Sensors and Actuators A 180 (2012) 113119

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Sensors and Actuators A: Physical
j our nal homepage: www. el sevi er . com/ l ocat e/ sna
A square-type rotary ultrasonic motor with four driving feet
Yingxiang Liu

, Weishan Chen, Peilian Feng, Junkao Liu

State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, Heilongjiang Province, China
a r t i c l e i n f o
Article history:
Received 5 January 2012
Received in revised form17 April 2012
Accepted 17 April 2012
Available online 24 April 2012
Keywords:
Rotary ultrasonic motor
Square-type
Longitudinal vibration transducer
Circular movement
a b s t r a c t
This paper presents and veries a new idea for constructing rotary ultrasonic motor that may effectively
make use of the longitudinal vibrations of the bolt-clamped transducers. Based on the idea of generating
elliptical motion on the driving tip by superimposing longitudinal vibrations, a square-type rotary ultra-
sonic motor with four driving feet is proposed. This new motor consists of four longitudinal vibration
transducers, which are located in square-type and form an enclosed construction. The longitudinal vibra-
tions of the four transducers are superimposed to produce the same circular movements on the four feet,
which can push the rotor into motion when a preload is applied. By using FEM method, the proposed
motor is designed and analyzed, and circular trajectories on the driving feet are gained. The vibration
and input impedance characteristics of the motor are measured after the fabricating of a prototype, and
the test results are in good agreement with the FEM analysis results. Typical output of the prototype is
no-load speed of 71 r/min and maximum torque of 12.3 Nm at an exciting voltage of 200 V
rms
.
2012 Elsevier B.V. All rights reserved.
1. Introduction
Ultrasonic motors (USM) are based on the concept of driving the
rotor by a mechanical vibration excited on the stator via converse
piezoelectric effect. Their fundamental working principle consists
in generating a mechanical vibration in the stator able to create
an elliptical motion at the interface with the rotor. The rotor is in
contact with the stator, and the driving force is the frictional force
between the rotor and the stator. Ultrasonic motors exhibit merits
such as simple structure, large output force, high power density,
quick response, self-locking when power off, nonelectromagnetic
radiation and higher position accuracy [1,2].
According to the PZT operating mode, USMcan be classied into
bonded type motors [35] and bolt-clamped type motors [610]
up to the present. For the bonded type motors, elastic metal block
and PZT ceramic are bonded together with conductive adhesive
to form the stator, and d
31
operating mode of the PZT is adopted.
The classic ring type traveling wave USM[1113] is the most suc-
cessful one which has been commercially used in cases such as
camera auto-focus systems. However, as it is nding applications in
other elds, such as in robotic joints driving and actuation of space
mechanisms, its output ability is found to be relatively insufcient.
Firstly, the d
31
mode of the PZT has a lower electromechanical cou-
pling factor compared withthe d
33
mode. Furthermore, the bonded
type motors exhibit demerits of fragility of the PZT under strong

Corresponding author. Tel.: +86 451 86417891; fax: +86 451 86416119.
E-mail addresses: liuyingxiang868@hit.edu.cn (Y. Liu), cws@hit.edu.cn
(W. Chen), fpl hit@163.com(P. Feng), jkliu@hit.edu.cn (J. Liu).
extension stress, and fatigue of the adhesive layer caused by shear
stress especially under conditions of harsh temperature environ-
ment. All these drawbacks make it difcult to achieve large output
torque and high efciency for the bonded type motors.
To overcome the aforementioned demerits of the bonded type
motors, the bolt-clamped type motors is a good choice. The bolt-
clamped structure can apply strong preloading on the PZT ceramics
and avoid the fatigue of the adhesive layer, and then higher excit-
ing voltages can be applied to improve the output ability. The d
33
mode of the PZT adopted by these motors has a high electrome-
chanical coupling factor, which is helpful to improve the output
power and efciency. Kurosawa et al. proposed an innovative high
power and high speed linear USMusing two sandwich type vibra-
tors, and this motor was improved by many other researchers [14].
Yun et al. proposed a high power linear USM using a longitudinal
and bending hybrid bolt-clamped transducer, and their prototype
motor achieved the no-load velocity of 0.47m/s and the maximum
thrust force of 92N[15]. Iula et al. proposed a traveling wave rotary
motor using four high power Langevin transducers, their proto-
type motor exhibited a static torque of about 0.67Nm [16]. The
authors proposed and studied a cylindrical USM which used only
one sandwich type composite transducer, and the prototype motor
exhibited a no-load speed of 281r/min and a maximum torque of
1.2Nm[17]. Shi et al. developed a linear USMwith a wheel-shaped
stator, the no-load speed of the prototype was 0.374m/s and the
maximumthrust force was 13N[18]. All these initiative researches
soundly proved that the bolt-clamped motors had potentiality to
generate large thrust force or torque by virtues of that intensive
vibration could be excited by the clamped PZT elements and that
high efciency operating mode d
33
were preferentially utilized.
0924-4247/$ see front matter 2012 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.sna.2012.04.024
114 Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119
Fig. 1. Structure of the USM. (a) The section viewof the proposed USM. (b) The three-dimensional model.
In a previous work, the authors proposed a linear USM using
longitudinal vibration transducers with single foot [19]. Typical
output of the prototype is no-load speed of 1160mm/s and maxi-
mum thrust force of 20N. However, in this design, the longitudinal
vibrations of the end caps are left unused. It is a idling of the
vibrationenergyandmay result ina lower output power. The vibra-
tion energy idling problem is common for previous bolt-clamped
motors.
Considering the merits of bolt-clamped type USM and the
present energy idling problem, a square-type rotary USM with
four driving feet is proposed and fabricated in this study. This new
motor consists of four longitudinal transducers, and the longitudi-
nal vibrations of thetransducers areutilizedsufcientlytogenerate
circular movements at the four driving feet. The working principle
and design method are introduced. After fabricating the prototype,
the characteristics of the motor are investigated through experi-
ments.
2. Structure of the USM
Fig. 1(a) shows the section view of the proposed USM, Fig. 1(b)
shows the three-dimensional model andthe polarizationof the PZT
ceramics. The proposed motor contains four longitudinal trans-
ducers, which are located in square-type and form an enclosed
construction. Every transducer includes two exponential shape
horns located on each end. And the horns of adjacent transduc-
ers intersect at the tip ends where locate a driving foot. To each
transducer, two symmetrical slots are cut on the middle site, where
the PZT ceramics are set in. A wedge-caulking mechanism, consists
of wedging blocks, preloading blocks, screws and nuts, fastens the
PZT ceramics and the electrodes in the slot to formthe transducer.
Berylliumbronze sheets are clamped to serve as electrodes.
3. Working principle
Fig. 2 is the schematic diagram of working principle of the
proposedmotor. O-XYis the static coordinate system(OXis the hor-
izontal direction and OY is the vertical direction). Take A, B, C and
Dto indicate the center points of the four driving feet, respectively.
Fig. 2(b) gives the excitation modes of the proposed motor: sine
and cosine exciting voltages are applied; the d
33
operating mode
of the PZT is utilized to generate the longitudinal vibrations of the
transducers. Fig. 2(c) shows the vibration mode shape change of
the motor in one vibration cycle.
Fig. 2(c) shows that the vibration mode shape of the motor
changes as (1)(2)(3)(4); the longitudinal vibrations of adjacent
transducers are superimposed and generate circular movements
on the driving feet. The motion trajectories of the four driving feet
are the same clockwise circles, which ensure that the four feet can
drive the rotor simultaneously to realize a clockwise movement. By
exchanging the two exciting signals, the vibration mode shape of
the motor may change as (1)(4)(3)(2). Then, counter clockwise
circle motions are generatedonthe four drivingfeet andthe reverse
motion of the rotor can be realized. Different with previous USM
that utilized bolt-clamped longitudinal transducers, the proposed
square-type motor make full use of the longitudinal vibrations of
the four transducers to excite circular movements on the four feet
by means of an enclosed construction. The problem of vibration
energy idling is successfully avoided, whichis benecial to improve
the mechanical output power.
4. Design and analysis
Fig. 2(c) indicates that two natural vibration modes of the pro-
posed motor are involved for the generation of circular movements
on the driving feet. One vibration mode is excited by the longitudi-
nal vibrations of the two vertical transducers, corresponding with
the vibrationshapes of (1) and(3). The other mode is corresponding
withthe vibrationshapes of (2) and (4), whichcanbe excited by the
longitudinal vibrations of the two horizontal transducers. Since the
complicated structure of the motor, FEM was used to accomplish
the design and analysis work (ANSYS 9.0 produced by Ansys Inc.,
Canonsburg, PA).
In this design, the four transducers have the same structure to
ensure that the resonance frequencies of the two vibration modes
are uniform. Fig. 3 shows the nal structural parameters of the
motor (the wedge-caulking mechanismis simplied as a preload-
ing block, and the thickness of motor is 35mm). Duralumin alloy
(mass density =2810kg/m
3
, Young modulus E=7.210
10
N/m
2
,
Poisson ratio =0.33) is the selected material of the frame com-
posed of the horns. Steel (=7800kg/m
3
, E=2.0610
11
N/m
2
,
=0.3) is the selected material of the preloading blocks. The PZT
ceramics material is PZT-41 provided by Jingdezhen Tonghui Elec-
tronics Limited Company.
Firstly, the nite element model of the motor was founded.
Modal analysis was developed to extract the resonance frequencies
andvibrationmodes. During the modal analysis, SOLID227element
was used for the meshing, and the voltages applied on the nodes
of electrodes were set as zero. Block Lanczos method was adopted
to extract the vibration mode shapes and the corresponding res-
onance frequencies. Fig. 4 shows the two vibration modes of the
motor, and analysis results indicate that the resonance frequencies
of Mode-A and Mode-B are 24.122kHz.
In Fig. 4, Mode-A is the vibration mode excited by the longitudi-
nal vibrations of the vertical transducers, which causes the vertical
Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119 115
Fig. 2. Schematic diagramof working principle. (a) Motion trajectories of the driving feet. (b) Excitation modes. (c) Vibration mode shape change of the motor.
displacements of the driving feet. In Mode-A, there is 180

phase
difference on time between the longitudinal vibrations of the two
vertical transducers. Mode-B is the vibration mode excited by the
longitudinal vibrations of the horizontal transducers, which causes
the horizontal displacements of the driving feet. InMode-B, there is
also 180

phase difference on time between the longitudinal vibra-

tions of the two horizontal transducers. Thus, on each driving foot,
two orthogonal simple harmonic motions are superimposed and
result in circular movement. Fig. 4(a) indicates that coupling bend-
ing vibrations with three wave nodes are excited in the horizontal
Fig. 3. Structural parameters of the motor.
transducers; the same bending vibrations are also excited in the
vertical transducers, see Fig. 4(b). Thus, the actual vibrationmode of
the transducer inthe proposedmotor is longitudinal-bending com-
posite vibration, where the longitudinal vibration is generated by
the stretching vibrations of the PZT ceramics and the bending one
is caused by the coupling effect between the adjacent transducers.
The second work of the FEM analysis is to investigate the
electromechanical coupling factor of the two vibration modes by
harmonic analysis. It is well known that there are two stages in
energy conversion in an ultrasonic motor. The rst stage is to con-
vert electrical energy into a vibration of the stator, making the
surface points of the stator move elliptically. The second stage is
to convert the elliptical motion of the stator surface points into
macro spinning of the rotor through friction coupling. The elec-
tromechanical coupling factor can represent the energy transfer
efciency of the rst stage. It is an important characteristic that can
verifythereal feasibilityof theproposedmotor andagoodindicator
for the mechanical output performance. The series resonance fre-
quency f
s
and the parallel resonance frequency f
p
were gained by
the impedance characteristics of Mode-A and Mode-B, and anal-
ysis results indicated that they were 24.122kHz and 25.337kHz,
respectively. To give a comparison, the nite element model of a
single transducer was founded, and the f
s
and f
p
of its rst-order
longitudinal mode were obtained to be 24.307kHz and 26.250kHz,
respectively. Then, the electromechanical coupling factor k can be
calculated by the following equation:
k =

f
2
p
f
2
s
f
2
p
(1)
The electromechanical coupling factors of the proposed motor
and the single transducer are calculated to be 30.60% and 37.76%,
116 Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119
Fig. 4. Vibration modes of the motor. (a) Mode-A. (b) Mode-B.
respectively. The coupling effect between the adjacent transducers
makes the resonance frequencies of the proposedmotor lower than
the corresponding one of the transducer, and the same decrease
occurs on the electromechanical coupling factor.
The nal work of the FEManalysis is to verify the particle move-
ments on the driving feet by transient analysis. To accomplish this
work, sine and cosine exciting voltages with the resonance fre-
quency of the motor and effective value of 100V were applied on
the PZT ceramics. By running the transient analysis procedure, the
operating sequence shown in Fig. 2(c) was observed to be excited
in the motor. To gain the vibration characteristics of the motor, six
nodes were selected, as Fig. 5(a) shows. The vibrations of selected
nodes were extracted; Fig. 5(b) and (c) shows the motion trajecto-
ries of selected nodes in the last simulation period.
Fig. 5(b) presents that the motion trajectories of the particles
on the driving feet are the same circles, which veries the afore-
mentioned working principle of the proposed design, as Fig. 2
shows. Under the excitation conditions mentioned above, the par-
ticle vibration amplitude on the driving feet in horizontal and
vertical direction achieved 5.3m. Due to the bolt-clamped struc-
ture and the d
33
operating mode, the proposed motor may operate
Fig. 5. Motion trajectories of nodes on the motor. (a) Schematic diagram of nodes
selection. (b) Motion trajectories of nodes on the driving feet. (c) Motion trajectories
of nodes on the borders of the horn.
with intensive vibration by high voltage excitation, which would
improve the mechanical output ability. Fig. 5(c) indicates that the
motion trajectories of nodes on horns borders are oblique ellipses,
which also state that the vibration modes of the transducers in the
proposed motor are longitudinal-bending composite vibrations.
5. Experiments
To validate the feasibility of the proposed design, a prototype
motor was fabricated, see Fig. 6. The frame composed of all the
horns is one body that fabricated by using linear cutting machine.
The wedging blocks and the preloading blocks are also fabricated
by using linear cutting machine to ensure the uniformity.
A scanning laser Doppler vibrometer (PSV-400-M2, Polytec,
Germany) was employed to measure the vibration modes of the
motor. To illuminate the vibration mode of the transducers and the
resonance frequencies of Mode-A and Mode-B, the side surfaces
of transducer-2 and transducer-1 were taken as the test regions,
respectively. The vibration mode shapes and vibration velocity
average response spectrums under Mode-A and Mode-B excita-
tions are shown in Fig. 7.
In Fig. 7(a) and (c), the two driving feet locate at the two leading
ends of the test regions. The tested vibration mode shapes show
that the longitudinal vibrations of the twoparallel transducers have
a phase difference of 180

on time and bending vibrations with

three wave nodes are excited in the transducers. These vibration
Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119 117
Fig. 6. The prototype of the proposed motor.
Fig. 7. Vibration scanning results of the prototype. (a) Vibration mode shape of
transducer-2 under Mode-A excitation. (b) Vibration velocity response spectrum
under Mode-A excitation. (c) Vibration mode shape of transducer-1 under Mode-B
excitation. (d) Vibration velocity response spectrumunder Mode-B excitation.
Fig. 8. Impedance test results of the prototype.
mode shapes are ingoodagreement withthe modal analysis results
shown in Fig. 4.
The two vibration velocity average response spectrums, see
Fig. 7(b) and (d), state that there is no other natural vibration
mode from20kHz to 25kHz, which is very favorable for the oper-
ation stability of the motor. The resonance frequencies of Mode-A
and Mode-B are 23.070kHz and 23.141kHz, respectively, which
are different fromthe results obtained by the FEMmodal analysis
with discrepancies of 1.052kHz and 0.981kHz. The simplication
of the wedge-caulking mechanism to be a preloading block and
the neglect of the electrodes in the FEM model can result in these
differences. And another reason is the inaccuracy of the mate-
rials physical parameters assigned to the PZT elements. There
is 0.071kHz difference between the two resonance frequencies,
which is mainly caused by the machining error and the rigging
error.
To evaluate the energy conversion performance of the proto-
type, the electrical input impedance characteristics were measured
by using an impedance analyzer (4294A, Agilent Inc.). As shown
in Fig. 8, the series and parallel resonance frequencies of Mode-A
were tested to be 22.804kHz and 23.655kHz, while the two reso-
nance frequencies of Mode-B were measured to be 22.853kHz and
23.630kHz. The two series resonance frequencies are quite differ-
ent fromthe results obtained by the vibrometer with discrepancies
of 0.266kHz and 0.288kHz, respectively. These discrepancies, may
be caused by the different exciting conditions during the measure-
ments, are acceptable as they are about 1.2%of the testes resonance
frequencies. By Eq. (1), the electromechanical coupling factors of
the twomodes are calculatedtobe 26.58%and25.43%, respectively,
which have slight decreases compared with the harmonic analysis
results.
The output characteristics of the prototype under single foot
driving were tested rstly. Fig. 9 shows the schematic diagram
of the experiment set-up. The motor was set on the base by four
Fig. 9. The experiment set-up under single foot driving.
118 Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119
Fig. 10. Plot of the speed versus the exciting frequency.
grippers. The grip holes located at the centers of the transducers,
which had little impact on the vibrations of the motor. Acylindrical
type rotor with diameter of 80mm was in contact with one driving
foot, and the preload was applied and adjusted by springs. The
mechanical load was applied on the rotor by adding weights
through a string, and a rotary encoder was connected with the
rotor to gain the rotary speed.
During the measurement, sine and cosine exciting voltages with
effective value of 200V are applied on the PZT ceramics to excite
the corresponding modes. Fig. 10 is the plot of the speed versus
the frequency of exciting voltage (the output torque is zero and
the preload is 100N). The motor achieves a maximum speed of
181r/min when the exciting frequency is about 23.10kHz. Fig. 11
gives the plot of the speed versus the output torque under an excit-
ing frequency of 23.10kHz. The test results state that the prototype
motor reaches the maximumtorque of 1.3Nmby using one driving
foot.
Finally, the output characteristics of the prototype under four
feet driving were tested. Fig. 12 shows the schematic diagram of
the experiment set-up. A cylindrical type rotor is in contact with
the four feet simultaneously by its inner surface. In the fabrication
of the rotor, its inner radius is made slightly smaller than the outer
radius of the stator (98.5mm), and the deviation is used to provide
the preloads between the rotor and the four driving feet. Totally
two rotors with thickness of 2mmare fabricated, and here we can
call they rotor-1androtor-2, respectively. The inner radius of rotor-
1 is 98.38mm, and the deviation of 0.12mm is used to provide a
preload of about 100N. To rotor-2, in order to gain a preload of
about 300N, the inner radius is fabricated to be 98.14mm. Fig. 13
gives the plot of the speed versus the output torque under four feet
driving (exciting frequency 23.10kHz, effective value of exciting
voltage 200V).
The maximum speed under a preload of 100N and the maxi-
mum torque under a preloadof 300Nwhenthe four driving feet are
utilized simultaneously to drive cylindrical rotors are calculated to
be 73.5r/min and 12.8Nmrespectively based on the test results of
Fig. 11. Plot of the speed versus the output torque under different preloads.
Fig. 12. The experiment set-up under four feet driving.
Table 1
Comparison of the square-type motor and the motor with single foot.
Parameters Square-type motor Motor with single foot
Exciting frequency (kHz) 23.10 25.32
Quantity of PZT (mm
3
) 67,200 39,670
Weight (kg) 2.07 1.28
Maximumspeed 71r/min (732mm/s) 1160mm/s
Maximumforce or torque 12.3Nm(125N) 20N
Maximumpower (W) 19.4 6.14
single foot experiment shown in Fig. 11. But, Fig. 13 states that the
maximumspeedandtorqueare71r/minand12.3Nm, respectively.
Here we can give two explanations to these discrepancies in out-
put speed and torque. Firstly, the output performances of the four
feet are not identical. During the single foot driving experiments,
the mechanical output speed and torque of the four driving feet are
measured one by one; results show that they have minute differ-
ences. These differences can cause the decreases of the maximum
speed and torque. Secondly, in the four feet driving experiments,
the deviations between the inner radius of the rotors and the outer
radius of the stator are used to provide the preloads. The machin-
ing errors of the rotors may cause the preloads deviate from the
expected values.
In order to show the merits of this new design, a comparison
between the square-type rotary USM and the linear motor with
single foot [19] is given in Table 1, and the equivalent linear
speed and thrust force of the square-type motor is calculated and
listed. The square-type motor achieved a lower maximum speed,
which is caused by the smaller resonance frequency and the lower
vibration amplitude of the driving feet. But, compared with the
motor with single foot, the square-type motor has achieved a 316%
Fig. 13. Plot of the speed versus the output torque under different preloads under
four feet driving.
Y. Liu et al. / Sensors and Actuators A 180 (2012) 113119 119
output power and a 625% thrust force under the same amplitude
of the exciting voltage. The increasing of the preload from 200N
to 300N is one reason that results in these improvements. A more
important factor is that the enclosed construction adopted by the
proposed design makes the longitudinal vibration energy of the
four transducers are utilized sufciently to form circular move-
ments on the four feet. Therefore, more vibration energy can enter
into the friction coupling process between the driving feet and the
rotor and nally result in the increasing of the mechanical output.
6. Conclusion
Asquare-typerotaryUSMwithfour drivingfeet was proposedin
this study. In this newdesign, four longitudinal transducers located
in square-type are adopted to form an enclosed construction. The
wedge-caulking mechanisms are adopted to fasten the PZT ceram-
ics in the slots of the transducers. By superimposing longitudinal
vibrations of the four transducers, the same circular movements
are generated on the four driving feet, which can achieve the rotary
driving. Both the modal and transient analysis results state that the
actual vibration mode of the transducer in the proposed motor is
longitudinal-bending composite vibration, where the bending one
is caused by the coupling effect between the adjacent transducers.
Harmonic analysis results indicate that the proposed motor has a
lower electromechanical couplingfactor thanthesingletransducer.
After the fabricating of a prototype, the vibration and electrical
input impedance characteristics are tested, and the gained results
are in good agreement with the FEManalysis ones. Typical output
of the prototype is no-load speed of 71r/min and maximumtorque
of 12.3Nm.
The square-type rotary motor achieves obvious improvements
on the output force and power, which veries the merits of the
enclosed construction in bringing more vibration energy into the
frictional couplingprocess. Thereis novibrationenergyidlingprob-
lems came fromthe longitudinal vibration of end caps anymore. It
should be noted that the rotor is directly in contact with the driv-
ing foot and no friction material is adopted between the interfaces,
which means that higher output performance may be attained by
matching appropriate frictionmaterial. Furthermore, the miniatur-
ization of the prototype is also the focus of the following study.
Acknowledgments
This project is supported by the National Natural Science Foun-
dationof China (No. 51105097andNo. 50875057) andthe Research
Fund for the Doctoral Program of Higher Education of China (No.
20102302110007).
References
[1] S. Ueha, Ultrasonic Motors Theory and Applications, Clarendon Press, Oxford,
1993, pp. 120.
[2] C.S. Zhao, Ultrasonic Motors Technologies and Applications, Science Press, Bei-
jing, 2010, pp. 110.
[3] Y. Ting, L.C. Chen, C.C. Li, J.L. Huang, Traveling-wave piezoelectric linear motor
part I: the stator design, IEEE Transactions on Ultrasonics, Ferroelectrics, and
Frequency Control 54 (2007) 847853.
[4] W.H. Lee, C.Y. Kang, D.S. Paik, B.K. Ju, S.J. Yoon, Buttery-shapedultraslimpiezo-
electric ultrasonic linear motor, Sensors and Actuators A 168 (2011) 127130.
[5] S.Y. He, P.R. Chiarot, S. Park, Asingle vibrationmode tubular piezoelectric ultra-
sonic motor, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency
Control 58 (2011) 10491061.
[6] L. Petit, P. Gonnard, Amultilayer TWILAultrasonic motor, Sensors andActuators
A 149 (2009) 113119.
[7] R. Carotenuto, G. Caliano, A. Iula, M. Pappalardo, Langevin exural piezoelectric
motor basedonstator precessional motion, Sensors andActuators A113(2004)
189197.
[8] W.S. Chen, Y.X. Liu, J.K. Liu, S.J. Shi, A linear ultrasonic motor using bend-
ing vibration transducer with double driving feet, Ferroelectronics 400 (2010)
221230.
[9] J.T. Zhang, H. Zhu, C.S. Zhao, Combined nite element analysis and subprob-
lem approximation method for the design of ultrasonic motors, Sensors and
Actuators A 163 (2010) 510515.
[10] A. Iula, M. Pappalardo, A high-power traveling wave ultrasonic motor, IEEE
Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 53 (2006)
13441351.
[11] X. Li, W.S. Chen, T. Xie, J.K. Liu, Novel high torque bearingless two-sided
rotary ultrasonic motor, Journal of Zhejiang University: Science A 8 (2007)
786792.
[12] Y. Chen, Q.L. Lin, T.Y. Zhou, A traveling wave ultrasonic motor of high torque,
Ultrasonics 44 (2006) 581584.
[13] J.H. Oh, H.E. Jung, J.S. Lee, K.J. Lim, H.H. Kim, B.H. Ryu, D.H. Park, Design and
performance of high torque ultrasonic motor for application of automobile,
Journal of Electroceramics 22 (2009) 150155.
[14] M.K. Kurosawa, O. Kodaira, Y. Tsuchitoi, T. Higuchi, Transducer for high speed
and largethrust ultrasonic linear motor usingtwosandwichtypevibrators, IEEE
Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45 (1998)
11881195.
[15] C.H. Yun, T. Ishii, K. Nakamura, S. Ueha, K. Akashi, A high power ultra-
sonic linear motor using a longitudinal and bending hybrid bolt-clamped
Langevin type transducer, Japanese Journal of Applied Physics 40 (2001)
37733776.
[16] A. Iula, A. Corbo, M. Pappalardo, FE analysis and experimental evaluation of the
performance of a travelling wave rotary motor driven by high power ultrasonic
transducers, Sensors and Actuators A: Physical 160 (2010) 94100.
[17] Y.X. Liu, W.S. Chen, J.K. Liu, S.J. Shi, Acylindrical traveling wave ultrasonic motor
using longitudinal and bending composite transducer, Sensors and Actuators
A 161 (2010) 158163.
[18] Y.L. Shi, C.S. Zhao, W.Q. Huang, Linear ultrasonic motor with wheel-shaped
stator, Sensors and Actuators A 161 (2010) 205209.
[19] Y.X. Liu, J.K. Liu, W.S. Chen, S.J. Shi, A high-power linear ultrasonic motor using
longitudinal vibration transducers with single foot, IEEE Transactions on Ultra-
sonics, Ferroelectrics, and Frequency Control 57 (2010) 18601867.
Biographies
Yingxiang Liu was born in Hebei province, China, in 1982. He received his B.S., M.S.
and Ph.D. degrees from the School of Mechatronics Engineering, Harbin Institute
of Technology, China, in 2005, 2007, and 2011, respectively. He is currently a lec-
turer in the Harbin Institute of Technology, China. His research interests include
piezoelectric motor, robot sh, etc.
Weishan Chen was born in Hebei province, China, in 1965. He received the B.S. and
the M.S. degrees in precision instrumentation engineering, and the Ph.D. degree
in mechatronics engineering from Harbin Institute of Technology, China, in 1986,
1989, and 1997, respectively. From1999, he is a professor of the School of Mecha-
tronics Engineering, Harbin Institute of Technology. His research interests include
ultrasonic driving and controlling, smart materials and structures, bio-robotics, etc.
Peilian Feng was born in Shanxi province, China, in 1983. She received her B.S.
and M.S. degrees from Harbin Institute of Technology, China, in 2005 and 2007,
respectively. From 2007 to 2011, she was a patent examiner of State Intellectual
Property Ofce of the Peoples Republic of China. She is currently an educational
secretary inthe HarbinInstitute of Technology, China. Her researchinterests include
piezoelectric motor, etc.
JunkaoLiuwas borninHebei province, China, in1973. He receivedhis B.S. andPh.D.
degrees fromthe School of Mechatronics Engineering, Harbin Institute of Technol-
ogy, China, in 1995 and 2001, respectively. From2011, he is a professor of the School
of Mechatronics Engineering, Harbin Institute of Technology. His research inter-
ests include ultrasonic driving, biomimetic robots and simulation of multi-degree
of freedomparallel mechanism, etc.