Novel approach for a design-oriented measurementbased fully scalable coplanar waveguide transmission

line model
G.Carchon, W.De Raedt and 6.Nauwelaet-s
Abstract: In t h s paper, a novel technique for constructing a design-oriented multi-layer coplanar
waveguide (CPW) transmission line model is proposed. The technique uses a novel method to
determine the conductive losses of an arbitrary CPW line, based on the losses of a limited set of
measured reference lines, with a constant ground-to-ground spacing and a closed-form formula
derived for standard CPW lines, to predict the geometric dependancy of the conductive losses. The
characteristic impedance and effective dielectric constant are easily and accurately predicted using a
and closed-form
quasi-TEM program. The final model contains a look-up table for Z, and
expressions for the losses. It can be easily implemented in commercial design software, and provides
the designer with an accurate multi-layer CPW transmission line model which is fully scalable in stripwidth, slot and length. The method has been verified by 3-D simulations and measurements of CPW
lines on thn-film multi-layer MCM-D with very good accuracy. It is shown that the performance of
the loss-scaling method is superior to the results obtained by 3-D simulations or by implementing
conventional CAD formulas.

Introduction

Many RF and microwave circuits nowadays use coplanar

transmission lines, as they have the advantage that wafer
thinning, via hole etching and backside metallisation are
not required. This reduces cost and enhances the process
yield. The ground plane is directly accessible at the front
side of the wafer, whch makes it highly compatible with
flip-chip mounting and also offers a low ground-inductance
to transistors. Coplanar waveguides (CPWs) have a very
low dispersion and the presence of the groundplane results
in a decreased coupling between neighbouring lines.
Thin dielectric layers are often used in addition to the
semi-insulatingsubstrate in MCM-D and MMIC technologies. These thin multi-layer dielectrics have an influence on
the properties of the CPW lines [l]. However, multi-layer
CPW transmission line models are not available in commercial circuit simulators and the designer is thus forced to
build a custom library model. This paper presents an accurate technique for accomplishng ths.
A design-oriented CPW transmission-line model should
have a high accuracy and offer full scalability in both stripwidth and slot. The designer can then choose the optimal
ground-to-ground spacing of the CPW line for his application: a wide spacing may be interesting for low-loss applications in the lower microwave region, whereas a small
0E E , 2001
ZEE Proceedings online no. 20010544
DOf 10.1049/ipmap:20010544
Paper fmt received 26th July 2000 and in r e d form 22nd May 2001
G.Carchon and W. De Raedt are with MEC, MCP-HDIP, Kapeldref 75, B3001 Heverlee, Belgium
B. Nauwelaers is with K.U.Leuven,
dep.BAT-TELEMIC, Kasteelpark Armberg 10,B-3001 Heverlee,Belgium
IEE Proc.-Microw. Antennas Propag., Vol. 148, No. 4, August 2001

ground-to-ground spacing may be interesting for the hgher

microwave region, owing to the decreasing parasitics associated with, for example, the bridges and T-junctions. The
model should finally have a very low simulation time.
Building a custom multi-layer CPW transmission-line
model requires knowledge of the characteristic impedance,
effective dielectric constant and frequency-dependent losses
for the entire range of stripwidths and slots that needs to be
modelled. These can be obtained by extracting all the line
parameters from the measurements, for example by using
the technique in [2]. An alternative is to perform a large
number of 3-D simulations, for example by using HPHFSS, or to use the techniques presented in [3, 41, which
are less time consuming. For the losses, measurements are
to be preferred as material parameters (e.g. tanti) are not
always very well known, the conductors may not have a
completely rectangular cross-section and most simulators
do not account for surface roughness effects. Even when all
this discrete data is available, it will still be difficult to
obtain a fully scalable model. The transmission lines, for
example in [5], are modelled using electromagnetic simulations, but only a fixed ground-to-ground distance is being
examined, and detailed information on the (limited) scaling
of the model is not given. In [6-8], a number of coplanar
lines are individually modelled based on combined 3-D
simulations and S-parameter measurements, but no information is given on the scalability of the models.
Closed-form formulas for the evaluation of the line
parameters of standard CPW lines can be found in [9, lo].
However, for the multi-layer case, most of the work to-date
has been concentrated on a full-wave analysis of the structure, not on design-oriented models. There is thus a need
for a technique capable of providing a fully scalable, multilayer CPW transmission line model. For the losses, the
technique should be measurement based as this offers the
highest accuracy. This is, for example, important in the
221

design of narrowband bandpass filters and low-noise

amplifiers.
In this paper, a novel technique for constructing a
design-oriented multi-layer CPW transmission-linemodel is
proposed. The technique uses a novel method to determine
the conductive losses of an arbitrary CPW line, based on
the measured losses of a limited set of reference lines, with
a constant ground-to-ground spacing and a closed-form
formula derived for standard CPW lines. The characteristic
impedance and effective dielectric constant are easily and
accurately predicted using a quasi-TEM program. The final
,
closedmodel contains a look-up table for 2, and l e and
form expressions for the losses. It can be easily implemented in commercial design software and provides the
designer with an accurate multi-layer CPW transmission
line model which is fully scalable in stripwidth, slot and
length. The method has been verified by 3-D simulations
and measurements on CPW lines on thin-film multi-layer
MCM-D with very good accuracy.
2
Characteristic impedance and effective dielectric
constant of multi-layer CPW lines

The characteristic impedance (Z,) and effective dielectric

constant (E@) of multi-layer CPW lines can be accurately
predicted using electromagnetic simulators. We have used
an in-house developed quasi-TEM program. Details can be
found in [3, 111. The program accurately accounts for the
metal thickness, and has the significant advantage that the
simulation of one CPW line can be done very time eficiently (only a few seconds on an HP 52240). The program
also allows automatic sweeping of the dimensions of the
stripwidth and slot, such that the creation of a table-based
model is not time consuming.

influence of the probe-tip discontinuities is accurately

removed. A good agreement between the measured and
simulated values can be observed. The small discrepancies
between the measured and simulated results may be attributed to planarisation effects: the top benzocyclobutene
(BCB)-layer is not perfectly flat which results in a slightly
higher 2, and lower

5 pm BCB
3p-n Cu
5pm BCB

- 700 ym glass

Fig. 1 Layer build-up of the MCM-D technology

The extracted characteristic impedance as a function of

frequency for the GaAs lines, mentioned in Table 1, are
given in Fig. 2. Note that the CPW lines have a very low
dispersion, such that the quasi-TEM program accurately
predicts the behaviour of the lines.
8o
70
60

Table 1: Measured against simulated (quasi-TEM program

and HFSS) characteristic impedance and effective dielectric
constant (20GHz) for different CPW-line geometries on
GaAs and MCM-D
Width Slot

Extracted

Simulated
quasi-TEM

~m

P"'

Z'

Eeff

Zc

Eeff

Zc

Eeff

17

40

66.7

6.45

67.8

6.49

68.3

6.65

30

22.5

48.3

6.58

48.7

6.51

49.0

6.66

60

20

39

6.60

39.1

6.53

39.3

6.69

80

10

29

6.51

29.6

6.37

29.9

6.59

MCM-D 14

53

113.6 2.85

110.3 2.97

113

3.03

25

47

95.9

2.90

93

3.02

93.6

3.07

42

39

78.5

2.93

76

3.05

76.6

3.1

53

33

70.1

2.94

68

3.05

68.4

3.1

64

28

63.0

2.94

61

3.05

61.3

3.1

75

22

56.2

2.93

54.4

3.04

54.9

3.09

84

18

50.7

2.92

49.3

3.01

49.7

3.08

GaAs

10

20

30

40

frequency, GHz

Fig.2

Extracted churucterktic i m p e h c e ar. a function of frequency for the

GaAs lines mentioned 62 Table I

The accuracy of the program is demonstrated in Table 1.

Here the simulated (quasi-TEM program and HP-HFSS)
and extracted Z, and .se, are given for several line
geometries on GaAs and MCM-D. The layer build-up of
the MCM-D technology is given in Fig. 1. The layer thicknesses in the simulations have been adjusted to correspond
to the measured thicknesses on the processed wafer. The
line parameters have been determined using [2], which
extracts the line parameters from the measurements of two
lines with different lengths, while, at the same time, the
228

<

Simulated

HFSS

3 Method to predict the conductive losses of multilayer CPW lines based on the known losses of a
limited number of reference lines

It has been shown in [7] that the assumption of quasi-TEM

propagation for CPW lines is valid as long as the groundto-ground distance (GG) of the CPW line remains below
M O , where ilis the wavelength along the line. The symbols
used to describe the dimensions of the CPW lines are illustrated in Fig. 1.
Under the quasi-TEM assumption, the conductive losses
are given by eqn. 1. Here Rsis the surface resistance of the
conductors, 2, is the characteristic impedance of the line
and J, is the current density.

We assume that the presence of the dielectrics does not

influence the current shape. This assumption was also
made in [12-141 and it was verified in [15]. The surface
resistance also does not depend on the dielectrics.The characteristic impedance is therefore the only parameter which
is influenced-by the presence of the dielectrics or, equivalently, the product acZcis independent of the dielectrics.
I E E Pruc-Micruiv. Antennos Prupag., Vol. 148, No. 4, August 2001

This implies that we can use readily available fit-formulas

for standard CPW lines to predict the geometric dependency of the conductive losses of multi-layer CPW lines.
Although we will not use these closed-form expressions
directly, we will use the formulas to predict the losses of an
arbitrary multi-layer CPW l i e , based on the known losses
of a limited number of reference lines. This leads to an
increased accuracy, as will be illustrated in Section 4.
We have chosen the fit-formula in [9], given in eqns. 2 4 .
This behaviour has also been found in [131.
Qc

Fig. 4. The agreement between the predicted and the simulated results is excellent. This proves that the loss-scaling
method can be applied to predict the conductive losses of a
general multi-layer CPW line based on the known losses of
a h t e d number of known reference lines.
20.0

17.51
15.0

Rs(f)G
16ZcK2(k)(l- k 2 )

k=b

frequency, GHz

a=2
b=w+2~
(4)
Here t is the thickness of the metal, a is half of the stripwidth, b is half of the ground-to-ground spacing and K(k)
is the complete elliptic integral of the first lund. a, is given
in Nplm.
In the proposed method, the conductive losses of a line
with an arbitrary ground-to-ground spacing are derived
from the known conductive losses of the reference line with
the same k-value (eqn. 4). This is illustrated in Fig. 3.

Fig. 4

Simulated (HFSS) uguimt predicted (murh) conductive losses mhg

the loss-scalmg method
4
reference CPW line on glass (width = 3 0 p , slot = 20m)
- ~ _ _HFSS simulations
CPW line on GaAs (width = 30pm, slot = 20pm)
CPW line on glass (width = 6 0 p , slot = m p )
CPW line on glass (width = 9 0 p , slot = 6 0 ~ )

W
0

It should be mentioned that the method presented here

holds as long as the metallisation thickness is larger than
twice the penetration depth.
4 Model implementation and verification by
measurements

The loss-scaling method has been applied to build a fully

scalable design-oriented model for CPW lines on multilayer thin-film MCM-D. The layer build-up is given in
Fig. 1. It consists of alternating thin layers of photosensitive BCB dielectric (CycloteneTMfrom Dow) (E, = 2.7) and
a low-loss copper metallisation ( 3 p n ) deposited on a

700pn thick borosilicate glass carrier substrate (E, = 6.2).

Fig.3

Loss scrrling method: the conductive losses of an urbitrmy CPW line

are Btemiiued from the known conuhctive losses of the refereuce Iiue

Suppose that we want to determine the losses of a line

with dimensions w and GG. The conductive losses are then
given by eqn. 5. The corresponding reference line has the
width = wre,such that k = wIGG = wre/GGrefis satisfied.

Note from eqn. 5 that the complete elliptic integral of the

first lund does not have to be evaluated, as t h s term only
depends on the k-value, which is identical for both lines.
Therefore only simple logarithmic and hyperbolic functions
remain. Surface roughness effects are hereby included in
the losses of the reference line.
The above method has been verified by a number of 3-D
simulations (HFSS) as this allows separation of the conductor losses from the dielectric and radiative losses. The
method will be applied on measured results (overall losses)
in Section 4.
Based on the simulated conductive losses of a reference
CPW line on glass (width = 30p-11, slot = 20pm), we have
predicted the conductive losses of a CPW line on GaAs
(width = 3 0 m , slot = 2Op.n) and two CPW lines on glass
with varying geometries (width = respectively 6 0 p and
9 0 p , slot = 4 0 p and 6 0 ~ ) The
. results are given in
IEE Proc.-Microw. Antennas Propug., Vol. 148, No. 4, August 2001

4. I Characteristic impedance and effective

dielectric constant
The 2, and
have been simulated using the quasi-TEM
program for a large range of stripwidths (l(r300pn) and
slots (5-2OOp). The accuracy of this approach has already
been demonstrated in Table 1.

2o
O l

Fig.5

50

100

150
200
stripwidth, pm

250

300

Simulated 2 us a function of stripwrdth (1&300/an) and slot

(5-zoop) wmg the bi-TEMprogrmn

The results are shown in Figs. 5 and 6. The obtained

results can be easily integrated in a table-based implementa229

'

tion in commercial design simulators. The characteristic

impedance and effective dielectric constant are hereby
known for all CPW-line geometries.

The method used so far results in the standard custom

measurement-based CPW line model which is scalable for a
futed ground-to-ground distance. In the next two Sections,
we will illustrate how a fully scalable model can be
obtained using the loss-scaling method.

3.4
-. .

4.3 Additional loss contributions

The loss-scaling method only applies for the conductive
losses. Dielectric and radiative losses are, however, also
present. Their contribution will be discussed separately for
conventional CPW lines and for CPW lines with additional
thin dielectric layers.

3.33.23.1 -

3.02.92.8-

4.3.1 Conventional CPW lines: The dielectric losses

for a standard CPW line are given by eqn. 7 [9]. They linearly increase with frequency.

2.7-

2.5

50

100

150

200

250

300

stripwidth, pm

Fig.6 Sirnuluted E

as U fiction of stripwidth (1&3Wpn) rmd slot

(5-2oc)pn) ushg the &i-TEMprogrum

4.2 Losses of the reference lines

A first step is to choose the ground-to-ground spacing of
the reference lines. T h ~ value
s
is optimally determined such
that most of the design work can be done using lines with
the standard value. A small value would result in a 50Qline with very small slots. It would therefore be dificult to
realise and have increased conductor losses. A large value
would result in large discontinuities and parasitic elements
such that the high-frequency performance of the technology is compromised. Based on the previous arguments, the
line geometries in Table 1 have been realised.
The losses of the reference h e s have been extracted from
the measured S-parameters using [2]. The extracted losses
are then fitted using a fit-formula of the form given in
eqn. 6. These fit-formulas have also been used in [6] with
good results. Naturally, it is possible to define different fitfunctions for different frequency regions to obtain a better
accuracy.

The parameters p and q are then fitted with some higher

order polynomial as a function of k. In .this way, a multilayer CPW model is obtained. For a fried ground-toground distance, the width of the lines can now be accurately scaled. As can be seen in Fig. 7, an excellent agreement between the extracted and fitted overall losses for the
reference lines has been obtained.

Radiative losses are also present as the CPW-guided mode

propagates at the interface between two dielectric media
with a phase velocity that exceeds that of a TEM wave in
the higher dielectric constant material. This condition gives
rise to radiation from the guided CPW wave into the substrate [16]. Energy transfer from the CPW mode into the
substrate causes attenuation of the guided wave. The attenuation constant is given by eqn. 8 in units of inverse
length. K and K are the complete elliptic integrals of the
first and second kind.

(W

Ct!

= f (ET)

+ 2S)2

(&) K ( k ) K k( )

The associated losses have a third-power dependancy on

frequency and increase quadratically with the ground-toground distance.
For an optimal high-frequency accuracy, the dielectric
and radiative losses have to be accounted for separately as
their dependancy on the geometry differs from the geometry dependance of the conductive losses: if the ground-toground distance of the CPW line decreases, the radiative
losses decrease while the conductive losses increase. If the
loss scaling method is simply applied to the extracted, overall losses, overestimated losses for lines with GG < GGrer
will be obtained, whereas the losses will be underestimated
when GG > GGrCf An analogous argumentation can be
given for the dielectric losses.
The dielectric and radiative losses should therefore be
substracted from the overall losses of the reference lines
before the loss-scaling method is applied. However, it
should be emphasised that this effect is only significant at
the higher microwave frequencies.

4.3.2 CPW lines with additional thin dielectric

layers: The dielectric losses of multi-layer CPW lines can

10

20

30

40

50

frequency, GHz

Fig.7 Extracted (-) uguht jit fitted (-A-)

(w = 75pn, s = 22pn)
230

losses for the rej&nce line

be accurately simulated by electromagnetic simulators as

long as the material parameters are accurately known. One
alternative is therefore to calculate them using the quasiTEM program used for the calculation of Z, and
The radiative losses can be expected to have the same
dependancy upon the ground-to-ground distance and frequency as the normal CPW lines, but the exact value is
more difficult to predict. However, as both corresponding
loss contributions are small, an approximate, first-order
compensation is sufficient.
IEE Proc.-Microw. Antennas Propag., Vol. 148, No. 4, August 2001

For our layer build-up, eqn. 7 with an equivalent, constant tan6 was used to represent the dielectric losses. The
GG and frequency dependancy of eqn. 8 was used to estimate the radiation losses. However, the absolute value
attributed to the dielectric and radiative losses was optimised to obtain an optimal accuracy for the overall scaled
losses. This can be justified as the dielectric losses of the
materials are not very accurately known.

4.4 Overall loss prediction results

The loss-scaling method has been applied to predict the
losses of a number of CPW lines, based on the fitted losses
of the reference lines. The results are given in Figs. 8-10.
An excellent agreement between the extracted and predicted losses can be observed for a very wide range of line
geometries.

4.5 Comparison to conventional CAD-formulas

The results of the loss-scalingmethod have been compared
to the predicted losses using conventional CAD formulas
and HFSS simulations. The results are given in Figs. 11
and 12. We have used the fit-formula presented by Owyang
[9, 13, 171 and the fit-formula presented by Gupta [lo]. The
dielectric and radiative losses were added according to
eqns. 7 and 8.

20

E
.
a

l5

10

301

A
A

25

O l
0

-.-

10

Fig.8 Extructed (-)

k = 0.17

20
30
frequency, GHz

40

50
Av
/

reference line
-0- II' = 1 2 p
-A- w = 3 0 p
-7- iv = 4 0 p

'5

251
20

01

20
30
40
50
frequency, GHz
Fig. 11 M e w e d (-) aguimt simulated lossesfor a CP W line with dimenskns w = 4 6 p , s = 1 2 ~
10

-.-

15
Q

ugumyt predicted (murks) losses jor the lines with

-0-

loss-scaling method
Owyang

-V-

HFSS

-A- Gupta

10

101

-.Fig. 9
0.34

10

20

30

40

50

frequency, GHz

Exiructed (-) agakt predicted (marks) lossesfir the luws rr,ith k =

reference line
=2 4 p
M, = 61 pm
w=s o p

-0- w

-A-V-

0 1

10

15

20

25

30

frequency, GHz

Fig. 12

Mecmred (-) uguinst simuhted losses f o r U CP W line with dimensions w = 117pn, s = 3 0 p

-W-

-0-A-V-

O l
0

10

30
frequency, GHz
20

40

50

Fi 10 Exiructed [-) ugaimt predcfed (marks) losse~for the lines wlrh k

=?6

4- reference line
-0- w = 4 6 p
-A-w=
117pm
-Vi v = 154um

IEE Proc.-Microw Antennas Propag., Vol. 148, No. 4, August 2001

loss-scaling method
Owvane
Gupta
HFSS

- .

The method of Gupta results in overestimated losses for

all CPW lines. The method of Owyang gkes good results
for the 46pm wide line, but underestimates the losses of the
1 1 7 p wide line. The HFSS simulations underestimate the
losses for the 46pm wide line, but give good results for the
high-frequency losses of the 117pm wide line. The losses at
the lower frequencies are, however, underestimated. The
loss-scaling method gives good results for all lines and over
the entire frequency band.
23 1

Conclusions

A novel technique for constructing a design-oriented multilayer CPW transmission-line model has been proposed.
The technique uses a novel method to determine the conductive losses of an arbitrary CPW line, based on the measured losses of a limited set of reference lines with a constant
ground-to-ground spacing and a closed-form formula
are easily
derived for standard CPW lines. The Z, and ~~8
and accurately predicted using a quasi-TEM program. The
and
final model contains a look-up table for Zc and
closed-form expressions for the losses. It can be easily
implemented in commercial design software and provides
the designer with an accurate multi-layer CPW transmission line model which is fully scalable in stripwidth, slot
and length. The method has been verified by 3-D simulations and measurements on CPW lines on thn-film multilayer MCM-D with very good accuracy.
The method has been used to construct a fully scalable
CPW line model for multi-layer thin-film MCM-D. An
excellent agreement between measurement and simulation
has been obtained for a large variety of dimensions. The
predicted losses using the loss-scaling method have been
compared to the results obtained using 3-D simulations
and conventional CAD methods. It has been demonstrated
that the presented method has a superior accuracy.
6

Acknowledgments

This work was supported by a scholarship granted by the

Flemish Institue for the Advancement of Scientific-Technological Research in Industry (I.W.T.).
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IEE Proc.-Microw. Antennus Propag., Vol. 148, No. 4, August 2001