Q-Scope Series S canning P robe Mi c r o s c o p e s

Advanced SPM/AFM products featuring:

Fast scan rates and sub-angstrom noise oor Full complement of SPM imaging modes Convenient sample handling and applications exibility Superior imaging and precision measurement capabilities Control signal access for customized experiments OEM packages available

The industrys most cost-effective, complete, and turnkey SPM/AFM systems available.

Focused on Surface Metrology Solutions

Ambios Technology provides industrial and academic researchers with affordable, world-class surface metrology instruments. Our years of experience in surface measurement technology give us a unique perspective to evaluate our customers needs and deliver appropriate solutions. In 2005, Ambios Technology acquired Quesant Instruments, an early pioneer in the commercialization of scanning probe microscopes (SPM). Quesant began shipping state-of-the-art AFM products in the mid-90s which featured patented innovations and signicant breakthroughs in performance and ease-of-use. The Q-Scope SPM Series augments Ambios Stylus Prolometer and Non-Contact Optical Proler product lines. Ambios now provides a full complement of imaging and precision surface measurement instruments covering the range from angstroms to millimeters. At Ambios, we bring a strong technological emphasis, rigorous attention to quality, and superior price/performance value to all our products. Ambios Technology is committed to continuous innovation and delivering exceptional value to our customers. Our products meet the critical surface metrology demands in elds such as: Materials science Optics Microelectronics Mass storage Nanotechnology Polymer Chemistry Biomaterials

Innovative and Capable Technology

The Q-ScopeTM family of AFM/SPM products was designed to be a exible platform which can grow and adapt to changing research needs. All these instruments deliver long-term value as well as excellent imaging performance and high resolution measurements. Our modular approach to building your system minimizes cost, offers maximum exibility, and allows custom congurations for special applications. Common to all models is ScanAtomicTM image acquisition and analysis software and our proprietary DSP-based control electronics. Standard Q-Scope models can then be congured using various sample stages, bases, advanced image processing software and scan accessories to tailor any Q-Scope instrumental conguration to meet specic application requirements. With the Q-Scope, easy-to-use controls permit rapid probe exchange and alignment, sample approach, and intuitive display and adjustment of all SPM operating parameters.

Q-Scope Advantages I Speed, Flexibility, Performance

Scan Range Choices Interchangeable Q-ScanTM AFM scanning assemblies offer scan ranges from submicron to 200m in X and Y and up to 17m in Z. Proprietary creep compensation circuitry is used to optimize the performance during open-loop imaging. Fast Scan Rates Scanning can be performed at rates as high as 20Hz, greatly reducing data acquisition times. With Broadband Mode (see Figure 1), the PID error signal is combined with the Z height data during scanning to acquire data at very high speeds. This capability is combined with the AnaLoopTM PID feedback loop which elegantly combines advanced analog and digital circuitry for fast and precise data acquisition.

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Figure 1. High performance Broadband Mode provides Q-Scope users with the ability to scan at higher speeds in contact mode.

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High Resolution Imaging The Universal SPMTM (USPM) instrument differs from the original Q-Scope design in that it scans the sample beneath a xed probe. This system is designed for both AFM and STM measurements on small samples with atomicscale resolution. The USPM is available as a complete stand-alone system, combined with a Q-Scope, or as an upgrade to an existing Q-Scope. High Precision Measurements The Metrology option adds proprietary sensors to the scan module to accurately measure the precise position of the probe tip in X, Y, and Z axes. This capability is available on all models and improves positional precision of the acquired measurements to better than 1%. Sample Handling Flexibility Manual or motorized sample translation stages are available on the Q-Scope. Sample sizes up to 240mm diameter can be accommodated. Automated scanning and storage of data from multiple areas on the sample (e.g. on patterned wafers) can be obtained with our motorized stage systems, including the large area, 200mm R-Theta vacuum stage. And for applications that require a compact and portable design, the NomadTM stand-alone AFM is ideal. Full SPM Modes Capability Ambios Q-Scopes always keep pace with the rapid development of new SPM imaging techniques. Virtually all AFM imaging modes are standard, including WaveModeTM (intermittentcontact mode). These instruments can capture topographic, lateral force, phase, magnetic force, electric force, conductance and force-distance curves. Combined AFM/Nanoindenter The Ambios Q-Scope models offer a modied scan assembly that allows for a 1-D or 2-D Hysitron Triboscope transducer to be mounted on the AFM head. As a result, tribological measurements can be selectively made and imaged with AFM-level precision and with resolution limited only by the probe dimensions. Requires additional Hysitron equipment. Research Customization Package Specialized research applications may require direct access to electronic signals and software. The Q-Scope electronics Signal Access Module provides 22 BNC connectors to allow for easy access to scan head signals, major PID control loop signals and other functions. OEM Packages Ambios supplies Original Equipment Manufacturers with customized AFM hardware and software modules for integration into their high performance nanotechnology instrumentation. These demanding customers have come to rely on Ambios combination of state-of-the-art design, performance, reliability, and value. Contact the factory for details.

80m x 80m area scan of SiC surface, showing single atomic steps of 2.4. Sample courtesy of Microsemi.

The Nomad - our portable and compact AFM that can measure on virtually any sample, small or large. Or mount in combination with other instrumentation like an inverted optical microscope platform.

All Q-Scopes can be equipped with closed-loop control for applications which require high precision measurements.

Contact mode with simultaneous Lateral Force images of human hair.

AFM WaveMode intermittent-contact mode with Phase image.

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Back panel of Q-Scope controller with direct BNC access to scan control and data signals.

User-Friendly Operation and Features

Extensive userfriendly features are embedded throughout the entire Q-Scope and USPM designs. The Q-Scopes mechanical design and easy-to-use controls permit rapid probe exchange and alignment, sample approach, and intuitive display and adjustment of all SPM operating parameters.

Patented Isotopic Focal SystemTM

Locating features of interest on the surface is only one critical function of the high resolution color video camera on our Q-Scope models. Our 90 top-down optical viewing design allows for optically tracking the laser beam with the cantilever/probe during scanning. This design improves operator efciency by precisely positioning and following the probe over sample features of interest.
Patented optical system that allows the laser beam to track the cantilever/probe during scanning.

Rapid Probe Exchange with Computer-Assisted Alignment

The Q-Scope design makes the process of probe exchange fast and easy. For easier handling, our AFM probes are pre-mounted on stainless steel holders that conveniently align into a specially machined probe holder. The process of getting the laser aligned on the back of the cantilever and then into the photo-detector is made straightforward by ergonomically-designed controls, and the graphic display of laser beam position and intensity.

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1 I Ambios mounts commercially manufactured cantilever/probe assemblies onto performed crosses for ease of handling; 2 I Exchanging pre-mounted cantilever/probe assemblies is easy and straightforward; 3 I Computer-assisted laser beam alignment window; 4 I The typical video camera view of a properly aligned cantilever ready to scan.

Intuitive and Powerful Software Control

ScanAtomic is a rened and user friendly software operating under Microsoft Windows enabling users to perform even complex operations with ease via menu options organized by function. Our cockpit style user interface permits easy control over all software functions. Typical operational conveniences includes the ability of setting all operating parameters (Laser intensity; Scan rate; Scan size; Resolution; Zoom; Scan angle; Feedback PID; etc) by key board or mouse control.
The SPM Conguration window uses simple click and drag dial controls.

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Set-up display of the amplitude of the cantilevers oscillation for WaveMode operation.

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Advanced Data Processing and Analysis

Once the raw image is acquired, a full-suite of powerful ltering and processing tools is available for optimizing and analyzing the data. Images can be stored or exported to a host of other Windows applications. These les can easily be retrieved and displayed in various formats and views including Top-view, 3-Dimensional view with adjustable viewing angles, Z-height color, slope shading, sunrise angle and light shading. Image color palettes can be selected from a menu or custom created to highlight specic image features. Powerful ltering, analysis and processing capability is resident in the ScanAtomic package. FFT, Height histogram, force vs. distance analysis, hardware or software zooming are only a few of these standard functions. Q-Scopes can be congured with SPM-specic high performance image processing programs like SPIP from Image Metrology and Mountains from Digital Surf. Images can be exported to these applications or to other Windows utilities (i.e. Word).

Top view of screw dislocation in Au.

Measurement of single atomic steps.

Bimodal histogram feature permits statistically signicant step height measurements.

Application-Driven Software Packages

Specialized software and analysis packages have been developed to support the unique requirements of several demanding applications, including CD/DVD metrology, semiconductor wafer QA and analysis. NanoLithography is just another example of advanced software capability available on the Q-Scope. This Ambios ScanAtomic SPM software feature has two components: 1 I A NanoLithography window within the ScanAtomic environment for creating simple processscripts to manipulate surface features and create patterns on surfaces. The script component of our lithography option has the advantages of speed and simplicity. 2 I A software interface module which allows programs outside the ScanAtomic environment (macros) to access the nanolithography capabilities of the instrument. This offers the advantages of an object-oriented program development environment with the ability to create specialized control applications with graphical user interfaces.
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Advanced Nanolithography software is available for Q-Scopes equipped with closed-loop control.

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Page one images top to bottom 1 I Au dislocation imaged with STM, 200nm scan. 2 I 40m MFM Mode image of a Zip drive. 3 I SiO2 on Re Crystal, 3m scan. 4 I 25m scan of nanoparticles on stepped crystal surface. 5 I PMMA Phase Mode image, 25m scan size. 6 I 9m scan of phase separated Polystyrene-polybutadiene.

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Total SPM Solutions

The Q-Scope Series
Our most popular stand-alone SPM instrument is the Ambios Q-Scope. It has earned a global reputation as a versatile, easy-to-use, and high value/high performance tip-scanned SPM. It features simple and straightforward control, rapid probe exchange and alignment, automated sample approach, and intuitive display and adjustment of all SPM operating parameters. Virtually all AFM imaging modes, including WaveMode intermittent-contact mode, which can capture topographic, lateral force, phase, magnetic and force-distance curves are standard. All Q-Scope models are built upon a Q-LithicTM structure featuring a solid granite base and support arch for excellent mechanical and thermal stability. Manual or motorized X-Y staging can accommodate sample sizes up to 150mm x 150mm and 65mm thick.

Large Sample Flexibility

Q-Scope congured with 150mm x 150mm manual translation sample stage.

A specialized R-Theta sample translation stage system is available for large CD/DVD, magnetic disk or semiconductor wafer applications. Automated scanning and storage of data is possible from multiple areas anywhere on a sample (e.g. on patterned wafers) up to 200mm diameter.

Nomad: Modular, Compact and Portable

To provide additional versatility and portability, Ambios offers the Nomad model Q-Scope. Using virtually the same scan head, electronics, scan modes, video microscope and software capabilities as all other Q-Scopes, the Nomad can be placed directly on large area samples. Its unique tripod base allows automated probe tip approach.
The Nomad is a low-cost, compact, and portable AFM offered with or without closed-loop control.

The Universal SPM

The USPM Model is a small sample scanning probe microscope that rasters the sample rather than the probe. The tight mechanical loop of this instrument allows the highest resolution data when imaging in either AFM or STM imaging modes. It is equipped with a built-in 250X video microscope. Options include an available Acoustic/Vibration Isolation Chamber, liquid cell, and closed-loop scanning.

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The USPM is a small sample scanned system available with AFM or STM capability.

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Accessories, Options and Supplies

Metrology Scanners
This option adds closed-loop control to select scanners for either the Q-Scope or USPM Models with an active position sensing system to all three axes of motion. This approach results in linear scans with 99.8% precision in X and Y and 99% in Z.

Open- or closed-loop scanners are available for all Q-Scope models.

Pre-mounted Cantilevers
Cantilevers for Ambios Q-Scopes are conveniently mounted on stainless steel tabs for quick and easy replacement. Ambios supplies probes for all available imaging modes as well as supplying different aspect ratio probes. Contact your nearest representative for details.

Acoustic/Vibration Isolation
Ambios offers two means of isolating your SPM from building vibrations, interior acoustic noise, and thermal drift caused by room air movement. The high performance IsochamberTM features an integral Minus K Technology negative-stiffness isolator which offers 1.5Hz horizontal and 0.5Hz vertical natural frequencies. The economical AVIC model is a less expensive option where isolation is achieved by placing the microscope onto a heavy mass supported by soft springs within a closed chamber.
An SEM image showing typical probe tip geometry. Photo courtesy of Applied Nanostructures.

NanoIndentation
Ambios offers a unique scan module designed for use with Hysitrons Triboscope nanomechanical tester. This interface module provides a full test platform for the quantitative determination of a surfaces nanomechanical properties combined with the AFMs high resolution 3D imaging capability.

Scanning in Liquids
Using this option with either the Q-Scope or USPM Models, AFM scans can be performed under liquids. Liquid scanning is possible with both contact and intermittent-contact scanning modes.

Ambios Isochamber provides superior instrument isolation from building vibrations, thermal drift, and 30db of acoustic isolation (as measured with an external eld of white noise at 80dB SPL).

Sample Heater
Available option for the Q-Scope, which allows samples to be imaged at elevated temperatures to 250C via a digital temperature controller.
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Hysitron interface option turns a Q-Scope into a combined AFM/Nanoindenter.

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Q-Scope sample heater.

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AFM/SPM Operating Modes

Contact (both constant height and constant deection), WaveMode (intermittent contact), Broadband high speed image acquisition mode, Lateral Force, Phase, Electric Force Microscopy, Magnetic Force Microscopy, Force Displacement Measurements. OPTIoNAL: operation in uids, STM (constant current, constant height, i/V, and i/Z plots), conductance AFM.
STANDARD SCANNER s Universal SPM (sample scanning) X & Y Range X & Y Resolution Z Range Z Resolution Open Loop 0.5m 0.08 0.4m 0.06 (STM only) 5.0m 0.8 0.5m 0.08 40m 6 4m 0.5 80m 12 8m 1.2 Closed Loop (Optional) 80m in X & Y 8.0m in Z with X-Y precision better than 0.1% (RMS/total scan range) and 1% in Z Q-Scope (tip scanning) X & Y Range X & Y Resolution Z Range Z Resolution Open Loop 20m 3 2m 0.2 40m 6 4m 0.5 80m 12 8m 1.2 200m 30 10m 1.4 80m 12 17m 2.5 Closed Loop (Optional) 80m in X & Y 8.0m in Z with X-Y precision better than 0.1% (RMS/total scan range) and 1% in Z Displacement Equivalent Noise in Z (Open Loop Scanner measured with probe in feedback, scan size set to zero, line-by-line leveling, and 10Hz acquisition rate with Proper Isolation) USPM Q-Scope Co NTR o L ELECTRoNIC s STAGIN G SY sTEMs Universal SPM (sample scanning) Q-Scope (tip scanning) SY sTEM S oFTWARE Realtime image acquisition software features include: Image analysis and rendering software features include: Realtime surface leveling, adjustment to PID controls, adjustment of scan controls, undo/redo functions to allow capture of previous or partial images, image capture up to 1024 lines X 1024 pixels, slope shading or perspective illumination, hardware and software image zoom Variety of curve tting/leveling mechanisms on a line-by-line or entire image basis, image streak and/or spot artifact removal, 2D FFT analysis with unique image conjugate erase functions that allows easy identication and removal of periodic features, line prole extraction on single or multiple lines, automated bimodal histogram function for statistically signicant step height measurements .afm le format supported by several other 3rd party image rendering packages including SPIP and others Maximum sample size: 25(x) X 25(y) X 8(z)mm X-Y translation: +/- 5mm (manual) Sample mounting: 20mm diameter platform Simple exchange of scanners, probe modules (i.e. AFM to STM), and cantilevers Video view: 250X, 0.75mm FOV, 90 to sample Sample illumination: LED Maximum sample size: 150(x) X 150(y) X 65(z)mm X-Y translation: 12.5mm manual; optional motorized stage or 200mm motorized R-theta stage Patented Isotopic Focal System allows laser beam tracking of the cantilever/probe during scanning Q-Lithic granite stage provides highly stiff structure for scanner mounting Simple and rugged scanner/cantilever exchange with easy to use laser alignment adjustments Video view: 200X, 1.0mm FOV, 90 to sample Full user access to control and HV signals for image/data acquisition and manipulation High speed 32 bit DSP and controller allows acquisition of up to four channels of data simultaneously Fully integrated creep compensation and patented AnaLoop analog feedback control for extremely low noise operation and up to 20Hz image acquisition speed Minimum Computer Conguration: current generation Intel processor with a clock speed of 3.0GHz or higher, 1GB RAM, 80GB hard drive, CD-ROM writer, 10/100 ethernet, 17 inch FPD, Windows XP Pro, ScanAtomic is fully integrated in Windows operating and networking environment <0.07 angstroms (measured in STM) pixel-by-pixel RMS deviation from the mean plane over the entire image <0.3 angstroms (measured in AFM WaveMode) pixel-by-pixel RMS deviation from the mean plane over the entire image <0.5 angstroms (measured in AFM WaveMode) pixel-by-pixel RMS deviation from the mean plane over the entire image

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Tel 877.429.4200 100 Pioneer Street, Suite A Santa Cruz, CA 95060 Fax 831.427.1160

2006 Ambios Technology, Inc. All rights reserved. Specications are typical and are subject to change without notice. 8/2006. Q-Scan; Q-Scope; Universal SPM, ScanAtomic; Nomad; Q-Lithic, WaveMode; AnaLoop; Isotopic Focal System; and Isochamber are registered trademarks.