MKS-647B: Multiple Channel Flow Ratio/

Pressure Gas Controller

Instruction Manual
By: Michael Wilson
English 202C

Introduction:
When working with gases used for experiments, researchers like to have some sort of
control over the type, pressure, and flow rate of the gas or gases that they are using.
This allows for much more precision and accuracy with the results that they obtain.
Many times they use a two device system that allows for this control over the gases.
They use a primary multiple channel gas controller for user interface and a secondary
mass flow controller that receives commands from the primary device to physically alter
the flow rate of the gas. As the name states, this multiple channel gas controller can
handle multiple gas inputs at a time. There are approximately 4 channels on the gas
controller. Each channel can handle a different gas each with different flow rates and
calibration factors which allows 4 different gases to be manipulated at one time. Since
there are 4 gases being manipulated at one time, there also has to be 4 mass flow
controllers in order to serve as the electronic valve that sets the flow rate of the gas.
This instruction set describes the steps needed to calibrate and operate the primary gas
controller so that the user can control the rate at which the gas or gases are being
introduced into their experiment. It is also important to note that unless stated otherwise,
the drawings and technical specifications used in this document have been taken by the
actual MKS-647B manual (Multi Channel Flow Ratio/ Pressure Controller; Type 647B;
Instruction Manual; 1999 by MKS Instrument Deutschland GmbH) to allow a better
understanding for the reader.

Definitions:
Multiple Channel Gas Controller:
A Multiple Channel Gas Controller is a primary control device used to manipulate the
flow rate of any fluids (gases or liquids) that are being introduced into a secondary Mass
Flow Controller device. The gas controller is basically the computer that allows for user
interface. It sends commands via electronic connectors in order to control the flow of
gas through the secondary mass flow controller.
Mass Flow Controller:
The mass flow controller is a secondary device, essentially behaving as an electronic
valve that receives commands from the primary gas controller. It only allows a certain
amount of gas through at a time depending on the users setting in the primary device.
Flow Rate:
The flow rate is the quantity of a gas or liquid moving through a pipe or channel within a
given or standard period.
Correction/Calibration Factor:
The correction factor is the number that differentiates the different types of gas that the
gas controller can handle.

Materials:
Multiple Channel Gas Controller
Mass Flow Controller (1-4)
Nylon hose (1-4)
Electronic Connectors (1-4)
Power cable
Gas Tanks (1-4)
Technical Specifications

Front Panel

Rear Panel
Main Menu

Menu Tree

I.

When starting an experiment and you are unsure if someone tampered with the
device:
Under Main Menu
Select (2) Extended Display
Make sure the Unit, Range and Gas settings are appropriate values
for your specific experiment.

If not, please reset the device before use to ensure proper settings.
II.
To perform a reset for your device:
Under Main Menu

Select (6) System Setup

Scroll down to Reset

Press Right arrow button
Wait until it says Done

III.
To manage flow rate settings for your experiment:
Under Main Menu

Select (5) Instrument Setup

Select (1) Range Selection

Manually scroll until the settings match the flow meter settings located on a sticker
on top of the mass flow controller for each individual channel.
Select Esc
Select (2) Gas Selection

Scroll through the selections for the desired gas type. Make sure to double check the
correction factor for the gas.
Select Esc

Under Main Menu

Select (2) Extended Display

IV.

Use the left and right arrows to move between Set point, Channel, and Status.
To turn the flow of gas on
Press ON- Channel #
Press ON- (0) All
To turn the flow of gas off
Press OFF- (0) All
Press OFF- Channel #

If you are unsure about the calibration of your device:

Under Main Menu
Select (2) Extended Display
Make sure the flow of gas is off
Actual flow for all channels that are turned off should be 0
If not Go to the Main Menu
Select (5) Instrument Setup
Select (4) Zero Adjust

Adjust the zero value until the actual flow is zero.

V.
Troubleshoot your connector cable and controller:
Under Main Menu
Select (4) Diagnostics
Select (2) Signals

If the set point is the same as the FS Range value, then the output
voltage for the selected channel must be 5V or [005000] for it to be
working fine. The display is in mV.
Check pins on connector cable with a multi meter to see if 5V is being
generated.

For additional support, please contact:

United States
MKS Instruments, Inc.
Corporate Service Center
651 Lowell Street
Methuen, MA 01844
Phone: (978)-682-4567
Fax: (978)-682-8543