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SAFETY AND

INSTALLATION
Mask Aligners
MA6-MA8
Laboratory Mask Aligner
Rev04/ 04-08
www.suss.com
CONTENTS
INST-SAFETY MA6-MA8 Rev04 04-08 Contents I
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CONTENTS
Contents ......................................................................................................................I
1. Warnings and Safety Precautions ......................................................................1
1.1. General Safety Information .............................................................................1
1.1.1. User Requirements ................................................................................1
1.1.2. Definition of Qualified Personnel ............................................................2
1.1.3. Tasks to be Performed by Personnel
and related Training Requirements.......................................................2
1.2. Recommended Safety Equipment ...................................................................3
1.3. Safety-Related Terms and Symbols ................................................................4
1.4. Intended Use of the Laboratory Mask Aligner .................................................5
1.5. Transport and Installation ................................................................................6
1.6. Maintenance and Service ................................................................................6
1.7. Safety Hazards Inherent to the Machine..........................................................7
1.7.1. Electrical Hazards ..................................................................................7
1.7.2. Mechanical Hazards...............................................................................8
1.7.3. Thermal Hazards....................................................................................9
1.7.4. Noise Emission Hazard..........................................................................9
1.7.5. Radiation Hazards..................................................................................9
1.7.6. Chemical Hazards................................................................................10
1.7.7. Increased Hazard after Extraordinary Events ......................................12
1.8. Safety Systems and Procedures....................................................................13
1.8.1. Interlocks..............................................................................................13
1.8.2. Emergency OFF (EMO) .......................................................................17
1.8.3. Location of Potential Hazards in the Machine......................................17
1.8.4. Hazard Alerts .......................................................................................20
1.8.5. Lockout/Tagout Procedures.................................................................21
1.8.6. Resource Conservation........................................................................23
1.9. Warranty and Void of Warranty......................................................................24
1.10. Working with the Mask Aligner.....................................................................24
1.10.1. General Description ...........................................................................24
1.10.2. Replacement of the Exposure Lamp..................................................24
1.10.3. N2-Control Unit ..................................................................................25
1.10.4. Operating Procedures........................................................................25
CONTENTS
II INST-SAFETY MA6-MA8 Rev04 04-08 Contents
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2. Installation of the MA6-MA8 ..............................................................................27
2.1. General Requirements .................................................................................. 27
2.1.1. Preparation of the Installation Site .......................................................27
2.1.2. Receiving..............................................................................................27
2.1.3. Transport of the Machine Crates..........................................................27
2.1.4. Storage of the Machine Crates.............................................................28
2.1.5. Disposal of Packaging Materials ..........................................................28
2.1.6. Transport Without Pallet .......................................................................28
2.1.7. Decommissioning.................................................................................30
2.2. Warranty and Limitations ...............................................................................31
2.3. Utilities ...........................................................................................................31
2.3.1. Environmental Requirements ...............................................................32
2.3.2. Weight of the MA6/MA8 .......................................................................33
2.3.3. Dimensions...........................................................................................34
2.3.4. Earthquake Tie-Down Layout ...............................................................38
2.3.5. Pneumatic Connectors .........................................................................39
2.3.6. Lamp Cooling .......................................................................................40
2.4. Mode Set-Up: MaskAligner or BondAligner ...................................................43
WARNINGS AND SAFETY PRECAUTIONS
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1. WARNINGS AND SAFETY PRECAUTIONS
1.1. General Safety Information
IMPORTANT: This section contains information
that the operator must know and understand in order
to minimize the risk of injuries.
This section describes general safety precautions
and procedures which must be observed and fol-
lowed by all persons working with the equipment
covered by this manual. After a thorough review by
qualified safety personnel, the user should generate
specific safety procedures with regard to particular
application and configuration of the equipment and
local codes. Operators must be thoroughly familiar
with these procedures which should also be posted
in an accessible location so that all equipment oper-
ators are exposed to the information on a continuing
basis.
In addition to the specific safety precautions detailed
in this section, anyone working with or in close prox-
imity to the equipment described in this manual
should observe normal precautions and safe operat-
ing practices generally applicable to the operation of
semiconductor production and processing equip-
ment.
1.1.1. User Requirements
The management responsible for the safety of the
installed equipment must ensure the following:
Only qualified and adequately trained personnel
is permitted to carry out work on or with the sys-
tem.
These persons are able to consult the instruc-
tions supplied with the system and other product
documentation at any time and they follow the in-
structions in this documentation consistently.
Non-qualified personnel do not carry out any
work on or in the vicinity of the system.
The user must install adequate safety proce-
dures to guarantee that only specifically trained
personnell gat access to situations presenting in-
creased hazards or requiring specific knowledge
- for example firm rules- to avoid that the key for
getting access to Teach-/Service Mode will be
available for others.
The user must provide all personnel having con-
tact with or working in the proximity to the equip-
ment with all safety information contained in each
of the equipment manuals, and ensure that they
have been properly trained in the safety require-
ments of the system as well as trained in the use
of required Personal Protective Equipment.
The user must ensure that all personnel working
with the equipment have been properly trained in
its operation, and that all personnel follow at all
times all applicable operating instructions and/or
procedures contained in this manual.
The user must adhere to all safety information
provided in this manual and all other applicable
safety and site preparation information supplied
or referred to by SUSS MicroTec Lithography
GmbH.
The user must provide applicable safety informa-
tion on all materials processed by the machine, if
such material is rated as being toxic, carcinogen-
ic or irritating - especially Material Safety Data
Sheets (MSDS).
The user must not remove, modify, obscure, or in
any other way alter the content or readability of
any safety labels or placards located on or inside
the equipment.
The user must not install additional labels or plac-
ards or make any other additions or modifications
that have the effect of drawing attention away
from, or reducing the effectiveness of, any safety
labels or placards installed by SUSS MicroTec Li-
thography GmbH.
The user must not take action on the system oth-
er than described in the manual!
The user must not change or modify the system
without the prior written permission of the manu-
facturer.
WARNINGS AND SAFETY PRECAUTIONS
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The User must replace defect system compo-
nents.
The User must use only original spare and wear
parts.
Operators must not run the system with removed
covers or defeated interlocks.
1.1.2. Definition of Qualified Per-
sonnel
Caution!
The instructions contained in this man-
ual are for qualified personnel only. Do
not attempt to run the machine unless
you are entitled to do so.
Qualified personnel are persons, who on account of
the training and instruction they have received and
their experience and knowledge of relevant stan-
dards, specifications, accident prevention regula-
tions and operating conditions, have been
authorized by those responsible for the safety of the
system to carry out any necessary work and who are
able to recognize possible dangers.
All system users are advised to become familiar with
the contents of these safety instructions prior to op-
erating the system. They also should have read and
understood the operating instructions. In addition,
always comply with local health and safety regula-
tions and company safety requirements regarding
safe usage of equipment.
Knowledge of the first aid and the local rescue facil-
ities is also required.
1.1.3. Tasks to be Performed by
Personnel and related
Training Requirements
1.1.3.1. Operating the MA6-MA8
This requires:
knowledge of how to handle process material
safely.
knowledge of the microscope alignment process
in the machine and of the EISS sub-system use.
understanding the exposure process
and understanding the presentation of the pro-
cess status in the User Interface.
1.1.3.2. Start-up, Shut-down and
Configure the MA6-MA8
This requires (in addition):
knowledge of how to start the machine and the
UV lamp.
knowledge of how to select and start alignment
and exposure programs.
knowledge of how to handle photo-masks safely
during loading and unloading
and understanding how to identify potential prob-
lems with the machine.
knowledge of how to use the MA6-MA8 EISS
sub-system for configuration and programming
Understanding the parameters to be pro-
grammed and the inherent risk of damage to ma-
terial or equipment caused by a wrong process.
1.1.3.3. Perform Light Measurement and
Adjustment
This requires:
knowledge of how to use the SUSS light mea-
surement probes
practice of preparing measurement protocols
understanding the potential hazard originating
form UV-radiation.
knowledge of how to adjust lamp power at the
CIC
knowledge of how to adjust light uniformity using
the lamp positions adjustment - and in complex
situations also the lens positions.
1.1.3.4. Perform Safety Checks on the
MA6-MA8
This requires:
understanding the hazards caused by UV-radia-
tion, by a hot UV-lamp, by mechanical move-
ments and by electrically energized parts- also
the understanding of how to avoid all these haz-
ards.
understanding how all interlock and safety func-
tions of the machine are working.
knowledge of how to check the safety on the ma-
chine and how to defeat and reinstall interlocks.
pactice in filling of safety check reports.
WARNINGS AND SAFETY PRECAUTIONS
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1.1.3.5. Exchange of UV-Lamp
This requires:
special training for exchanging the exposure
lamp:
i.e. handling of the lamp, performing electrical
connections to the lamp, checking and adjusting
lamp positions,checking of lamp cooling, ability
to identify degraded mirrors.
1.1.3.6. Perform General Trouble Shoot-
ing and Maintenance
This requires:
special training for Maintenance Access Points
understanding machine states and processes
experience in using the service program (Ser-
viceGUI)
knowledge in handling of cleaning agents- in-
cluding flammable liquids - and grease
detailed knowledge of mechanical machine com-
ponents
1.1.3.7. Perform Service Tasks
This requires:
special training for dedicated service by a SUSS
MicroTech Lithography trainer.
1.2. Recommended Safety
Equipment
At a minimum, it is recommended that the user sup-
plies the following personal safety protective equip-
ment (PPE) and make it readily available at the
machine installation site:
Optical Safety Glasses filtering UV-radiation (ac-
cording to EN170) for extended working at the
exposure area (i.e. during light measurement) or
near the uncovered light beam (i.e. lens adjust-
ment). SUSS recommends part# 185245.
Face Shield or Mechanical Safety Goggles (ac-
cording to EN166) during the handling (ex-
change) of an UV-lamp, or when fragments of
substrates must be handled.
Chemically Resistant Clean Room Gloves and
Lab Coat and Apron, for handling poisonous sub-
strates, wafer fragments or cleaning agents.
Optional special safety equipment, if recom-
mended by an MSDS or the material supplier, for
handling of custom specific materials having a
potential impact on operators health.
Note:
Always read the instruction sheet for the respec-
tive safety device and follow suppliers instruc-
tions!
WARNINGS AND SAFETY PRECAUTIONS
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1.3. Safety-Related Terms and
Symbols
The terms DANGER, WARNING, CAUTION and
NOTE are used in these instructions and at warning
labels on the machine to point out particular dangers
or unusual information to which special attention
must be paid.
Danger!
indicates an imminently hazardous situation
which, if not avoided, could result in death or se-
rious personal injury;
Warning!
indicates a potentially hazardous situation
which, if not avoided, could result in death or se-
rious personal injury; - substantial damage to
property could also result if proper precautions
are not taken.
Caution!
indicates that personal injury or damage to prop-
erty can result if proper precautions are not tak-
en.
Note!
draws attention to special technical product informa-
tion which may not be immediately obvious even to
qualified personnel.
The following ISO 3864 symbols are used in the
manual and at the machine to alert to specific haz-
ardous situations
Electric Shock Hazard Warning
Crush or Pinch Point Warning
Intensive Light + Potential Eye
Damage Warning
with UV insert: Invisible Ultraviolett
Light
without insert: Invisible Infrared Light
and/or visible Light
Laser Beam Warning
Hot Surface Warning
Displosion Warning
General Warning Symbol (always
with Explanation)
Wear Appropriate Safety Goggles -
Action Symbol
Wear Face Shield Action Symbol
Wear Gloves or Gauntlets Action
Symbol
Read Instruction Symbol
WARNINGS AND SAFETY PRECAUTIONS
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The transport, assembly, operating and mainte-
nance instructions and other technical data (in the
instructions, product documentation and on the
product itself) which is not specially emphasized as
described above must also be observed in order to
avoid faults which may, in turn, directly or indirectly
result in severe personal injury or damage to
property.
1.4. Intended Use of the
Laboratory Mask Aligner
The system described in this manual has been man-
ufactured according to the technical standards, safe-
ty regulations and EC guidelines.
If not installed properly or not used as directed, dan-
gerous situations or damage might occur.
The mask aligner is designed as a photo-lithograph-
ic system for 1:1 direct projection of structures from
a photo mask to photo-sensitive coated substrates,
which have been adjusted to the mask. As light
source a closed UV-source is used together with
adapted exposure optics.
Integrated components - like the lamp power supply
- are designed strictly with the specific use in mind.
Any other use of the machine than as a photo-litho-
graphic system or of its components is not intended
by design!
Note:
After manual reconfiguration of the mirror house
position and of the alignment stage adapter fol-
lowed by a restart, the machine can be used as a
bond aligner (substrate-to-substrate aligner)
without the exposure
Danger!
Owing to its functional characteristics,
equipment of this type may cause seri-
ous personal injury or material damage
if it is not used or operated in the cor-
rect manner, is not sufficiently main-
tained or if unqualified personnel have
access to it.
If, in special cases, the systems are to be used for
applications where requirements may be more strin-
gent, compliance with such requirements must be
assured during installation by the provision of addi-
tional protective measures on site.
Any uncertainties regarding this, especially if de-
tailed product-specific information is not available,
must be clarified with the appropriate Suss MicroTec
Lithography service centre. The system type and se-
rial number must be quoted when making inquiries.
You are advised to make use of the support and ser-
vices offered by the competent SUSS MicroTec
Lithography service centre with regard to planning,
installation, commissioning and servicing.
See the last page of manuals (resp. last cover page
of printed folders) for a list of SUSS units and repre-
sentatives wordwide - valid at the time of manual
publication.
For the latest contact list go to www.suss.com !
Warning!
Only use accessories authorized by
Suss MicroTec Lithography GmbH in
order to avoid fire or other damages to
the system. Accessories authorized by
Suss MicroTec Lithography GmbH are
compatible with the system.
Any unauthorized changes or modifications to the
system or use of incompatible accessories would
void all warranties. Please consult SUSS MicroTec
Lithography GmbH before implementation of any
change or modification.
When working with hazardous process materials the
local laws, regulations, codes and Material Safety
Data Sheets (MSDS) regarding these materials
have to be considered and observed.
Always make sure that all covers are in place and
closed before the machine is switched on.
WARNINGS AND SAFETY PRECAUTIONS
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1.5. Transport and Installation
Warning!
It is assumed that all basic planning
work concerning installation and all
work regarding transport, assembly,
commissioning, maintenance and re-
pair will be carried out by qualified per-
sonnel and/ or monitored by
responsible, skilled personnel.
Particular attention must be paid to the following:
technical data and information concerning per-
mitted use (assembly, connection, supply and
exhaust adjustments, ambient and operating
conditions) specified in the brochure, order docu-
ments, manuals, instructions and other product
documentation.
the general installation and safety regulations,
the proper use of tools and transportation devic-
es,
the local requirements and
system-specific specifications.
the obligation of those responsible for the instal-
lation to provide employees with suitable safety
instruction in accordance with local accident pre-
vention regulations.
The product documentation contains instructions
which must be followed by qualified personnel in sit-
uations in which the equipment is used for its intend-
ed purpose.
The transport, assembly, operating and mainte-
nance instructions and other technical data (in the
instructions, product documentation and on the
product itself) which is not specially emphasized as
described above must also be observed in order to
avoid faults which may, in turn, directly or indirectly
result in severe personal injury or damage to proper-
ty.
See particularly Chapter 2. Installation and also the
installation instructions of optional components and/
or OEM subassemblies (i.e. CIC Lamp Power Sup-
ply and eventual special equipment)
For safe environmental conditions see section Envi-
ronmental Requirements below.
1.6. Maintenance and Service
Specific maintenance and service related safety in-
structions are defined within a special maintenance
section of the user manual.
Warning!
Only qualified and equipment specific
trained personnel are allowed to run
the equipment in service mode be-
cause incorrect machine handling
could result in serious damage to the
machine and in personnel suffering in-
juries. Under no circumstances should
users with only operator or manager
authorization operate the machine in
this mode or perform service tasks.
Warning!
Only use accessories, spare parts and
consumables authorized by SUSS Mi-
croTec in order to avoid personal injury
or damage to the machine. Authorized
parts are compatible with the system. If
incompatible parts are used, the sys-
tem may become severely damaged.
At regular intervals check all supply lines and fittings
to prevent loose fittings and leakage. Also perform
maintenance tasks as described in the Preventive
Maintenance Manual of the machine.
When Service tasks are completed and the machine
should be set to operation mode, make sure that all
covers are in place, interlocks are activated before
the system is switched on again.
Warning!
With only operator authorization do not
run the machine if it is still in service
mode. Call for maintenance/ service
technician to complete his task and to
set back the machine into automated
operation mode.
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 7
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1.7. Safety Hazards Inherent
to the Machine
This section describes specific safety hazards or po-
tential hazards which may be associated with the
use of this equipment, the possible consequences of
human interaction with the hazard and the meth-
od(s) for avoiding the hazard.
Hazards described in this section are:
Electrical Hazards by potentially lethal voltages
or by energy high enough to ignite fire.
Mechanical Hazards by rotating and moving ma-
chinery parts or by disploding UV-lamp bulbs
Thermal Hazards by hot surfaces or hot internal
parts
Noise Emission Hazards
Chemical Hazards by specific materials or
agents (Contamination, spill, ...)
Non-Ionizing Radiation Hazards
1.7.1. Electrical Hazards
Protection against electrical hazards is provided in
general by closed, grounded cabinets for the electri-
cal devices using dangerous voltages.
Those are the central section of the machine, power
supplies for UV-lamps, electronics and computer.
Dangerous voltage is also present in the lamp
house.
All boxes are marked with the electrical hazard label.
Warning - Hazardous Voltage!
When the covers or connectors are re-
moved from any component of the ma-
chine, hazardous voltages may be
exposed.
Hazardous voltages can cause severe
injury or death. Never remove the rear
or side panels of the modules or any
other equipment housing, cover or
shroud while the power line is connect-
ed.
Warning!
For maintenance works - at first always
try to work at a fully de-energized elec-
trical coldequipment.
Follow the Lockout/Tagout procedures
described in the machine documenta-
tion or by your in-house instructions.
Energized Electrical Work - Voltage Types
(SEMI S2-0302, Sect. 11)
TYPE 1 Equipment is fully de-energized (electri-
cal cold)
TYPE 2 Equipment is energized. Energized cir-
cuits are covered or insulated. Work is
performed at a remote location to pre-
clude accidental shock.
TYPE 3 Equipment is energized. Energized cir-
cuits are exposed and accidental contact
is possible. Potential exposures are less
than 30 volts rms. 42,4 volts peak, 240
volt-amps and 20 joules.
TYPE 4 Equipment is energized. Energized cir-
cuits are exposed and accidental contact
is possible.
Voltage potentials are greater than 30
Volts rms, 42,4 Volts peak, 240 Volts-
amps. 20 Joules or radio frequency (rf) is
present.
It should never be necessary for the operator to
open the cover of an electrical portion of this ma-
chine. If any electrical problem occurs, turn the ma-
chine off and notify a supervisor or maintenance
staff immediately.
If working at a fully de-energized equipment is not
possible, only specifically trained technicians are au-
thorized to service the electrical system of an ener-
gized electrical hotequipment - When performing
so, always observe and obey your safety in-house
instructions.
Important!
In case of danger for a person servicing
electrical hotequipment actuate the
Emergency Off Button (EMO) immedi-
ately!
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Danger - High Voltage!
The machine operates under high volt-
age!
Voltage may be still present in supply
sub systems when the machine is
switched off, but still connected to the
mains power supply.
All power to the system must be com-
pletely disconnected before servicing
electrical systems to prevent the risk of
electrical shock.
Prior to opening system disconnect system from
mains power supply completely (main switch in OFF
position).
Maintenance, adjustment etc. on the electrical sys-
tem must be performed by specifically qualified per-
sonnel with the corresponding access permission
only. Electrical drawings must be available during
such work and must be fully understood by the ser-
vice technician.
In case of any fuse replacement use fuses only of
the same type and with the same load as the re-
placed fuse. Never use auxiliary fuses or short cir-
cuit the fuse block.
When removing internal components (capacitors,
motor regulators) from the equipment observe the
warning labels (on them or in the schematics) and
make sure that the respective device has been dis-
charged.
Do not remove or cut off any ground wire of the sys-
tem or the power supply.
1.7.2. Mechanical Hazards
1.7.2.1. Moving Parts
Improper operation of the machine may result in se-
rious injury from moving actuators such as align-
ment stage, mirror house or displacement of the
microscope. Such positions are marked by a nearby
crush warning symbol (if attachable)
Warning!
Your fingers could be jammed or body
parts could be hurt by a machine part
in action.
Do not take any action during opera-
tion of the machine to remove any ob-
structing element until a stop
command is sent to the active actuator.
1.7.2.2. Pressurized Lamps
Improper handling of an UV lamp may result in injury
from fragments of the exploding pressurized lamp.
Lamps must be protected from mechanical impacts
during all handling, i.e. during lamp exchange. A hot
lamp has high inside gas pressure - extreme tem-
perature shock to a hot lamp could cause also explo-
sion. This could happen by premature opening of the
lamp house.
Warning!
Fragments of an exploding UV lamp
could severely injure eyes or other
body parts.
An UV lamp not enclosed in the original
manufacturers box must be handled
only with gloves and protected by a
face shield or by mechanical safety
goggles!
High power lamps (2 kW and more) are
pressurized also when cold. They must
be handled with special care and only
when protected by a face shield and
chest protector (see section Safety
Equipment above).
Always follow also the instructions ( in-
side the original transport box) given
by the lamp manufacturer
Premature opening of the hot lamp
house may result in lamp explosion.
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SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 9
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Lamp explosion also results in release
of mercury - liquid when cold and va-
porized when hot. For further details
see section Chemical Hazards below.
After lamp explosion immediate decon-
tamination is mandatory, because mer-
cury represents a potential serious
threat to health and pollutes the envi-
ronment (see also section Chemical
Hazards).
1.7.2.3. Compressed Gases
The machine uses compressed air for many func-
tions and for vibration damping. Compresed air has
the potential of harming people if abused or in cause
of a fierce leak. Do not lacerate pneumatic tubes or
disconnect a pressurized tube!
Always make sure that the gas supplies (CDA and
Nitrogen) are switched off prior to work at the pneu-
matic system.
1.7.3. Thermal Hazards
Thermal hazards will result from premature contact
with heated portions of the equipment and may arise
by premature opening of the lamp house door. The
UV lamp bulb and sockets are extremely hot when
ON. After switching off the lamp the interior of the
lamp house needs further cooling.
During normal operation the upper exhaust duct of
the lamp house on back of the machine can attain
the temperature of about 70C. Do not touch!
The lamp house is labeled by a hot surface symbol.
Halogen lamps for microscope illumination will be
also very hot when switched ON - Do not touch.
Before changing halogen lamps, wait some minutes
to cool down.
Warning!
Before opening the door of the lamp
house allow the UV-lamp and the interi-
or of the lamp house to cool down at
least 10 minutes for the LH1500 and 20
minutes for the LH5000.
1.7.4. Noise Emission Hazard
The sound level measured in the operator area is
well below 70dB (A) during all operation modes. No
hazard is caused by noise.
1.7.5. Radiation Hazards
The high energy of the ultra violet (UV) light pro-
duced by the exposure lamp can cause severe eye
damages and skin burns.
Personnel entrusted with the adjustment of the ex-
posure lamp should wear eye and skin protection
against UV radiation.
In most applications the UV light uses the wave-
length region between 440 nm and 340 nm. This UV
light is accompanied by some visible blue light.
This wavelength interval may be limited -depending
on the application- by filters.
Shorter wavelengths could be applied using special
exposure optics. In this case the light beam could be
hardly visible!
The full spectrum of the UV-lamp (without optics and
selective mirrors) is given in section 3.1.4 Compo-
nents of the Exposure Optics.
Warning!
Invisible high energy UV light may dam-
age your eyes or skin if the machine is
not used as intended.
When performing light uniformity
checks, wear UV protective glasses.
It is also recommended to wear gloves
during light measurement
Do not work on a machine if shielding
covers of the light beam are detached -
if unavoidable for service purposes
wear UV protective glasses and cover
your skin.
Sections where UV radiation could
harm your eyes are marked with the
wear safety goggles action symbol.
Be especially aware of hazards to eyes
and skin resulting from unvisible UV-
exposure, when working with short
wave UV-light by applying UV250 or
UV300 optics.
When using deep-UV radiation the ap-
plication of a special cover at the mask
stage, stopping scattered light, is rec-
ommended.
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The halogen lamps for microscope illumination do
not only emit visible light but also invisible Infrared
(IR) light.
The covers over light sources for microscope illumi-
nation as lamps and light guide adapters are neces-
sary to safeguard against excessive IR light
exposure; do not remove such covers. After chang-
ing a bulb or a light guide component, make sure,
that all covers are fixed on the right place.
Small RF radiation or EM field is emitted by all elec-
tronic subsystems. The frequency depends on the
clock rates used inside the systems, and can be es-
pecially high from the computer system.
The intensity of this radiation or fields is low and gen-
erally not known to be harmful for humans. But per-
sons with pacemakers should avoid to perform
maintenance or service tasks inside the machine
(when electronics are still energized).
1.7.6. Chemical Hazards
1.7.6.1. Chemicals used or produced by
the Machine
1.7.6.1.1. Mercury (Hg)
The UV lamp contains a small amount of toxic mer-
cury (Hg) (for lamps from 200 W to 1000 W the con-
tent is between 0,1 g and 1,0 g Hg). Hg enclosed in
an unharmed lamp bulb cannot affect humans or the
environment.
If an UV lamp breaks or bursts, counter measures to
contain the mercury content are to be taken immedi-
ately.
A broken cold lamp spills liquid mercury, which must
be caught.
An effective way to collect visible droplets is by suc-
tion with a syringe or vacuum device (but never use
personal respiration).
Following general clean up - including invisible re-
maining - shall be done using a mercury absorbing
agent like sulfur powder or a specialized Hg-catcher
like Mercurysorb by Carl Roth (available as SUSS
articles PO. 192656 and 192657).
Missing to collect the spilled mercury completely will
result in a risk for long-term emission of toxic Hg va-
por (see Warning below).
During the cold clean up no special respiratory pre-
cautions are needed, because short-term exposure
is not critical. But wear Latex gloves and goggles.
All debris as well a the materials used in the
cleanup should be treated as hazardous waste
and disposed off accordingly (following local
rules and law for Hg waste).
If an explosion of a hot lamp happens, the mercury
content will be blown away as vapor.
SUSS recommends the following course of action
following a lamp explosion on order to avoid the in-
halation of mercury vapor:
Turn off electric power to the lamp supply and
machine immediately
Do not turn off the exhaust system for the lamp
house. Exhausting is the most effective way to
remove the Hg vapor.
Do not open the lamp house for the time being.
Evacuate the immediate area of the machine.
Ventilate the room (as effective as possible).
Wait for about 30 minutes before returning to the
machine area.
Remove glass fragments, bulb sockets and po-
tential mercury residue, deposited inside the
lamp house. This should be done only when
wearing Latex gloves and goggles.
Decontaminate the empty lamp house as de-
scribed above for liquid mercury spillage.
Finally use lint free paper, which is slightly damp-
ened by a residue free liquid, to wipe optics very
gently.
All debris as well a the materials used in the
cleanup should be treated as hazardous waste
and disposed off accordingly (following local
rules and law for Hg waste).
To minimize the risk of lamp explosion - as well as to
optimize lamp life in general - follow these rules:
run UV lamps only with a SUSS lamp power sup-
ply (i.e. CIC), which respects the technical data of
each lamp type approved by SUSS.
select only a lamp type which is explicitly autho-
rized by SUSS for use with the SUSS power sup-
plies.(See sections Cooling the Exposure lamp
in Installation for approved lamp types.
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 11
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watch for the lamp life - this is specified in the
data sheets typically as 1000h and controlled
correspondingly by the SUSS power supply - but
frequent ignitions shorten the life expectancy.
take special care to adjust cooling of the UV lamp
according to the tables listed in the installation
section of the manuals.
Make sure that the N
2
-cooling tubes are not de-
adjusted but blow correctly to the lamp sockets.
Check the color of the metal sockets of the used
lamp - it must be similar to the new lamp or slight-
ly gold-colored at the maximum. If a socket is
darker, then it has not been cooled correctly. In
this case carefully check and adjust cooling con-
ditions and electrical connections.
do not open a still hot lamp house because pre-
mature opening generates a temperature shock
to the lamp.
when inserting a new lamp, avoid any mechani-
cal stress to the bulb.
insert the lamp correctly with respect to direction
and polarity (the 500 W deep UV lamp is re-
versed to all others).
inspect the electrical connections between lamp
and feed through of the lamp house for degrada-
tion of contact surfaces with every lamp ex-
change - if degradation is detected, change also
the bad component.
if the type or model of lamp has been changed,
select the correct lamp type at the lamp power
supply menu before starting.
for more details see also CIC-manual and chap-
ter Maintenance of this manual in sections Re-
placement of the exposure lamp and N
2
-control.
Warning!
Mercury is very toxic. Incorporated
mercury can result in chronic heavy
disease. Incorporation is typically pos-
sible by extended exposure to mercury
vapor, which will be a result of spilled
and than hidden mercury.
The only sure way to avoid this risk, is
to avoid a spillage event - or if this hap-
pened by accident, to remove all mer-
cury from the location by
recommended procedures and agents
as described above!
Warning!
A hot mercury lamp is highly pressur-
ized and can explode if mistreated,
causing mechanical hazard by frag-
ments and chemical hazard by Hg va-
por.
Carefully avoid any of the above listed
severe treatments.
Store and transport UV lamps - including disused
lamps - only in the manufacturers original box!
Disused mercury UV lamps must be disposed - ac-
cording to local rules and law - as hazardous waste,
because of its Hg content.
In principle mercury lamps could be returned to the
supplier. But the heavy restriction is, that they must
not be shipped by air other than declared as danger-
ous goods (UN 2809) together with an IATA ship-
pers declaration and specially packed.
The UV lamp has a limited life time and is sensitive
to rough handling. Therefore it is seen as a consum-
able.
1.7.6.1.2. Ozone (O
3
)
Ozone affects the human respiratory tract, if ozone
concentration is increased above a certain level.
The effect is cumulative.
The exposure lamps produce ozone due to the inter-
action of the UV light with the oxygen of the air.
The spectral distribution of normal UV lamps (340 -
440 nm) is not especially effective in producing
ozone: the seldom used dUV-lamp (with increased
intensity below 315 nm) produces more ozone.
Exhaust of the lamp house is mandatory for lamps
with 500 W or higher, to cool the lamp to a safe tem-
WARNINGS AND SAFETY PRECAUTIONS
12 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
1
perature. This exhaust takes also the produced
ozone away.
During the very first minute following lamp ignition
the ozone production of standard lamps is signifi-
cantly increased about the normal level. Because of
this ozone, the exhaust should be also active, if a
small lamp will be switched on only for a few minutes
and cooling would not be an issue.
In the vicinity of mask aligner lamp houses never has
been found an ozone concentration higher or near to
OSHA acceptable maximum value, if the exhaust
has been correctly set. Also the ozone concentration
in the exhausted air itself is regularly significantly be-
low the limit.
Caution!
To avoid exposure to ozone adjust the
exhaust flow for the lamp house to the
correct settings.
1.7.6.2. Use of Toxic or Secret Process
Materials (Substrates, Resists)
When using toxic or secret material (e.g. GaAs), the
system's user has to make sure that his personnel is
supplied with the necessary safety instructions and
Material Safety Data Sheets to run the system in a
safe way.
Note!
It is the users responsibility to mark all contain-
ers and cassettes containing toxic materials
with appropriate labels and warning signs.
1.7.6.3. Working with Cleaning Agents
Cleaning agents like isopropyl alcohol (IPA) are
flammable solvents and must be used in accordance
with Federal, State and local requirements. Some
environmental regulatory restrictions may exist con-
cerning the total amount of such solvents allowed at
a facility. Proper precautions must be taken in the
storage, use and disposal of this cleaning agent,
which should be treated as hazardous materials.
Use solvents only in well-ventilated areas, away
from flames and sparks. Avoid skin contact and
breathing vapors.
For effective cleaning of optical parts see this spe-
cial section in chapter Maintenance.
Danger - Flammable Media!
Solvent vapors and liquids are easily
flammable! Flammable chemicals can
cause injury or death if ignited!
Keep away ignition sources! The ma-
chine must be switched off when work-
ing with liquid flammable solvents.
In the event of chemical spillage, notify
a supervisor immediately.
To clean components of the mask
aligner -especially optical parts - no
other cleaning agents than IPA and wa-
ter should be used.
Only properly trained personnel should
be engaged in handling isopropyl alco-
hol for cleaning.
Always wear recommended protective
equipment (safety goggles, gloves,
face shield etc.) in accordance with the
chemicals you are handling!
Consider and observe Material Safety
Data Sheets of the corresponding ma-
terials.
1.7.6.4. Working with other Chemicals
When using other chemicals always wear recom-
mended personal protective equipment (safety gog-
gles, gloves, face shields etc.) in accordance with
the chemicals you are handling.
Prior to starting work with chemicals the user must
read and understand the advice outlined in the re-
spective Material Safety Data Sheets.
1.7.7. Increased Hazard after Ex-
traordinary Events
Following an extraordinary event - heavy malfunc-
tion of equipment, overheating, seismic event, etc. -
the equipment may be damaged without evidence.
To avoid hazards for personnel and additional dam-
age to the machine, do not run the machine without
prior careful checks by service technicians. For de-
tails see the Maintenance and Service sections.
Check forthwith that the UV-lamp is undamaged. If
any indication of bulb breakage is seen, proceed as
described above for Cemical Hazards/ Mercury!
If a chiller is used, check if liquid has spilled!
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 13
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1.8. Safety Systems and
Procedures
1.8.1. Interlocks
Warning!
Operation of the system with bypassed
or defeated safety interlocks can pose
major risk to personnel. Only specifi-
cally trained persons are authorized to
do so.
1.8.1.1. Interlock and Warning for Lamp
Cooling Failure
Lamp cooling devices are monitored by a circuit in-
side the lamp power supply.
If this circuit detects a failure signal from a detector,
the CIC power supply will first signal the failure with
an acoustic beep and display N
2
-error.
If this failure continues for an extended time interval
- which duration depends on the lamp type to guar-
antee a safe operation - the output voltage to the
lamp, and in effect the lamp, will be switched off by
the CIC.
1.8.1.1.1. Nitrogen Failure Warning/ Interlock
Especially important for lamp cooling is a flow of Ni-
trogen directed to the lamp sockets. The flow inten-
sity is adjustable by a pressure gauge (see
description in section N
2
-Control Unit and lamp de-
pendent setting values in the installation chapter
section Lamp Cooling - and the service chapter for
description of all gauges). The N
2
-pressure is read-
able at the pressure meter on front of the micro-
scope bridge. An additional limit switch activating
the warning signal to the CIC, if the N
2
-pressure falls
below the setting is located in the pneumatic com-
partment.
Warning!
The adjustment of the Nitrogen cooling
flow as well as the limit adjustment for
the monitor is to be done carefully dur-
ing installation of the machine - or fol-
lowing a change of the lamp type or any
part exchange in the cooling system -
and must not be modified later. Only
specifically trained personnel is al-
lowed to modify settings.
If the lamp cooling warning beep sounds, it is prob-
ably caused by a breakdown of the Nitrogen supply.
If the supply can be restored within the lamp specific
hold time, no switch off would happen.
If the Nitrogen supply is nevertheless stable, the set-
tings of the Nitrogen monitoring device should be
checked and adjusted by qualified personnel.
1.8.1.1.2. Exhaust Flow Failure Interlock
(Option)
Some lamp configurations are additionally equipped
with a flow sensor in the lamp house exhaust system
(located in the input air tube). In case of exhaust
shortfall the flow sensor interrupts the same inter-
lock circuit to the CIC as the N
2
limit switch de-
scribed for N
2
failure.
How to set the limit for the flow sensor correctly can
also be found in the installation and maintenance
chapters of the manual.
Warning!
The adjustment and the interlock limit
setting for Nitrogen flow and exhaust
must be done by trained service per-
sonnel only.
Operation of the system with bypassed
or defeated safety interlocks can pose
risk to personnel or machine.
1.8.1.2. Lamp House Door Interlock of
LH1500/ 1000
The lamp house door is closed by 3 screws and
monitored by a safety switch.
When the lamp house door opens, the lamp power
supply module will be switched off immediately by a
safety interlock relay as part of the EMO circuit.
WARNINGS AND SAFETY PRECAUTIONS
14 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
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To restart the lamp following an activated lamp
house door interlock, the lamp house door must be
closed, locking all 3 screws, the lamp power supply
must be restarted, lamp cool down time (indicated at
the CIC power supply) has to be waited, then the
lamp can be regularly restarted.
Warning!
The lamp house interlock can only pre-
vent the direct access to lamp voltage
and the exposition to very intense UV
light.
But the lamp and the interior of the
lamp house will be still extremely hot.
Also a lamp explosion could be caused
by temperature shock.
Never open the lamp house door when
the lamp is ON!!
Note for LH350 (small Lam house)!
The LH350 is not equipped with a door interlock,
nor does it have access by a side door. For de-
tails see Lamp House 350W in section Mainte-
nance.
Note!
The lamp house door interlock only switches off
the CIC; it does not directly influence the ma-
chine.
1.8.1.3. Detailed Description of the Inter-
lock
1.8.1.3.1. Location and General Actions of Inter-
locks
The lamp house door interlock is activated by
a single switch in the lamp house. Opening the
lamp house door switches an EMO relay in the
power supply section of the machine, which
switches the CIC power supply OFF immediate-
ly.
The lamp cooling warning/ interlock uses the
pressure switch in the pneumatic compartment to
monitor the nitrogen cooling of the lower lamp
socket. The CIC checks the (pressure underrun
warning) output of this switch and activates an
audible and visible alarm as well as a timer if it
detects the flow being too small. This gives oper-
ating technicians a chance to detect and remedy
the cooling flow failure. When CICs timer ex-
pires, the CIC will switch OFF its power output.
If the lamp house in-flow tube is equipped with an
(optional) exhaust flow sensor this works identi-
cally by wiring the flow sensor limit switch in se-
ries to the N
2
pressure sensor switch.
The Emergency Off circuit is activated by the
EMO knob, which is red on a yellow background
the EMO knob is located on left of the machine.
If the EMO knob is activated, it triggers the EMO-
relais to switch off all power supplies, which are
not necessary for the EMS function itself .
Details for all Interlock functions can be seen in
the following schematic diagrams.
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 15
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1.8.1.3.2. Interlock Schematics
Lamp House Door Interlock
Opening the lamp house door will immediately open
the door switch, effectively turning off the CIC power
supply the same way as by activation of the EMO
button. The EMO-relay F5 will switch off all 3+3 par-
all contacts supplying the CIC main power (on ma-
chine output X10).
1
-Q2
EMO
-Lamphouse doorswitch
S11
S12
-X6 1 2
EMO Relay
-F5
13
23
33
14
24
34
43
44
53
54
63
64
230 VAC
-F2
10A
L1 N(L2) PE
-X10
Outlet for CIC
MA 6/8 1000WLamphouse
WARNINGS AND SAFETY PRECAUTIONS
16 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
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Lamp Socket Nitrogen Cooling Interlock
As long as N
2
pressure is sufficient, the contact
of pressure switch CV9.7 remains closed .
If the pressure falls below the adjusted limit, the
CV9.7 contact will open and deactivate the relay
in the Interlock module A1..
When the control unit of the CIC lamp power sup-
ply detects the error signal on input N
2
Interlock
it warns the operator about the cooling error by
an acoustic and visible indication, it also starts a
timer.
After timely remedy of the error the indication will
be off and normal work continues. If the error is
not corrected, the timer overflow of the CIC con-
trol will switch off the power output of the CIC to
the lamp.
Additionally an optional exhaust flow sensor can
be installed in the (lower) air intake duct of the
lamp house LH1000/1500 which acts in series to
the N
2
pressure switch CV9.7. If the exhaust flow
will become too low, the CIC control unit reacts
identically as described for the N
2
cooling.
EMO Interlock
Actuation of the red EMO knob activates the Emer-
gency Off circuit via EMO relay F4 (for machine and
IPC) and F5 (for CIC). Contactors then switch off the
power supplies of all funtional modules of the ma-
chine.
(CIC with lamp, motor drives, control, pneumatic
control; IPC with EISS video system, microscope il-
lumination.)
The following devices will be still energized after ac-
tuation of the EMS/EMO:
Input wiring including Filter Z1 and breakers
F1, F2
EMO circuit itself (F4,F5)
Pneumatic pressure system
Optionally: IPC with EISS, if connected to a
separate mains supply.
By manual release of the EMO button electric power
will be already restored to the CIC by F5 and X10.
Manual restart of the lamp can then be done at the
CIC (as soon as the cool-down timer is ready).
MODUL
Interlock
5
2
L N
1 2
-X5
4
3
N2 Interlock
CIC
6 7
114170
8
GND
+24V
-A 1
2 1
230 VAC
N
CV 9.7
Input Board C3 / Pin 21
P30 Pin2 C3 Pin 16 PneumatikII Pin 19
PneumatikII Pin 20 P30 Pin 4
P30 Pin 3
1
1 2 3 4 5
1 2 3 4 5
Flowsensor
# 150793
+24VDC GND
bn bk wh bu
4
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 17
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1.8.2. Emergency OFF (EMO)
The machine is equipped with an emergency off cir-
cuit. When activated the circuit removes hazardous
potentials from the machine by stopping all move-
ments and switching off the electrical supply, which
is not further necessary to restart the machine con-
sistently.
The activation button is clearly labeled as EMO, is of
red color and easily accessible.
In case of any danger originated from the machine
actuate the emergency off button!!
Warning!
The EMO function cannot remove all re-
sidual hazards from the machine.
Although the UV lamp can be switched
off immediately when the EMO has
been hit, the lamp is still extremely hot
and under high pressure.
Also a basic electric supply is still nec-
essary to hold the machine in a state of
readiness for restart.
To restart the mask aligner you must first release the
EMO button and then switch on lamp and machine
again.
Note that the lamp needs a minimum cooling time
before it can be restarted, this will be controlled by
the SUSS lamp power supply (CIC).
NOTE :
The machine always can be fully switched off using
the main switch, which is located directly below the
EMO button.
The Main switch is ON, when the bar is oriented ver-
tical, and OFF when oriented horizontal, it can be
locked using the holes in the OFF position.
1.8.3. Location of Potential
Hazards in the Machine
1.8.3.1. Potential Hazards inside the
Basic Machine
All hazards described above are related to specific
components of the machine.
The locations of these hazards in the machine are
displayed in the following drawings.
Also shown in these drawings are the locations of
the safety interlocks:
Legend to Hazard Location Drawings
A B
C D
E F
G H
UV IR
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FRONT VIEW
Notes:
1) Mask Stage:
Mechanical hazards by foreward moving of the mir-
ror house. UV-light hazard by reflected light espe-
cially during light measurement (wear UV-goggle
because direct looking to stage is required).
2) Lamp House:
A - lamp sockets and supply wires ignition
unit
D - lamp may explode
E, F - very intense light inside - all covers
(incl. air intake duct to lamp house) are
necessary
G - extremely hot lamp bulb inside, hot
exhaust duct on top.
Lamp House
A,D,E,F,G
Ignition Unit
A
Pneumatic &
Control Section
IPC
A
CIC
A
Electric Power
Section
A
Main Switch
A
TSA Microscope
Movement
C, F
Mirror House &
Stage
C, E
Microscope
Illumination
F
UV Optics
E
EMO-button
Restart
N
2
Socket
Cooling Setting
Exhaust Duct
Connection
(LH1000)
Exhaust Flow
Sensor
(optional)
Lamp House
(LH1000) door
Interlock
Switch
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SIDE VIEW (with IPC)
Lamp House
A, D, E, F, G
Ignition Unit
A
Mirror House
Optics
E
Electric Power
Section
(Middle Section)
A
Pneumatic &
Control Section
(Right Section)
IPC
A
CIC
A
Stage &
Mirror House
C, E
TSA Microscope
Movement
A, F
WARNINGS AND SAFETY PRECAUTIONS
20 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
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1.8.4. Hazard Alerts
1.8.4.1. Types and Locations of Hazards
Alerts
Hazard Alarts are mostly realized as hazard warning
labels which are fixed in the vicinity of the hazard or
at a cover guarding against the hazard character-
ized on the label.
The labels also describe how to avoid the hazard.
Labels are preferably used for a general description
of potential hazards to unexperienced personnel.
Some temporary hazardous situations in specific
machine states are displayed as line messages on
the operator monitor which must be confirmed be-
fore the program can continue.
Actual hazardous states, asking for quick reaction,
may be depicted by an audible alarm.
Status lamps at the CIC may indicate states with a
potential for actual endangerment. Adequate reac-
tion requires well trained personnel.
1.8.4.2. Hazard Warning Labels
The Warning Labels consist of a keyword depicting
the grade of hazard, one or more hazard warning
symbols and a text describing the potential hazard
as well as a method to avoid the risk.
CAUTION:
Do not remove or destroy warning la-
bels. Use only recommended cleaning
agent IPA, because more aggressive
solvents could harm the labels. If a la-
bel may have become unreadable, re-
new the label by ordering it from SUSS.
Warning labels are for users safety!
Warning labels are always positioned as close as
possible to the respective hazard location or protec-
tive part covering the hazard - including outside cov-
ers.
The hazard location drawings above therefore de-
scribe also the positions of the respective warning
labels.
1.8.4.3. Other Hazard Alerts
Lamp Power Supply CIC - audible alarm & indi-
cator lamps & "Display"
The CIC presents its status on a 8 digit display
and some indicator lamps. In case of Nitrogen
cooling alarm, both displaying methods are used
together with an audible beep alrm. For more de-
tails see the CIC-manual
MMI screen (messages)
The user interface presents status message.
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1.8.5. Lockout/Tagout Procedures
Lockout/tagout is an essential safety procedure that
protects workers from injury while working on or
near electrical circuits or other parts of the equip-
ment which can be energized.
Lockout involves applying a physical lock to the
power source(s) of circuits and equipment after they
have been shut off and de-energized. The source is
then tagged out with an easy-to-read tag that alerts
other workers in the area that a lock has been ap-
plied.
In addition to protecting workers from electrical haz-
ards, lockout/tagout prevents contact with operating
part: blades, gears, shafts, presses etc.
Also, lockout/tagout prevents the unexpected re-
lease of hazardous materials in areas where work-
ers are present.
In order to make certain there is no danger of elec-
trical shock or hazards during electrical service or
maintenance work, all power should be disconnect-
ed at the source using the relevant in-house lockout/
tagout procedures.
The lockout device/procedure should be in accor-
dance with SEMI S2 (and especially for USA with
OSHA CFR (Code of Federal Regulations) title 29,
part1910, sections 147 and 331-335).
Note:
The customer has to provide the possibility to
centrally switch off media supply (vacuum, com-
pressed air, nitrogen etc.) for maintenance and
service work.
The following procedure should be implemented in
order to safely perform a type 1 service task to en-
sure that the machine is isolated from all potentially
hazardous energy.
All equipment shall be isolated from all energy
sources as described in the following sections and
locked out or tagged out to protect against acciden-
tal or inadvertent operation when such operation
could cause injury to personnel.
Make no attempt to operate any switch, valve, or
other energy isolating device when it is locked or
tagged out.
1.8.5.1. Responsibility
Appropriate employees shall be instructed in the
safety significance of the lockout/tagout procedure.
Appropriate employees include all technicians on
the manufacturing floor and the manufacturing man-
agers. Each new or transferred employee, affected
employee and other employees whose work opera-
tions are or may be in the area shall be instructed in
the purpose and use of the lockout/tagout proce-
dure. It is the managers responsibility to ensure that
all appropriate employees are trained. The techni-
cian(s) will be responsible for ensuring that the ma-
chine is locked or tagged out before repair is
attempted. In his/ her absence the machine room
manager will assume responsibility.
1.8.5.2. Preparation
In preparation for lockout/tagout, survey the area to
locate and identify all isolating devices in order to be
certain which switch(es), valves or other isolating
devices apply to the machine to be locked or tagged
out, then observe the following steps for a danger
free working:
Notify all affected employees that a lockout/ta-
gout procedure is going to be utilized and the rea-
son therefore. The authorized employee shall
know the type and magnitude of energy that the
equipment utilizes and shall understand the haz-
ards thereof.
1.8.5.3. Electrical Energy Isolation
If the machine is operating, shut it down by the nor-
mal shut down procedure.
Switch off electrical power using the main switch
on the machine or a central switch at the facility
supplying the machine.
The system has to be separated from all electri-
cal power supplies.
Ground (short circuit) the machine frame.
Check voltage free state: After ensuring that no
personal are exposed, the voltage - free state
(deadness) has to be checked at all terminals
nearest to the operator station.
When using checking devices - comply with in -
house regulations. Portable checking devices
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22 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
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and voltage testers are to be checked directly be-
fore and after use.
Protect from restart: All switches taking off power
have to be protected against restart (Switch ON),
if possible with mechanical key locks.
Use key locks to block the main switch at the ma-
chine. If there are no key locks available, choose
a properly authorized method to protect the ma-
chine from being switched on.
Unqualified operations must be noted with the
appropriate warning labels.
Note!
If the machine is equipped with an additional
main breaker attached on a box on back, this can
be switched off instead of the main switch. The
breaker can be locked in the OFF-position using
the small locking device attached to the box by a
wire.
Caution!
Return all operating controls to their
neutral or off position.
When opening electrical compart-
ments, observe if components like ca-
pacitors keep residual voltages after
switch off. (If applicable this is marked
close to the component).
Discharge components.
Ground and short circuit components to be han-
dled. The grounding / short circuiting devices
must be connected to the grounding equipment
first and then the components are to be ground-
ed.
Take the appropriate measures (jumper, ground-
ing) prior to beginning work, if wires are to be cut
or interrupted.
Ensure that all grounding and short circuit mea-
sures remain effective during work.
Cover/ barrier powered adjacent components: If
components adjacent to the work location cant
be switched off, they must have appropriate cov-
ers or barriers. Notice and comply with the regu-
lations according to working adjacent to
powered components. In general - working in
close proximity of powered components (> 30 V
RMS or 42,2 V peak) is only allowed, if any ac-
cess to powered components is limited by the ap-
propriate covers or barriers.
1.8.5.4. Pneumatic Energy Isolation
Switch off pressure supply for CDA (compressed air)
and nitrogen.Prevent accidental re-pressurization of
the media supply by marking the pressure valves
with warning labels or other proven methods:
If lockable valves are available at installation,
switch these valves OFF, lock them and tag-out!
Disconnect the supply tubing from the valves out-
let to permit dissipation of any stored pneumatic
energy.
Check the depressurized state of the system by
checking the gauges.
1.8.5.5. Thermal Energy Isolation
Thermal energy which may be stored within the ma-
chine -especially in the lamp house -should be ren-
dered safe by waiting until any part of equipment or
media which may have been heated during a pro-
cess has had sufficient time to cool down to 40 C or
lower.
Warning - Danger of Burning!
Before touching any part of the equip-
ment which may have been heated
-especially before opening the lamp
house-, be sure that it has cooled down
to 40 C or lower.
Additional main break-
er shown in OFF-posi-
tion (switched
downwards) and
locked with the locking
clamp. The clamp will
be firmly fixed using a
screwdriver from top.
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 23
1
1.8.5.6. Lockout/Tagout Checklist
When performing lockout/tagout on circuits and
equipment, you can use the checklist below.
Identify all sources of electrical energy for the
equipment or circuits in questions.
Disable backup energy sources such as genera-
tors and batteries.
Identify all shut-offs for each energy source.
Notify all personnel that equipment and circuitry
must be shut off, locked out, and tagged out.
(Simply turning a switch off is NOT enough).
Shut off energy sources and lock the main switch
in the OFF position. Each worker should apply
his or her individual lock. Do not give your key to
anyone.
Test equipment and circuitry to make sure they
are de-energized. This must be done by a quali-
fied person.*
Deplete store energy by bleeding, blocking,
grounding, etc. Apply a tag to alert other workers
that an energy source or piece of equipment has
been locked out.
Make sure everyone is safe and accounted for
before equipment and circuits are unlocked and
turned back on. Note that only a qualified person
may determine when it is safe to reenergize cir-
cuits.
* OSHA defines a qualified person" as someone
who has received
mandated training on the hazards and on the
construction and operation
of equipment involved
in a task.
1.8.5.7. Restoring Machine to Normal
Operation
After service and/or maintenance is complete and
the equipment is ready for normal production opera-
tions, check the area around the machine to ensure
that no personal are exposed.
After all tools have been removed from the machine,
and guards have been reinstalled, remove all lock-
out/tagout devices. Operate the energy isolating de-
vices to restore energy to the machine.
Prior to leave the machine to operators, make sure
that all interlock defeats have been cancelled.
1.8.6. Resource Conservation
1.8.6.1. Minimum Medium Consumption
Note!
Ensure that the consumption of media always
should be kept to a reasonable minimum.
When the machine should be not used for an ex-
tended time, avoid energy and media consumption
by stand-by status.
Switch off the main switch as well as the external
valves for CDA, N2 and Vacuum.
Do not switch off N2 before the hot UV-lamp has
been cooled for at least 10 additional minutes.
1.8.6.2. Maintenance
Minimum consumption of cleaning liquids is taken
for granted.
Cleaning agents isopropyl alcohol is flammable sol-
vents and must be used in accordance with Federal,
State and local requirements. Some environmental
restrictions may exit concerning the total amount of
such solvents allowed at a facility.
1.8.6.3. Installation
Packing materials should be disposed of according
to the relevant local and environmental laws and
regulations.
Separate materials and forward to a recycling pro-
cess, if possible.
WARNINGS AND SAFETY PRECAUTIONS
24 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
1
1.9. Warranty and Void of
Warranty
Failure to adhere to any or all User Requirements
specified within this manual will cause the equip-
ment warranty and any other related contracts made
between the purchaser and Suss Microtec Lithogra-
phy GmbH to be voided.
Suss Microtec Lithography GmbH disclaims respon-
sibility for any death, injury, property damage, or oth-
er loss caused by or resulting from failure to adhere
to any of these User Requirements, as well as state,
local, or federal guidelines and regulations.
Attention!
Read the instruction manuals before using the
system!
Modification of the system, including operation of the
system with bypassed or defeated safety interlocks
can pose major risk to personnel and will void all
warranties.
It should be noted that the contents of instruction
manuals and product documentation shall not be-
come part of or modify any prior existing agreement,
commitment or legal relationship. The sales con-
tract, which also contains the complete and solely
valid warranty stipulations, contains all of the obliga-
tions that must be fulfilled by Suss Microtec Lithog-
raphy GmbH. These contractual warranty
stipulations are neither extended or limited by the
statements made in the manual and documentation.
Changes and repair work at the system may only be
carried out if it is documented in the manual.
1.10. Working with the Mask
Aligner
1.10.1. General Description
NOTE
This section contains information the operator must
know and understand to minimize the risk of injuries.
Service of the machine should be performed by
qualified personnel only. If any problems occur with
the power supply, turn the machine off and notify
maintenance immediately.
When performing any maintenance on the power
supply, lamp housing or the lamp itself, make sure
that the power line to the power supply is discon-
nected.
The light source for the UV light required to expose
the substrate is a high pressure lamp. Special pre-
cautions must be taken when working with these
lamps. The voltage and current required to run a
high pressure lamp constitute a lethal combination.
Starting ignition voltage is 30kV and the circuit po-
tential ranges up to 180 VDC at currents between 5
- 50 A.
Caution!
The exposure lamp operates at very
high pressure. The lamp may fail as a
result of improper cooling, improper
setting of the power supply et cetera.
Danger!
High pressure lamps even when cold
should be handled with eye/ face pro-
tection and gloves. If a lamp should
break, avoid touching the fragments
and/ or breathing the mercury vapour.
1.10.2. Replacement of the Expo-
sure Lamp
The UV lamp is a consumable. Lamp replacement is
required after the operation life time, recommended
by the manufacturer. This regularly is after 1000h -
but may be different for specific lamps.
The high UV light energy produced by the exposure
WARNINGS AND SAFETY PRECAUTIONS
SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS 25
1
lamp can cause eye damage and skin burns. Per-
sonnel entrusted with the adjustment of the expo-
sure lamp should wear eye and skin protection
against ultraviolet radiation (UV radiation).
SSS MicroTec will not be responsible for injured
arising from incorrect or unprotected work with these
systems.
Warning!
Use only lamps approved for use by
SUSS MicroTec Lithography.
Check adequate lamp cooling. (Set-
tings of N2 socket flow and exhaust
flow according to lamp cooling table)
and check that N2 nozzles are correctly
directed to the lamp sockets.
The safety regulations of the original
lamp manufacturers must be complied
with!
Respect recommended maximum ser-
vice life! When installing a new lamp re-
set lamp life counter on CIC:
Prior to starting check that correct
lamp type has been selected at CIC.
Caution!
The polarity of the 500W Hg/Xe lamp is
opposite to all other lamps which have
Anode (+ pole) on bottom.
Caution!
Do not open the lamp house before it
cools down to room temperature. You
could burn your fingers.
See section Lamp Replacement in Maintenance for
more details!
1.10.3. N
2
-Control Unit
The Nitrogen flow for lamp socket cooling is set by a
Nitrogen gauge (located on right side of the mirror
house - see pneumatic plan) and controlled by the
pressure meter which is located in the pneumatic
compartment.
The required setting value is given in section Lamp
Cooling of the installation chapter.
Adjustment shall be done by experienced service
technicians only and before any lamp will be started.
Whenever the N
2
flow fails - i.e. if it drops below the
adjusted limit then the lamp socket Nitrogen cool-
ing alarm/interlock of the CIC will be activated. It
turns off the lamp within a few minutes.
Warning!
Nitrogen cooling adjustment must
comply with the value given by SUSS in
the manual. De-adjusted cooling could
cause a lamp explosion.
The same applies for exhausst flow ad-
justment.
1.10.4. Operating Procedures
Before the machine becomes operational, turn on ni-
trogen, compressed air and vacuum.
1.10.4.1. Start Up Procedure
Check- and if necessary- set primary pressure
gauges with the corresponding regulators
Turn ON compressed air and adjust to 5 bar.
Turn ON nitrogen and adjust regulator to 2
bar. Turn on vacuum. The gauge should read
< -0.8 bar.
Do not modify any secondary gauge if not es-
pecially trained for the required settings.
1.10.4.2. Ignition of Exposure Lamp
Caution!
Make sure the door of the lamp house
is closed!
Switch main power to ON (at power box door on
rear) (left foot well).
Switch ON power at the Constant Intensity Con-
troller (CIC Unit).
Press CP at CIC.
The CIC performs a self calibration test.
When CIC display shows ready press key
START.
WARNINGS AND SAFETY PRECAUTIONS
26 SAFETY-INST MA6-8 Rev04 04-08 WARNINGS and SAFETY PRECAUTIONS
1
Caution!
Nitrogen Failure leads to a turn off of
the exposure lamp after 1 to 3 minutes.
If equipped with an exhaust flow sensor
the same applies for an exhaust failure.
1.10.4.3. Starting the Machine
Turn the main switch Electronics ON / OFF (201)
on the front panel in a clockwise direction into the
ON position and let it spring back. The machine
is initialised. Depending on the configuration, the
display then shows the following header, for ex-
ample:
"Ready for Start - press LOAD Button MA6-
BA6-[M] V4.000 04.05.01 SW:P"
The second line shows the following information:
Machine configuration Software version
Date Additional options included
(in this case: Purge)
The flashing LOAD key (307) on the lower control
level should now be pressed. The display reads:
"WATCH OUT MACHINE IS STARTING!"
Following an initialisation phase, the prompt
"Select machine configuration: MA6"
appears. The Y cursor keys must now be used to
choose between the operating modes mask
aligner and bond aligner.
The display then reads:
"Ready for load"
The machine is now in basic status and is ready to
work. All motorised manipulators (TSA, BSA and ad-
justing station) move to the default position. If you
want them to move to the positions which they occu-
pied before switching off, these must be stored as a
program before switching off.
Additional advice:
Pressing the key combination FAST-UNLOAD
(at an interval of approx. 200 ms) leads to a soft-
ware reset.
Switching on the main electronics switch ON /
OFF (201) with the EDIT - PARAMETER key
(311) depressed leads to reloading of the default
values for all variables.
To switch off, turn the main switch Electronics
ON / OFF (201) on the upper control level in an
anticlockwise direction into the OFF position and
let it spring back.
Note!
In cause of danger activate an EMO/
EMS key to stop the process.
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 27
2
2. INSTALLATION OF THE MA6-MA8
2.1. General Requirements
The system must be installed by a SUSS MicroTec
service representative. The crates with the compo-
nents of the system should not be opened and un-
packed until the service representative arrives. This
is important in order to achieve intended functional-
ity of the machine, best results for the process and
safety for users and other personnel. It is also impor-
tant to avoid any challenge regarding the equipment
warranty
See contact information for SUSS representatives at
the rear cover of the SUSS manuals.
2.1.1. Preparation of the Installa-
tion Site
See section Environmental Requirements below for
required operating conditions.
See section Dimensions below for required space.
For required media and connections see the follow-
ing sections below:
Utilities, Pneumatic Connectors, Lamp Cooling.
2.1.2. Receiving
Shipment from SUSS MicroTec to the users facility
is regularly done by forwarding agents with limited li-
ability. The risk of loss or damage during shipment is
borne by the party as defined in the sales contract.
Before signing the notice of receipt, check carefully
that the number of crates of the shipment is com-
plete, and check all crates of the shipment for visible
damage or signs of rough handling. Check also that
at least 1 shock-watch indicator (small glass tube)
and 1 tilt-watch indicator (colored powder) are
present at each crate, sealed with SUSS stamp or
with paper label, and none of the indicators has re-
leased.
Important Notice!
It is the responsibility of the receiving
party to inspect the packaging for in-
tegrity.
Insurance claims will become void, if
visible damage and signs of maltreat-
ment are not registered and reported!
In case of integrity risk with a received component,
proceed as follows:
Make a note of damage statement (short descrip-
tion) on the delivery document and let the freight
carrier sign your statement, make sure that driv-
ers name and handoff-time will be also available.
Do not prematurely open the damaged crate, but
take pictures.
Notify the freight supplying company and your
SUSS representative promptly about the dam-
age and arrange with both for adequate follow-up
action.
When considerable damage is possible, then an
independent loss adjuster should be present
when opening the crates.
2.1.3. Transport of the Machine
Crates
Facility-internal transport is in full responsibility of
the receiving party.
Before any transport action special safeguards must
be affixed to the corresponding units to prevent
damage of the Mask Aligner during transport.
Respect any marks and signs at the crate - especial-
ly the CG-mark (=center of gravity - marked if con-
siderably de-centered) and the crossed-forklift
symbol (= do not lift at this side) when lifting the
equipment. Use only adequate fork lift for movement
(see also section Weight below) and spread forks
wide and long.
Do not lift loads higher than necessary during trans-
port.
Never stay under any lifted load!
Danger!
The machine is very heavy. General
safety rules for lifting and moving must
be followed-
Only movement experts should trans-
port this machine!
The crate should not be opened prior to attendance
of a SUSS service technician.
But - if the machine must be lifted without the palette,
it is mandatory to support all cross-ties using long
forks.
INSTALLATION OF THE MA6-MA8
28 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
Never remove any transport lock before the machine
has reached the installation spot and rests on feet.
Do not let the machine rest on wheels - secure the
machine by screwing down and tightening the feet.
Caution!
The machine is a high precision tool
and as such it is shock-sensitive if not
properly secured.
Only trained personnel must prepare
this machine for operation.
2.1.4. Storage of the Machine
Crates
If extended storage of the equipment would be nec-
essary, special care must be taken for controlled
ambient conditions. Do not open the package!
Warehousing must guarantee temperature range
+10C to +30 C and humidity < 80%, non-condens-
ing.
If the package has been already cut off and extend-
ed storage is planned, the machine must be careful-
ly sealed again with drying agent. Contact a SUSS
specialist before storage.
2.1.5. Disposal of Packaging
Materials
Check that all accessory parts are available and no
part is hidden in wrap material.
All packaging material should be stored until the ma-
chine installation is completed and final acceptance
has been achieved.
Some dedicated cardboards should be kept in store
even for the full lifetime of the equipment. Such spe-
cialized cardboard boxes with lining materials are
the boxes for microscopes and for the CIC lamp
power supply. Also the box of the high pressure UV-
lamp must be kept for later safe lamp disposal.
Crate material: The wooden crate can be reused
for building other shipment crates or can be dis-
posed as fire wood.
Wrap material inclusive bubble-wrap can be re-
used adequately or can be disposed because be-
ing Polyethylene (in some instances additional
paper wrap may be used). Only the evacuated
main protective bag over the machine (if used -
depending on expected environmental condi-
tions at the shipment route) is composed material
of aluminum and PE and should be disposed as
such.
Drying agent: The drying agent packages are
filled with silica gel. They can be reused when
dried at 130 C or they can be disposed as resi-
dential waste.
All disposal must follow local environmental rules
and laws.
2.1.6. Transport Without Pallet
For the final transport section, when the MA6/MA8
must be transported without the pallet the following
applies:
All general transport rules, described above, ap-
ply also for transport of the machine without pal-
let.
Leave the dust cover on the machine until the
machine has reached its final location.
Only lift the machine from the pallet once the side
walls of the container and the machine fixings
have been removed.
Warning!
Never lift the MA6 metal base plate
(without vibration damping table) di-
rectly with metal forks of the forklift.
Without an anti-gliding intermediate
layer there is a high risk of sliding and
falling.
When transporting on rollers over a
ramp, avoid a higher slope as 10.
Caution!
The center of gravity is located behind
the center of the machine (because of
the high weight of the lamp house).
Two different procedures to lift and transport the ma-
chine are applicable:
with transport yoke or
without transport yoke
Both transport procedures require the use of carry-
ing straps for lifting.
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 29
2
Warning!
Use straps of identical size and length
to ensure a horizontal position of the
machine during raise. The lifting capac-
ity of each single strap must be higher
than the full load of the machine (see
approx. weight information below; be-
cause of additional optional equipment,
the exact weight may be a bit higher -
see transport documents).
SUSS MicroTec recommends to lift the machine
with a transport yoke in the following procedure 1:
Loosen the 4 brackets with which the machine is
screwed onto the pallet.
The screws for fixing 4 transport rings in place
(see Illustration: transport ring) are to be screwed
(regard the instructions for the tightening mo-
ment) into the bores in which the brackets were
previously fixed.
Transport ring
Transport ring screwed into the base plate of the MA6
4 identical, adequately long transport straps
should then be threaded through the transport
rings.
For transporting the machine, we recommend
the use of a transport yoke, order no.: 187724
(see illustration: Transporting the machine using
a transport yoke).
ATTENTION: REGARD THE TIGHTENING MO-
MENT FOR THE SCREWS!
Transporting the MA6 respectively MA8 machine using a trans-
port yoke front view and side view
Screws
(add on the machine)
Tightening
moment
M12, mechanical property 10.9 90Nm
M10 A2-70 30Nm
INSTALLATION OF THE MA6-MA8
30 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
The transport yoke ensures that the transport
straps do not contact the machine and thus apply
forces to the machine (covers, lamp house, etc.).
This would happen if the transport straps rjoin
centrally to a lifting hook.
If no transport yoke is available, it is alternatively
possible to use the transport ring with an distance
bolt. This also avoids that the transport straps con-
tact the machine
Procedure 2: lifting the machine without a transport
yoke:
Loosen the 4 brackets with which the machine is
screwed onto the pallet.
The screws for fixing 4 transport rings in place
(see Illustration: Transport ring and distance
adapter screwed into the base plate MA6) are to
be screwed (regard the instructions for the tight-
ening moment) into the distance bolt.
Each distance bolt is to be screwed with 2 screws
(regard the instructions for the tightening mo-
ment) into the bores in the base plate. Bores are
on each side of the base plate to give an option
to fix the distance bolts side-, front- and back-
wards.
ATTENTION: REGARD THE TIGHTENING MO-
MENT FOR THE SCREWS! Transport ring and distance adapter screwed into the base plate
MA8
4 identical, adequately long transport straps
should then be threaded through the transport
rings.
2.1.7. Decommissioning
Before taking the machine out of service for an ex-
tended period, it is highly recommended that you
contact the SUSS MicroTec Service Department.
Before taking machine out of service for a long peri-
od, the following is recommended:
Servicing of all mechanical moving parts.
Transport preparation as noted below,
Covering the machine on all sides (including on
bottom) in a dust-proof wrapping and inserting
sufficient drying agents inside the wrapping.
Placing the machine on a palette (fixed).
Screws
(add on the machine)
Tightening
moment
M12, mechanical property 10.9 90Nm
M10 A2-70 30Nm
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 31
2
Special safety precautions must be taken before
transporting the machine in order to protect the
mask aligner from damage.
The transport preparation of the machine must be
supervised by an authorized SUSS MicroTec ser-
vice representative. The presence of a SUSS Micro-
Tec representative is necessary for warranty issues
and transport recommendations.
The following minimum requirements must be ful-
filled in preparation for transport:
Removal of the exposure lamp and specific com-
ponents of the exposure optics
Attachment or activation of all transport safe-
guards.
Dust-proof wrapping and application of adequate
drying agent.
The preceding sections must be taken into account
for the transport itself.
Additional special protective measures are neces-
sary if heavy vibrations or high temperatured fluctu-
ations are to be expected during transport or
storage!
For storing conditions see the advice above.
On final decommissioning and disposal of the equip-
ment or subassemblies the following should be re-
spected:
All electronic and electric components (PCBs,
cables, breakers, etc.) should be disposed in a
controlled way according to local and legal re-
quirements,
Contaminated parts should be decontaminated
or disposed as regulated for the respective con-
tamination,
Plastic parts (tubes, brackets, etc.) can be mostly
recycled or disposed as residential waste
Glass parts (lenses, mirrors) can be disposed as
residential or construction waste.
Most of the machine is recyclable metal (alumi-
num and steel).
2.2. Warranty and Limitations
In most cases SUSS MicroTec mask aligners carry
a twelve months warranty covering labor, material
and workmanship. This warranty may vary for differ-
ent areas around the world. Please consult the spe-
cific warranty terms outlined in your quotation for the
particulars pertaining to your machine.
This warranty is limited to:
Equipment unpacked and installed by SUSS Micro-
Tec representatives.
Equipment that is used and operated in accordance
with the Operator Manual.
Equipment that is properly maintained and serviced
on regular basis.
This warranty excludes:
Damage during shipment (claims must be presented
to the carrier or as determined by local practice).
Any items that are subject to wear during normal op-
eration of the equipment, such as: exposure lamps,
mask, etc.
2.3. Utilities
See also section Pneumatic connectors below:
All supply lines for gaseous media inclusive vacuum
should be equipped at the installation site with
valves for shut off.
The valves are required to avoid consumption when
the machine is switched off and also for complete
energy isolation of a locked out machine; for this rea-
son the valves should be lockable in the OFF-posi-
tion. Pressure relieve devices at the output side of
the valves are additionally recommended.
For type of connectors and location of couplings on
machine see section Pneumatic Connectors below.
Machine internal pressure adjustments must be set
according to requirements of the service manual (or
service information), after all supply pressures have
been checked and adjusted as described in the fol-
lowing.
All these utilities (electric power, pneumatic supply
and exhaust) must be made available by the user
INSTALLATION OF THE MA6-MA8
32 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
prior to machine installation at the location, satisfy-
ing the environmental, dimensional and weight re-
quirements.
Vacuum
better than -0.8 bar,
equivalent: lower than 0.02 MPa or 150 mm Hg
absolute pressure
Clean Dry Air (CDA, compressed)
5-7 bar, equivalent to 0.5 - 0.7 MPa
(with base frame: 7 bar)
consumption approx. 2m/h (LH1000/1500),
1 m/h (LH350)
Nitrogen (N
2
)
2-3 bar, equivalent to 0.2-0.3 MPa or 29-43.5 psi
consumption max. 1 m/h (depending on lamp,
see tables for lamp cooling values below)
Caution!
It is important to use dry and particle
free nitrogen and compressed air.
Dirty media would contaminate optical
components (lamp, mirrors, lenses)
and could heavily affect performance
and functions of the equipment.
Eliminate any water, oil or dust parti-
cles from the supply system for N
2
and
CDA.
For CDA, N
2
and Vacuum:
A pressure valve is required at facility connection
points; use lockable valves for lock-out/ tag-out
purposes. Disconnect couplings are additionally
recommended.
Exhaust
of lamp house LH1500/ 1000 (and LH350 - when
used with 500W lamp) by flexible duct (to be sup-
plied by the user, inner diameter 100mm). The duct
must be heat resistant up to 90C.
Flow rate, velocity and temperature adjustment de-
pending on lamp house and lamp type. (see section
lamp cooling)
The exhaust will control heat, small amounts of
ozone and mercury vapors in the unlikely event of a
lamp explosion.
Machine Electric Power -
(depending on configuration)
200-240V,L1/N/PE or L1/L2/PE, 50/60 Hz
AIC of main interrupt: 10kA
AIC of breakers: 1kA, or optional main breaker:
10kA
SCCR (short circuit current rating) of overall
equipment: 1 kA
approx. 2,3 kVA max., incl. CIC1200, and lamp
1000W
approx. 1.5 kVA max., incl. CIC1200 and lamp
350W
approx. 0.7 kVA max., as Bond-Aligner without
lamp
3 wire power cord with wire gauge AWG14 or
2,5mm
facility main breaker (medium or slow) required
(customer supplied) before the machine with Am-
pacity 16A (for Europe) or 15A (for US)
and AIC 10kA.
Warning!
Faulty installation can be fatal for oper-
ators or equipment.
All utility must be installed by experi-
enced technicians, especially electric
supply only by a certified electrician.
2.3.1. Environmental Require-
ments
For best process results it is recommended to use
the machine in a clean room class 1000 or better.
The machine should be located in a vibration free
area (category VC-C, i.e. flow displacement
speed < 12.5 m/s in any direction); higher vibra-
tion would impair machine performance.
SUSS recommends that the MA6 should be set
up on the vibration-insulated base frame, de-
signed specifically for this purpose.
Also the exhaust duct must not transmit building
vibrations to the machine.
The machine should be carefully levelled. For
coarse levelling the foot screws are used; fine
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 33
2
levelling is done by regulators for the pressurized
dampers under the machine base plate. (Level-
ling regulators of the vibration-insulated base
frame).
The room should be free from dust and aggres-
sive fumes (acid, base or solvent).
The room temperature should be 20 -22 C re-
spectively 68 -72 F.
The relative humidity of the room should be 45 -
55%.
Yellow lighting (light spectrum missing blues) is
required for exposure processes.
Service and maintenance area:
The recommended distance from wall or other
machines should be at least 710 mm (for ma-
chine dimensions see dimensional drawing be-
low).
The machine can be used at geographical height up
to 1500 m. Installation in higher regions must be
agreed and specially adjusted by SUSS Service.
2.3.2. Weight of the MA6/MA8
All listed weights include tooling and standard ac-
cessories kit:
Special options could increase weight.
Note:
Additional weight of the transport crate is given only
as safety information for transport purposes.
MA8: approx. 480kg (incl. table); add 340kg for
the crate.
MA6 with LH1000: approx. 340kg (without table);
MA6 with LH350: approx. 320kg (without table);
BA6 (without LH, TSA) approx. 260kg (without ta-
ble);
For MA6 or BA6 add 170kg for the crate.
The MA6/BA6 vibration-isolating table has a weight
of 110kg. It is delivered in an extra crate.
The weight distribution to the machine feet is rel-
atively uniform with the MA8 (5 feet, each about
100kg). The special vibration-isolating table for
the MA6 has only 4 feet and the highest load is
positioned under the lamp house.This highest
load is smaller than 150kg with LH1000 installed.
The center of mass is located between the mid-
dle of the machine and the lamp house.
The diameter of each foot is 80 mm.
INSTALLATION OF THE MA6-MA8
34 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
2.3.3. Dimensions
2.3.3.1. MA6/ BA6
Width: 1214mm (incl. tray plate on left, without
tray: 926mm);
Depth: 1105mm in MA mode, incl. lamp house
(main body: 940mm)
1300mm in BA mode, incl. lamp house,
940mm for BA6 (without LH, TSA)
+ 70mm for connectors on back;
handrest on front of vibration-isol.table
increases depth by 60mm
Height: (always with table, which is 700mm high)
1570mm with LH1000
1535mm with LH350
1040mm for BA6 (without LH,TSA)
+ height of monitor on top.
Note:
with TSA tilted up and all wiring on
top, the height will go up to 1760 mm.
All Dimensions
in mm
FRONT VIEW
1
5
7
0

r
e
s
p
.

1
5
3
5
MA6 (incl. Table)
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 35
2
All Dimensions in mm
TOP VIEW
MA6 (without Table)
INSTALLATION OF THE MA6-MA8
36 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
2.3.3.2. MA8
Width: 1295mm
Depth: 938mm (in MA mode)
+ 70mm for connectors on back,
1088mm (in BA mode)
Height: 1595mm
All Dimensions in mm
FRONT VIEW
MA8
53
1295
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 37
2
Note on Recommended Service Area:
For service purposes the user should provide a free
distance of 710mm (SEMI S8 recommendation) be-
tween the machine main body (see drawings - but
disregarding excess length of BA-mode, tray plate,
lamp house, connectors and optional table-hand-
rest) and any adjacent wall or other machine.
All Dimensions in mm
SIDE VIEW
62
MA8
INSTALLATION OF THE MA6-MA8
38 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
2.3.4. Earthquake Tie-Down
Layout
If required, the machine can be fixed at the floor to
prevent accidental movement in case of an
earthquake.
The machine itself - respectively the vibration-isolat-
ing table - is to be fastened on the floor using 4 solid
brackets, 2 on left and 2 on right side on each cor-
ner.
Three different situations are possible, requiring dif-
ferent brackets:
1. MA8 with integrated vibration-isolating table,
2. MA6 or BA6 with SUSS vibration-isolating table,
3. MA6 or BA6 without table, resting on a user pro-
vided desk.

1. MA8 tie-down is done with brackets
250x90x10x80mm (80mm wide, 10mm thick). A
set of 4 should be included in the machine acces-
sories or used for tie-down of the machine to the
shipment pallet. If missing, any appropriate solid
brackets could be used, or order SUSS part#
164413 (1bracket).
Each bracket must be screwed to one of the four
corner feet of the table using 4 screws M8 and
compatible profile slot stones, and to the floor us-
ing 2 screws M10 or equivalent (see picture MA8
Foot Tie-down).
2. The MA6/BA6 vibration-isolating table must be
tied-down with brackets holding down the side
cross-ties of the table (after removal or cut-out of
the sidewall sheets). With strong brackets it is
sufficient to tie down only 2 diagonally across po-
sitioned corners. An example is shown in picture
MA6 Cross-Tie Tie-down, this example uses 2
brackets#164413 bolted together by 4 screws
M10x120 (Bracket#164413 is not shipped with
the MA6).
To avoid overload and breakage of the pneumat-
ic dampers in case of a seismic event, the ma-
chine plate should be equipped with a stable link
to the vibration-isolating table - but without inter-
ference to the vibration-isolation. This emergen-
cy link can be achieved by screwing 8 (2 at each
corner) screws M8x80 through holes provided in
the table to the bottom side of the machine. Pic-
ture MA6 Plate to Table Link shows this movable
link between the tip of a foot and the bottom of
the machine.
3. The desk carrying a MA6 or BA6 directly must be
secured to the floor by the user according to the
individual requirements of the used desk. The
machine base plate should be tied at all corners
to the desk using the brackets with are always
shipped with the machine, attaching the machine
to the crate pallet - or with comparable simple but
strong brackets.
A short M10 screw ties each bracket to the ma-
chine, and two M12 screws or equivalent hold the
bracket to the desk (see picture MA6 Direct Tie
as an example).
Tie-down of additional components, not mounted to
the machine:
Those are 2 subassemblies: The lamp power supply
CIC1200 (weight:20kg) and the IPC (computer,
weight: 28kg).
No brackets are delivered or recommended for
these components. But both can be tied down rela-
tively simple:
The CIC can be retained on its plate underneath
MA8 Foot Tie Down MA6 Cross-Tie
Tie-Down
MA6 Plate-to-Table Link
MA6 Direct Tie
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 39
2
the machine using 2 strong straps
or - if preferably placed on top of the computer
case - by 2 long straps around the solid computer
case.
The (black) computer case itself can be retained
to the floor by 4 screws (6 to 8 mm thick) through
the square holes in the rails crossing the case at
front and rear on bottom inside. Those 4 holes
are positioned on a 110x500 mm rectangle. To
apply the tie-down-screws, the 4 holes in the rails
must at first also be drilled through the case bot-
tom.
Note:
If occasional moving of the lamp house on its rails is
required for any reason (at the MA8 for change
between the alignment modes MA or BA) always
make sure, that the lamp house is securely tied to
the rails again in the final position with all screws
2.3.5. Pneumatic Connectors
All pneumatic connectors are located on back of the
machine.
3 for Vacuum, 2 for CDA and 1 for Nitrogen.
Additionally 2 connectors are provided for release of
used gas from valves.
For exact locations see following picture:
Connections on back of MA6 / MA8
1 Main Power
2 Compressed air
3 Nitrogen
4 Vacuum
5 Used gas output
The machine is equipped with connections for pneu-
matic hoses, external diameter 6 mm or alternatively
with connections for pneumatic hoses, external di-
ameter 1/4 inch. Hose couplings for connection to
the supply media are not included in the shipment.

INSTALLATION OF THE MA6-MA8
40 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
2.3.6. Lamp Cooling
2.3.6.1. Cooling the Exposure Lamp
1500 W
All data apply to the following exposure lamps:
USH 1500 KS - PN: 191142
Lamp operation life time: 1000h
1)
CDA: Clean Dry Air
2)
Temperature -Outlet: measured at clean room
temperature 20C - 22C and specified flow;
measured directly in solid LH outlet tube.
2.3.6.2. Cooling the Exposure Lamp
1000 W
All data apply to the following exposure lamps:
HBO 1000 W-D - PN: 148 959
USH 1000 KS - PN: 169 776
Lamp operation life time: 1000h
3)
measured in approx. center of a straight segment
of duct - preadjusted with closed LH door and
shutter, heat sink cooling off.
Item to be cooled Value Unit Notes
Exposure Lamp 1500 W
Lamp House (LH) LH1500
N2 primary pressure
after input gauge
2 bar
0,2 MPa
N2 consumption,
overall
1.5 m/h
N2 throttle, lower
socket cooling
50 kPA
N2 lower socket 470 l/h
by service
personnel
N2 upper socket 400 l/h
by service
personnel
N2 shutter 600 l/h
by service
personnel
CDA primary pressure 5 bar
0.5 MPa 1)
CDA ellipsoid mirror 1.7 m/h
CDA consumption,
overall
2.7 m/h
heat sink,
ellipsoid
Exhaust
temperature - outlet
100 2 C
2)
Intake duct of LH low-
er
- open
Exhaust duct of LH,
upper. Average veloc-
ity
2.2 m/s
Duct, inner diameter 100 mm flexible
Flow rate, exhaust
duct of LH
65 m/h 3)
Item to be cooled Value Unit Notes
Exposure Lamp 1000 W
Lamp House (LH) LH1500
N2 primary pressure
after input gauge
2 bar
0,2 MPa
N2 consumption,
overall
0.9 m/h
N2 throttle, lower
socket cooling
45 kPA
Alarm limit
30kPA
N2 lower socket 340 l/h
by service
personnel
N2 upper socket 300 l/h
by service
personnel
N2 shutter 260 l/h
by service
personnel
CDA primary pressure 5 bar
0.5 MPa 1)
CDA ellipsoid mirror 1.0 m/h
LH1500
only
CDA consumption,
overall
2.0 m/h
heat sink
ellipsoid
Exhaust
temperature- Outlet
80 2 C
2)
Intake duct of LH low-
er
- open
Exhaust duct of LH,
upper. Average veloci-
ty
1.5 m/s
Duct, inner diameter 100 mm flexible
Flow rate, exhaust
duct of LH
42.5 m/h 3)
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 41
2
2.3.6.3. Cooling the Exposure Lamps
500W and 350W in LH1000
1)
CDA: Clean Dry Air
2)
Exhausted air temperature measured at (input)
clean room temperature 20C - 22C
3)
to be measured in open air flow before flexible
duct in solid outlet tube
(not interfered by heat sink stream - 3 small inside
tubes from bottom)
4)
Adapter set 182721 includes special N
2
socket
cooling tube (182612) and special socket heat
sink (182609) -
4a)
apply heat sink on lower lamp socket -
4b)
do not use heat sink 182609
The listed data apply to the following exposure
lamps:
A) deepUV 500W: UXM 501 MD - PN 148979;
B) standard 500W: HBO 500 W/B - PN 188816
C) 350W HBO 350 W-S - PN 146049
(Note: reduced deepUV and reduced Ozone generation),
USH 350 DS - PN 182538;
Lamp operation Life Time of 350W lamp: only 600h
Lamp House (LH) LH1500/ LH1000
Exposure Lamp (power) A) 500W
deep UV
B) 500W
Standard
c) 350W
Adjustable Item Unit Value Value Value Notes
Nitrogen primary pressure bar 1-2 1-2 1-2 =0,1 - 0,2MPa
N
2
consumption, overall
m
3
/h
0,66 0,50 0,35
N2 throttle, sockets:
N
2
lower socket
N
2
upper socket
l/h 175
240
130
175
150
-
adjustment by
service personnel
only
N2 shutter l/h 240 200 200 service only
CDA
1)
primary pressure
bar 5 5 5 = 0,5 MPa
CDA consumption, overall
m
3
/h
0,6 0,6 0,3 heat sink
CDA ellipsoid mirror l/h - - - no cooling
Intake tube (lower) of LH closed closed closed by tube cover
Exhaust tube (upper) of LH exhausted exhausted open
Flexible duct, diameter mm 100 100 100(option)
Flow rate in outlet
3)
m
3
/h
7,4 7,4 7,4 (opt)
Average air velocity in out-
let
3)
m/s 0,25 0,25 0,25
Air temperature in outlet
3)

-at nominal power
C 81 2 75 5 70 5
see Note
2)
Power range W 400-600 400-600 275-380
Lamp adapter set Part#
182 721
4a)
182 721
4b)
112655
Special attention Pola-
rity
reversed!
anode UP
INSTALLATION OF THE MA6-MA8
42 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2
2.3.6.4. Cooling the Exposure Lamps
500W and 350W in LH350
1)
CDA: Clean Dry Air
2)
Exhausted air temperature measured at (input)
clean room temperature 20C - 22C
3)
to be measured in open air flow before flexible
duct in solid outlet tube
(not interfered by heat sink stream - 3 small inside
tubes from bottom)
4a)
Retrofit with valve required
350W lamp adapter 111071 to be removed
4b)
350W lamp adapter 111071 to be removed
The listed data apply to identical exposure lamps as
for the LH1000.
Lamp House (LH) LH350
Exposure Lamp (power) A) 500W
deep UV
B) 500W
Standard
c) 350W
Adjustable Item Unit Value Value Value Notes
Nitrogen primary pressure bar 1-2 1-2 1-2 =0,1 - 0,2MPa
N
2
consumption, overall
m
3
/h
0,6 0,5 0,3
N2 throttle, sockets:
N
2
lower socket
N
2
upper socket
l/h 200
240
200
175
180
-
adjustment by
service personnel
only
N2 shutter (T9.6) l/h 260 260 260 service only
CDA
1)
primary pressure
bar 5 5 5 = 0,5 MPa
CDA adjustment by throttle
T9.9 (in turns open)
Turns 7 7 5 heat sink
Intake tube of LH Upper/
open
Upper/
open
Lower/
closed (std)
Exhaust tube of LH Lower/
exhausted
Lower/
exhausted
Upper/
open (std)
Flexible duct, diameter mm 100 100 100
(optional)
(std:350W lamp
without exhaust)
Flow rate in outlet
3)
m
3
/h
7,4 7,4 7,4 (opt)
Average air velocity in out-
let
3)
m/s 0,25 0,25 0,25
Air temperature in outlet
3)

-at nominal power
C 80 75 not
defined
see Note
2)
Power range W 400-600 400-600 275-380
Lamp adapter set Part#
189553
4a)
159485
4b)
(111071)
Special attention Pola-
rity
reversed!
anode UP
INSTALLATION OF THE MA6-MA8
SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8 43
2
2.4. Mode Set-Up:
MaskAligner or
BondAligner
Depending on how a MA6/BA6 or MA8/BA8 has
been ordered and has been supplier-configured, the
application mode can be optionally toggled between
MaskAligner- and BondAligner-mode.
Those modes require:
different alignment tooling adapters,
different longitudinal positioning of the mirror
house (in order to make room for the bond adapt-
er frame).
The position of the mirror house platform is locked in
both potential positions. Sensors in the machine
identify the actual position and configuration.
This mode change can be done only during every
start-up of the machine. The user will be asked for
the application mode. If he selects to change the
mode, the position lock for the mirror house platform
will be released. Then the user can manually shift
the platform until it is automatically locked again in
the other position
This also is required before the machine boots up in
the other mode.
Caution!
The following applies only for the ma-
chine MA8.
The machine type MA8/BA6 has an an-
gled mirror house with the lamp house
positioned sideways.
Only the mirror house segment without
the lens system can be moved together
with the platform. To allow for this lon-
gitudinal movement, at first the lamp
house LH1000/LH1500 together with
the optics-containing tube must be mo-
ved sideways.
Two positions are predefined at the
lamp house rails: always slide the lamp
house until it touches the factory-fixed
stopper, then secure it in this position
with all its crews to the rails.
The distant position is required for BA-
mode and during every movement of
the mirror house platform.
The closer position is required to use
the lamp in MA-mode.
Always make sure before switching on
the lamp of the MA8, that the lamp
house is moved fully to the closer stop
position and the optics-containing tube
extends into the mirror house tube.
This is important for safety reasons, to
avoid excessive UV stray-light exiting
from a gap between the tubes. It is also
important to achieve the required light
uniformity at the exposure stage.
During extended use of BA-mode it is
recommended, to disconnect the
CIC1200 lamp supply from the supply
line.
INSTALLATION OF THE MA6-MA8
44 SAFETY-INST MA6-8 Rev04 04-08 INSTALLATION of the MA6-MA8
2

SUSS MicroTec Worldwide
ASIA
SUSS MicroTec KK (Japan)
GITC 1-18-2, Hakusan, Midori-ku
Yokohama, Kanagawa, J apan 226-0006
Phone (+81)-45-931-5600
Fax (+81)-45-931-5601
SUSS MicroTec (Shanghai) Co.,Ltd.
580 Nanjing W.Rd
Nanzheng Building Room 606
200041 Shanghai PRC
Phone (+86) 21-52340432
Fax (+86) 21-52340430
SUSS MicroTec (Taiwan) Co., Ltd.
8F l11 l No. 81 l Shui-Lee Road
Hsin-Chu l 300 l Taiwan
Phone (+886)-(3)-5169098
Fax (+886)-(3)-5169262
SUSS MicroTec Co., LTD
(South and Northeast Asia)
3388/92-93 I 25th Floor l Sirinrat Building
Rama IV Road l Klongtoey
Bangkok 10110 l Thailand
Phone (+66)-(0)-2350 6038
Fax (+66)-(0)-2633 5728
EUROPE
SUSS MicroTec Ltd.
Hogwood Ind. Estate
23, Ivanhoe Road
Finchampstead, Wokingham
Berkshire RG40 4QQ l England
Phone (+44)-(0) 1189-732144
Fax (+44)-(0) 1189-734395
www.suss.com
SUSS MicroTec S.A.
Avenue des Colombires
F-74490 Saint J eoire l France
Phone (+33)-(0) 4 50 35 83 92
Fax (+33)-(0) 4 50 35 88 01
SUSS MicroTec Test Systems GmbH
Sss-Strasse 1
D-01561 Sacka/Dresden l Germany
Phone (+49)-(0) 35240-73-0
Fax (+49)-(0) 35240-73-700
SUSS MicroTec Lithography GmbH
Schleissheimer Strasse 90
D-85748 Garching/Mnchen l Germany
Phone (+49)-(0) 89/3 20 07-0
Fax (+49)-(0) 89/3 20 07-162
NORTH AMERICA
SUSS MicroTec Inc.
Western Regional Sales Office
8240 So. Kyrene Road Suite 101
Tempe, AZ 85284-2117 l USA
Phone (+1) (480) 557-9370
Fax (+1) (480) 557-9371
SUSS MicroTec Inc.
228 Suss Drive
Waterbury Center, VT 05677 l USA
Phone (+1) (802) 244-5181
Fax (+1) (802) 244-5103

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