Specifications

Accelerating voltage Resolution (HV) Resolution (LV) Magnification Probe current Maximum sample diameter Maximum sample thickness Specimen stage 0.3 kV - 30 kV 3.0 nm (30 kV) 15.0 nm (1 kV) 4.0 nm (30 kV , BED) 5 ~ 300,000 1 pA ~ 1 uA or more 200 mm 100 mmh 5-axis eucentric X/Y/Z (mm) 125 / 100 / 80 T (degrees) -10 ~ + 90 R (degrees) 360

Example of layout
2,000

Vibration damping weight Electrical panel

Oil-sealed rotary pump Oil-sealed rotary pump

1,000

Keyboard Mouse
750 800

800 2,500 mm

InTouchScope is a registered trademark of JEOL Ltd. Specifications subject to change without notice.

Entrance 850 mm or more

M S J
n a Sc g n ni
Certain products in this brochure are controlled under the Foreign Exchange and Foreign Trade Law of Japan in compliance with international security export control. JEOL Ltd. must provide the Japanese Government with End-users Statement of Assurance and End-use Certificate in order to obtain the export license needed for export from Japan. If the product to be exported is in this category, the end user will be asked to fill in these certificate forms.

e l E

T I n o ctr

o r c i M

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e p o c s

http://www.jeol.com/
1-2 Musashino 3-chome Akishima Tokyo 196-8558 Japan Sales Division Telephone:+81-42-528-3381 Facsimile:+81-42-528-3386
AUSTRALIA & NEW ZEALAND/ JEOL(AUSTRALASIA) Pty.Ltd. Suite 1, L2 18 Aquatic Drive - Frenchs Forest NSW 2086 Australia BELGIUM/ JEOL (EUROPE) B.V. Planet II, Gebouw B Leuvensesteenweg 542, B-1930 Zaventem Belgium CANADA/ JEOL CANADA, INC. 3275 Premier Rue #8, St-Hubert, Quebec J3Y 8Y6, Canada CHINA/ JEOL(BEIJING) CO., LTD. Room B1010/1110, Wantong New World Plaza No. 2 Fuchengmenwai Street, Xicheng District, Beijing 100037, P.R.China EGYPT/ JEOL SERIVCE BUREAU 3rd Fl. Nile Center Bldg., Nawal Street, Dokki, (Cairo), Egypt FRANCE/ JEOL (EUROPE) SAS Espace Claude Monet, 1 Allee de Giverny 78290, Croissy-sur-Seine, France GERMANY/ JEOL (GERMANY) GmbH Oskar-Von-Miller-Strasse 1a, 85386 Eching, Germany GREAT BRITAIN & IRELAND/ JEOL (U.K.) LTD. JEOL House, Silver Court, Watchmead, Welwyn Garden City, Herts AL7 1LT, U.K. ITALY/ JEOL (ITALIA) S.p.A. Palazzo Pacinotti - Milano 3 City, Via Ludovico il Moro, 6/A 20080 Basiglio(MI) Italy KOREA/ JEOL KOREA LTD. Dongwoo Bldg. 7F, 1443, Yangjae Daero, Gangdong-Gu, Seoul, 134-010, Korea MALAYSIA/ JEOL(MALAYSIA) SDN.BHD. 508, Block A, Level 5, Kelana Business Center, 97, Jalan SS 7/2, Kelana Jaya, 47301 Petaling Jaya, Selangor, Malaysia MEXICO/ JEOL DE MEXICO S.A. DE C.V. Arkansas 11 Piso 2 Colonia Napoles Delegacion Benito Juarez, C.P. 03810 Mexico D.F., Mexico SCANDINAVIA/ SWEDEN JEOL (Skandinaviska)AB: Hammarbacken 6A, Box 716, 191 27 Sollentuna Sweden SINGAPORE/ 2 Corporation Road #01-12 Corporation Place Singapore 618494 TAIWAN/ JIE DONG CO., LTD. 7F, 112, Chung Hsiao East Road, Section 1, Taipei, Taiwan 10023 Republic of China THE NETHERLANDS/ JEOL (EUROPE) B.V. Lireweg 4, NL-2153 PH Nieuw-Vennep, The Netherlands USA/ JEOL USA, INC. 11 Dearborn Road, Peabody, MA 01960, U.S.A. Please confirm other territories by the web site.

No. 1501G356C Printed in Japan, Kp

Versatile
Large Chamber and Stage
Can accept large and heavy specimens, from 200mm diameter 80mm tall and up to 2kg.

Advanced Functions
Image Quality
Improved electron optics for higher image quality, faster imaging and analysis.
granite

Uncoated

Fully Automated 5 Axis Motor Stage

Mechanically eucentric, asynchronous, 5 axis (X, Y, Z, T, R) motor control stage. Computer eucentric tilt and rotation correction built in for tall specimens or when the ROI is not centered on the rotation axis.

Analytical Port Geometry

Multiple ports for a variety of accessories such as: EDS, EBSD and WDS. Co-planar EDS and EBSD geometry. Dual EDS detectors can be mounted at 180 for high throughput microanalysis.

New Vacuum System

New vacuum system for fast pump down after specimen exchange. Better signal in low vacuum mode.

Faster Stage Movement

Newly developed motorized stage enables faster positioning (1.5 times faster, compared to other JEOL products).

Sample Granite Accelerating(kV) : 1.5 magnification : 10,000

Less Charging
New scan mode inhibits charging artifacts with non-conductive samples.

1 m

Specimen Navigation
Fully automated, 5 axis motor stage speeds up search for region of interest (ROI). Quickly reach the ROI from a color image using the Stage Navigation System (Option).

Intuitive Operation

Low Vacuum Mode (LV)

Low vacuum pressure range from 10 to 650Pa extends the range of materials that can be readily observed.

Analysis
High Current mode, probe current up to 1A (20kV). Advanced Zoom Condenser Lens minimizes image and focus shift due to changes in probe current. Computer eucentric stage rotation allows for easy positioning of a specimen or ROI.

Uncoated 500 Pa

Erysiphaceae

50 Pa
In Touch Interface
Comfortable operation is achieved with a newly designed and developed graphical user interface (GUI), which is operate through the touch screen. The GUI size is adjustable so that the work area can be optimized while analysis or data processing is performed.

Multi-user/Multi-task
Multiple user login function for customized workspace and specimen condition settings.

Multi-language
Interchangeable English to Japanese GUI (select through Icon).

50 m
50 m
Sample : Erysiphaceae Accelerating(kV) : 25 magnification : 400

Sample : Erysiphaceae Accelerating(kV) : 25 magnification : 400