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Culture Documents
I.
INTRODUCTION
TABLE I
APPLICATIONS OF MEMS ACCELEROMETERS USED IN EVERY DAY LIFE.
Field
Sensitivity
Power
Consumption
Frequency
Range
Medical
16 g
>= 19 mA
2.4 MHz
IEEE standard
Implantable
25 uA
2.4 MHz
IEEE standard
Automobile
35g, 50g,
70g.
>= 1.3 mA
2.50 GHz
Defense
Up 70 g
2.0 A, 20 V
650 KHz to
1.5 MHz
Communication
20 to 70g
Varies with
applications
2.7 to 10 GHz
Seismology
>= 2g
Varies with
applications
>= 1 KHz
II.
mw 2 x Bwx
kx
wt
wt
Fext
maext
(1)
i.
Sensitivity
'C
a
(2)
Amin
Where
4k BTB
m
4k BTwo
mQ
Kd max
m
ATM
8K BTwn]
m / sec2 Hz
M
(5)
amax
Noise Analysis
(3)
iii.
iv.
Spring Constant
K
(4)
EWt 3
4L3
(6)
vi.
Sense Capacitance
ACCELEROMETER LAYOUT
TABLE II
References
[1]
S. No.
[2]
Parameters
Mass (gram)
2.0416
2
3
1.4746
101
4
6
45fF
19.594nF/g
0HFK1RLVHXJ+]
[3]
[4]
[5]
17.7
[6]
V.
DISCUSSION
VI.
CONCLUSION
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
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