Daily Output OEE Tracker 10 July'2015 - Rev01

Plater#02
500
100%
500
400
80%
400
300
60%
300
200
40%
200
100
20%
100
0%
W17
W18
W19
W20
W21
W22
W23
W24
W25
W26
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul
2-Jul
3-Jul
4-Jul
5-Jul
6-Jul
7-Jul
8-Jul
9-Jul
W17
W18
W19
W20
W21
W2
Actual output (SWKS)
Actual output (Others)
Actu
%OEE
OEE Target
%OE
Com
Plater#05
500
100%
400
80%
300
60%
200
40%
100
20%
0%
W17
W18
W19
W20
W21
W22
W23
W24
W25
W26
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul
2-Jul
3-Jul
4-Jul
5-Jul
6-Jul
7-Jul
8-Jul
9-Jul
%OEE
OEE Target
A
L G
0
2
100%
80%
60%
72
63%
62%
57%
40%55%47%
20%
0%
W17W18W19W20W21W
Plater#03
Pl
500
100%
500.00
400
80%
400.00
300
60%
300.00
200
40%
200.00
100
20%
100.00
0%
W17
W18
W19
W20
W21
W22
W23
W24
W25
W26
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul
2-Jul
3-Jul
4-Jul
5-Jul
6-Jul
7-Jul
8-Jul
9-Jul
0.00
W17
W18
W19
W20
W21
W22
W23
W24
W25
W
Actual output (SW
%OEE
OEE Target
%OEE
Combined OEE for Plater#2+3+4+5

100%
80%
72%74%
63%
62%
57%
54%
40%55%47%
45%49%
44%43%
60%
20%
31%
69%
38%39%36%
55%53%54%
51%
45%
0%
10%
W17W18W19W20W21W22W23W24W25W26
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul2-Jul3-Jul4-Jul5-Jul6-Jul7-Jul8-Jul9-Jul
%OEE
OEE Target
A
L G
0
Plater#04
100%
80%
60%
40%
20%
0%
W18
W19
W20
W21
W22
W23
W24
W25
W26
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul
2-Jul
3-Jul
4-Jul
5-Jul
6-Jul
7-Jul
8-Jul
9-Jul
%OEE
OEE Target
30-May
31-May
75
0
75
175
(75)
25
6-inch Loading
Plan
Actual
Cum Delta
8-inch Loading
Plan
Actual
Cum Delta
125
175
125
0
50
(75)
Plan
Actual
Cum Delta
100
180
100
179
80
159
Plan
Actual
Cum Delta
300
541
300
322
241
263
6-inch Posi-Coat
8-inch Posi-Coat
1-Jun
75
0
(50)
2-Jun
75
149
24
3-Jun
75
0
(51)
4-Jun
75
155
29
5-Jun
75
0
(46)
6-Jun
75
150
29
7-Jun
75
0
(46)
8-Jun
75
170
49
9-Jun
75
90
64
10-Jun
75
100
89
11-Jun
75
100
114
12-Jun
75
100
139
13-Jun
75
99
163
14-Jun
75
97
185
15-Jun
75
100
210
125
125
125
125
125
125
125
125
125
125
125
125
125
125
125
232
32
73
(20)
199
54
45
(26)
150
(1)
0
(126)
164
(87)
0
(212)
131
(206)
96
(235)
110
(250)
104
(271)
89
(307)
100
(332)
100
(357)
100
100
100
100
100
200
200
200
200
200
200
200
200
200
200
72
131
0
31
0
(69)
360
191
186
277
425
502
225
527
446
773
172
745
295
840
267
907
270
977
25
802
462
1064
159
1023
300
300
300
300
300
300
300
300
300
300
300
300
300
300
300
356
319
391
410
564
674
357
731
178
609
181
490
354
544
93
337
255
292
311
303
532
535
75
310
260
270
383
353
506
559
Plan
Actual
Cum Delta
120
120
120
120
120
120
120
120
120
120
120
6-inch Posi-Develop
216
96
426
402
583
865
372
1117
588
1585
61
1526
291
1697
70
1647
228
1755
0
1635
194
1709
Plan
Actual
Cum Delta
300
300
300
300
300
300
300
300
300
300
300
8-inch Posi-Develop
477
177
589
466
580
746
724
1170
356
1226
279
1205
287
1192
400
1292
160
1152
242
1094
317
1111
6-inch Align(1st)
Plan Orig
Plan as of 6/5
Plan as of 6/10
Actual
Cum Delta
100
120
120
125
100
150
400
113
100
150
0
96
100
150
208
0
100
150
150
154
(505)
(900)
8-inch Align(1st)
Plan
Actual
Cum Delta
6-inch Align(2nd)
Plan Orig
Plan as of 6/5
Plan as of 6/10
Actual
Cum Delta
8-inch Align(2nd)
Plan
Actual
Cum Delta
Cu Plate 6"+ 8" (Plater

#3, #4 & #5)
4+6+8 inch SnAg Plate
Ball Drop Shipping
Plated Bump Shipping
Plan
Plan (6/5)
Plan (6/13)
Actual
Cum Delta
Plan
Plan (6/5)
Plan (6/13)
Actual
Cum Delta
100
100
100
100
100
100
100
100
100
100
100
100
100
122
100
0
100
200
100
120
100
120
30
(190)
0
(290)
0
(390)
77
(413)
72
(463)
78
(385)
124
(461)
76
(505)
173
100
120
120
62
(452)
(510)
80
(100)
(120)
300
272
300
196
(28)
100
(792)
(696)
(904)
300
300
300
300
300
300
300
300
300
300
300
300
300
300
300
(132)
179
(253)
121
(432)
255
(477)
160
(617)
133
(784)
159
(925)
182
(1043)
89
(1254)
191
(1363)
135
(1528)
262
(1566)
172
(1694)
72
(1922)
91
(2131)
247
(2184)
100
100
100
100
100
100
194
100
122
100
0
100
200
100
120
100
(39)
0
(139)
0
(239)
103
(236)
79
(351)
164
(309)
75
(234)
97
(337)
76
100
120
120
53
100
120
120
115
100
150
0
89
100
150
400
21
100
150
150
48
100
150
217
147
(381)
(448)
(453)
(364)
(743)
(845)
(915)
300
300
300
300
300
300
300
300
300
300
300
300
300
300
300
40
121
(60)
(39)
300
186
300
121
(114)
(293)
263
(330)
391
(239)
206
(333)
170
(463)
108
(655)
59
(896)
50
(1146)
103
(1343)
63
(1580)
19
(1861)
130
(2031)
112
(2219)
98
(2421)
153
(2568)
172
(2696)
150
150
150
150
150
150
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
295
150
185
295
115
122
(35)
(63)
115
(98)
186
(62)
113
(99)
80
(169)
112
(452)
158
(479)
153
(511)
161
(535)
190
(530)
139
(576)
100
(661)
0
(846)
150
(881)
92
(1084)
80
(1299)
150
150
150
150
150
150
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
150
185
300
97
128
(53)
(75)
113
(112)
163
(99)
142
(107)
86
(171)
160
(406)
172
(419)
176
(428)
174
(439)
143
(481)
93
(573)
116
(642)
106
(721)
105
(801)
210
(776)
105
(971)
Plan
Actual
Cum Delta
45
56
45
75
(242)
(212)
Plan
Actual
Cum Delta
181
114
181
93
(912)
(1000)
45
45
45
45
45
45
45
45
45
45
45
45
45
45
45
37
(220)
0
(265)
25
(285)
0
(330)
0
(375)
24
(396)
0
(441)
50
(436)
35
(446)
0
(491)
0
(536)
2
(579)
0
(624)
73
(596)
22
(619)
181
181
181
181
181
181
181
181
181
181
181
181
181
181
181
32
(1149)
195
(1135)
76
(1240)
150
(1271)
25
(1427)
177
(1431)
89
(1523)
136
(1568)
68
(1681)
101
(1761)
31
(1911)
113
(1979)
76
(2084)
100
(2165)
57
(2289)
PLT02
%OEE
OEE Target
Daily Cap (WPD)
PLT03
%OEE
OEE Target
Daily Cap (WPD)
PLT04
%OEE
OEE Target
Daily Cap (WPD)
PLT05
%OEE
OEE Target
Daily Cap (WPD)
Overall
%OEE
OEE Target
Daily Cap (WPD)
Plating Recipe
a
143
e
f
0.754601227
WPD (PLT02)
163 NiSnAg ( 1 Ni 4 SNAG metals )
176 CU_PLT (Cu Pillar) ( 4 Cu metals )
CU_PLT ( RDL ) ( 4 Cu metals )
CuNiSnAg ( 1 Ni 1 Cu 4 SNAG metals )
CU_PLT (Cu Pillar) ( 3 Cu metals )
CU_PLT ( RDL ) ( 3 Cu metals )
Min
200
75
125
60
Max
225
100
250
150
80
190
157.5 176.4705882
i
iii
iv
0.90797546
WPD (PLT03)
CU_PLT (RDL) ( 3 Cu metals )
SN ( 1 metal )
Min
125
75
Max
150
100
190
175
WPD (PLT04)
Min
125
75
Max
150
100
190
100
WPD (PLT05)
148 CuNiSnAg ( 1 Ni 4 SNAG metals )
Min
200
75
75
60
Max
225
100
190
80
0.1111111111
PLT02
ab
ac
df
de
PLT Type
NiSnAg & CU_PLT ( Cu Pillar )
NiSnAg & CU_PLT ( RDL)
CuNiSnAg & CU_PLT ( RDL )
CuNiSnAg & CU_PLT ( Cu Pillar )
Total
WPD
300
463
328
Wafer in
123
50
208
173
Weighted WPD
I,ii
I,iii
iv
PLT03
PLT Type
CuNiSnAg & CU_PLT (Cu Pillar)
CuNiSnAg & CU_PLT (RDL)
SN ( 1 metal )
Total
Weighted WPD
347
WPD
208
328
175
Wafer in
140
140
208
Ave
213
88
250
138
70
190
Recipe
1
2
3
4
5
6
PLT02
Actual RDL
Actual output (Cu)
Actual output (NiSnAg)
Actual output (SWKS + Others
Daily Cap (WPD)
%OEE
7-Apr
8-Apr
9-Apr
10-Apr
63
40
103
328
31%
1&6
58
41
99
300
33%
1&2
49
66
115
300
38%
1&2
7-Apr
8-Apr
9-Apr
10-Apr
70
142
212
225
94%
1&2
75
146
221
225
98%
1&2
52
125
177
225
79%
1&2
74
109
183
225
81%
1&2
7-Apr
8-Apr
9-Apr
10-Apr
133
500
182
315 400
553
57%300
133
187
320
525
61%
101
191
292
525
56%
158
155
313
525
60%
200
19%
19%
16%
28%
84
46
130
300
43%
1&2&5
OEE Target
Ave
138
70
190
175
1
2
3
4
PLT03
Actual RDL
Actual output (Cu)
Daily Cap (WPD)
%OEE
OEE Target
Ave
138
70
190
70
1
2
3
4
Ave
213
88
190
70
1
2
3
4
%
71%
29%
0%
0%
100%
PLT04
Actual RDL
Actual output (Cu)
Actual output (SWKS + Others)
Daily Cap (WPD)
%OEE
OEE Target
Recipe
PLT05
Actual RDL
Actual output (Cu)
Daily Cap (WPD)
%OEE
OEE Target
Recipe
Overall
Actual RDL
Actual output (Cu)
Daily Cap (WPD)
%OEE
OEE Target
PLT02
100
W17
W18
W19
W
Actual
300
200
100
W17
W18
W19
%
100%
0%
W
Actual
PLT04
100%
500.00
400.00
300.00
200.00
100.00
0.00
W17
W18
W19
ALG02
Plan (Input wafer)
Daily Cap (WPD)
%OEE
OEE Target
ALG03
Plan (Input wafer)
Daily Cap (WPD)
%OEE
OEE Target
Overall
Plan (Input wafer)
Daily Cap (WPD)
%OEE
Actual
OEE Target
11-Apr
12-Apr
13-Apr
14-Apr
15-Apr
16-Apr
17-Apr
18-Apr
113
75
188
300
63%
1&5
128
55
183
300
61%
1&2
98
58
156
300
52%
1&2
139
40
179
300
60%
1&2
99
69
168
300
56%
1&2
105
68
173
300
58%
1&2
43
22
65
300
22%
1&2
65
55
120
300
40%
1&2
11-Apr
12-Apr
13-Apr
14-Apr
15-Apr
16-Apr
17-Apr
18-Apr
73
152
225
328
69%
1&3
86
129
215
225
96%
1&2
101
80
181
328
55%
1&3
75
130
205
225
91%
1&2
90
130
220
225
98%
1&2
87
96
183
225
81%
1&2
56
121
177
225
79%
1&2
3
166
169
225
75%
1&2
13-Apr
14-Apr
15-Apr
16-Apr
17-Apr
18-Apr
192
500
164
60% 356
400
50% 525
40% 68% 300
99
143
242
525
46%
68
221
289
525
55%
14%
22%
11-Apr
12-Apr
PLT02
186
227
413
628
66%
214
184
398
525
76%
199
138
337
628
54%
214
170
384
525
73%
189
199
388
525
74%
38%
43%
33%
46%
33%
70%
30%
20%
10%
0%
W18
W19
output (SWKS)
W20
W21
W22
%OEE
35%
200
PLT03
100
W17
W18
W19
W20
Actual ou
40%
300
30%
200
20%
10%
0%
W18
W19
output (SWKS)
W20
W21
100
-
W22
W17
%OEE
W18
W19
W20
Actual ou
PLT02+PLT03+PLT04
PLT04
600
500
400
300
200
100
W18
W19
l output (SWKS)
W20
W21
W22
%OEE
W17
W18
W19
W2
Actual ou
19-Apr
20-Apr
21-Apr
22-Apr
23-Apr
24-Apr
25-Apr
26-Apr
85
27
112
300
37%
1&2
58
43
101
300
34%
1&2
43
0
43
283
15%
1&5
21
67
88
213
41%
1
100
0
100
213
47%
1
25
49
74
283
26%
1&5
120
25
145
283
51%
1&5
0
0
0
283
0%
19-Apr
20-Apr
21-Apr
22-Apr
23-Apr
24-Apr
25-Apr
26-Apr
63
73
136
225
60%
1&2
72
130
202
225
90%
1&2
124
64
188
225
84%
1&2
145
60
205
225
91%
1&2
100
71
171
225
76%
1&2
85
100
185
225
82%
1&2
92
89
181
225
80%
1&2
141
94
235
328
72%
1&3
21-Apr
22-Apr
23-Apr
24-Apr
25-Apr
26-Apr
19-Apr
20-Apr
PLT03
148
100
248
525
47%
130
173
303
525
58%
167
64
231
508
46%
166
127
293
438
67%
200
100%
71
80%271
438
60%62%
110
149
259
508
51%
212
114
326
508
64%
141
94
235
611
38%
28%
19%
15%
10%
40%
47%
9%
42%
0%
20%
0%
W18
W19
ual output (SWKS)
W20
W21
W22
%OEE
60%
40%
20%
0%
W18
W19
ual output (SWKS)
W20
W21
W22
%OEE
+PLT03+PLT04
80%
70%
60%
50%
40%
30%
20%
10%
0%
W18
W19
al output (SWKS)
W20
W21
W22
%OEE
27-Apr
28-Apr
29-Apr
30-Apr
1-May
2-May
3-May
4-May
0
0
0
283
0%
0
0
0
283
0%
0
39
39
138
28%
4
145
2
147
300
49%
1&2
123
40
163
300
54%
1&2
73
38
111
283
39%
1&5
123
25
148
283
52%
1&5
180
0
180
300
60%
1&2
27-Apr
28-Apr
29-Apr
30-Apr
1-May
2-May
3-May
4-May
118
84
202
225
90%
1&2
22
146
168
225
75%
1&2
96
47
143
328
44%
1&3
25
75
100
225
44%
1&2
87
97
184
225
82%
1&2
54
136
190
328
58%
1&3
105
75
180
225
80%
1&2
72
96
168
225
75%
1&2
27-Apr
28-Apr
29-Apr
30-Apr
1-May
2-May
3-May
4-May
118
84
202
508
40%
22
146
168
508
33%
96
86
182
465
39%
170
77
247
525
47%
210
137
347
525
66%
127
174
301
610
49%
228
100
328
508
65%
252
96
348
525
66%
0%
0%
0%
48%
41%
26%
44%
5-May
200
133
0
133
283
47%
1&5
6-May
200
133
0
133
283
47%
1&5
7-May
200
159
2
161
283
57%
1&5
8-May
200
154
12
166
283
59%
1&5
9-May
225
127
26
153
300
51%
1&2
10-May
200
103
0
103
283
36%
1&5
11-May
225
191
19
210
300
70%
1&2
12-May
225
132
25
157
300
52%
1&2
(67)
5-May
75
92
149
241
328
74%
1&3
(134)
6-May
75
129
149
278
328
85%
1&3
(175)
7-May
75
51
58
109
225
48%
1&2
(221)
8-May
150
101
202
303
328
93%
1&3
(319)
9-May
150
18
119
137
225
61%
1&2
(416)
10-May
150
50
151
201
225
89%
1&2
(450)
11-May
150
20
248
268
328
82%
1&3
(543)
12-May
150
50
179
229
328
70%
1&3
17
71
47
(2)
(134)
(234)
(364)
(464)
5-May
275
225
149
374
611
61%
6-May
275
262
149
411
610
67%
7-May
275
210
60
270
508
53%
8-May
350
255
214
469
610
77%
9-May
375
145
145
290
525
55%
10-May
350
153
151
304
508
60%
11-May
375
211
267
478
628
76%
(50)
(63)
(128)
(223)
(453)
(650)
(814)
Power Supplu Issue

12-May
375
182
204
386
628
61%
(1007)
13-May
200
43
20
63
300
21%
1&2
14-May
200
89
0
89
300
30%
1&2
15-May
200
143
0
143
300
48%
1&2
(700)
13-May
150
109
85
194
328
59%
1&3
(811)
14-May
150
117
100
217
225
96%
1&2
(868)
15-May
150
96
(505)
(538)
(592)
96
190
51%
3
wer Supplu Issue

13-May
350
152
105
257
628
41%
14-May
350
206
100
306
525
58%
15-May
350
239
0
239
490
49%
(1205)
(1349)
(1460)
W17
W17
104
55
159
W18
57
34
91
W19
55
15
71
W20
136
11
147
118
13
131
300
53%
270
34%
267
26%
285
52%
298
44%
70%
70%
70%
70%
70%
W17
W17
W18
W19
W20
81
120
201
85
95
179
254
81%
225
80%
254
69%
86
124
210
284
73%
70%
70%
70%
70%
70%
W17
W17
W18
W19
W20
70%
70%
70%
70%
70%
W17
W17
W18
W19
W20
185
175
360
554
65%
70%
83
90
173
141
129
271
495
55%
70%
138
105
244
521
47%
70%
223
135
357
569
63%
70%
66
147
192
264
73%
184
139
323
562
57%
70%
16-May
17-May
18-May
19-May
20-May
21-May
246
0
246
300
82%
1&2
70%
(622)
16-May
208
0
208
300
69%
1&2
70%
(414)
17-May
230
0
230
300
77%
1&2
70%
(184)
18-May
180
0
180
300
60%
1&2
70%
(4)
19-May
162
0
162
283
57%
1&5
70%
158
20-May
116
0
116
283
41%
1&5
70%
274
21-May
108
283
38%
1&5
70%
382
22-May
189
300
63%
1&2
70%
571
23-May
85
75
57
85
190
45%
3
70%
(507)
16-May
75
190
39%
3
70%
(432)
17-May
57
190
30%
3
70%
(375)
18-May
118
90
208
225
92%
1&2
70%
(257)
19-May
49
68
117
225
52%
1&2
70%
(208)
20-May
50
159
209
225
93%
1&2
70%
(158)
21-May
0
158
158
225
70%
1&2
70%
(158)
22-May
68
110
178
225
79%
1&2
70%
(90)
23-May
71
80
151
225
67%
70%
1&2
50
120
170
225
76%
70%
1&2
37
40
77
225
34%
70%
1&2
39
136
175
225
78%
70%
1&2
151
25
176
225
78%
70%
1&2
19-May
0
369
170
539
750
72%
70%
(190)
20-May
0
261
188
449
733
61%
70%
71
21-May
0
203
199
402
733
55%
70%
274
22-May
0
147
294
441
733
60%
70%
421
23-May
0
408
135
543
750
72%
70%
829
70%
70%
70%
16-May
0
331
0
331
490
68%
70%
(1129)
17-May
0
283
0
283
490
58%
70%
(846)
18-May
0
287
0
287
490
59%
70%
(559)
22-May
23-May
108
0
189
0
24-May
25-May
137
0
242
0
26-May
27-May
28-May
29-May
30-May
31-May
241
0
241
300
80%
1&2
70%
1493
27-May
244
0
244
300
81%
1&2
70%
1737
28-May
146
0
146
300
49%
1&2
70%
1883
29-May
170
0
170
300
57%
1&2
70%
2053
30-May
168
0
168
300
56%
1&2
70%
2221
31-May
137
300
46%
1&2
70%
708
24-May
242
463
52%
1&3
70%
950
25-May
302
0
302
463
65%
1&3
70%
1252
26-May
50
130
180
225
80%
1&2
70%
(40)
24-May
50
114
164
225
73%
1&2
70%
10
25-May
59
100
159
225
71%
1&2
70%
69
26-May
75
73
148
225
66%
1&2
70%
144
27-May
69
16
85
70
121%
2
70%
213
28-May
55
25
80
70
114%
2
70%
268
29-May
77
83
160
250
64%
1&2
70%
345
30-May
75
83
158
250
63%
1&2
70%
420
31-May
37
100
137
225
61%
70%
1&2
75
101
176
225
78%
70%
1&2
77
68
145
225
64%
70%
1&2
74
80
154
225
68%
70%
1&2
71
143
214
225
95%
70%
1&2
78
135
213
100
78%
70%
1&2
29-May
75
82
157
100
75%
70%
1&2
30-May
50
118
168
100
50%
70%
1&2
31-May
24-May
0
224
230
454
750
61%
70%
1053
25-May
0
367
215
582
913
64%
70%
1420
26-May
0
438
168
606
913
66%
70%
1858
27-May
0
390
153
543
750
72%
70%
2248
28-May
0
384
159
543
595
91%
70%
2632
29-May
0
279
160
439
470
93%
70%
2911
30-May
0
322
165
487
650
75%
70%
3233
31-May
0
293
201
494
650
76%
70%
3526
1-Jun
2-Jun
3-Jun
4-Jun
5-Jun
6-Jun
7-Jun
8-Jun
194
0
194
300
65%
1&2
70%
2415
1-Jun
279
0
279
463
60%
1&3
70%
2694
2-Jun
184
0
184
283
65%
1&5
70%
2878
3-Jun
139
0
139
283
49%
1&5
70%
3017
4-Jun
258
0
258
283
91%
1&5
70%
3275
5-Jun
192
0
192
283
68%
1&5
70%
3467
6-Jun
204
0
204
283
72%
1&5
70%
3671
7-Jun
148
0
148
283
52%
1&5
70%
3819
8-Jun
76
88
164
250
66%
1&2
70%
496
1-Jun
50
99
149
250
60%
1&2
70%
546
2-Jun
75
120
195
250
78%
1&2
70%
621
3-Jun
37
160
197
250
79%
1&2
70%
658
4-Jun
62
110
172
250
69%
1&2
70%
720
5-Jun
154
35
189
328
58%
1&2
70%
874
6-Jun
50
129
179
100
50%
1&2
70%
924
7-Jun
75
130
205
100
75%
1&3
70%
999
8-Jun
99
123
222
100
99%
70%
1&2
1-Jun
100
115
215
100
100%
70%
1&2
2-Jun
64
90
154
100
64%
70%
1&2
3-Jun
50
110
160
100
50%
70%
1&2
4-Jun
50
116
166
100
50%
70%
1&2
5-Jun
75
98
173
100
75%
70%
1&2
6-Jun
72
90
162
100
72%
70%
1&2
7-Jun
48
130
178
100
48%
70%
1&2
8-Jun
0
0
0
88
0%
70%
2
85
0
85
301
28%
70%
1&2
98
0
98
301
33%
70%
1&2
97
32
129
301
43%
70%
1&2
5-Jun
0
370
226
596
720
83%
70%
5243
6-Jun
0
506
133
639
1011
63%
70%
5749
7-Jun
0
424
219
643
783
82%
70%
6173
8-Jun
0
368
292
660
783
84%
70%
6541
1-Jun
0
369
211
580
650
89%
70%
3895
2-Jun
0
429
214
643
813
79%
70%
4324
3-Jun
0
323
210
533
633
84%
70%
4647
4-Jun
0
226
270
496
633
78%
70%
4873
8-Jun
450
217
167
384
550
70%
80%
8-Jun
650
148
366
514
650
79%
80%
8-Jun
1100
365
533
898
1200
75%
80%
9-Jun
10-Jun
11-Jun
12-Jun
13-Jun
14-Jun
15-Jun
16-Jun
146
70
216
283
76%
1&5
70%
3965
9-Jun
50
0
50
70
71%
5
70%
4015
10-Jun
84
30
114
213
54%
1
70%
4099
11-Jun
86
0
86
213
40%
1
70%
4185
12-Jun
106
0
106
213
50%
1
70%
4291
13-Jun
140
0
140
213
66%
1
70%
4431
14-Jun
75
0
75
305
25%
1
70%
4506
15-Jun
90
0
90
305
30%
1
70%
4596
16-Jun
63
143
206
100
63%
1&3
70%
1062
9-Jun
15
119
134
100
15%
1&2
70%
1077
10-Jun
75
212
287
100
75%
1&3
70%
1152
11-Jun
23
194
217
100
23%
1&3
70%
1175
12-Jun
73
111
184
100
73%
1&3
70%
1248
13-Jun
77
118
195
100
77%
1&3
70%
1325
14-Jun
75
162
237
100
75%
1&3
70%
1400
15-Jun
72
152
224
100
72%
1&3
70%
1472
16-Jun
73
45
118
100
73%
70%
1&2
9-Jun
73
56
129
100
73%
70%
1&2
10-Jun
57
127
184
100
57%
70%
1&2
11-Jun
25
146
171
100
25%
70%
1&2
12-Jun
35
88
123
100
35%
70%
1&2
13-Jun
47
110
157
100
47%
70%
1&2
14-Jun
47
88
135
100
47%
70%
1&2
15-Jun
0
146
146
100
0%
70%
1&2
16-Jun
15
62
77
301
26%
70%
1&2
0
12
12
70
17%
70%
4
0
12
12
70
17%
70%
4
95
0
95
225
42%
70%
1
66
0
66
225
29%
70%
1
42
0
42
225
19%
70%
1
131
12
143
375
38%
70%
1&2
134
0
134
375
36%
70%
1&2
9-Jun
0
297
320
617
783
79%
70%
6838
10-Jun
0
138
187
325
340
96%
70%
6976
11-Jun
0
216
381
597
483
124%
70%
7192
12-Jun
0
229
340
569
638
89%
70%
7421
13-Jun
0
280
199
479
638
75%
70%
7701
14-Jun
0
306
228
534
638
84%
70%
8007
15-Jun
0
328
262
590
880
67%
70%
8335
16-Jun
0
296
298
594
880
68%
70%
8631
9-Jun
450
255
181
436
550
79%
80%
10-Jun
450
132
207
339
550
62%
80%
11-Jun
500
300
100
400
550
73%
80%
12-Jun
500
289
144
433
550
79%
80%
13-Jun
500
101
250
351
550
64%
80%
14-Jun
500
192
231
423
550
77%
80%
15-Jun
500
376
68
444
550
81%
80%
16-Jun
500
342
50
392
550
71%
80%
9-Jun
650
248
400
648
650
100%
80%
10-Jun
650
190
442
632
650
97%
80%
11-Jun
650
332
303
635
650
98%
80%
12-Jun
650
197
221
418
650
64%
80%
13-Jun
650
165
436
601
650
92%
80%
14-Jun
650
100
397
497
650
76%
80%
15-Jun
650
344
236
580
650
89%
80%
16-Jun
650
308
341
649
650
100%
80%
9-Jun
1100
503
581
1084
1200
90%
10-Jun
1100
322
649
971
1200
81%
11-Jun
1150
632
403
1035
1200
86%
12-Jun
1150
486
365
851
1200
71%
13-Jun
1150
266
686
952
1200
79%
14-Jun
1150
292
628
920
1200
77%
15-Jun
1150
720
304
1024
1200
85%
16-Jun
1150
650
391
1041
1200
87%
80%
80%
80%
80%
80%
80%
80%
80%
19-Jun
0
0
0
0
305
0%
1&5
70%
4725
19-Jun
20-Jun
0
0
0
0
305
0%
1&5
70%
4725
20-Jun
21-Jun
0
0
0
0
305
0%
1&5
70%
4725
21-Jun
22-Jun
103
23-Jun
129
0
129
305
42%
1&5
70%
4725
17-Jun
18-Jun
0
0
0
0
305
0%
1&5
70%
4725
18-Jun
60
81
141
350
40%
1&5
70%
4785
22-Jun
81
103
184
325
57%
1
70%
4866
23-Jun
70%
4891
24-Jun
66
127
193
100
66%
1&3
70%
1538
17-Jun
75
34
109
100
75%
1&2
70%
1613
18-Jun
60
0
60
100
60%
1&2
70%
1673
19-Jun
62
0
62
100
62%
1&2
70%
1735
20-Jun
71
0
71
100
71%
1&2
70%
1806
21-Jun
73
0
73
100
73%
1&2
70%
1879
22-Jun
68
0
68
100
68%
99
0
99
140
71%
70%
1947
23-Jun
70%
2046
24-Jun
25
109
134
100
25%
70%
1&2
17-Jun
56
136
192
100
56%
70%
1&2
18-Jun
25
0
25
100
25%
70%
1&2
19-Jun
78
0
78
100
78%
70%
1&2
20-Jun
73
0
73
100
73%
70%
1&2
21-Jun
125
0
125
175
71%
70%
1&2
22-Jun
115
0
115
175
66%
70%
58
0
58
100
58%
70%
23-Jun
24-Jun
174
0
174
375
46%
70%
1&4
224
0
224
375
60%
70%
1&4
97
0
97
375
26%
70%
1&4
165
0
165
375
44%
70%
1&4
236
0
236
375
63%
70%
1&4
209
0
209
325
64%
70%
1&4
64
0
64
325
20%
70%
85
0
85
325
26%
70%
17-Jun
0
394
236
630
880
72%
70%
9025
18-Jun
0
355
170
525
880
60%
70%
9380
19-Jun
0
182
0
182
880
21%
70%
9562
20-Jun
0
305
0
305
880
35%
70%
9867
21-Jun
0
380
0
380
880
43%
70%
10247
22-Jun
0
467
81
548
950
49%
70%
10714
23-Jun
0
328
103
431
925
47%
70%
11042
24-Jun
0
267
76
343
890
39%
70%
11309
17-Jun
76
24-Jun
25
76
101
325
31%
64
0
17-Jun
500
296
135
431
550
78%
80%
18-Jun
500
389
139
528
550
96%
80%
19-Jun
20-Jun
21-Jun
22-Jun
23-Jun
0
0
0
550
0%
80%
0
0
0
550
0%
80%
0
0
0
550
0%
80%
0
0
0
550
0%
80%
0
0
0
550
0%
80%
17-Jun
650
353
239
592
650
91%
80%
18-Jun
650
146
404
550
650
85%
80%
19-Jun
20-Jun
21-Jun
22-Jun
23-Jun
0
0
0
650
0%
80%
0
0
0
650
0%
80%
0
0
0
650
0%
80%
0
0
0
650
0%
80%
0
0
0
650
0%
80%
17-Jun
1150
649
374
1023
1200
85%
18-Jun
1150
535
543
1078
1200
90%
19-Jun
0
0
0
0
1200
0%
20-Jun
0
0
0
0
1200
0%
21-Jun
0
0
0
0
1200
0%
22-Jun
0
0
0
0
1200
0%
23-Jun
0
0
0
0
1200
0%
33
52
80%
80%
80%
80%
80%
80%
80%
89
25-Jun
89
54
23
166
325
51%
139
26-Jun
109
27-Jun
161
28-Jun
83
29-Jun
73
139
212
325
65%
74
109
183
325
56%
73
161
234
325
72%
25
83
108
325
33%
30-Jun
56
32
49
137
325
42%
1-Jul
0
49
31
80
325
25%
2-Jul
0
73
115
188
325
58%
70%
4856
25-Jun
70%
4929
26-Jun
70%
5003
27-Jun
70%
5076
28-Jun
70%
5101
29-Jun
70%
5077
30-Jun
70%
5126
1-Jul
70%
5199
2-Jul
86
0
86
100
86%
118
0
118
150
79%
70
0
70
100
70%
69
0
69
100
69%
50
0
50
100
50%
50
0
50
100
50%
88
0
88
100
88%
60
0
60
100
60%
70%
2132
25-Jun
70%
2250
26-Jun
70%
2320
27-Jun
70%
2389
28-Jun
70%
2439
29-Jun
70%
2489
30-Jun
70%
2577
1-Jul
70%
2637
2-Jul
50
0
50
100
50%
70%
100
0
100
150
67%
70%
59
0
59
100
59%
70%
74
0
74
100
74%
70%
84
0
84
100
84%
70%
0
0
0
100
0%
70%
75
0
75
250
30%
70%
178
0
178
250
71%
70%
25-Jun
26-Jun
27-Jun
28-Jun
29-Jun
30-Jun
1-Jul
2-Jul
98
0
98
325
30%
70%
125
0
125
415
30%
70%
182
0
182
325
56%
70%
199
0
199
325
61%
70%
106
0
106
325
33%
70%
0
0
0
325
0%
70%
168
0
168
325
52%
70%
74
0
74
325
23%
70%
25-Jun
89
288
23
311
850
37%
70%
11508
26-Jun
0
416
139
555
1040
53%
70%
11924
27-Jun
0
385
109
494
850
58%
70%
12309
28-Jun
0
415
161
576
850
68%
70%
12724
29-Jun
0
265
83
348
850
41%
70%
12989
30-Jun
56
82
49
131
850
15%
70%
13015
1-Jul
0
380
31
411
1000
41%
70%
13395
2-Jul
0
385
115
500
1000
50%
70%
13780
49
49
25
100
157
25
121
78
82 0.337777778
24
3-Jul
0
80
116
196
325
60%
4-Jul
100
49
146
295
370
80%
5-Jul
0
60
64
124
325
38%
6-Jul
48
54
101
203
355
57%
7-Jul
25
63
135
223
340
66%
8-Jul
50
48
119
217
370
59%
9-Jul
50
54
114
218
370
59%
70%
52%
3-Jul
70%
65%
4-Jul
0
79
0
79
100
79%
70%
28%
5-Jul
0
60
0
60
100
60%
70%
45%
6-Jul
0
62
24
86
130
66%
70%
60%
7-Jul
0
87
0
87
100
87%
70%
53%
8-Jul
0
80
0
80
100
80%
70%
51%
9-Jul
0
76
0
76
100
76%
70%
2746
4-Jul
0
80
0
80
100
80%
70%
70%
2806
5-Jul
0
80
43
123
160
77%
70%
70%
2868
6-Jul
0
70
0
70
100
70%
70%
70%
2955
7-Jul
0
86
24
110
145
76%
70%
70%
3035
8-Jul
0
80
54
134
160
84%
70%
70%
3111
9-Jul
0
89
28
117
145
81%
70%
123
0
123
325
38%
70%
4-Jul
0
5
156
161
325
50%
70%
5-Jul
0
28
76
104
325
32%
70%
6-Jul
25
10
68
103
325
32%
70%
7-Jul
75
0
55
130
415
31%
70%
8-Jul
50
15
29
94
370
25%
70%
9-Jul
25
35
46
106
343
31%
70%
#DIV/0!
70%
3-Jul
0
305
116
421
850
50%
70%
14085
4-Jul
100
213
302
515
895
58%
70%
14198
5-Jul
0
228
183
411
910
45%
70%
14426
6-Jul
73
196
193
462
910
51%
70%
14549
7-Jul
100
236
214
550
1000
55%
70%
14685
8-Jul
100
223
202
525
1000
53%
70%
14808
9-Jul
75
254
188
517
958
54%
70%
14987
10-Jul
0
0
0
0
0
#DIV/0!
70%
14987
30
0
30
100
30%
70%
2667
3-Jul
72
0
72
100
72%
70%
3-Jul
10-Jul
0
0
#DIV/0!
70%
10-Jul
0
0
0
#DIV/0!
70%
3111
10-Jul
0
0
0
#DIV/0!
70%
10-Jul
0
0
0
Date
WW
Down
Time
MC #
6-Jun
W24
2nd
QDR Down for PLT02 ( Unable to control N2 pressure in

QDR Cell )
10-Jun
W24
1st / 2nd
Cu bath was down for 8 hrs due to the checmical

concentration issue. The Root cause was the worn out
O-Ring in the Pump Turbine.
Issue / Cause
Action
- Temporarily modify the tubing in order to regulate N2
pressure.
- Corrective measure is to replace the speed controller.
Change the O-Ring of Pump Turbine.
12-Jun
W24
1st / 2nd
Thermo-exchanger unit of Cu cell is down indefinitely

not to properly control the bath temp.
- Best Arrival time of replacement Temp Controller is

alleged to be 06Aug.
- UAT to keep on pulling in the delivery date.
17-Jun
W25
93
Transporter Motor down presiding the whole moving

mechanism of Plater#2 then after replacing with the
spare motor, this one was down at 10:00PM 6/17.
- Replace with the spare motor - During test run the spare
motor was also down.
- Motor to be shipped from Hermes(Agent) SNP W/H to
arrive 4:00PM 6/19 and production to resume 05:00AM
6/20.
Resp
ECD
Mugilan
TBD
Process Eng (PS Lee) /

Manf tech / Mugilan
10-Jun
Rashpal / CW Chai
6-Aug
Rashpal
21-Jun
Status
Open ( Waiting for
the quotation of
speed controller)
PM Doc ? (Y/N)
OPen
Spare Part
List (Y/N)
NA for now
but to be
updated (TBD)
Closed (Doc #)
NA
Done
Open
Closed (Doc #) Open
Open
Done
Date
OEE
17-Jun
Err:509
Overall
Plater#2
Plater#3
Plater#4
Plater#5
Date
OEE
18-Jun
Err:509
Overall
Plater#2
Plater#3
Plater#4
Plater#5
Date
OEE
19-Jun
Err:509
Plater#2
Plater#3
Plater#4
Plater#5
Date
OEE
20-Jun
35%
Plater#2
Plater#3
Plater#4
Plater#5
Date
OEE
21-Jun
43%
Plater#2
Plater#3
Plater#4
Plater#5
Date
OEE
22-Jun
58%
Plater#2
Plater#3
Plater#4
Plater#5
Date 23-Jun
OEE
47%
Plater#2
Plater#3
Plater#4
Plater#5
Date
24-Jun
Plater#2
Plater#3
Plater#4
Plater#5
Date
25-Jun
Plater#2
Plater#3
Plater#4
Plater#5
Date
26-Jun
Plater#2
Plater#3
Plater#4
Plater#5
Date
27-Jun
Plater#2
Plater#3
Plater#4
Plater#5
Date
30-Jun
Plater#2
Plater#3
Plater#4
Plater#5
Date
1-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
2-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
3-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
4-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
5-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
6-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
7-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
8-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
9-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Date
10-Jul
Plater#2
Plater#3
Plater#4
Plater#5
Running
Running ~50%
Critical HW
OK
OEE
Fail/PM
Except for Plater#3, overall output performance of Plating machines has been marred by the series
of Platers ;
On 6/12 & 6/17, Temp Controller malfunction affecting the Cu cell performance(since 6/12 ~ now) w
cells at all. But Today(6/17 Morning), its transporting motor unit was down to be replaced with the s
low output.
No significant issue
For 6/13 ~ 6/15, Defective Shield with the burred Teflon screen / Incompletely cleansed Anode spaw
abnormal bump
From 6/10AM ~ Now, Combined impact of incorrectly assembled Anode Holder(by UAT PM team) w
changed from the previous version, which prompted TEL/NEXX engineers re-defining the chemica
Anode.
Running
OK
Critical HW
Fail/PM
Running ~50%
OEE
New Problems arose with Plater#2
The whole system has been down since 6/17 11:00AM due to the initial failure of Transporter Motor
motor's failure as well. Though another spare was located in SNP W/H of agency company, conside
arrangement & defined Buy-Off, the estimated production commencement time would be 05:00AM
Down for 24 hrs on 6/17 due to the controversial PM & subsequent Buy-Off of Cu Cell
Cu_Cell Anode Holder verification dry run has been going from 6/17PM to be finished by 11:00PM 6
production run. Its NiSnAg output met the target output.
Running
Running ~50%
<70%
Critical HW
OK
OEE
Fail/PM
Waiting for the arrival of Transport Motor by 04:00PM 6/19. Estimated Production start is from 05:00
installation/Dry Run/Buy-Off for the newly arrival motor set
One Cu cell is down(#8) due to low chemical flow caused by clogged filiter which was replaced but
Efficiency loss. UAT equipment engineeing is to revisit the existing filter change frequency for corre
One Cu Cell (#6) has the higher Bump Height in the Opposite area of notch side. Being suspected
Holder & Shield combination eroding 20% OEE, continuous process monitoring/optimization is requ
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
Newly arrived Motor could not be successfully installed for 6/19 17:00 ~ 23:00 due to sensor align
TEL/NEXX engineer in place from 13:00 6/20, the installation has been done by 16:00 to be on the
by 23:00 6/20 for the production run start.
No significant HW issue for both machines itself but due to the upstream 8" WIP disconnection : Wi
Oxidization found from 56ea of Mastic wafers even prior to Cu Plating process, these wafers have b
into Plater#2's activization step until its Motor is fixed, which could have been proceeded thru the
CW Chai vowed to proceed them thru the manual loading at Plater#2's activization step from 6/20.
Not related to HW issue but due to Less SnAG output by insufficient 8"-Post-Cu-Plate-WIP since Plat
wafer only while the abundance of 6" wafer Post-Cu-Plate-WIP(270 wafers) is waiting for Plater#2.
6" convertibility study for Plater#5 with ECD to be determined.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
After going thru the Bump thickness / Shear test / Void ckeck thru X-Ray, the production started fro
~4 days of complete machine down
No significant issue with 6" Cu_Plate

No significant issue with 8" Cu_Plate
Though the output of Cu_Plate was on target with 73w@6/20, SnAg_Plate output could not meet th
insufficent upstream Post_Cu_Plate_WIP primarily caused by the unexpected 8" Mastic Oxicidization
previous HW issue of Plater#4 & Plater#5 over 6/17~6/19
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
After undergoing some intermittent issue by the sensor alignment of Transporter Motor, the machin
6/22 07:00AM without major issue thus its half-day output is expected to be moderately OK, while
impacted by SAT machine issue(temporary slow down of 6" wafers' Oxidization Cleansing)
No significant HW issue is reported / observed
No significant issue and its NiSnAg cells are specially arranged for SWKS 6" wafers for one day to m
shortfall
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
One Cu Metal(#6) has been down for 12 hrs due to the chronic Rough Bump issue which is to be pe
replacing the new Temp Controller Unit in Cu Cell.
One Cu cell have been down ~ 12 hrs for high Bump Height. Process engineering mapping analysis
causing the chronic Bump Height issue has commenced while the Gap anaysis between 'Good Perf
the subsequent internal machine-benchmark.
Four out of four Cu_Cell have been down for 18 hrs due to the Bump Height issue suspected from t
among Cu_Cells. Tel/NEXX engineer has been working on to assess the current stability and will sta
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
One Cu_Cell(#6) has been down for 24 hrs to go thru the cycle of Anode Cleansing, Anode Burn, Du
which should have been finished within 12 hrs but extended due to the manpower shortfall of tech
No significant HW issue is reported / observed for 11 days in a row.
One Cu_Cell(#7) has been down for 24 hrs - longer than the desired cycle time due to the stretche
- In the wake of Cu Bump Height related HW Down since Yesterday, All five Cu_Cell have been dow
TEL/NEXX engineer's thorough review though his finding ending up with typical 'Dirt Anode'. Now a
stage of Buy-Off to be released for production by 07:00PM 6/24.
- For SnAG cells that have been down for 18 hrs due to the intermittent sensor malfuction causing
bath, TEL/NEXX engineer is still working on to find the root cause.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue for both Cu & NiSnAg cells as #6 Cu cell was fixed on 6/24 to be on production.
No major HW issue as #7 Cu Cell was fixed on 6/24.
- Three Cu-Cells out of 5 cells are running for Cu_plate but the other two cells are suspected of the
- Two SnAg cells were running during night shift with other two SnAg cells down due to Sensor maif
10:00AM, those two working cells were down as well in order to check the chemical level. By 08:00
expected to up & running.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed. But 72 wafers could not be logged on 6/25 as production
SnAg Bump Height issue.
No major HW issue is reported / observed
No major HW issue is reported / observed. Meanwhile, 25 wafers could not be loaded on 6/25 to ca
hrs due to the contamination found on wafer backside at the preceding process (Descum). Correcti
reinforce 100% inspection (from the existing sample base plan : One out of 25 Wafers) after Descu
- For 2 days in a row, Two Cu_Cells(#6 & #8) have been down for the recurring 'Uneven Bump Heig
Cu-Cells have been OK. Until arrival of senior TEL/NEXX engineer on 6/29, the propsect of fixing #6
positive.
- Two SnAg cells have been partially running but other two SnAg cells were down until 04:00PM due
check. After subsequent check & buy-off, UAT expects all SnAG cells would be running from 06:00P
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed with 65% OEE marked
- For 3 days in a row, Two Cu_Cells(#6 & #8) have been down for the recurring 'Uneven Bump Heig
Cells(#7, 9, 10) have been OK. Team expects the senior TEL/NEXX engineer's arrival on 6/29 to fix
- Due to the consecutive check on the chemical flow level & lengthy buy-off, SnAg cell's uptime wa
OEE 6/26. In the meantime, no major HW is reported on 6/27 to let team expect moderate SnAg ou
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
- Cu Cell : Switched to 8 inch loading while 6 inch loading was halted due to wafer crack issue foun
- NiSnAg Cell : Down since 6/30 early afternoon due to the N2 Regulator malfuction that triggered t
dilluted. The expected recovery time is by early Morning of 7/1
No major HW issue is reported since Plater#3's Transporter Motor cable was replaced on 6/29 after
No major HW issue is reported / observed. On top of Cu_Cell allotment, SnAg plating is added with
both Solder_Bump(8 inch) & Cap_Solder_Bump(6 inch).
- Cu Cell : While two Cu_Cells(6 & 8) have been down for days due to the unrecoverable 'Bump Uni
were down for more than 12 hrs due to the recoverable 'Bump Uniformity' issue to be running after
off from 6/30 evening.
- NiSnAg cell : HW swapping study(with Plater#4) is underway for one SnAg cell but the rest three
for 8" Cap_SnAg plating.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
Machine is running without no significant issue in its all Cu cells & NiSnAg cells but the source of '6
not uncovered yet thru UAT's mapping study, meaning the potential of another event of '6-inch Wa
OEE was affected by 6" wafer crack and 8" wafer holder shortage on 6/30, No major HW issue is re
In the wake of Yesterday's loading disconnection due to 6" wafer crack & 8" wafer holder shortage,
down for 7 hrs due to DI water inlet T-Joint leakage on 11:00AM ~ 06:00PM 7/01.
- Cu Cell : Still only two cells (#7 & #10) are OK while the other two cells (#6 & #8) needs further v
the dummy wafer running by 10:00PM 7/01.
- NiSnAg cell : Three cells are running for 8" as one cell is used for the engineering study.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed.
No specific HW issue but two Cu cells were in the regular PM(Anode cleansing) for ~8 hrs
-Cu cell : From 0400PM, all 4 cells are down due to the chronic Bump Uniformity issue inspite of foll
guidance of reinforcing the biweekly Anode cleansing frequency incorporated with the existing M h
cleansing frequency.
- NiSnAg : Three out of four cells have been running while one cell is reserved for the engineering s
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
Two Cu cells have been down for 20hrs while addressing the Uniformity issue after the regular Anod
-Cu cell : All 4 cells have been completely down while UAT/TELNEXX conducts the chemical dump,
to assess the bath chemical deterioration on the root cause of chronic Bump Uniformity issue.
- NiSnAg : Three out of four cells have been running while one cell is reserved for the engineering s
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed but for engineer's 4hrs-checking SnAg cells on Bump Hei
No major HW issue is reported / observed after finishing the regular Anode cleansing Yesterday(7/0
-Cu cell : All Cu cells have been completely down while UAT/TELNEXX conducts the chemical dump
Burning to assess the bath chemical deterioration on the root cause of chronic Bump Uniformity iss
evaluation result on #6 Cell promising, the live wafer running will follow by 7/04 09:00PM~10:00PM
the other 4 cells will hinge on.
- NiSnAg
: No majorCritical
HW issue
/ observed
Running
Running
<70% but SnAg cells as of 7/04
HW is reported
OK
OEE
Fail/PM
Power controller unit of #9 Cu_Cell has been down for 2 hrs 7/05 Morning to be recovered after fixi
As of 12:00PM Noon 7/05, One Cu cell(#9) has been down for 18 hrs for Anode cleansing=>Burnin
Test=>Fail=>Voltage&Current Check=>2nd Dummay Wafer Test OK=>Two Live wafer plating & te
Other than #9 Cu_Cells, two other Cu Cells have been OK.
-Cu cell : Preceding trial of the chemical dump / leaching / Anode Cleansing, appears to take hold w
the #6 for the production mode from 03:00 PM 7/05. Meanwhile, fanning-out the same approach f
will limited to #7 & #8 which can be ready for the production by Wed 7/08 ~12:00PM. Since the b
uniformity record of #9 & #10 has been within UATs own control band, after a round of Anode cle
Dummy Wafer Check + Live Wafer confirmation Cu-Cells, the production of #9 & #10 will resume f
- NiSnAg : No major HW issue is reported / observed.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
-Cu cell : #6 Cells has been running for the production over past 24 hrs and #7 & #8 will be releas
ongoing dummy test wafer & live wafer verification is confirmed to be acceptable. Pending the resu
forthcoming chemical analysis result, the prospect of releasing #9 & #10 can be no later than the
based on the promising estimation.
- NiSnAg : No major HW issue is reported / observed except for the unexpected Low Bump Height r
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed except for 3 hrs of regulat CRS cleaning
No major HW issue is reported / observed except for 3 hrs of regulat CRS cleaning
-Cu cell : In the aftermath of #6 Cell's production release since 7/05, #7 & #8 cells will be released
09:00AM after Dummy & Live wafers' sample running result. For #9 & #10 cells, 6 hrs of Anode bu
preceded by chemical dump & leaching.
- NiSnAg : No major HW issue is reported / observed except for the insufficient upstream Cu_Plated
Cu_plating shorftfall.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
-Cu cell : #7 & #8 cells are released for production fro 03:00PM after successful buy-off. Regardin
Anode burning has been repeated as the first trial of Anode burning could not pass the visual criter
the black film peel-off.
Cu_plating
Runningshorftfall.
Running <70%
Critical HW
OK
OEE
Fail/PM
No major HW issue is reported / observed except for the daily CRS cleaning(3 hrs)
- Cu cell : As of 04:00PM, All five Cu_Cells are allegedly up and running for the produciton after #9
released after all.
Cu_plating shorftfall.
Running
Running <70%
Critical HW
OK
OEE
Fail/PM
There is more than 12 hrs of SnAg Anode Cleaning & subsequent buy-off to impact the production
3.875

Daily Output OEE Tracker 10 July'2015 - Rev01

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Daily Output OEE Tracker 10 July'2015 - Rev01

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Plater#02

Actual output (SWKS)

Actual output (Others)

Actual output (Others)

Actual output (SWKS)

Actual output (Others)

Actual output (SW

Combined OEE for Plater#2+3+4+5

Actual output (Others)

Cu Plate 6"+ 8" (Plater

4+6+8 inch SnAg Plate

Ball Drop Shipping

Plated Bump Shipping

Actual output (SWKS)

Actual output (SWKS)

Actual output (SWKS)

Actual output (Others)

Actual output (SWKS)

Actual output (Others)

Actual output (SWKS)

Actual output (Others)

Actual output (SWKS)

ual output (SWKS)

Actual output (Others)

ual output (SWKS)

Actual output (Others)

Actual output (Others)

Power Supplu Issue

wer Supplu Issue

QDR Down for PLT02 ( Unable to control N2 pressure in

Cu bath was down for 8 hrs due to the checmical

Thermo-exchanger unit of Cu cell is down indefinitely

- Best Arrival time of replacement Temp Controller is

Transporter Motor down presiding the whole moving

Process Eng (PS Lee) /

Closed (Doc #) Open

New Problems arose with Plater#2

No significant issue with 6" Cu_Plate

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