrograph of the micro-hole machined at a micro-tool vibration frequency of 100 Hz and 20 g/l electrolyte concentration. The micro-burrs are observed on the periphery of the micro-hole that is due to comparatively lower micro-tool vibration frequency, which results in improper removal of passive layer and sludge. Fig. 13 shows the SEM micrographs of the microhole machined at 150 Hz vibrating frequency and 25 g/l electrolyte concentration. A few stray current-affected areas around the micro-hole have been observed, which are due to the presence of more ions associated during machining. Moreover, the micro-hole produced with this parametric combination is circular. Reducing the electrolyte concentration can reduce the stray current-affected area.

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