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W.G. Sloof
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Questions:
a. Calculate the inelastic mean free path of the Ti 2p3/2 photoelectrons.
b. How does the intensity of the Ti 2p3/2 line change as a function of the
copper film growth time?
c. When island growth occurs, how can this be investigated with XPS?
Note: The photoelectron intensity of the substrate is given by:
Is = Iso exp [-d/( cos )], where Iso is the intensity of the uncovered
substrate and d the thickness of the overlayer.
5. An oxidized silicon surface is analysed with Auger Electron Spectroscopy
(AES) using a 3 keV primary electron beam. In the electron emission
spectrum two main line of silicon are observed: Si KL3L3 @ 1625 eV and Si
L3VV @ 80 eV.
The inelastic mean free path (IMFP) of the electrons depends on their
kinetic energy E (in eV) according to =
Questions:
a. What is the shift of both Auger lines due to chemical bonding between
W.G. Sloof
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a. Give the RBS spectrum of the material and specify the appropriate
energy values at the horizontal axes and give the relative intensities of
the Au and Al signals at the vertical axes.
b. Determine the thickness of the Al foil.
9. Auger Electron Spectroscopy is employed to investigate a joint between
copper and silver. After sputter cleaning the surface with argon ions a
spectrum is recorded at different locations using an electron beam with
energy of 5 keV.
Questions:
a. Why is the Auger electron spectrum usually differentiated?
b. At which kinetic energy do you expect the Ag M5VV line?
c. What is the advantage to use AES instead of X-ray microanalysis?
W.G. Sloof
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10. A steel surface has been analysed with SIMS and SNMS in order to
determine segregation of alloying element. Both analyses have been
executed with the same ion beam.
Questions:
a. Is the sputter yield for SIMS the same as for SNMS?
b. Explain possible differences between the secondary ion intensities of
the analysis with SIMS and SNMS.
11. A steel surface is coated with a thin layer of zinc. A composition depth
profile has been recorded using ion sputtering. The sublimation heat U0 of
Zn is equal to 0.1x10-15 eVcm2 and of Fe 0.3x10-15 eVcm2. The stopping
cross section Sn of Zn is equal to 200x10-15 eVcm2 and of Fe 150x10-15
eVcm2.
Questions:
a. Calculate the Zn/Fe sputter yield ratio. What does this ratio mean for
the acquired composition depth profile?
b. Which sputtering effects must be considered, when analysing the zinc
coating / steel interface?
c. Which analytical techniques may be used in combination with ion
sputtering?
W.G. Sloof
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