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4
4
H
2
OSiOH
4
4
C
2
H
5
OH: 2
nSiOH
4
nSiO
2
2nH
2
O: 3
However, not all the hydroxyl groups on the silicon atom react
with each other. Thus the silica particles contain a large number of
hydroxyl groups on their surfaces. The PVB molecules also involve the
hydroxyl groups. The silica particles can be connected by the PVB
binder owing to the existence of the hydroxyl groups in both the PVB
binders and the silica particles [17]. The PVB modication of lm
enables us to physically touch AR lms without any microscopic
damage since the AR lms become stronger. The abrasion resistance
test was performed by a dragwipe test. It is observed that the abrasion
resistance of lms increases with the increase of PVB content. After
rubbing the lms 100 times, the lms without PVB physically damaged
seriously. However, lms with 2.0 wt.% PVB show no visible damage
under anoptical microscope. Alarger amount of PVBis not recommended
because it will occulate the silica sol. During the deposition process, the
occulated silica sol is not stable, which makes the sol not suitable for
coating.
3.3. LIDT of lms
It is well known that solgel derived silica AR lms possess very high
LIDT [8,18]. Fig. 3 gives the LIDTs measured at 1053 nm for all the lms,
which correspond to the highest energies at which no damage occurred.
The LIDT values for the lms with different PVB contents are 30.0, 34.1,
35.5, 37.2, 40.1, 38.1, and 35.1 J/cm
2
, corresponding to F0, F2, F4, F6, F10
,
F15 and F20 respectively. With the increase of PVB content, the LIDT of
silica lms increases rstly from30.0 J/cm
2
(F0) to 40.1 J/cm
2
(F10), and
thendecreases quickly to 35.1 J/cm
2
. The lmF10has the highest LIDT, in
which the PVP content is 1.0 wt.%. It shows that the addition of a suitable
amount of PVB can improve the laser damage resistance of silica lms,
but the excessive PVB reduces the LIDT. The increase in LIDT may mainly
result from the increase in lm strength induced by the enhanced
particle-to-particle bond strength due to the PVB binder. The silica lms
are normally prepared from organic reagents, thus organic impurities
and other contaminants possibly remained in the nal lms. When some
of these organic impurities andother contaminants are rapidly vaporized
bythelaser irradiation, thelms woulddamage. Therefore, it is suspected
that lm weakness can contribute to laser damage and higher LIDT of
lms can be obtained when the lms are strengthened. However, PVB
itself can act as organic impurity and excessive amount of PVB has a
negative effect on the LIDT. In addition, it suggests that lm F6 modied
with suitable PVB content has the most uniform structure among all the
lms, which will be discussed in Section 3.4. The representative
morphologies of the damaged areas for the lms with and without PVB
addition are shown in Fig. 4. All samples show similar annular damage
spots induced by the laser surface burning of lms. At the center of the
damage spots the lm materials have been entirely removed. Beyond a
certain distance from the center, no material loss can be observed. This
suggests that the damages of lms may be caused by laser-induced
ablation processes. In Fig. 4, the different surface morphologies indicate
that the lm without PVB suffered the most serious damage while the
lm prepared with 1.0 wt.% PVB has the mildest damage. It shows that
the PVB content has a positive effect on the LIDT of the lms.
3.4. Relation between microstructure and LIDT of lm
Themicrostructureof PVB/silicaARlms shouldalsobeconsideredin
order to understand the effect of PVB on LIDT. The colloidal particles
producedby the solgel process have sphere structure andsubsequently
formlms withporous structure bypackingthesesilica spheres [19]. The
microstructure of the silica lm is controlled by several factors such as
the reaction condition, the intrinsic microstructure of silica particles and
the deposition process. It is known that the microstructure of the solgel
lm has a signicant effect on the LIDT of the lms [20]. Solgel lms
possess porous structure formed by particle stacking, which provides
Fig. 2. Variation of refractive indices and porosity of lms with PVB content.
Fig. 3. Laser induced damage threshold of lms with different amount of PVB.
2485 F. Chi et al. / Thin Solid Films 519 (2011) 24832487
good LIDT. Solgel lms have a good space capability to accommodate
thermal expansionwhichoccurs during laser irradiationprocess because
of the absorption of laser energy by the lm. Thus the microstructure of
thelmis alsoa keyfactor totheLIDT. Scanningprobe microscope(SPM)
analysis is an effective tool to investigate the microstructure of the lm,
thus we characterize the silica lms using a SPMand relate the results of
SPMto the laser induced damage behavior of the lms froma particular
view.
Fig. 5 shows the two-dimensional SPM images of lms F0, F10 and
F20, indicating the different porous structures and the different
surface roughness. It is distinctly observed that the surface of the lm
without PVB modication is composed of silica particles and rather
rough as given in Fig. 5(a). In contrast, the lm F10 with 1.0 wt.% PVB
modication is dense and the surface is smooth as shown in Fig. 5(b).
It indicates that tighter structures are formed in PVB/silica lms and
that the tightness is improved with the PVB modication. However,
when the PVB content increases in excess of 1.0 wt.%, the silica
particles become larger, leading to a rougher lm. The observation is
consistent with the results of refractive index and porosity of lm. The
root-mean-square (RMS) roughness values of lms were analyzed
with a SPM. The RMS values of the lms F0, F10 and F20 are 5.12, 3.25,
and 4.61 nm, respectively. The results indicate that a suitable amount
PVB modication can decrease the surface roughness, and surface
roughness increases as the PVB content exceeds an optimal value. As
shown in Section 3.3, the LIDT values of lms showthe same trends as
the microstructures of the lms. From the results derived from the
SPM, it could suspect that the LIDT of the lm is positively dependent
Fig. 4. Laser induced damage morphologies of the annealed lms with Nikon microscope:
(a) lm without PVB, (b) lm with 1.0 wt.% PVB, and (c) lm with 2.0% PVB.
Fig. 5. Two-dimensional SPM images of annealed lms: (a) lm without PVB, (b) lm with
1.0 wt.% PVB, and (c) lm with 2.0% PVB.
2486 F. Chi et al. / Thin Solid Films 519 (2011) 24832487
on the microstructures of the lms. When the lm composed of
uniform silica particles has a uniform microstructure, it may have a
stable structure and possesses a higher LIDT.
The zetasizer nano particle analyzer was used to investigate the
microstructures of silica particles in the sols. Fig. 6 shows the particle
size distributions of silica sols S0, S10, S20, corresponding to PVB
contents of 0 wt.%, 1.0 wt.% and 2.0 wt.%, respectively. The particle
size distributions are narrower in the PVB/silica sols than those
without PVB, and the particles are smaller in the PVB/silica sols. The
results indicate that PVB has the ability to inhibit the growth of silica
particles. It agrees well with the results of SPM, in which the lm
derived from sol S10 has a more uniform structure. During the
deposition process, the small particles may be stacked tightly so that
the tightness of the lm can be enhanced.
4. Conclusion
PVB modied silica AR lms were prepared through the addition of
PVB to the solgel precursor solution. The addition of PVB to silica sols
was found to increase the LIDT of the lms prepared from the sols. The
increase in LIDT was due to the increase in lmstrength and uniformity
of lm microstructures. Adhesive-resistance test showed that the
strength of the lm was enhanced by the incorporation of PVB into
lms. Suchlmwas more difcult todamage by the laser irradiationdue
to its improved physical strength. Furthermore, the result of the nano
particle analyzer showed that the growth of the silica particles was
controlled by the addition of the optimal amount of PVB, and a stable
silica sol was obtained in which the size of sol particles was more
uniform. As a result, the lm deposited from such silica sols possessed
more uniform microstructures. The uniform microstructures made the
lm have a good space capability to accommodate thermal expansion
which occurred during laser irradiation process.
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Fig. 6. Particle size distributions of the PVB modied silica sols: (a) sol without PVB,
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2487 F. Chi et al. / Thin Solid Films 519 (2011) 24832487