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L U N D UN I V E R S I T Y

Outline&
Digital'IC*Design*ETIN20'
Lecture'3*'Devices'con:nued'

Joachim'Rodrigues,'LUND'UNIVERSITY'
'

Recap&
Models&
Velocity&satura2on&
Exercise&
Sub8threshold&current&
Parasi2cs&
Capacitance&&
Resistance&
Fundamentals&
DC&margins&
& Lund University / Dept. of Electrical and Information Technology / September 4, 2014

L U N D UN I V E R S I T Y

- 2

L U N D UN I V E R S I T Y

Recap:&How&does&it&work?&
VGS must be
lager than a
threshold VT

Opens a
channel

VGS

Recap:&How&does&it&Work?&
A simple model:

k
I D = (VGS VT ) 2
2
k:=gainfactor

VDS

VGS > 0

When&VGS%is&increased&above&VT%
More&nega2ve&than&posi2ve&charges&are&
aHracted&close&to&the&gate&(turns&into&n8
type&material)&

n+

n+
p-

A&channel&is&formed&(Strong&inversion)&

ID

VGS > VT

VDS&drives&a&current&ID%

Gate
Source

Depletion region

Drain

p-substrate
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 3

n+

n+

n-channel
p-

Depletion
Region

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 4

Depletion
Region

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Recap:&Linear&Region&(Resis2ve&Opera2on)&

Recap:&Linear&Region&(Resis2ve&Opera2on)&

VDS%is&increased&slightly%

ID(VDS)%has&a&resis2ve&behavior%

Horizontal&E8eld&from&drain&to&source&

ID&has&a&linear&rela2on&to&VGS%

A&current&ID&is&established'
VGS > VT

VGS > VT

ID

VDS<VGS-VT

ID
n+

n+

n+

p-

p-

Depletion
Region

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 5

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Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 6

L U N D UN I V E R S I T Y

Recap:&Linear&Region&(Resis2ve&Opera2on)&

ID&is&propor2onal&to&the&horizontal&E8eld&
!&i.e.&to&the&charge&velocity&caused&by&the&drain&voltage&VDS%

VGS forms a
vertical E-field
n+

n+

Recap:&Satura2on&Region&
VDS%=%VGS%%%VT&&&&&&&&

ID&is&propor2onal&to&the&ver2cal&E8eld&
!&i.e.&to&the&#&of&charges&aHracted&by&the&gate&voltage&VGS%

n+

n-channel

n-channel

VDS<VGS-VT

ID

Strong&inversion&reached&precisely&(i.e.&VGD%=%VT)&&&
No&channel&close&to&the&drain&(pinch8o)&
ID%has&a&quadra2c&rela2on&to%VGS%&
ID%has&a&small&dependence&to%VDS%&
VGS > VT

ID
n+

VDS establish a
horizontal E-field pLund University / Dept. of Electrical and Information Technology / September 4, 2014 - 7

VDS=VGS-VT

n+
VDS /2"
p-

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 8

Depletion
Region

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L U N D UN I V E R S I T Y

Recap&
Equations widely used models for manual
calculations
kn W
(VGS - VT ) 2 (1 + VDS ) saturation
2 L
V 2
W
< VGS - VT ; I D = kn ((VGS - VT )VDS - DS )(1 + VDS ) linear
L
2

VDS VGS - VT ; I D =
VDS

kn = nCox

Chapter&3&
The&Devices&Cont.&

Often added to
avoid discontinuity

VT = VT 0 + ( -2 F + VSB - -2 F )
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 9

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Model&for&Manual&Analysis&

A&rst&order&model&for&the&velocity&saturated&
region:&

I DSAT

VDSAT 2
W
= n Cox ((VGS VT )VDSAT
)
L
2

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 10

L U N D UN I V E R S I T Y

A&Unied&Model&for&Manual&Analysis&

Vmin 2
W
ID = k
((VGS VT )Vmin
)(1 + VDS )
L
2
'
n

Vmin = min(VGS VT , VDS , VDSAT )

We will transform this model into its unified equivalent

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 11

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Example&&Unied&Model&

A&Unied&Model&for&Manual&Analysis&
VDS 2
' W
I D = kn ((VGS VT )VDS
)(1 + VDS ) Resistive
L
2

= 0.06; kn'

Vmin = min(1.5 0.43, 1.5, 0.63)

V 2
W
((VGS VT )VDSAT DSAT )(1 + VDS ) Velocity saturated
L
2

W
Vmin 2
I D = k ((VGS VT )Vmin
)(1 + VDS )
L
2
0.632
I D = 172.5 106 ((1.5 0.43)0.63
)(1 + 0.06 1.5) = 89.4 A
2
'
n

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 15

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Simple&Model&

Three&Regions&
VDSAT%

Model&for&manual&
calcula2ons&

0&.&63&&V&

&
x&10&

0&.&15&

84

2&

Simulated&

V&GS& =& 2&V&

I&D&&(mA)&
Velocity&
saturated&

Linear&

0&.&1&

I&D&&(A)&

1.5&

V&GS& =&1.5&V&

I D = 88 A
0&.&5&

1&

V&GS& =&1&V&

0.5&

0&
0&

Saturated&
region&

Vmin = min(VGS VT , VDS , VDSAT )

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 13

2.5&

Wmin
0.375
= 115106
= 172.5 A / V 2
Lmin
0.25

VGS and VDS


Find&Vmin& 15 min exercise: calculate ID for different
Velocity&

kn' W
ID =
(VGS VT ) 2 (1 + VDS ) Saturated
2 L
I D = kn'

VT = 0.43V ; VDS = 1.5V ,1V ; VGS = 1.5V ,1V ; VDSAT = 0.63V ;

0&
0.5&

1&

1.5&

2&

2.5&

V&DS&&(V)Technology
&
Lund University / Dept. of Electrical and Information
/ September 4, 2014 - 16

Saturated&
0&

V&DS&&(V)&

1&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 17

2&

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Transistor&Model&for&Manual&Analysis&

A&PMOS&Transistor&
Velocity&satura2on&is&less&pronounced&for&PMOS&due&to&lower&
mobility&
0&

Table&on&Back&Cover&

ID&(mA)&

VGS&=&81.0V&

80.02&

VGS&=&81.5V&

Assume&all&
numbers&
nega2ve!&

80.04&

80.06&

80.08&

VGS&=&82.0V&

Wmin = 0.375 m
Lmin = 0.25 m

VGS&=&82.5V&

80.1&
82.5&

82&

81.5&

81&

VDS&(V)&

80.5&

0&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 18

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 19

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The&Transistor&as&a&Switch&

Simplied&model&averages&the&
currents&on&the&endpoints&of&the&
transi2on&region&(pg&105)&

Velocity
Saturated

x&105&

Req depends on VDS

6&
Velocity
Saturated

5&

&

Problem: RON is time varying,


dependent on the operation
mode

7&

Req

%%

Req

ID (A)

R eq &(Ohm)

The&Transistor&as&a&Switch&

VDS (V)

VDD/2

VDD

4&
3&
2&
1&
0& 0.5&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 20

&

1.5&
%% &

V DD &(V)

&

&

2.5

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 21

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The&Transistor&as&a&Switch&

VDD (V)

1.5

2.5

NMOS (k)

35

19

15

13

PMOS (k)

115

55

38

31

Sub&Threshold&Current&&
&

Req%resistance&for&a&square&transistor&(W/L&=&1)&
in&0.25&um&

SECOND'ORDER'EFFECTS'

(Table&on&Back&Cover)&
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 22

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Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 23

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Sub8Threshold&Region&

The&Trend&is&to&reduce&VT%

Logarithmic

ln(I
ln(IDD
))

The&sub&threshold&drain&
current&has&an&
exponen2al&rela2on&to&
the&gate&voltage&
(compare&to&bipolar).&&

Exponential increase of the


static power!

VT
High Ioff
Low

&

10m

ln (I D)

100u
1u

Sub threshold region

I off = I 0 e

10n

VT
Low Ioff

High
VT

VGS [V]

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 24

100p

VT

1p

VGS (V )
0

0.5

1.0

1.5

2.0

2.5

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 25

VGS VT
mvT

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L U N D UN I V E R S I T Y

VT&in&Short&Channel&MOS&

VT&in&a&Short&Channel&MOS&
VDS = 0

n+

n+
p-

n+

n+

The&Drain/Source&
Deple2on&helps&the&
channel&to&strong&
inversion.&

n+

The depletion region


increases around the
drain when VDS increases

n+
p-

The effect can not be


neglected in a short
channel device

In&a&short&channel&the&
threshold&voltage&tends&
to&be&lower.&

VDS = VDD V tends to be lower


T
n+

n+

p-

p-

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 26

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Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 27

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VT&in&Short&Channel&MOS&

Example8&Measurements&

VT

Channel stretching is
effective for leakage
reduction
VDS

Penalty: Speed

10
0.25

A&reference&circuit&was&
measured&in&the&sub8VT&
domain&VDD&<&500mV&

Energy/Operation [pJ]

0.3

0.35
[V]

0.4

10
0.25

0.45

0.3

DD

10

10

10

0.35
[V]

0.4

0.45

DD

10

Over&400&kHz&at&400mV&

0.25

0.3

0.35
[V]

DD

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 28

10

Total Energy
Dynamic Energy
Leakage Energy

Energy/Operation [pJ]

Long devices have a


higher VT and
consequently lower
leakage

10

Frequency [Hz]

VT

Short
Channel

Energy/Operation [pJ]

10

0.4

0.45

10

10

10
Frequency [Hz]

10

Lund University
/ September 4, 2014 - 29
Fig. 4. Measured
performance/inDept.
termsof
ofElectrical
energy and and
speedInformation
versus VDD Technology
at 23 C.

3Sep-14

29

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L U N D UN I V E R S I T Y

Capacitance&
Two&Types&of&Capacitance&
Junc2on&Capacitance&

Diode&areas&
Contribu2on&from&two&parts&8&area&and&side&wall&&

Capacitance&

Gate&Capacitance&

chapter3.fm Page 112 Friday, January 18, 2002 9:00 AM

SECOND ORDER EFFECTS

8&Gate&to&Bulk&
8&Gate&to&Source/Drain&

112

THE DEVICES

Chapter 3

-16

10

VGS

x 10

Gate Capacitance (F)

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 30


(a)
Figure 3.31 Simulating the gate capacitance of an MOS
transistor; (a) circuit configuration used for the analysis, (b)
resulting capacitance plot for minimum-size NMOS transistor
in 0.25 m technology.

L U N D UN I V E R S I T Y

MOS&Capacitances&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 31

6
5
4
3
2
-2

-1.5

-1

-0.5

GS

0.5

1.5

(V)

(b)

region and its surroundings. The detailed picture, shown in Figure 3.32, shows that the
junction consists of two components:

L U N D UN I V E R S I T Y

Gate&Capacitance&

Channel-stop implant
NA+

Source

Gate

Drain

CGS

CGD

n+

n+

CG

CSB

Cut off

Side wall

tox

Bottom

xj

n+

Side wall

n+

n+

n+

Channel
LS

CDB

Substrate NA

Figure 3.32

Detailed view of source junction.

Bulk&Cap.&
&
Junc2on&Cap.&
The side-wall
junction, formed by the source region with doping N and the p channel-stop implant with doping level N . The doping level of the stopper is usually
larger& than that of the substrate, resulting in a larger capacitance per unit area. The
side-wall junction is typically graded, and its grading coefficient varies from 0.33 to
0.5. Its
capacitance value equals C = C' x (W + 2 L ). Notice that no side-wall
Overlap&Cap.&

The bottom-plate junction, which is formed by the source region (with doping ND)
and the substrate with doping NA. The total depletion region capacitance for this
component equals Cbottom = CjWLS, with Cj the junction capacitance per unit area as
given by Eq. (3.9). As the bottom-plate junction is typically of the abrupt type, the
grading coefficient m approaches 0.5.

+
A

sw

Xd

Linear

Source
ND

jsw j

capacitance is counted for the fourth side of the source region, as this represents the
conductive channel.4
Since xj, the junction depth, is a technology parameter, it is normally combined with
C'jsw into a capacitance per unit perimeter Cjsw = C'jswxj. An expression for the total
junction capacitance can then be derived,

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 32

The&Capacitance&changes&with&
the&opera2on&mode&
Nonlinear'behavior&&

Saturation

n+

n+

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 33

Toactual
actualvalue
valueofofthe
thetotal
totalgate-channel
gate-channelcapacitance
capacitanceand
andits
itsdistribution
distributionover
overthe
the
To
threecomponents
componentsisisbest
bestunderstood
understoodwith
withthe
theaid
aidofofaanumber
numberofofcharts.
charts.The
Thefirst
firstplot
plot(Fig(Figthree
ure3.30a)
3.30a)captures
capturesthe
theevolution
evolutionofofthe
thecapacitance
capacitanceasasaafunction
functionofofVVGSGSfor
forVVDSDS==0.0.For
For
ure
thetransistor
transistorisisoff,
off,no
nochannel
channelisispresent
presentand
andthe
thetotal
totalcapacitance,
capacitance,equal
equaltoto
VVGSGS==0,0,the
L U N D U N I V E R S I TWLC
Y
appearsbetween
betweengate
gateand
andbody.
body.When
Whenincreasing
increasingVVGSGS, ,aadepletion
depletionregion
regionforms
forms
WLCoxox, ,appears
underthe
thegate.
gate.This
Thisseemingly
seeminglycauses
causesthe
thethickness
thicknessofofthe
thegate
gatedielectric
dielectrictotoincrease,
increase,
under
whichmeans
meansaareduction
reductioninincapacitance.
capacitance.Once
Oncethe
thetransistor
transistorturns
turnson
on(V
(VGSGS==VVT),
channel
which
T),aachannel
formedand
andCCGCB
dropstoto0.0.With
WithVVDSDS==0,0,the
thedevice
deviceoperates
operatesininthe
theresistive
resistivemode
modeand
and
isisformed
GCBdrops
thecapacitance
capacitancedivides
dividesequally
equallybetween
betweensource
sourceand
anddrain,
drain,ororCCGCS
WLCoxox/2.
/2.The
The
the
GCS==CC
GCD==WLC
GCD
largefluctuation
fluctuationofofthe
thechannel
channelcapacitance
capacitancearound
aroundVVGSGS=V
=VTTisisworth
worth remembering.
remembering. AA
large
designerlooking
lookingfor
foraawell-behaved
well-behavedlinear
linearcapacitance
capacitanceshould
shouldavoid
avoid operation
operation inin this
this
designer
region.
region.

Dynamic&Capacitance&

VDS=0&

WLC
WLC
oxox

Bottom

CC
GCS
GCS

2WLCoxox
2WLC
33

00

/(V
)
VV
/(V
-V-V
GS
DSDS
GS
T)T

&
at
e

CC
GCD
GCD

11

(b)CC
functionofofthe
thedegree
degreeofofsaturation
saturation
(b)
GCasasa afunction
GC

Figure3.30
3.30 Distribution
Distributionofofthe
thegate-channel
gate-channelcapacitance
capacitanceasasa afunction
functionofofVV and
andVV (from
(from[Dally98]).
[Dally98]).
Figure
Gate8Drain&
Gate8Body&Capacitance&
Oncethe
thetransistor
transistorisison,
on,the
theCapacitance&
distributionofofits
itsgate
gatecapacitance
capacitancedepends
dependsupon
uponthe
the
Once
distribution
becomes&0&with&a&
degreeofofsaturation,
saturation,measured
measuredby
bythe
theVVDSDS/(V
/(VGSGS-V
-VT)T)ratio.
ratio.As
Asillustrated
illustratedininFigure
Figure3.30b,
3.30b,
degree
becomes&0&with&
conduc2ng&channel&
satura2on&&
GSGS

DSDS

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 34

38Sep814&
L U N D UN I V E R S I T Y

34&

Side
Wall

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 35

L U N D UN I V E R S I T Y

Junc2on&Capacitance&

Junc2on&Capacitance
1

Cbottom = C j Area =

Cdi%=%Cbo;om%+%Csw%
Cbo;om%=%Cj%&Area&&&&&&&&&&&Cj&

Dont'count'the'wall'
towards'the'channel'

CC
GC
GC

WLC
WLC
oxox
22

VV
GSGS
VV
TT
(a)CC
functionofofVV
(with V =0)
=0)
(a)
GCasasa afunction
GC
GSGS(with VDSDS

&

CC
GCS==CC
GCD
GCS
GCD

CDi%=%CBot%+%CSW%

Drain/Source Diffusion

Ch To
an w a
ne rds
l

CC
GC
GC

CC
GCB
GCB

Junc2on&Capacitance&

VDS>&0V&

WLC
WLC
oxox
Total&
Capacitance&&
WLC
WLC
oxox
22

L U N D UN I V E R S I T Y

(1

in&F/m2&

Csw%=%Cjsw%&Perimeter&&&&&Cjsw&in&F/m&
&
Dont&count&the&wall&towards&the&channel&into&the&perimeter&

VBD / BS

1
2

C j 0 Area

Abrupt junction

Csw = C jsw Perimeter =


(1

Abrupt vs graded
junction is discussed
in the book (Diode)

VBD / BS

1
3

C jsw0 Perimeter
Graded junction

Cj/Cjsw&is&dependent&on&the&bulk&voltage&
Cj0&&and&0&are&process&parameters&&&
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 36

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 37

L U N D UN I V E R S I T Y

L U N D UN I V E R S I T Y

Gate&Capacitance&

Overlap&Capacitance&

Source

CGD = Cox W Xd

CG%=%Cox%%W%%Le%

Gate
Drain

Xd

&

Leff
CGS

CGS = Cox W Xd

CGD
CGB

Source

Gate

Xd

%
CG&depends&on&the&region&
&

Cox in F/m2

Cox&in&F/m2&

CGS = Co W

CGS

Co in F/m

CGB
Co or Xd are overlap
process parameters

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 39

L U N D UN I V E R S I T Y

Channel&Capacitance&

MOS&Capacitance&Example&

To Bulk

To Source

To Drain

Total Gate Cap.

CGCB

CGCS

CGCD

CG

Cutoff

COX W L

COX W L + 2 C0W

Resistive

(1/2) COX W L (1/2) COX W L

Saturation

(2/3) COX W L

COX W L + 2 C0W
(2/3) COX W L + 2 C0W

Cut&o:&No&channel&&CGC%=%CGCB%

Overlap&
Capacitance&
Resis2ve:&Channel&&Divide&CGC&in&two&parts&
(pg&107)&

Gate&Capacitance&8&0.35&micron&process&
&

Cox&=&4.6&fF/m2&
W&=&0.6m;&&Le&=&0.3&m;&&&
&
CG&=&Cox%W%Le&=&4.60.60.310812&=&&
CG&=&0.83&fF&

Satura2on:&&2/3&of&Channel&to&source&
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 41

Drain

Leff

Or
CGD = Co W

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 40

L U N D UN I V E R S I T Y

(Table 3-4)

Gate&is&overlapping&
Drain/source&
region&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 42

CGD

L U N D UN I V E R S I T Y

L U N D UN I V E R S I T Y

Junc2on&Capacitance&
4

Linearized&Junc2on&Capacitance&
Nonlinear'behavior:&Replace&non8linear&capacitance&by&a&
large8signal&equivalent&linear&capacitance.&
Distributes&equal&charge&over&the&voltage&swing&of&interest&

C (fF)

Abrupt

Cj =

Graded
1

C j0

Vhigh: upper voltage


Vlow : lower voltage

V
(1 D ) m
0

VD (V)

0
-5

-4

-3

m=

-2

-1

Ceq =

0.6

K eq =

1
1
for abrupt and m = for graded junction
2
3

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 43

Q j
VD

See page 83

Q j (Vhigh ) Q j (Vlow )
Vhigh Vlow

= K eq C j 0

0m [(0 Vhigh )1m (0 Vlow )1m ]


(Vhigh Vlow )(1 m)

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 44

L U N D UN I V E R S I T Y

L U N D UN I V E R S I T Y

Noise&on&Supply&Rails&

MOS&Decoupling&Capacitor&

&A&big&problem&on&large&
synchronously&clocked&chips&
Filters noise on
the supply lines

VDD

VDD

RWire

VDD
ISwitch

&On&chip&decoupling&
capacitors&helps&&
&&&&(&1/10&of&the&switched&C)&

The&world&is&not&digital.&We&need&to&
know&the&limita2ons&
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 47

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 48

L U N D UN I V E R S I T Y

L U N D UN I V E R S I T Y

Filler&Cells&in&a&Typical&0.13&um&Tech.&
Leaf Leaf
Cell Cell

Leaf
Cell

Leaf Cell

Leaf Leaf
Cell Cell

Leaf
Cell

Leaf
Cell

Leaf
Cell

Leaf Cell

Leaf
Cell

Leaf
Cell

Resistance&

VDD

Decoupling&&capacitance&
wherever&space&is&empty&%
Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 49

L U N D UN I V E R S I T Y

SECOND ORDER EFFECTS

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 50

L U N D UN I V E R S I T Y

MOS&Simula2on&Models&

Parasi2c&Resistances&

SPICE&Level&1&(Shichman8Hodges)&
Long&channels&and&manual&calcula2ons&

Resistance&in&
diusion&and&
contact&

RS

RD

SPICE&Level&2&
Physical&model.&Not&accurate&for&sub&micron&tech.&
SPICE&Level&3&
Empirical&model&based&on&curve&matching&
BSIM'(Berkeley'Short*channel'IGFET'Model)'
Accurate'for'short'channel'devices'
EKV'model'for'latest'available'technologies'

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 51

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 52

L U N D UN I V E R S I T Y

L U N D UN I V E R S I T Y

Typical&Values&(0.35m)&
Parameter

NMOS

uA/V2

..
PMOS

uA/V2

k'
VT
Leff
Weff

175
0.50 V
0.30 um
0.55 um
0.58 V1/2
0.05

- 60
- 0.60 V
0.38 um
0.55 um
- 0.45 V1/2
- 0.15

tox
Cox
Cj0
Cjsw0

7.5 nm
4.6 fF/um2
0.93 fF/um2
0.28 fF/um

7.5 nm
4.6 fF/um2
1.42 fF/um2
0.38 fF/um

Discrete (BF 170)

50 mA/V2
2V

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 53

Seminar:&Drain&current,&opera2on,&mode,&parasi2cs&

Lund University / Dept. of Electrical and Information Technology / September 4, 2014 - 54

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