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Lecture 8-7
Acoustic Wave Devices
Bulk Sensors
acoustic pressure sensor
pressure sensors
accelerometers
SAW
f =
2f
2
0
( Q Q )1 / 2
L1
C0
C1
R1
f 03 / 2 ( L L )1 / 2
f =
( Q Q )1 / 2
L1
C0
C1
unperturbed
TSM resonator
R1
L2
liquid loading
R2
L3
mass loading
1
+ jC 0
R1 + jL1 + 1 jC1
1
1
fs =
2 ( L1C1 )1 / 2
SAW device
2n + 1
v, n = 0,1,2,3,.....
CC
( f ) = 2
CC
( f fo )
v
By Materials
Bulk wave
Surface wave
Flexural plate wave
By wave forms
Longitudinal wave
Transverse wave
Raleigh wave (mixed long. and trans. wave)
Bulk Materials
Quartz
Piezo-ceramic materials
Thin films materials
ZnO
PZT
organic polymer
GaAs
Electrical
input
Electrical -Mechanical
Transducer
Oscillator
Frequency
Amp.
Phase
Mechanical - Electrical
Transducer
Delay line
(temperature, mass,
stress, morphology)
Electrical
output
Important parameters:
Frequency: f
Pitch
Phase velocity: vp
=4d
Delay line:
Effective mass
Delay line:
Acoustic Wave
Devices
Love mode
Humidity frequency
characteristics (HFC)
Influence of Newtonian
liquid viscosity on Love
wave phase velocity
Accelerometer
Torque Sensors
Gyro Sensor
Humidity Sensors
Voltage sensor
Flow Sensor
Others