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I. INTRODUCTION
View Port
Laser
Radiation
248 nm
Quartz
Lens
Targtet
Assembly
Gas Inlet
Plume
Substrate
Holder
(200)
200 mTorr
100 mTorr
20 mTorr
0.1 mTorr
35
40
45
50
55
60
65
Fig.2. XRD spectra for the MgO thin films on Si (100) at the
substrate temperature of 450C and laser fluence of 7J/cm2
200 mTorr
(111)
100 mTorr
30
35
40
45
50
55
60
(200)
500 C
450 C
(220)
o
400 C
35
40
45
50
55
60
65
(220)
(200)
(111)
65
(200)
(220)
3 J/cm
5 J/cm
(111)
25
30
35
7 J/cm
40
45
50
55
60
65
(220)
(111)
(200)
7 J/cm
5 J/cm
3 J/cm
30
35
40
45
50
55
60
65
Fig.7. SEM images for (a) the fracture section and (b) the
surface morphology of the MgO films deposited on Si(100)
at 400C and 5J/cm2 in oxygen ambient of 200mTorr.
IV. SUMMARY
[3]
[9]