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Electron Microscopy
and Diffraction
1. Introduction
Contact
• M t i l characterization
Materials h t i ti
• History
• Why EM ?
• Classification of EMs
• Overview of SEM and TEM
1959-1967:
- SEM withi h stereoscan (Wells)
(W ll )
- Performance of SE detector (1960, Everhart and
Thornley)
- The first commercial EM (1965)
- Electron-channeling contrast for crystal orientations
(
(1967))
[Oatley (1982), J. Appl. Phys. 53, R1]
James Hillier
EM
1938 - First SEM is produced
by von Ardenne
1940
McMullan’s original
microscope
01/01/2009 25
Handouts-MSE4346 -K51 KHVL
Definition
Resolution
- RP is the smallest
distance between two
points at which two or more
objects can be
distinguished
g as separate.
p
- Resolution is the ability of
a lens to distinguish
between two point sources
at infinity, when they are
viewed in the image plane.
61 λ
0,61
0
RP = ----------------
NA = n.sinα
n sinα - numerical aperture
RP- resolution power NA = n.sin
RP
n - index of refraction α - half angle of illumination
The smallest
Th ll t di
distance
t b
between
t ttwo points
i t th
thatt can be
b
resolved by
Human eye: 0
0.1-0.2
1 0 2 mm
Light microscope: 0.2 μm
SEM: 1-2 nm
TEM: 2Å
This high resolution is achieved by TEM thanks to the
use of a high energy electron beam (small wavelength).
concave convex
Electromagnetic lenses
(solenoid/coil) for
subatomic particles
(electron, protons,
positrons)
F
Formation
ti off accelerated
l t d electron
l t b
beam t
toward
d
specimen by a positive voltage (kV)
Condensing electrons into a monochromatic and
narrow beam with electromagnetic lenses and
metallic diaphragms/apertures
Focusing and scanning electron beam into
specimen surface through electromagnetic
lenses and scanning g coil
Beam-specimen interaction
Data acquisition and imaging
Scanning
g Electron
Microscope
Transmitted Electron Imaging (SEM) Electron Backscattered
(TEI) Diffraction (EBSD)
Cons (weaknesses/limitations)
(weaknesses/limitations)::
- Specimens must be suitable in vacuum
- False/artificial outputs through sample preparation
- Coating non-conductive samples is required
- The crystallinity cannot be determined
- Resolution is often not sufficient to tell all of the surface features
- Scanning gpprocess is slow and so sample p may y move leadingg to
distorted images
Watch out!
A cover slide!
Transmission Electron
High-Resolution Microscope
Transmission Electron (TEM) Electron Energy Loss
Microscopy (HR-TEM) Spectroscopy (EELS)
SEM TEM
High resolution for thick bulk High resolution (1,2-1,5 Å)
samples: 20-50 Å (most for very thin samples (most
commercial SEM) and < 10 Ao commercial TEM)
(research SEM) 3D
3D-imaging
imaging impossible
3D-imaging due to large Information about crystal
depth of field structure (crystal lattice
Small magnification avaiable and orientation,
orientation
as for light microscope dislocation, twinning,…)