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COST OF MEMS TEST

Minimizing Cost of Calibration & Test for MEMS devices

Agenda

Innovative solutions
test handlers
> Strip Test > Pick & Place

interface products

> Test in Carrier > Sensor Test > Gravity Feed

Wafer Level Test

> DUT boards > Vertical Probes (Quad Tech) > Cantilever Springs (Blue Line)

In-Process Test

Final Test

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Multitest experts are close to your sites for > application support > service including professional installations > post-installation support

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Comprehensive MEMS Test Solution Set


Singulated Package Test handler platform Strip Test / Test in Carrier

Gravity

Gravity

P&P

Instrip

application

tube x4

tube x4 / x8

tray x4 / x8 / x16

strip x42 / x72 / x144

Accelerometers
20g/ 50g /100g 3 axis low g X, Y, Z, 45 Z+X, Z+Y YZ = 5DOF Z sinusoidal; XYZ = 6DOF Y, Z, X+Y on request on request Z sinusoidal; XYZ = 6DOF (9DOF on request) Barometric abs.& rel
(on request)

InFlip 3DOF; InFlipM 6DOF InGyro 6 DOF, InGyroM 9DOF

Gyroscopes Pressure / Gas Magnetometer Microphone Humidity Optical Sensors Oscillators


up to 20 bar absolute Gas detection Z = 1DOF, MRS XY = 2DOF, XYZ = 5 (8) DOF

Gas detection MRS XY = 2DOF, XYZ = 3DOF MRS XY = 2DOF, XYZ = 3/6DOF (9DOF on requ.)

InPressure (20bar abs.+ gas d.) InBaro absolute (on request)

InFlipM 6DOF, InGyroM 9DOF InPhone

humidity MEMS

InHumid (on request)

specific solutions available temp. calibr. up to +/0,2K

specific solutions available on request

InOptic (on request)

on request

MEMS today in cars

MEMS today in smart-phones

MEMS tomorrow

Addressing complexity of Cost of Calibration and Test


> depreciation period > useful lifetime > re-use for new applications investment cost for > handler base + change kit > utilities (eg. power, CDA, LN2) > labor, operations & engineering > load boards, contactors > maintenance & service > spare parts > management > adminstration > facilities

> tester
> manipulator + docking

Capital Cost
CoCT =

_________________________
Yield

Lifetime

Variable Cost

Overhead

Utilization

Throughput

> contacting accuracy and repeatability > open/short rate

> uptime, MTBA, MTTA, MTTR

> DUT test time

> package conversion time


> setup time > socket cleaning & exchange > training

> handler index time


> number of contact sites > soak speed & capacity > effective throughput

> test yield / re-test rate

Optimizing Cost of Test and Calibration for Sensors


> depreciation period > useful lifetime > re-use for new applications investment cost for > handler base + change kit > MEMS module > tester > manipulator + docking > utilities (eg. power, CDA, LN2) > labor, operations & engineering > load boards, contactors > maintenance & service > spare parts > management > adminstration

> facilities

Capital Cost
CoCT =

_________________________
Yield

Lifetime

Variable Cost

Overhead

Utilization

Throughput

> contacting accuracy and repeatability > open/short rate > test yield / re-test rate

> uptime, MTBA, MTTA, MTTR

> DUT test time

> package conversion time


> setup time > contactors cleaning & exchange > training

> handler index time


> number of contact sites > soak speed & capacity > effective throughput

4 Steps to best CoCT

1 2 3 4

Step 1: Standardization
Standard Sensor Test Equipment replaces cost-intensive custom designed solutions:
> ease of operation > ease of maintenance > leverage skills / little additional training needs > convertibility to other sensors applications, exchangeable stimuli > global support > convenient spare supply
Example: Multitest MEMS Cart

Step 2: Modularity
Sensor Test Equipment is combined with Standard Handling Equipment
> ease of operation / maintenance - similar to standard process > leverage skills / little additional training needs > sensor test module can be fully optimized for dedicated requirements > new sensor applications require only changes in the sensor test modules -> fast time to market

Example: Multitest Standard Pick & Place Test Handler with MEMS Cart

Step 3: Parallel Test


Sensor Test Equipment is combined with Standard Strip Test Equipment

> up to 1200 signal lines > high throughput > supporting small packages

Example: Multitest Standard Strip Test Handler with MEMS Box

Step 3: Parallel Test for singulated packages


Sensor Test Equipment is combined with Strip-LikeTest Equipment and Carrier Loading / Unloading

> leverages advantages of strip test for singulated packages


> high throughput

> supporting small packages


> full device traceability
Example: Multitest InCarrier

Step 4: Multi-DoF Test @ 1 Insertion


Sensor Test Equipment to fully support multi-axis / combo sensors

> multiple actuations in ONE insertion

> modular architecture for reduced complexity

Example: Multitest 9 DOF Test Setup

Example: 9 DOF Inertial & Magnetometer Test


6 Axis Inertial MEMS Test = 3 Axis Gyroscope + 3 Axis low g Accelerometer
with non magnetic contact environment for passive 3 DOF Magnetometer test

1 Test Insertion for 3D Accelerometer + 3D Gyroscope + 3D Magnetometer

Optimizing Cost of Test and Calibration for Sensors


> depreciation period > useful lifetime > re-use for new applications investment cost for > handler base + change kit > MEMS module > tester > manipulator + docking > utilities (eg. power, CDA, LN2) > labor, operations & engineering > load boards, contactors > maintenance & service > spare parts > management > adminstration > facilities

Capital Cost
CoCT =

_________________________
Yield

Lifetime

Variable Cost

Overhead

Utilization

Throughput

> contacting accuracy and repeatability > open/short rate > test yield / re-test rate

> uptime, MTBA, MTTA, MTTR

> DUT test time

> package conversion time


> setup time > socket cleaning & exchange > training

> handler index time


> number of contact sites > soak speed & capacity > effective throughput

MEMS Test and Calibration Equipment for best CoTC Best Cost of Test and Calibration is ensured by
Convertibility to changing packages

Exchangeable stimuli

Modular concept that combines best package handling performance with state-of-the art MEMS test solutions

MEMS test modules for high parallel test handling solutions (strip test, test in carriers)

Multi-DOF solutions with only ONE insertion

Thank you!

For more information please visit: www.multitest.com/sensor This presentation will be available at

www.multitest.com/SemiconTaiwan

MEMS Test Example Singulated MEMS


Standard Gravity or Pick & Place test handler
MT9320 (tube), MT9928 (tube), NEW: MT9510 (tray)

Standard MEMS test module


> MEMS stimulus during test > configurable for multiple MEMS applications Accelerometer high g Accelerometer 3 axis Yaw-Rate (Gyro) Pressure

> singulated device handling tube to tube, bowl to bulk, tray to tray > NEW: up to 8/16 contact sites > temperature conditioning (-55C to +155C at +/- 3C accuracy) >fast package conversion (at MT9928, MT9510)

..
> fast package conversion

MEMS Test Example InStrip or InCarrier


Standard platform InStrip (strip test handler)

Standard InMEMS test module

>temperature conditioning
(-40C to +125C)

>MEMS stimulus during test for whole strip


> High parallel test (600 to 1200 signal lines)

> Configurable for multiple

>fast package conversion


The worlds first and only single insertion 144x // 9DOF sensor test and calibration handler !!!

MEMS applications
InFlip = Accelerometer 3 axis InPressure = Pressure test InGyro = 6 DOF motion InMagnet + InGyro InPhone

> fast package conversion

What is InCarrier?
Combined advantages of Singulated Test and InStrip Test

Singulated IC Test

InStrip IC Test

InCarrierTM IC Test

Patented

InCarrier Examples

SO Device in InCarrier

BGA 64 in InCarrier

InCarrier in standard slotted strip cassette (cassette is


shown open; different shutter types available)

InCarrier Process
tray tube

Burn-In using

Loader

MT InCarrier sockets

bowl wafer ring

InMEMS = contact Strip Handler + Create map MEMS Test Module file

Selective Laser Product-Marking tube

Sort-unloader

tray T&R

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