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DOI: 10.1002/adom.201400316
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Figure 1. a) The fabrication process of a 3D SRR; spin-coating resist, electron beam lithography, Ni/Au (10/60 nm) deposition, lift-off, CF4 plasma
dry-etching, and self-folding (in sequence). The SRR diameter, d, height, h, and gap size, g, were 2.2 m, 1.8 m, and 1.5 m, respectively. Note that a
shadow effect of the arms in the dry-etching process produces protruding Si portions under the arms in the last two steps. b) SEM image of the fabricated isotropic metamaterial consisting of fourfold symmetric 3D SRRs. The inset shows a magnified image, and the total sample area was 4 4 mm2.
Since the folding forces were entirely programmed by the deposition conditions and structure design, the fabricated structures
were quite uniform over a sample area. Different from previous
reports,[29,34] our technique based on 2D templates of bilayer
metals demonstrates a robust approach for the realization of
large-scale 3D metamaterials.
We firstly characterized the fundamental optical properties
of the 3D SRR elements by measuring a rectangular array of
the SRRs, i.e., an anisotropic metamaterial (see Supporting
Information, Figure S2b), using Fourier-transform infrared
Figure 2. a) Measured normalincidence transmittance spectra for different sample rotations . The inset shows the sample configuration at = 0
where the incident electric field is parallel to the SRR gap. b) Numerically simulated transmittance spectra at = 0 and 90. The inset shows the corresponding Jz distribution in the 3D SRR at the resonance f = 30.2 THz. c) Real and imaginary parts of the retrieved effective parameters of 3D SRRs;
permittivity , permeability , bi-anisotropy parameter , and refractive index n.
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D 0
B =
i / c 0
i / c 0 E
0 H
(1)
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Figure 3. a) Schematic of measurement setup. The illumination condition is specified using three variables; the sample rotation , incident
angle , and p- or s-polarization. b) Measured transmittance map of an
isotropic metamaterial as a function of frequency and sample rotation for
the normal incidence (TEM at = 0). The resonant dip position of the
first mode is indicated by the white dashed line.
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Experimental Section
Figure 4. a,b) Measured transmittance map of an isotropic metamaterial as a function of frequency and incident angle for the p- (a) and s(b) polarizations at = 0. The quasi-isotropic responses are robust even
for the sample rotation. (see Supplemental Information, Figure S4). The
resonant dip positions of the first and second modes are indicated by the
white dashed lines.
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Supporting Information
Supporting Information is available from the Wiley Online Library.
Acknowledgements
The authors thank nano-fabrication supports from the Metamaterials
Fabrication Platform of Instrument Technology Research Center and
Emergent Matter Science Research Laboratory of RIKEN. This work was
supported by grants from the National Science Council (NSC 1022221E-492033, 1022745-M-002005-ASP, 1002923-M-002007-MY3, and
1022221-E-492003), the Photonics Center Osaka Univ. joint research
R-3, the JSPS Asian CORE Program, and MEXT KAKENHI Grant-in-Aid
for Scientific Research on Innovative Areas Grant Number 22109006.
C.-C.C., A.I., and T.T. contributed equally to this work. C.-C.C. and D.P.T.
devised the 3D structure idea and initiated the project; C.-C.C., Y.-H.T.
and M.-H.S. performed the fabrication experiments; C.-C.C. and A.I.
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