A First Look at NT9080 Webinar Slides 100408

Introduction to the NT9080
April 2010
Webinar Overview
Optical Profiler History Technology Overview
White Light Interferometry PSI VSI
NT9080 Introduction and Overview NT9080 Applications Summary
2010 Veeco Instruments Inc.
NT9080 Surface Metrology System
Optical Profiler History
Veeco Optical-Industrial Metrology

Founded as WYKO Optical Inc.
December 1982
Grew from UA Optical Sciences Headquartered in Tucson, Arizona

Located in the heart of Optics Valley
Merged with Veeco July, 1997 Technology Leadership

Over 60 patents 3 R&D 100 Awards 6 Photonics Circle of Excellence Awards 10 generations of WLI products!
The Veeco facility in Tucson, AZ
The NT Product Family

tion a tom u dA
ing s a re Inc
ion t c Fun
n a y alit
SP9900 NT9800
NT9300
NT9100 NT9080
5 2010 Veeco Instruments Inc. NT9080 Surface Metrology System
NPFlex
The ContourGT Product Family

Increasing Functionality and Automation
GT-K1
GT-X3
GT-X8
Technology Overview
What is White Light Interferometry?

Detector Array Digitized Intensity Data
LED Sources
Illuminator
Beamsplitter Translator Dichroic Mirror Field Stop Aperture Stop Microscope Objective Mirau Interferometer Sample
Typical Interferometer Diagram

The expanded beam exiting from the light source is divided by a Beamsplitter into two beams One beam is reflected from the Reference Mirror, and the other one from the Sample These two beams are recombined by the Beamsplitter to interfere The imaging lens images the interferogram onto the CCD camera
CCD Reference arm

Reference Mirror
Test arm
Beamsplitter Sample
Optical Path Difference (OPD)

Difference in optical path lengths that beams travel in Reference and Test arms When OPD=0, the brightest fringes are in focus
Interference Lines are Similar to Contour Map Lines

On a map each dark line represents a fixed elevation The spacing in this image is 100 Spacing is set by the mapmaker On an interferogram each line also represents a fixed elevation Spacing is 1/2 the wavelength of the light (usually 300nm) Spacing is set by physics!
100
300nm
10
Two Measurement Modes on the NT9080

Phase Shifting Interferometry (PSI)
Uses monochromatic illumination and calculates the phase of the sinusoidal fringes Phase is converted to surface height Sub-nm noise, 135nm steps or below
Vertical Scanning Interferometry (VSI)

Uses broad spectrum illumination and calculates the point of best fringe contrast Best contrast point indicates the relative surface height Few nm noise, 10mm steps possible
Data Pits on Compact Disk (PSI)
Gravure Printing Roll (VSI)
Phase Shifting Interferometry (PSI)

PSI Characteristics
Measure very smooth objects with high precision Uses monochromatic (green) light for best fringes Vertical resolution <0.1nm Measurement time about 1 second per measurement
PSI Operation
Grab Intensity Frames at 90 degree phase shifts Calculate Phase Unwrap Phase Calculate Height
I4 I2 Tan( ) = I1 I 3
( x , y ) = Tan
1
I 4 (x , y ) I 2 (x , y ) I 1 (x , y ) I 3 (x , y )
Height( x, y ) =
( x, y ) = ( x, y ) 2 2 4
PSI Lowest Noise Floor Technique
Subtraction of 2 sequential measurements of SiC Mirror with 64 averages on NT9080 0.02nm Ra, 0.7nm PV
Single measurement of SiC mirror with 64 averages on NT9080 0.14nm Ra, 0.2nm deep scratches can be seen
PSI Summary
Lowest noise floor Fastest measurement mode Limited surfaces can be measured
Pixel-to-pixel steps and slopes up to ~135nm height can be measured Surfaces must be optically smooth (<10nm Ra)
25nm fiber undercut on SC fiber endface
15nm Ra on Magnetic Tape
14
Vertical Scanning Interferometry (VSI)
Rough surfaces, vertical range >135nm to 10mm Utilizes white light Sees a few fringes where part is in focus Vertical resolution about 3nm Measurement time depends on scan lengths, typically 5 to 30 seconds
15
Operation of Optical Profiler in White Light Vertical Scanning
Objective is scanned through focus Peak of fringe contrast is located and logged Height map of surface is generated
VSI
Step Height Standard

VSI Summary
Versatile measurement technique for most any surface characterization
Near-universal measurement mode!
Up to 10mm vertical features can be measured Camera saturation is tolerated

More light means more data feedback
Human Bone Sample
Slower than PSI 3nm noise floor may dominate measurements of smoother samples
Micro-gear etched in Si
17
Making a Surface Measurement is Easy

Place your sample on the NT9080 sample stage
No surface preparation is required
Choose the correct objective magnification for the job

From 1 to 100x
Focus on the sample Choose the proper measurement mode Set the illumination level Measure!
Results are just seconds away
Ask for a demo today!

Were glad to demo via web on at your facility We can measure samples at our facility and provide an application report tailored for your measurement needs
18
Introducing: The NT9080
NT9080 Overview
The NT9080 is an easy-to-use, bench-top 3D surface mapping instrument that provides dedicated metrology capability at a cost-effective price for R&D, production, or QA/QC applications The NT9080 provides a good optical metrology entry point for 3D non-contact surface characterization, particularly for customers who are traditionally 2D-based system users The NT9080 is geared toward customers who require no automation capability and have limited purpose, dedicated measurement requirements
20
The NT9080 is Designed to be a Dedicated Metrology Platform

1. Fixed 0.55X or 1.0x field of view lens
Fixed FOV lenses multiply the magnification of the selected objective
2. Single Objective Adapter or 4 Position Manual Turret

Add up to 4 objectives and rotate any into position manually
1
3. Manual Z-Axis Focus

Easy to use focus knob allows for quick adjustment of the z-axis
2
4. Manual 4 Stage
A variety of fixtures can be attached to the system to properly hold samples
5 4 3
5. Manual Tip-Tilt
Remove tilt in the system for best measurements
21
NT9080 Provides Excellent Performance and Capability

Specification
Vertical Resolution RMS Repeatability (PSI) Step Height (VSI) Max Scan Speed Scan Range Stitching Automation Autofocus Software < 0.12nm <0.015nm 1% accuracy, 0.1% 1 sigma repeatability 28 m/sec (7x VSI) 10mm No No Included Vision32, with advanced analysis package Benchtop system, isolation recommended CE, NRTL
System Options
Metrology Illumination Power Objective Mounts Parfocal Objectives Non-Parfocal and Long Working Distance Objectives Field of View Lenses (Multipliers) Standards High output patented dual illumination 110 or 220 VAC Single or 4-position manual turret 2.5x, 5x, 10x, 20x, 50x, 100x 1x, 1.5x, 2x, 5x, 10x
0.55x or 1x Fixed SiC reference mirror, 8um, and 50um NISTtraceable step heights 1 inch and porous ceramic vacuum chuck 30x30 air isolation table
Fixtures Isolation
Isolation Certifications
22 22
Unsurpassed Control & Analysis Software

Vision32 industryleading software 2D and 3D data analyses Over 200 analysis and visualization tools Unmatched standard toolkit and applicationspecific analyses Access control for production environments
NT9080 Applications
Non-Contact 3D Profiling has Major Advantages Over Stylus Profilometry

Stylus is inherently a twodimensional technique WLI is a extremely fast as compared to stylus profilometry Stylus touches the surface! Minimum feature sizes detected are determined by size of stylus tip used Accurate Ra measurement must be orthogonal to surface grain
Schematic showing the limitations of the stylus due to the tip size (K J Stout et al 1993)
Why Ra is Not Enough

Many engineered surfaces still call out Average Roughness (Ra) as the pass/fail criteria Ra is a 2D measurement and therefore limited in explaining surface characteristics Different height distributions can exhibit very similar Ra figures leading to misleading data conclusions A more accurate analysis is a 3D measurement which removes ambiguity and adds data density
Profiles showing the same Ra with differing height distributions. (Surface Texture Analysis The Handbook,L Mummery 1992)
26
Example: Ra cant identify a passing surface

Problem: Brake Rotor Ra meets specification for both surfaces below. One works and one fails rapidly. Solution: Specify the surfaces with 3D texture parameters like Sdq
Ra: In spec Sdq: In spec
Ra: In spec Sdq: High
27
Solar Cell Roughness and Efficiency

Correlate surface roughness parameters to cell efficiency
0.1796mw/mm
0.1552mw/mm
0.1319mw/mm
28 28
Solar Cell Conductor Trace Analysis

The NT9080s large FOV provides for a more accurate topographical image of the Ag trace
Obtain a more complete understanding of the Ag trace in less time
Optimize material usage

Increase efficiency Decrease costs
Volume = 1,648,000 um^3
29
Solar Cell Scribing and Isolation

Edge isolation to prevent from shorting between front and back surface efficiency improvement
Laser-scribed trench analysis for depth, width to ensure complete isolation Current leakage is a major source of efficiency loss
Key metrics:
Cleanliness Depth Width Ability to capture edge roughness
30
Precision Machining: Wear Volume

Quantify material characteristics with wear studies and quantify material removal in terms of volume Calculate volume above and below the wear scar
Precision Machining: Wear Visualization

The regions of wear on a surface are identified and quantified using analyses such as Bearing Ratio
Peak areas that erode first are quantified Load bearing surface is identified Valley areas that would contain lubricant are quantified
32
Surface Roughness Measurements

Characterize surfaces from supersmooth to extremely rough 3D S-parameters provide directionality, periodicity, peaks vs. troughs, etc.
Implements new ISO standard algorithms and filtering
Quantify stiction and friction
Cylinder wall roughness
33
Precision Machining: Corrosion

Examine surface finishes for rate of corrosion over longer time periods Evaluate surface spatial frequency changes with Power Spectral Density (PSD) analysis Selectively remove and visualize spatial frequencies with advanced digital filtering
Individual measurements taken a 7 hour intervals

Y PSD of surface finish
10000 PSD (mm nm^2) 1000 100 10 1 10 100 Spatial Frequency (1/mm) 1000
Uncorroded 7 hours corroded 14 hours corroded 21 hours corroded
34
Corrosion areas detected using Multiregion Analysis
35
Printing Applications
Paper Surface Roughness
Lithography Plate Roughness
Printed Glucose Tester dimensions and volume

Medical Measurements
Heart Stent (Inner Surface)
Razor Blade Edge Angle
Syringe Surface
Summary
The Family of Veeco 3D Optical Profilers

The NT9x00 and ContourGT Family of White Light Optical Profilers
Low noise floor Up to 92m/sec VSI scans Large vertical range (10mm) Self-Calibration Capabilities High lateral resolution (<0.5m) Application-specific configurations Enhanced analyses and automation
Improved Autofocus Over 2000 analysis parameters
NT9080
NT9800
Film thickness capability Through-transmissive media objectives 64-bit capability on ContourGT

ContourGT Family
Veeco: Your Metrology Solutions Provider

Confocal Metrology: The VCM series
3D imaging of surfaces with nanometer scale vertical resolution
White Light Interferometers: The NT and ContourGT Families

3D profiling with angstrom scale vertical resolution
Dektak 150 NT-9800
Stylus Profilers: The Dektak series

Contact based 3D step height with angstrom z-height resolution
Atomic Force Microscopes

Atomic level resolution
VCM-200A Icon AFM
All Veeco Metrology Systems data can be analyzed with Veecos Vision software platform for display and analysis
40 40
Worldwide Service and Support
Worldwide In-Region Service & Support

Quick response, no language barriers
Customer Care and Call Centers

Live in APAC Coming soon to North America and Europe
Worldwide Inventory of Spare Parts in Regions

Drastically reduces instrument down-time
41 2010 Veeco Instruments Inc.
Dedicated Service Quality Team

Ensures customer satisfaction meets highest standards
Your Worldwide 3D Surface Metrology Partner and Community Leader

Greg Maksinchuk, Product Manager, Veeco Instruments, Inc. --- gmaksinchuk@veeco.com
WEBINAR INFORMATION
Recorded Webinars: www.veeco.com/Profiler-Webinar-Archives Upcoming Webinars: www.veeco.com/Profiler-Webinars
www.veeco.com/NT9080
42 42
THANK YOU!
43

A First Look at NT9080 Webinar Slides 100408

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A First Look at NT9080 Webinar Slides 100408

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Introduction to the NT9080

NT9080 Introduction and Overview NT9080 Applications Summary

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Optical Profiler History

Veeco Optical-Industrial Metrology

Grew from UA Optical Sciences Headquartered in Tucson, Arizona

Merged with Veeco July, 1997 Technology Leadership

The Veeco facility in Tucson, AZ

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

The NT Product Family

The ContourGT Product Family

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

What is White Light Interferometry?

Typical Interferometer Diagram

CCD Reference arm

Optical Path Difference (OPD)

Interference Lines are Similar to Contour Map Lines

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Two Measurement Modes on the NT9080

Vertical Scanning Interferometry (VSI)

Data Pits on Compact Disk (PSI)

Gravure Printing Roll (VSI)

Phase Shifting Interferometry (PSI)

PSI Lowest Noise Floor Technique

25nm fiber undercut on SC fiber endface

15nm Ra on Magnetic Tape

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Vertical Scanning Interferometry (VSI)

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Operation of Optical Profiler in White Light Vertical Scanning

Step Height Standard

Up to 10mm vertical features can be measured Camera saturation is tolerated

Human Bone Sample

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Making a Surface Measurement is Easy

Choose the correct objective magnification for the job

Ask for a demo today!

2010 Veeco Instruments Inc.

Introducing: The NT9080

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

The NT9080 is Designed to be a Dedicated Metrology Platform

2. Single Objective Adapter or 4 Position Manual Turret

3. Manual Z-Axis Focus

2010 Veeco Instruments Inc.

NT9080 Provides Excellent Performance and Capability

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Unsurpassed Control & Analysis Software

Non-Contact 3D Profiling has Major Advantages Over Stylus Profilometry

Why Ra is Not Enough

2010 Veeco Instruments Inc.

NT9080 Surface Metrology System

Example: Ra cant identify a passing surface

Ra: In spec Sdq: In spec

Ra: In spec Sdq: High