Variable Optical Attenuator (VOA) in MEMS Application for optical communication

1. Definition:
Variable optical attenuator is a network device used in optical links that reduces the amplitude or power
of transmitted signal without significantly changing its waveform. This device minimizes the power level
by controlling aperture slit or blocking the light beam with reflective mirror. By using MEMS concept,
VOA can be manufactured in micro scale so that can be applied in various applications
2. Function:
Mostly, variable optical attenuators are used to minimize the optical power so that receiver point can
obtain good reading value. The limitation incoming light power level is not only for data result but also
for the endurance of receiver device.

Figure 1. Function illustration of VOA

VOA is also able to get a flat gain for different wavelength channels in optical amplifiers. In optical
communication networks, optical amplifiers such as erbium-doped fiber amplifiers (EDFAs) are
employed to amplify weak light signals. However, multiple wavelength channels arriving at a node may
pass through different paths and experience different losses.
Moreover, VOA is capable of balancing signals in optical add/drop multiplexers (QADMs). In an OADM,
the power levels of signals to be added cannot be too high, otherwise the existing channels will be
overwhelmed; also, the dropped signals with high powers need to be attenuated before entering the
local network. One attenuator is necessary for each add/drop channel. Besides, the total power is varied
when one (or more channels) is added or dropped; therefore, an attenuator is needed to stabilize the
power coupled into the transmission fiber.

3. VOA configurations:
1. Direct coupling
This is the simplest method. The idea is by giving spoiling the coupling between two
fibers by introducing misalignment, fiber separation, relative angle, or lateral
position. Generally, micrometer screws or motors to change fiber separation.

Figure 2. Direct couple configuration

2. Interference
The attenuation is corresponded to the interference level. This interference condition
can be designed by using reflection model (Figure 3.a), transparent membrane
(Figure 3.b), or etalon model (Figure 3.c).

Figure 3. Interference configuration

3. Diffraction
Diffraction can introduce attenuation. By setting up shutter block, the optical power
of incoming light will decrease. There are three types of shutter which is used in this
configuration such as single shutter, dual shutter, and multi-shutter design.

4. Refraction
To adjust the attenuation level, the shutter (i.e. silicon wedge) is inserted into the
wedge partially into the light path. It is similar by using shutter. To attenuate the
move effectively, two wedges can be used.

Figure 4. Refraction configuration

5. Reflection

Figure 5. Reflection configuration

The reflection type of VOA makes use of mirrors to steer away the light beam
with respect to the output fiber aperture. Because the mirror reflection maintains the
unity of the laser beam field, the reflection-type is expected to have a low WDL and
PDL. The simplest design is to have a flat mirror reflect the incident light back to its
incoming direction, such as the back reflection. The adjustment of attenuation can be
obtained by either translating or rotating the mirror so as to spoil optical coupling.

4. Application
The basic principle of VOA is by blocking the light so that it would reduce the intensity of
received optical power. There would be diffraction as the impact of this blocking. By this
configuration, it is categorized into three type model of diffraction mode:
1. Single shutter
2. Double shutter
3. Multi-shutter
Scientists and engineers working in this field have to refer to VOAs industrial standard
namely Telcordia. There are several critical aspects that should be concerned, for example
low insertion loss (<1 dB), large attenuation range (>20 dB or even >40 dB), fast response
speed(<1 ms), low back reflection, low WDL, low PDL, and low temperature dependence.

Figure 1. Different model of shutter type of VOA

5. Symmetric and Asymmetric

The basic principle of VOA is by blocking the light so that it would reduce the intensity of
received optical power. There would be diffraction as the impact of this blocking. By this
configuration, it is categorized into three type model of diffraction mode:
1. Single shutter
2. Double shutter
3. Multi-shutter
The schematic structure of a developed MEMS VOA is by using two single-mode fibers
aligned very close each other, one as the input fiber and the other as the output. A shutter
is inserted into the light path between the two fibers to block a portion of light. To obtain
variable attenuation, a proprietary drawbridge actuator is employed. The shutter located at
the end of an L-shaped plate is mounted vertically on a mounting plate by a side holder.
Scientists and engineers working in this field have to refer to VOAs industrial standard
namely Telcordia. There are several critical aspects that should be concerned, for example
low insertion loss (<1 dB), large attenuation range (>20 dB or even >40 dB), fast response
speed(<1 ms), low back reflection, low WDL, low PDL, and low temperature dependence.
Dual-single shutter

The schematic structure of a developed MEMS VOA is by using two single-mode fibers
aligned very close each other, one as the input fiber and the other as the output. A shutter
is inserted into the light path between the two fibers to block a portion of light. To obtain
variable attenuation, a proprietary drawbridge actuator is employed. The shutter located at
the end of an L-shaped plate is mounted vertically on a mounting plate by a side holder.

When the shutter is actuated to move in the light path, the attenuation continuously increases to its
maximum value of 45 dB when the shutter is moved to about -7 m.

To attenuate the light, the straightforward method is to use shutters to block the light. When a driving
voltage is applied to the actuator to attract the moving plate down, the shutter will be lifted up and
inserted into the light path. However, from the standpoint of industrial production, surfacemicromachined shutter VOAs are not very attractive, because careful assembly of fragile thin-film based
structures is involved, which is time consuming and low yielding.

Variation in optical power due to differences in active channel power and optical amplifier gain may be
addressed by use of a variable optical attenuator (VOA)
On the other hand, along the communication transmission, signal repeaters and amplifiers are necessary
but these components often associate with wavelength dependencies. The output optical power varies
over different wavelength channels and affects the overall signal delivery

TDL

where F is the actuation force, k the stiffness of the folded beam, e0 the permittivity of air, N
the number of figers, E the Youngs modulus, g the figer gap, V the driving voltage, and L
and b the length and width of the folded beams, respectively. In MEMS VOAs, assume N
205, g 2.5 mm, b 2.5 mm, and L 900 mm (taken from Reference 23). The temperature
dependence of the mirror displacement can be expressed as

As a larger displacement causes a higher attenuation, the thermal softening explains the observed phenomenon that a
higher temperature
induces larger attenuation [43,59]. From Equation 5.23, the mirror shift is proportional to its current position;
therefore, TDL increases with current attenuation level. It explains the
experimental observation that the TDL for the same temperature change increases with
the increase of attenuation level.

WDL
Several physical mechanisms could cause the WDL, such as the wavelength dependence
of the fier property, diffraction of chopped Gaussian beam, diffraction or scattering at
mirror edges, defects of mirrors (surface roughness and scalloping), and interference of
forward stray lights (fier-end reflction, diffracted or scattered light, etc.).
With regard to FVOA and EVOA, the WDL should exhibit
a slow increase with higher attenuation level. This is because the Gaussian beam is almost
fully reflcted (limited by the mirror height), and thus, the diffraction is not signifiant

PDL
The PDL comes from the high conductivity of the metal-coating material applied on the
shutters and mirrors, typically gold or aluminum. Here, gold is chosen as an example
for numerical demonstration

4. Reference:
Liu, A.Q., Photonic mems devices design, fabrication, and control, 173-233.

MEMS VARIABLE OPTICAL ATTENUATOR WITH LINEAR ATTENUATION USING NORMAL FIBERS H. Cai, X.
M. Zhang, C. Lu and A. Q. Liu School of Electrical & Electronic Engineering, Nanyang Technological
University, Nanyang Avenue, Singapore 639798, ( Corresponding author, Tel: 65-67904336, Fax: 6567920415, Email: eaqliu@ntu.edu.sg)
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea,
June 5-9, 2005