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44
JANUARY/FEBRUARY 2004
DEFINING NANOTECHNOLOGY
INDUSTRIAL TECHNOLOGY
RESEARCH INSTITUTE
TAIWANS NATIONAL
NANOTECHNOLOGY PROGRAM
As an economy that specializes in high-technology manufacturing, Taiwan will not be absent in this global race to the
bottom. In June 2002 the government approved an NT$21.5
billion (approximately US$630 million) national nanotechnology program to be conducted over the six-year period, starting
in 2003.
Even at an average of about US$100 million a yearthe
largest investment ever made by the government on a single
R&D topic, Taiwans National Nanotechnology Program is still
considerably smaller in size compared to similar such programs of the larger economies. The governments of the United
States (at US$774 million for the year 2003 and going on to
US$847 million in 2004), Japan (US$810 million for the year
2003 and could be more in 2004) and Europe (US$1.7 billion
for the years 2002 to 2006 by the European Union alone) are
all committing much larger sums, and their annual budget
numbers over the past few years didnt just increase, they multiplied. Never was an R&D topic so vigorously pursued by all of
the technologically significant economies of the world, and
there can be little doubt that the coming nanotechnology battles in the global marketplace will be some of the fiercest ever.
For a small economy like Taiwan competing for a place in
this great race, its national program would have to be much
IEEE CIRCUITS & DEVICES MAGAZINE
JANUARY/FEBRUARY 2004
More than half of Taiwans National Nanotechnology Program, or over 80% of its industrialization tasks, will be led by
the Industrial Technology Research Institute (ITRI)Taiwans center for the development and dissemination of industrial technologies.
ITRI was founded in 1973 by the government of Taiwan
ROC as a nonprofit R&D institution to spearhead the building
and development of Taiwans high-tech industries and attend
to the technological needs of Taiwans industries in general.
Over the past 30 years its R&D programs have played a key
role in the birth and the rise of many of Taiwans technologyintensive industries such as semiconductors, PCs, optoelectronics, wireless communications, displays, advanced
materials, and chemicals through timely technology transfers
and spin-offs.
Today, ITRI is a 6,000-person organization with an annual
budget of about US$475 million, split roughly 50/50 between
government-sponsored R&D programs and commercial contract services. Information and communications technologies
are by far the main focus of its R&D activities, accounting for
more than 50% in overall resource allocation. Management
wise, ITRI focuses on real industrial impact and is very output
oriented. In each year it would license about 350 new technologies to over 500 companies. These licensing activities are
backed up by an annual granting of around 1,000 patents.
JANUARY/FEBRUARY 2004
nanotechnology program with a 20/60/20 structure to maximize the combined productivity of its overall R&D efforts.
20-Plus Programs
Approximately 20% of overall program resources will go to
zone 2 immediate applications, mostly in traditional industries. ITRIs approach is to position itself as a catalyzer. The
idea is to induce many dollars of private sector R&D investment for every dollar of ITRI expenditure. Figure 1 summarizes this approach. Basically, ITRI will focus on the
development of relevant competencies listed in the middle column, using what we targeted as the flagship (major) applications as vehicles for development. At the same time,
industry-specific nanotechnology consortia led by ITRI would
conceptualize and disseminate a continuous stream of nanotechnology-enabled product ideas (examples given in the
right-hand column) to be developed by our industry partners
as early as possible. To complement this effort, ITRI has also
founded a Nanopowder Service Center to provide the wide variety of building block materials and associated services needed
for expedient product development by our industry customers.
60 Programs
Approximately 60% of overall program resources will go to
zone 3 strategic industry applications. ITRI itself will undertake
the bulk of the research work here, with timely industry participation and academic collaboration, both domestically and internationally. More than half of the R&D resources for the 60
Industrial
Sectors
Plastics Industry
programs will be concentrated on the development of five focalpoint applications (descriptions of these will be given later).
Goal setting is a crucial part of planning here. Not setting the
right kind of goals would risk the program being orders of magnitude behind competing offerings from elsewhere.
Zone 3 will be especially meaningful to the smaller
economies that are excellent in technology-based manufacturing. This is where we could play even up with the larger
nations. For ITRI, how to provide convincing R&D leadership
so that we may compel Taiwans strong industries to partner
early with us to compete for a place in the global leadership
pack with each of the technologies we have selected for development would be the most crucial test.
20-Minus Programs
Approximately 20% of overall program resources will go to
frontier research. This part of the program will be planned and
managed according to competencies, not applications. We
dont believe meaningful research programs can be totally free.
At the end of the day, they can have only two kinds of values
either it leads to new applications, or it builds up new competencies. For applications that are projected to arrive only in the
very long term, managing to ensure that competencies would
indeed happen is by far the more important task, whether the
intended applications will materialize or not.
For 20-minus research, defining and selecting relevant
competencies to develop, building new-culture frontier
research clusters, raising a continuous stream of world-class
Core Technologies
Nano-Functionalization
Paints/Pigments/
Coating Industry
Innovative Products
Thermal insulation, UV-resistant,
bacteria-resistant, high faderesistant materials
High strength, bacteria-resistant,
abrasion-resistant, electric
conducting, low gas-permeation,
environmentally friendly packing
materials
Porous Nano-Structures
Construction
Industry
Paper Industry
Self-Assembly
JANUARY/FEBRUARY 2004
47
FOCAL POINTS
MTJ
Bit Cell
MTJ Stack
+
Interconnect
Via
Nanoelectronics on Silicon
We believe silicon, and especially CMOS, will be the main platform for nanoelectronics for the foreseeable future, and it is on
silicon that we will focus our nanoelectronic research efforts.
The device portion of the program currently under development
includes magnetoresistive random access memories (MRAM),
phase change memories, strained silicon, and other silicon germanium (SiGe) devices and, further out, organic bistable
devices, resistance random access memories (R-RAM), and other
next generation devices. Besides devices, materials will be
Top Electrode
CoFe/NiFe FM
Via
M4
M4
Via
M3
CMOS
Bit
Line
Word
Line
M4
M4
Via
M4
Via
M3
M3
Via
M2
Via
M2
Via
M1
Via
M1
M1
CNT
N+
S
CNT
N+
D
Digit
Line
Ground
Line
Via
N+
D
Al2O3 Barrier
CoFe FM
Ru
CoFe FM
PtMN AF
Silicon Substrate
Bottom Electrode
M4
BC
MTJ
20 nm
M5
(a)
Conventional Memory
Area 24 F2
150
1.5
140
1.4
ITRI's
Design
130
1.3
Prior
Act
120
1.2
110
1.1
100
1.0
90
0.9
80
0.8
70
0.7
60
0.6
50
0.5
40
0.4
30
0.3
20
0.2
10
0.1
0
0.0
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45
Percentage (%)
M1-3 Via
(c)
2. ITRIs MRAM design versus prior art. (a) MRAM cross section and TEM image of MTJ stack. (b) Layout (8 8 array). (c) Current to generate 10
Oe by writeline.
48
JANUARY/FEBRUARY 2004
increasingly the focal point for electronics in the age of nanotechnology. ITRIs early focus will be on high K gate dielectrics.
This effort will be broadened to include other critical nanomaterial technologies and their integration to future mainstream
integrated circuit (IC) fabrication processes.
S
Si
1.0
4
P-type
N-type
0.8
3
Vg = 5V
2
1
0
2. 5V
2.5V
0V
0.5
0.6
Vg = 5V
0V
0
Vds (V)
0.5
0.4
0.2
Gate
Nanophotonic Devices
The emphasis now is on lasers and other nextgeneration light sources of various wavelengths
made with self-assembled or defined-growth
quantum dots (QDs) and nanophotonic crystals
that are capable of reducing the size and cost of
optical communication components and systems
substantially. Further down the road, we see QD
lasers and photonic crystals as the key building
blocks to optical circuits.
I-V curves.
Drain current, Id(A)
0.0
JANUARY/FEBRUARY 2004
4-922HR/HR
(W,L) = 5m, 0.6mm)
CW at T = 20C)
30% Al Cladding
2
1.291.301.311.321.33
Wavelenth (m)
Ith : 1.43 mA
0
0
10 20 30 40 50 60 70 80
Current, I, mA
(a)
SEM
TEM
50 nm
50 nm
(b)
4. Development of quantum-dot lasers (InAs/InGaAs structure).
(a) 1.31-m lasing characteristics observed at room temperature.
(b) SEM and TEM images.
49
December, 2002
Panel : 10-in. 240 320 RGB, Triode
Pitch : 500 m 500 m
Brightness ~ 200300 nits
Voltage ~ 150200 V
Gate
CNT Dielectric
Cathode
Glass
Va - 1kV
5. Progress in CNT-FED development at ITRI: latest features
(size, color, resolution, structure).
5 nm
10 nm
Carbon Nanocapsules: Filled with Tb
UCL
68.3772
10
Catalyst
Carbon Nanospirals: Structure
90.0000
15
20
10 m
96.8377
9 11 13 15
Frequency (GHz)
17
Absorption (%)
99.0000
JANUARY/FEBRUARY 2004
Polymer
Monomer
Carbon Nanotube
Field Emission Displays
Flat panel displays have been a major
Nanopore (210 nm) as
growth industry in Taiwan, with world
a Reactor
market share now exceeding 35%. CNT
(a)
FEDs, with their potential for largesize, high resolution, color quality and,
above all, its favorable cost-down potential due to simpler structures and
advantages in large-area fabrication, is
sPS+aPS w/o
sPS+aPS with
an important emerging technology
Nanopore
Nanopore
MCM-41
PE from MCM-41
(c)
(d)
especially for large screen applications
(b)
including flat panel televisions. Using a
thick film process with spun-on CNT
7. Space-confirmed polymerization using nanopore reactors.
pastes, ITRI has produced FED with
(a) Schematic. (b) Polymerization. (c) Without a nanopore setting, sPS and aPS do not blend
well. (d) Molecular blending in a nanopore setting.
steadily improving characteristics, as
shown in Figure 5, and is presently
working with industrial partners to produce high resolution, full color television prototypes in
Nanopore Reactors
the near future. To date, 42 CNT FED-related patents have
Another topic we are working on is nano-scale space confinebeen obtained.
ment and its applications (Figure 7). Polymerization with 2 to
10 nm reactors made from MCM-41 nanopores and with appropriate catalysts can produce linear polymers with ultrahigh
Carbon-Based Nanomaterials
molecular weights and strengths. The polyethylene (PE) fiber
Some of the progress we made with carbon-based nanomathus produced at ITRI laboratories have recorded molecular
terials are shown in Figure 6. A novel carbon-based nanoweights greater than 7 million at melting temperatures greater
scale building block, carbon nanocapsules shown in Figure
than 140 C and a strength suitable for bulletproof applications.
6(a), has been fabricated with high concentration and purity. The nanocapsules possess high thermal and electric conBy placing different catalysts in the nanopores, molecular-level
ductivities and mechanical strength just like CNT but are
blending of two different polymers was demonstrated for, as far
considerably easier to disperse and are readily water and solas we know, the first time in the world. Figure 7(c) and (d)
vent soluble, resulting in much better processability. The
shows the case of atatic- and syndiotactic-polystyrene (aPS and
hollow capsules exhibit strong fluorescence in the 390 to
sPS) blending. These may lead to very interesting applications in
560-nm wavelength range with quantum efficiency signifiquite a number of areas.
cantly higher than that of C60 or CNT. They can also be
filled with metallic particles, resulting in excellent magnetic
SUMMARY
properties. Metal-filled carbon nanocapsules are protected
As a small economy that has built its future on manufacturfrom oxidation, making stable performance possible for varing excellence, Taiwan has a big stake in nanotechnology. On
ious applications. Further research work now concentrates
the one hand, our manufacturing strength makes nanotechon their functionalization for applications such as elecnology a unique opportunity. On the other, it also makes
trodes in lithium batteries, catalyst support in direct
nanotechnology the one R&D battle we can least afford to
methanol fuel cells, emitters for CNT FEDs, and heat-dissilose. To come out ahead takes coherent planning and discipating coatings for electronic components. An alliance with
plined actions and, above all, the ability to marry nanotechover 20 industrial partners in Taiwan has been formed to
nologys creative power to the dynamics of the marketplace.
pursue its various potential applications.
Such will be the challenges facing Taiwans National NanAnother interesting carbon-based nanomaterial created
otechnology Program and its central R&D forceITRI. For
in ITRI laboratories is the carbon nanospirals shown in
us, the future is literally now.
Figure 6(b). Essentially carbon nanowires twisted into springlike spirals, they exhibit excellent properties for electromagnetic radiation absorption. The frequency-dependent
Jih Chang Yang is with the Industrial Technology Research
absorption pattern, up to 15 GHz, can be tuned by the size and
Institute (ITRI), Taiwan ROC National Nanotechnology
composition of such spirals.
Program, Taiwan. E-mail: jcyang@itri.org.tw.
JANUARY/FEBRUARY 2004
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