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Sensing and Control Honeywell Inc. 11 West Spring Street Freeport, Illinois 61032

Airflow Sensors Microbridge Mass Airflow/Amplified

Figure 1 Heater control circuit

AWM3000 Series

FEATURES Laser trimmed for improved sensor interchangeability Flow sensing up to 1.0 SLPM Low differential pressure sensing Like the AWM2000 Series, the dual Wheatstone bridges control airflow measurement. The AWM3000 Series is amplified; therefore, it can be used to increase the gain and to introduce voltage offsets to the sensor output. The schematic in Figure 3 depicts the amplification circuitry on board the sensor. Also, the heater control circuit (see Figure 1) and the sensing bridge supply circuit (see Figure 2) are on board the package.

Figure 2 Sensing bridge supply circuit

Airflow

Figure 3 Differential instrumentation amplifier circuit

Honeywell Sensing and Control 1-800-537-6945 USA 1-815-235-6847 International 1-800-737-3360 Canada

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Airflow Sensors Microbridge Mass Airflow/Amplified

AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 0.01 VDC, 25C)
Catalog Listings Flow Range (Full Scale) Pressure Range (See Application Note 1) Output Voltage @ Trim Point Null Voltage Null Voltage Shift, Typ. +25 to 25C, 25 to +85C Output Voltage Shift, Max. +25 to 25C +25 to +85C Repeatability & Hysteresis, Max. Excitation VDC (Note 2) Power Consumption (mW) Response Time (msec) (Note 1) Common Mode Pressure (psi) Temperature Range Termination Weight (grams) Shock Rating 5 VDC @ 200 sccm 1.00 0.05 VDC 25 mV 4% Reading +4% Reading 0.50% Reading Min. 8.0 3.4 VDC @ 25 sccm 1.00 0.10 VDC 100 mV 5% Reading 5% Reading 1% Reading Typ. 100.01 50 1.0 AWM3100V +200 sccm AWM3150V +30 sccm +2.0 H2O (5 mBar) 5 VDC @ 2 H2O 1.00 0.08 VDC 25 mV +24% Reading (Note 3) 24% Reading 0.50% Reading Max. 15 60 3.0 25 AWM3200V

AWM3000 Series

AWM3300V +1000 sccm

5 VDC @ 1000 sccm 1.00 0.10 VDC 25 mV 5% Reading +5% Reading 1% Reading

Operating: 25 to +85C (13 to +185F); Storage: 40 to +90C (40 to +194F) 2,54 mm (.100) centers, 0,635 mm (0.025) square 10.8 100 g peak (5 drops, 6 axes)

Notes: 1. Initial warm-up time for signal conditioned circuitry is 1 minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. (See Application Note 1.) 4. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1 sec.

MOUNTING DIMENSIONS (for reference only)

Note: Positive flow direction is defined as proceeding from Port 1 (P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction.

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Honeywell Sensing and Control 1-800-537-6945 USA 1-815-235-6847 International 1-800-737-3360 Canada

Airflow Sensors Microbridge Mass Airflow/Amplified

OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) AWM3100V Press. Flow Nom. Tol. mBar sccm VDC VDC
0.49 0.42 0.35 0.28 0.21 0.14 0.09 0.04 0.00 200 175 150 125 100 75 50 20 0 5.00 4.80 4.50 4.17 3.75 3.27 2.67 1.90 1.00 0.15 0.16 0.17 0.18 0.19 0.19 0.17 0.13 0.05

AWM3000 Series
Performance Characteristics @ 10.0 0.01 VDC, 25 C AWM3200V (Note 2) Flow Press Nom. Tol. sccm H2O VDC VDC
60.0 53.0 46.0 38.0 30.0 23.0 16.0 8.0 0.0 2.00 1.75 1.50 1.25 1.00 0.75 0.50 0.25 0.00 5.00 4.59 4.16 3.70 3.25 2.65 2.15 1.55 1.00 0.15 0.15 0.16 0.20 0.22 0.22 0.19 0.11 0.08

AWM3150V Press Flow Nom. Tol. mBar sccm VDC VDC

2.50 1.70 0.84 0.42 0.34 0.26 0.17 0.08 0.00 30 20 10 5 4 3 2 1 0 3.75 2.90 1.95 1.50 1.40 1.30 1.20 1.10 1.00 0.70 0.45 0.20 0.10 0.08 0.08 0.07 0.06 0.05

AWM3300V Press. Flow Nom. Tol. mBar sccm VDC VDC

3.40 2.90 2.40 2.00 1.60 1.20 0.80 0.54 0.31 0.12 0.00 1000 900 800 700 600 500 400 300 200 100 0 5.00 4.90 4.80 4.66 4.42 4.18 3.82 3.41 2.96 2.30 1.00 0.15 0.16 0.17 0.18 0.19 0.20 0.21 0.19 0.17 0.14 0.10

Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement.

OUTPUT CURVES

Airflow

Honeywell Sensing and Control 1-800-537-6945 USA 1-815-235-6847 International 1-800-737-3360 Canada

73

Airflow Sensors Microbridge Mass Airflow/Amplified

AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 0.01 VDC, 25C)
Catalog Listings Flow Range (Full Scale) Differential Pressure Range Output Type Output @ Trim Point Null Output Null Shift +25 to 25C, +25 to +85C Output Shift +25 to 25C +25 to +85C Linearity Error External Output Load Response Time (Note 1) Repeatability & Hysteresis, Max. Excitation VDC Power Consumption (mW) Common Mode Pressure (psi) Calibration Gas Temperature Range Termination Weight (grams) Shock Rating 0 - 2 H2O (5 mBar) 4 - 20 mA DC (linear) 20.0 1 mA DC @ 2 H2O 4.00 0.3 mA DC 2 mA DC (max.) +24% Reading 31% Reading (Note 3) 5% Reading 100 - 300 (Note 4) 60 msec (max.) 0.50% Reading 10 0.01 Nitrogen 0 - 0.5 H2O (1.25 mBar) 4 - 20 mA DC (linear) 20.0 1 mA DC @ .05 H2O 4.00 0.4 mA DC 2 mA DC (max.) +32% Reading 32% Reading (Note 3) 5% Reading 100 - 300 (Note 4) 60 msec (max.) 0.50% Reading 100.01 50 AWM3200CR* AWM3201CR*

AWM3000 Series

AWM3303V 1000 sccm (1 SLPM) 1 - 5 VDC (Note 2) 5.00 0.150 VDC 3.00 0.050 VDC .050 VDC (max.) 5% Reading +5% Reading N/A N/A 3 msec (max.) 1% Reading 8-15 100 25

Operating: 25 to +85C (13 to +185F); Storage: 40 to +90C (40 to +194F) 2,54 mm (.100) centers, 0,635 mm (0.025) square 10.8 100 g peak (5 drops, 6 axes)

Notes: 1. Initial warm-up time for signal conditioned circuitry is 1 minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. 4. Output load connected from VOUT to GND (current sinking). 5. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec. * A 5 micron filter must be used on differential pressure sensors.

MOUNTING DIMENSIONS (for reference only)

Note: Positive flow direction is defined as proceeding from Port 1 (P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction.

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Honeywell Sensing and Control 1-800-537-6945 USA 1-815-235-6847 International 1-800-737-3360 Canada

Airflow Sensors Microbridge Mass Airflow/Amplified

OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) AWM3200CR (Note 2) Flow sccm
0 7 15 22 25 30 37 45 52 55 60

AWM3000 Series
Performance Characteristics @ 10.0 0.01 VDC, 25 C AWM3303V Press Flow Nom. Tol. mBar sccm VDC VDC
3.49 2.42 1.59 0.83 0.31 0.00 -0.31 -0.83 -1.59 -2.42 -3.44 1000 800 650 400 200 0 -200 -400 -600 -800 -1000 5.00 4.82 4.67 4.42 3.96 3.00 2.03 1.62 1.35 1.15 1.00 0.15 0.18 0.20 0.20 0.15 0.05 0.18 0.20 0.25 0.30 0.35

AWM3201CR (Note 2) Flow sccm

0 35 42 53 61 71 81 87 97 105 113

Press. Nom. Tol. H2O mA DC mA DC

0.00 0.25 0.50 0.75 0.81 1.00 1.25 1.50 1.75 1.83 2.00 4.00 5.75 7.70 9.75 10.21 12.00 13.90 16.00 18.00 18.50 20.00 0.3 0.3 0.4 0.4 0.5 0.6 0.7 0.8 0.8 0.9 1.0

Press. Nom. Tol. H2O mA DC mA DC

0.00 0.10 0.13 0.17 0.20 0.25 0.30 0.35 0.40 0.45 0.50 4.0 7.2 8.0 9.4 10.4 12.0 13.6 15.2 16.8 18.4 20.0 0.4 0.4 0.4 0.5 0.5 0.6 0.7 0.8 0.9 1.0 1.0

Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement.

OUTPUT CURVES

Airflow

Honeywell Sensing and Control 1-800-537-6945 USA 1-815-235-6847 International 1-800-737-3360 Canada

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