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501507
Yong-Hee Lee
Department of Physics and Graduate School of Nanoscience & Technology,
Korea Advanced Institute of Science and Technology, Daejeon 305-701
Kyu Hwan Hwang, Byoung Duk Lee, Joon-Gu Lee, Young-Woo Song and Jong Hyuk Lee
Samsung Mobile Display Co., Ltd., Yongin 446-577
(Received 15 May 2009)
We demonstrate a thin metal-dielectric structure that delivers low reflection and high absorption
over the entire visible spectrum. The thin black film consists of SiO2 /Cr/SiO2 /Al layers deposited
on a glass substrate. The measured reflectance and absorptance of the black film are 0.7% and
99.3%, respectively, when averaged over the range 380 780 nm. The total thickness of the black
film is only about 220 nm, and it can be used as a thin absorbing layer for displays that require
both broadband antireflection and high-contrast characteristics.
PACS numbers: 42.79.-e, 78.20.-e, 85.60.pg
Keywords: Black film, Metal-dielectric film, Contrast, Absorber, Antireflection
I. INTRODUCTION
In the design of the black film, the optical interference and the metallic absorption/dispersion are properly
taken into consideration to achieve optimal performance.
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Journal of the Korean Physical Society, Vol. 55, No. 2, August 2009
In our design, the choice of a proper top metal material turns out to be critical for obtaining a broadband
uniform absorption. In general, it is not easy to maintain
a constant phase difference between reflections from any
two layers. In order to minimize the overall reflection,
we search for a thin metal layer that is highly absorptive.
Generally, the energy absorbed in the metal layer is proportional to the product of the refractive index (n) and
the extinction coefficient (k) [21] Metals having high n
and high k values are highly reflective at the same time.
Therefore, in order to obtain a high absorption value,
optimized n and k values are required.
An absorptance plot of artificial 10-nm-thick metal
films with various n and k combinations is shown in Fig.
2. We assume the free-standing metal films to be surrounded by SiO2 . Note that the red-colored area of high
absorptance is localized where both n and k values lie
between 2.8 and 4.5 Accordingly, both Cr and Mo are
expected to be good candidate materials for the thin top
metal layer.
A striking comparison between four different thin top
metals is shown in Fig. 3. The thin black films containing Cr or Mo as the top metal layer show a noticeably
reduced reflectance in comparison to those employing Al
or Ag. In this computation, the thickness of the absorbing top metal layer is adjusted to meet both amplitude
and phase-matching conditions. The two dielectric layers
are 80-nm-thick SiO2 and the bottom thick metal layer
is a 100-nm-thick Al layer
A Black Metal-dielectric Thin Film for High-contrast Displays Sang-Hwan Cho et al.
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Fig. 3. (a) Reflectance of thin black films with different top metal layers (Cr: 10 nm, Mo: 6 nm, Al: 4 nm, and Ag: 10 nm).
The dielectric material is SiO2 (80 nm), and the bottom metal is Al (100 nm). (b) Magnified version of (a) corresponding to
the Cr and the Mo cases.
Fig. 4. (a) Irradiance profile inside a thin black film at 550 nm. (b) Reflectance spectra of thin black films with different
bottom metal layers.
4.
Layers
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Journal of the Korean Physical Society, Vol. 55, No. 2, August 2009
Fig. 5. (a) Thin black film without a phase-compensation layer. (b) Amplitude of the reflection coefficient and the phase
difference calculated for the structure shown in (a) at normal incidence. (c) Thin black film with a phase-compensation layer.
(d) Amplitude of the reflection coefficient and the phase difference for the structure shown in (c). (e) Comparison of the
reflectance with and without a compensation layer. (f) Effects of dielectric materials of higher indices.
metal, three different metals (Al, Cr, Mo) were compared. Table 1 summarizes four optimized designs with
different material combinations. It is interesting to see
that with our choice of materials, all the designs exhibit
a respectable performance.
5. Optimized Designs
A Black Metal-dielectric Thin Film for High-contrast Displays Sang-Hwan Cho et al.
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Design
Design
Design
Design
A
B
C
D
Phase-compensation
layer
SiO2 (80 nm)
SiO2 (80 nm)
SiO2 (80 nm)
SiO2 (80 nm)
Phase-matching
layer
SiO2 (80 nm)
SiO2 (80 nm)
SiO2 (80 nm)
SiO2 (80 nm)
Bottom thick
metal layer
Al (100 nm)
Al (100 nm)
Cr (100 nm)
Mo (100 nm)
Average R
(380 to 780 nm)
0.8%
0.6%
0.2%
0.6%
Average A
(380 to 780 nm)
99.2%
99.4%
99.8%
99.4%
Fig. 6. (a) Cross-sectional TEM image of a black metal film. (b) Optical constant dispersion curves of deposited thin films
measured by ellipsometry. Solid lines represent the n value, and dashed lines represent the k value.
Fig. 7. (a) Reflection spectra of design A obtained from the vertical direction. The black line represents the measured
spectrum and the red line the calculated one. (b) Reflectance spectra of thin black films with different structural parameters.
(c) Images of the thin black film (right) and an Al film (left).
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Journal of the Korean Physical Society, Vol. 55, No. 2, August 2009
Design A
Design A-1
Design A-2
SiO2
65
80
80
Al
100
100
100
sequentially deposited on a glass substrate in an evaporation chamber. Since the dielectric constants of the
materials vary somewhat depending on the deposition
method and conditions [27], they were measured directly
from films prepared under identical conditions by using
ellipsometry. We adjusted the thicknesses of all the layers of design A by utilizing the measured dielectric constants. The thicknesses of all the layers were estimated
by means of transmission electron microscopy (TEM).
Fig. 6(a) shows a cross-sectional TEM image of the thin
black film whereas Fig. 6(b) shows the dispersion curves
for all the materials used.
The reflection spectrum of the sample was measured using a UV/VIS spectrophotometer (Perkin Elmer
Lambda 950). Fig. 7(a) shows a typical reflection spectrum obtained from the direction normal to the substrate. The average reflectance was 0.7% and was measured over the visible spectral range between 380 and 780
nm; this value is lower than that at the air-glass interface. The calculated reflectance [red line in Fig. 7(a)],
which is based on the measured dielectric constants and
thicknesses, reproduces the measured value quite closely.
To estimate the robustness of our design, we fabricated
several samples that differ slightly from design A. Table 2
summarizes the structural parameters. Still, the overall
performance of our thin black film remained satisfactory
[see Fig. 7(b)]. From this observation, we claim that
our thin black-film structure may tolerate variations in
thickness and dielectric constant that usually accompany
typical thin-film deposition processes. An image of the
thin black film is shown in Fig. 7(c), along with that of
an Al film.
IV. SUMMARY
We demonstrate a thin black-film structure that is
anti-reflective and highly absorptive over the entire visible spectrum. The choice of a proper top metal (Cr,
Mo) turns out to be important. A simple four-layer
metal-dielectric structure (SiO2 /Cr/SiO2 /Al/Glass substrate) exhibits a reflectance of 0.7% and an absorptance
of 99.3%, averaged over the visible spectral range of 380
780 nm. The total thickness of the fabricated thin black
film is only 220 nm, which is much thinner than those
of typical black absorbers. Moreover, our design is advantageous in that acceptable samples can be prepared
ACKNOWLEDGMENTS
This work was supported by WCU (World Class University) program through the Korea Science and Engineering Foundation funded by the Ministry of Education,
Science and Technology (Grant Number: R31-2008-00010071-0) and by the Star-Faculty Project (Grant Number: KRF-2007-C00018).
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