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04/06/13

Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition) - 9780815520375| ScienceDirect.com
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Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition)


Copyright 2010 Elsevier Inc. All rights reserved Author(s): Donald M. Mattox ISBN: 978-0-8155-2037-5

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= Abstract only

Table of Contents
Front-matter, Pages i-iii
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Dedication To my wife Vivienne, Page ii


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Copyright, Page iv
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Preface to First Edition, Pages xix-xx


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Preface to Second Edition, Page xxi


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Acknowledgements, Page xxiii


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Acronyms Used in Vacuum Coating and Surface Engineering, Pages xxv-xliii


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Donald M. Mattox, Pages xlv-xlvi


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Chapter 1 - Introduction, Pages 1-24


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Chapter 2 - Substrate (Real) Surfaces and Surface Modification, Pages 25-72


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Chapter 3 - The Good Vacuum (Low Pressure) Processing Environment, Pages 73-145
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Chapter 4 - The Sub-Atmospheric Processing Environment, Pages 147-156


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Chapter 5 - The Low Pressure Plasma Processing Environment, Pages 157-193


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04/06/13
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Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition) - 9780815520375| ScienceDirect.com
Chapter 6 - Vacuum Evaporation and Vacuum Deposition, Pages 195-235
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Chapter 7 - Physical Sputtering and Sputter Deposition (Sputtering), Pages 237-286


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Chapter 8 - Arc Vapor Deposition, Pages 287-300


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Chapter 9 - Ion Plating and Ion Beam-Assisted Deposition, Pages 301-331


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Chapter 10 - Atomistic Film Growth and Some Growth-Related Film Properties, Pages 333-398
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Chapter 11 - Film Characterization and Some Basic Film Properties, Pages 399-438
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Chapter 12 - Adhesion and Deadhesion, Pages 439-474


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Chapter 13 - Cleaning, Pages 475-527


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Chapter 14 - The External Processing Environment, Pages 529-544


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Appendix - The Transfer of Technology from Research and Development to Manufacturing, Pages 545-552
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Glossary of Terms for Vacuum Coating (including synonyms, antonyms, and related terms), Pages 553-734
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Index, Pages 735-746


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