Aera FC-7700 Series MFCs

Precise, economical,
elastomer-sealed design

benefits
Fast response < 2 sec flowsettling time between set points
Unsurpassed reliability
zero drift < 0.5% of fullscale flow over one year
Easy integrationstandard
connectors and dimensions

As the field-proven standard for a range of applications, Advanced Energys

Aera FC-7700 series delivers precise flow control, while offering the economic
benefits of elastomer seals. For process and equipment engineers working in
the semiconductor, flat panel display, data storage, industrial vacuum, and
industrial coating markets, this series provides high reliability and superior
performance for non-corrosive gas applications, including CVD, PVD, etch,
ion implantation, sputtering, thermal oxidation, optical glass coating, optical
fiber, surface treatment, and other coating processes.

Superior resultshigh-quality
film and etch characteristics

features
Elastomer seals
VCR connections

Full-scale flow ranges

from 10 sccm to 150 slm
Normally-closed or normallyopen solenoid control valve

low cost

unsurpassed reliability

Custom-made for applications

High-quality electronic components

that require top performance

and a robust, minimal-parts design

but not the corrosion resistance

stand up to the effects of strong

or ultra-high leak integrity of

RF fields and other operational

metal seals, the FC -7700 series

demands, delivering the best, long-

is both cost-effective and precise.

term, zero-drift stability available

< 0.5% of full-scale flow over one year.

fast response

With over 25,000 units in the field,

< 0.5% are returned within a year of

Largest purge-mode flows

availableup to 100 times
the calibrated max

Advances in the FC -7700 series

Leak integrity of 1 x 10
atm-cc/sec of He

mass flow controllers (MFCs).

easy integration

These advances include a highly

Obtain the performance and

sensitive, rapid-response, small-

reliability advantages of Aera MFCs

diameter sensor. Further, compared

by replacing other brandswith no

to competing models slower thermal

installation hassles. Certain models

valves, the FC -7700 series normally-

feature standard electrical connectors

open or normally-closed solenoid

and critical dimensions to easily

design supplies a faster response.

fit existing systems.

-6

shipment.

technical design deliver enhanced

operation compared to competing

These speed enhancements eliminate

over-shoot or under-shoot and
produce an actual-flow settling time of

superior results

< 2 sec between set pointsthe fastest

FC -7700 series MFCs produce

time of any MFC with a standard

film and etch characteristics that

solenoid control valve.

are not only extremely uniform,

but also highly repeatable.

model and suffix codes

Category

Suffix Codes

Product
Flow Controller

FC-

Flow
10 sccm to 5 slm

7700

6 to 20 or 50 slm

7710

35 to 150 slm

7720

Connector
Aera 20-pin
Card Edge

Standard 9-pin D

CD

Standard 20-pin
Card Edge

CU

Fittings
1/4 VCR

4V

3/8 VCR (>100 slm)

6V

Example

FC

7700

6V

specifications
Operational

FC-7700, 7700C,
7700CD, 7700CU

FC-7710, 7710C,
7710CD, 7710CU

Full-Scale Range

10 sccm to 5 slm

6 to 20 slm*
20 to 50 slm

Response Time

< 2 sec to within 2% of set point

Accuracy

Within 1% of full scale

Within 2% of full scale

Linearity

Within 0.5% of full scale

Within 0.5% of full scale*

Within 1% of full scale

Within 1% of full scale

Repeatability

Within 0.2% of full scale

Leak Integrity

1 x 10 - 6 atm-cc/sec (He) max

Control Range

5 to 100% of full scale

Differential Pressure

7 to 40 psi
(362 to 2069 Torr)

10 to 40 psi (517 to 2069 Torr)*

14 to 40 psi (724 to 2069 Torr)

21 to 40 psi
(1086 to 2069 Torr)

Normal Operating Pressure

50 psi (2586 Torr)

Maximum Inlet Pressure

150 psi (7740 Torr) max

Temperature Range

5 to 45C (41 to 113F)

Low-flow model

High-flow model

FC-7720, 7720C, 7720CD

35 to 150 slm
< 3 sec to within 2% of set point

FC-7700, 7700C,
7700CD, 7700CU

Physical

FC-7710, 7710C,
7710CD, 7710CU

FC-7720, 7720C, 7720CD

Normally-closed solenoid, except FC-7700 and FC-7710

Control Valve Type

Seals

ElastomerViton

Materials

Stainless-steel type 316L, Viton, Teflon

Standard Fittings

1/4 VCR

Attitude Sensitivity

May be mounted in any position

Weight

0.91 kg (2.0 lb)

Electrical

FC-7700, 7700C,
7700CD, 7700CU

Normally-open or normallyclosed solenoid

1/4 VCR, 3/8 VCR

2.27 kg (5.0 lb)

FC-7710, 7710C,
7710CD, 7710CU

FC-7720, 7720C, 7720CD

Input Power

+15 VDC 2% at 25 mA
-15 VDC 2% at 180 mA

+15 VDC 2% at 25 mA
-15 VDC 2% at 200 mA

Power Consumption

3.1 W max

3.5 W max

Input Command Signal

0 to 5 VDC

Output Indication

0 to 5 VDC

dimensions
FC-7700, 7700C,
7700CU, 7700CD

FC-7710, 7710C,
7710CU, 7710CD

FC-7720, 7720C,
7720CD

12.7 mm (0.5")

15.0 mm (0.6")

15.0 mm (0.6")

76.0 mm (3.0")

76.0 mm (3.0")

133.5 mm (5.3")

124.0 mm (4.9")

124.0 mm (4.9")

183.8 mm (7.2")

18.0 mm (0.7")

18.0 mm (0.7")

25.5 mm (1.0")

69.0 mm (2.7")

69.0 mm (2.7")

101.5 mm (4.0")

119.0 mm (4.7")

119.0 mm (4.7")

151.0 mm (5.9")

127.0 mm (5.0")

127.0 mm (5.0")

152.6 mm (6.0")

32.0 mm (1.3")

32.0 mm (1.3")

37.5 mm (1.5")

5.0 mm (0.2")

5.0 mm (0.2")

16.0 mm (0.6")

For more information on non-vacuum products and applications, contact EMCO Sales:
Advanced Energy 1625 Sharp Point Drive Fort Collins, CO 80525 USA
T: 800.446.9167 or 970.221.4670 F: 970.221.5583 www.emcoflow.com
For information on vacuum-related products and applications, contact Advanced Energy Sales:
Advanced Energy Industries, Inc. 1625 Sharp Point Drive Fort Collins, Colorado 80525
T: 800.446.9167 or 970.221.4670 F: 970.221.5583 support@aei.com www.advanced-energy.com
United Kingdom
T: 44.1869.320022
F: 44.1869.325004

Germany
T: 49.711.779270
F: 49.711.7778700

Korea
T: 82.3 1.705.2100
F: 82.31.705. 2766

Advanced Energy and Aera are registered trademarks of Advanced Energy Industries, Inc.
Teflon and Viton are registered trademarks of E. I. Du Pont De Nemours & Company.
VCR is a registered trademark of Cajon Company.

Japan
T: 81.3.32351511
F: 81.3.32353580

Advanced Energy Industries, Inc. 2003

All rights reserved. Printed in U.S.A.
SL-FC7700-230-01 2.5M 10/03
Taiwan
T: 886.2.82215599
F: 886.2.82215050

China
T: 86.21.58579011
F: 86.21.58579003