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Departamento de Qumica, Universidade Federal de Sao Carlos, C. P. 676, 13560-970 Sao Carlos, SP, Brazil
Department of Chemistry, Michigan State University, East Lansing, Michigan 48824, United States
Department of Computer and Electrical Engineering, Michigan State University, East Lansing, Michigan 48824, United States
ABSTRACT: The morphology, microstructure, chemistry, electronic properties, and electrochemical behavior of a boron-doped nanocrystalline diamond (BDD) thin lm grown on quartz
were evaluated. Diamond optically transparent electrodes (OTEs) are useful for transmission
spectroelectrochemical measurements, oering excellent stability during anodic and cathodic
polarization and exposure to a variety of chemical environments. We report on the
characterization of a BDD OTE by atomic force microscopy, optical spectroscopy, Raman
spectroscopic mapping, alternating-current Hall eect measurements, X-ray photoelectron
spectroscopy, and electrochemical methods. The results reported herein provide the rst
comprehensive study of the relationship between the physical and chemical structure and
electronic properties of a diamond OTE and the electrodes electrochemical activity.
KEYWORDS: optically transparent diamond electrode, optical, chemical, and electronic properties, electrochemical characterization,
ionic liquids
1. INTRODUCTION
The use of diamond as an optically transparent electrode
(OTE) for spectroelectrochemical measurements was rst
reported back in the early 2000s.1,2 Our group and others
have made use of either free-standing diamond plates or thin
lms of boron-doped diamond (BDD) deposited on quartz for
transmission spectroelectrochemical measurements in the UV
vis region of the electromagnetic spectrum1,36 or on undoped
Si for measurements in the mid- to far-IR region.2,7 In our
opinion, the use of optically transparent diamond electrodes in
spectroelectrochemistry is an underdeveloped area of research
with this material. BDD possesses attractive qualities as an
OTE: a wide optical window, a wide working potential window
(>3 V in aqueous media), low background current, microstructural stability during anodic and cathodic polarization, and
resistance to molecular adsorption and fouling.1,48 Depending
on the doping level and lm thickness, diamond lms are
transparent in the visible (300700 nm) and mid- to far-IR
(<1100 cm1) regions. The preparation of an OTE requires
balances of lm thickness (thick enough to be continuous but
not too thick to signicantly reduce transmission) and doping
level (sucient to impart electrical conductivity but not so high
as to make the lm opaque). In the case of diamond, one has
some control over the materials optical properties through
selection of the chemical vapor deposition (CVD) conditions
used for thin-lm growth. The wide optical window coupled
with the interesting electrochemical properties make BDD
OTEs unique materials for transmission spectroelectrochemistry and sensor technologies in which both electrochemical and
spectroscopic signal transduction is desired.
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end of the deposition period, the CH4 and B2H6/H2 gas ows were
stopped, and the diamond lm remained exposed to the H2 plasma
(196 sccm). The lm was then cooled in the H2 plasma over a period
of 2030 min by slowly reducing the power and pressure down to 150
W and 10 Torr. This post-treatment cooled the sample to an estimated
temperature of less than 400 C in the presence of atomic
hydrogen;19,20 this step is critical for minimizing sp2 carbon impurity
incorporation and for maintaining stable H surface termination.
2.2. Atomic Force Microscopy. AFM was performed with a
NanoScope IIIa scanning probe microscope (Veeco Instruments Inc.,
CA) operating in the tapping mode. Pyramidal-shaped Si3N4 tips
mounted on gold cantilevers (100 m legs, 0.38 N m1 spring
constant) were used in air to obtain the topographical images.
2.3. UVVis Transmission Measurements. Optical spectroscopy was performed after the lm was rinsed with ultrapure water and
ultrapure isopropanol (distilled and stored over activated carbon) and
dried under a stream of N2. The BDD/quartz sample was placed in the
optical beam of a commercial UVvis spectrophotometer (Shimadzu
Model UV2401-PC). A piece of clean quartz was placed in the
reference beam of the instrument. Transmission spectra were recorded
in the range of 200900 nm. The refractive indices of diamond,
quartz, and air are 2.41, 1.54, and 1.00, respectively.
2.4. Raman Spectroscopy. Raman spectroscopy was performed
using a Renishaw inVia Reex spectrometer. The instrument consisted
of a confocal microscope connected to a continuous-wave diodepumped solid-state laser with a fundamental emission at 532 nm. The
sample was positioned under the laser light using a motorized stage.
The stage position was controlled and the spectral data were acquired
with the commercial WiREInterface software. This software allows for
control over the laser power, exposure time, spectral range covered,
and stage positioning for mapping of a sample. The parameters used
were a laser power of 10 mW at the sample and an integration time of
10 s. Each spectrum was generated from an average of ve spectral
acquisitions at each point. A Leica (100/0.85) objective lens was
used to focus the excitation light and collect the scattered radiation. A
1800 lines mm1 holographic grating was used, and the step size in the
mapping was 25 m.
2.5. X-ray Photoelectron Spectroscopy. XPS was performed
courtesy of Kratos Analytical Ltd. using an AXIS Supra instrument.
The surface science station was equipped with XPS and an Ar+ gas
cluster ion source for depth proling. The ion source was operated at 4
kV for depth proling of the diamond lms. X-rays were generated
from an Al/Mg K X-ray source, and the emitted photoelectrons were
analyzed using a hemispherical analyzer. The X-ray power was 600 W,
and scans were acquired over a 700 m 300 m area. The pass
energy was 160 eV, and the acquisition time was 120 s per survey scan.
The samples were analyzed as received after evacuation to the base
pressure of ca. 1010 Torr. The actual line shape used to t the spectra
was a combined Gaussian/Lorentzian shape. There was a 30%
Lorentzian component in the peak shapethis approximates the
natural line shape of the emitted electrons from within the sample.
The low-binding-energy side of the peak was t rst by adjusting the
height and half-width. Once that was done, additional components
were added on the basis of knowledge of the dierent types of
carbonoxygen functional groups and their respective binding energy
shifts from the C 1s base peak.
2.6. Hall Eect Measurements. A commercially available cryostat
was modied by the addition of a custom-designed sample stage
consisting of an aluminum nitride plate on a heated copper stage.21
The measurement temperatures were from room temperature to 700
K with the samples held under vacuum. Electrical connection to the
sample was made using 25 m diameter gold wires connected to Ti
metal contacts formed on the sample surface by physical vapor
deposition (PVD). For all of the measurements reported herein, a
four-point van der Pauw contact arrangement was employed.
The BDD sample was cleaned prior to PVD of the Ti contacts near
the four corners of the sample. The sample was then oxygen-plasmatreated to remove any surface conductivity eects. The sample was
mounted in the Hall eect system and annealed at 700 K under
vacuum while the IV behavior of the metal contacts was monitored
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Figure 1. Tapping-mode AFM images (500 nm 500 nm) of (A) a piece of quartz that was mechanically polished (100 nm diameter diamond grit
for 3 min) and ultrasonically seeded (45 nm detonation nanodiamond with 30 nm aggregates in DMSO for 30 min) and (B) a nanocrystalline
diamond overlayer formed after 30 min of growth on the mechanically polished and ultrasonically seeded quartz.
from room temperature to 700 K. Once the linear IV behavior was
observed for all contact pairs, resistivity and Hall eect measurements
were recorded using the ASTM standard procedure.22
2.7. Electrochemical Characterization. Electrochemical measurements were made using a computer-controlled workstation (model
650A, CH Instruments, Inc., Austin, TX) in a standard three-electrode
glass electrochemical cell.23 The BDD/quartz electrode was clamped
to the bottom of the cell. A Viton O-ring (i.d. 0.5 cm) placed between
the cell opening and the electrode surface ensured that a reproducible
area of 0.2 cm2 was exposed to the electrolyte solution. Electrical
contact with the diamond surface was made using a piece of aluminum
foil pressed along the entire width of the sample and a metal clip. The
O-ring was ultrasonically cleaned in ultrapure water and rinsed with
ultrapure isopropanol prior to use. Once mounted in the cell, the BDD
electrode was cleaned by soaking in ultrapure isopropanol (distilled
and stored over activated carbon) for 20 min. The cell was then rinsed
with the supporting electrolyte. Afterward, the cell was lled with the
analyte solution of interest. The counter electrode was a coiled Pt wire
that was positioned normal to the working electrode. The reference
electrode was a commercial Ag/AgCl electrode lled with 3 mol L1
KCl saturated in AgCl (0.197 V vs NHE, Bioanalytical Systems, West
Lafayette, IN).
2.8. Capacitance Measurements. Dierential capacitance
measurements were made using a potentiostat (PAR model 173)
and a lock-in amplier (Stanford Research Systems). A 10 mV
alternating-current (ac) sine wave was coadded to the applied directcurrent (dc) potential, and the capacitance was determined from the
following equation:
Z im =
3. RESULTS
3.1. Substrate Seeding. Preparing the quartz surface
properly ahead of the diamond growth is a critical step for
achieving a thin and uniform lm. A uniform and high initial
nucleation density is needed to grow a thin and continuous
nanocrystalline diamond lm in a short time. This is
accomplished by mechanical polishing and ultrasonic seeding
of the quartz with nanoparticles of diamond. The mechanical
polishing step introduces striations (trenches) on the substrate
surface, as can be seen in the AFM image presented in Figure
1A. Some residual carbon material likely remains in the
striations even after the ultrasonic cleaning that follows the
polishing. Analysis of the AFM images revealed a nominal
striation width of 42 9 nm. The apparent depth of the
striations was only about 2 nm. The clean scratches and
adventitiously embedded diamond/carbon particles serve as the
initial nucleation sites for diamond growth.
1
2fCdl
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Figure 4. (left) Series of Raman spectra recorded along a line prole across a nanocrystalline BDD thin lm on quartz. (right) Individual spectrum
showing peaks at 488, 1137, 1215, 1320, and 1470 cm1 and a shoulder at 1550 cm1. The 40 spectra were recorded over an area of 116 m 179
m. Therefore, each spectrum was recorded about every 4.5 m along the long axis.
decreases. For the BDD OTE, these two eects largely oset
each other, leading to the observed weak temperature
dependence. In the case of a degenerate semiconductor, there
are many carriers readily available for conduction so large
changes with increasing temperature are not expected. This is
further evidenced in the data presented below.
Figure 6 shows plots of (A) the charge carrier concentration
and (B) the carrier mobility as functions of temperature for the
BDD OTE. Generally, consistent with the weak temperature
dependence of the resistivity, both the carrier concentration
and the mobility are largely independent of the temperature.
Qualitatively, there is a slight increase in the carrier
concentration with temperature. This trend reects a slight
increase in the number of thermally activated carriers. Overall,
however, these electrical measurements are consistent with the
thin nanocrystalline BDD lm being a degenerate semiconductor/semimetal. The carrier concentration is high (1021
cm3) because of the high doping level, and the mobility is
relatively low (0.2 cm2 V1 s1) because of carrier scattering by
E
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Figure 6. Plots of (A) the charge carrier concentration and (B) the charge carrier mobility as functions of temperature for a nanocrystalline BDD
thin lm on quartz. Measurements were made over a temperature range of 300700 K. In (A), the carrier concentration at 410 C is likely a
measurement anomaly and is clearly inconsistent with the other data.
Figure 7. XPS survey spectrum for a nanocrystalline BDD thin lm on quartz (A) over a broad energy range from 0 to 1195 eV and (B) over a
narrow range from 0 to 300 eV. The nanocrystalline diamond lm thickness was 0.51 m. The OTE was exposed to the laboratory air for multiple
weeks prior to the measurement.
Figure 8. XPS depth proles through a nanocrystalline BDD thin lm deposited on quartz. The depth proling was performed using a 4 kV Ar+
beam. The depth proles on the left include signals for C, O, Si, and Ar. The depth proles on the right show the B and Ar signals (in the blueshaded region) on an expanded scale; signals for C (red), O (blue), and Si (green) are o-scale.
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Figure 9. Peak ts of the (A) C 1s and (B) B 1s regions of the XPS survey spectrum for a nanocrystalline BDD thin lm deposited on quartz. The
results reveal the dierent chemical environments around the C and B atoms in the lm.
Figure 10. Cyclic voltammetric jE curves for 0.1 mmol L1 analytes in 1 mol L1 KCl at a nanocrystalline BDD thin lm on quartz. The redox
analytes are (A) Fe(CN)63/4, (B) Ru(NH3)63+/2+, (C) IrCl62/3, and (D) methyl viologen. Scan rate = 0.1 V s1. Arrows depict the direction of
the initial scan. The lm thickness was 0.51 m.
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Figure 11. Cyclic voltammetric jE curves for 0.1 mmol L1 analyte in 1 mol L1 KCl at a BDD OTE. The redox analytes are (A) Fe(CN)63/4,
(B) Ru(NH3)63+/2+, (C) IrCl62/3, and (D) methyl viologen. Curves are shown for each analyte as a function of scan rate (0.1, 0.2, 0.3, 0.4, and 0.5
V s1). The lm thickness was 0.51 m.
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Figure 12. (A) Background cyclic voltammetric scans as a function of scan rate for a BDD OTE in 0.5 mol L1 H2SO4. Scan rates from 0.1 to 0.5 V
s1 were used. (B) Plot of log current at 0.3 V vs log scan rate.
Figure 13. Capacitancepotential curves for a nanocrystalline BDD thin lm on quartz. The lm thickness was 0.51 m. Curves are shown for (A)
0.5 mol L1 H2SO4 and (B) [BMIM][BF4]. Capacitance values were determined at a single frequency of 10 Hz. Cdl was calculated from the following
1
equation: Z im = 2fC .
dl
3.8. CapacitancePotential Proles. Finally, the capacitance of the BDD OTE was investigated as a function of
potential in two dierent electrolyte media: aqueous electrolyte
and ionic liquid. Figure 12A shows background cyclic
voltammetric scans as a function of scan rate for the BDD
OTE in 0.5 mol L1 H2SO4. The background current increases
as the scan rate is increased from 0.1 to 0.5 V s1. Figure 12B
shows a loglog plot of the background current (A cm2) at
0.3 V versus the scan rate (V s1). A linear relationship is seen,
with a slope of 0.89. A slope of 1.0 is expected for this plot if
the background current is capacitive in nature. Thus, the
background current for the diamond OTE in this potential
region is capacitive. The capacitance can be calculated from the
slope of the plot, and thus Cdl at 0.3 V was found to be 7.7 F
cm2.
Figure 13 shows CdlE curves for the electrode in (A) 0.5
mol L1 H2SO4 and (B) [BMIM][BF4]. The capacitance values
were measured at a single frequency (10 Hz). The capacitance
in the H2SO4 aqueous solution ranges from 47 F cm2 over
the potential range probed, with little hysteresis observed
during the potential cycle. The capacitance exhibits a general
trend of increasing magnitude with increasing positive
potential. The capacitance measured by the ac method is
consistent with the value determined by cyclic voltammetry
within an order of magnitude. The low capacitance value is
typical of BDD and has been reported since the very early days
of studies of the material.53,54 The relatively low capacitance, as
compared with glassy carbon for example (2530 F cm2), is
due to two factors: (i) a lower potential-dependent density of
states due to the semimetal electronic properties (i.e., less
excess surface charge at the dierent potentials) and (ii) the
relative absence of electroactive and ionizable surface carbon
oxygen functional groups that lead to pseudocapacitance on
graphitic carbon electrodes.54,55 The data reveal that there is
little hysteresis in the capacitance recorded during positive- and
negative-going applied potentials. This reects the stability of
the diamond electrode surface chemistry and microstructure at
these potentials.
The capacitance in the ionic liquid ranges from 0.7 to 1 F
cm2. The lower capacitance, to a rst approximation, is
consistent with the lower dielectric constant of the ionic liquid
(14.524) compared with that of water. The capacitance
potential curves in the RTIL also exhibited little hysteresis,
which contrasts with observations previously reported.56 This
indicates that the surface structure (chemistry and microstructure) of the diamond lm and that of the ionic liquid are
stable at these potentials.
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4. DISCUSSION
The results reported herein provide the rst comprehensive
investigation of the relationship between the physical and
chemical structure and electronic properties of a diamond OTE
and the electrodes electrochemical activity. With any carbon
electrode, it is critical to have a good understanding of the
surface chemistry and microstructure as well as the materials
electronic properties if one is going to reproducibly achieve
high-quality electroanalytical measurements. This means low
background current and noise, weak adsorption or fouling, and
high rates of electron transfer with redox analytes.
Key for preparing BDD OTEs is achieving a balance with
respect to both the nominal lm thickness required for
achieving a continuous lm and the doping level used for
imparting electrical conductivity. Ideally, one desires a lm that
is as thin as possible but continuous and the minimum doping
level needed to impart sucient electrical conductivity for the
desired measurements. Non-diamond substrates require some
pretreatment in order to enhance the nucleation density to the
point where very thin coalesced lms can be grown. This is
certainly the case for quartz. In our hands, this is reproducibly
accomplished by a combination of careful mechanical polishing
and surface cleaning with ultrasonic seeding in a nanodiamond
powder suspension. Both the polishing striations, likely the
carbon residue in the striations, and the nanodiamond particles
that decorate the surface serve as the initial nucleation sites.
Our substrate preparation protocol produces a high seed
particle density (ca. 1010 cm2) uniformly over the surface. The
resulting nanograined diamond lm is relatively thin (0.51
m) and continuous over the surface and strongly adheres to
the quartz substrate. Others have looked carefully at the proper
ways of seeding surfaces to achieve nanocrystalline diamond
lms.9,11,12,5759
The BDD OTE exhibits ca. 60% transparency in the visible
region of the electromagnetic specrum.4,5 The main light loss
mechanism is due to reection because of the high refractive
index of diamond (2.41). The reduced light throughput at
wavelengths below 250 nm is due to the band-gap absorption
of diamond (5.5 eV).4,5 The reduced transparency in the nearIR region is due to absorption by boron impurity states in the
doped lm.4,5 The absorption in the red gives the lm its blue
color. Importantly for dierence spectroelectrochemical measurements, the electrical, optical, and electrochemical properties
of the BDD OTE are stable at extreme positive and negative
potentials, during exposure to strong acid and base, and during
exposure to dierent organic solvents.5
The Raman spectroscopy data are reective of the nanocrystalline morphology of the lm, the relatively high fraction of
grain boundaries, and the substitutional insertion and possible
clustering of boron. Additionally, the spectral features are
characteristic of a heavily doped lm.35,36 The Raman mapping
reveals that the microstructure of the BDD lm is uniform
across the quartz substrate, as identical maps were obtained in
ve quadrants of the lm. The spectra presented in Figure 4
were acquired in the center of the lm, where the electrochemical measurements were performed. The grain size of the
nanocrystalline diamond determines the surface-to-volume
ratio, which is the main determining factor in the sp2 carbon
and hydrogen content.58 Smaller grains result in higher surface
areas and higher sp2 carbon and hydrogen content because of
the enhanced grain boundary volume. The diamond phonon
line is downshifted from 1332 to 1320 cm1 as a result of the
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5. CONCLUSIONS
The following conclusions can be reached regarding the
research presented and discussed:
1. Thin and continuous diamond thin-lm optically transparent electrodes can be grown on quartz with good
adhesion and uniform lm thickness with appropriate
substrate pretreatment. The mechanical polishing and
ultrasonic seeding pretreatment described herein produces a high initial nucleation density that leads to a
continuous nanocrystalline lm without grain coarsening
in a short growth period.
2. The nanocrystalline diamond lm consists of primary
grains that are 6085 nm in diameter after 2 h of growth.
The lm exhibits ca. 60% transparency in the visible
region.
3. The microstructure of the BDD OTE is uniform across
the surface, as evidenced by the Raman mapping. The
spectral features reect the nanocrystalline morphology
of the lm, the relatively high fraction of grain
boundaries, and the substitutional insertion and clustering of boron. Additionally, the spectral features are
characteristic of a heavily boron-doped lm.
4. Temperature-dependent Hall eect measurements revealed a room-temperature resistivity of 0.06 cm that
decreases by only a factor of 2 during a temperature
ramp from 300 to 700 K. The carrier concentration (ca.
1021 cm3) and carrier mobility (ca. 0.2 cm2 V1 s1)
were largely temperature-independent, consistent with
the electronic properties of a degenerate semiconductor
or semimetal. A low activation energy of conduction of
10 meV was determined.
5. XPS revealed a surface low in carbonoxygen functionalities (O/C = 0.03). The boron doping level was
uniform with depth in the lm. The boron concentration
in the lm, ca. 1021 cm3, is consistent with the high
boron doping level reected in the Raman spectra and
with the carrier concentration determined from the Hall
eect measurements. The boron exists in three chemical
environments: BB pairs or clusters, likely in grain
boundaries; BC groups due to the substitutionally
inserted boron dopant atoms; and BO groups at the
lm surface.
K
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AUTHOR INFORMATION
Corresponding Author
ACKNOWLEDGMENTS
This research was carried out in the framework of Project
W911NF-12-R-0011 funded by the Army Research Oce
(G.M.S.). R.J. thanks the Grant Agency of the Czech Republic
(Project P206/12/G151) and Charles University in Prague
(SVV260205) for their nancial support. This research was also
made possible by a SWE scholarship to N.W. from the Brazilian
funding agency CAPES (149/2012; AUXPE 499/2013).
R.C.R.-F. gratefully acknowledges a research productivity
scholarship from the Brazilian funding agency CNPq
(308328/2013-2). The Raman inVia Raman instrument was
acquired through the Defense University Research Instrumentation Program through Grant 65086-CH-RIP from the Army
Research Oce. We acknowledge Dr. Jonathan Counsell of
Kratos Analytical Ltd. for acquiring the XPS results using the
AXIS Supra XPS instrument.
REFERENCES
DOI: 10.1021/acsami.6b02467
ACS Appl. Mater. Interfaces XXXX, XXX, XXXXXX
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DOI: 10.1021/acsami.6b02467
ACS Appl. Mater. Interfaces XXXX, XXX, XXXXXX