NEPCON1.

0 -

PC

2015421

Verl

2100

660

11

Beckhoff

30

60

2010

3.46 (+47%)

Verl
2011

4.65 +34 %+97 % 2009

Beckhoff Image

2015-4-26

Beckhoff PC

Mr. Hans Beckhoff

BeckhoffPC
Beckhoff

Applications & Solutions


1.

:Intel

:IEC61131-3C/C++MatlabWindows
Visual Studio()

2.

3.

(50usJitter<1us)

I/O

4/26/2015

PC
PC
1. PC
2. PC
3. 4Intel CPU

4.
5. (Win/Intel)
6. Windows(32/64 bit)
MatlabLabview


(XAR)
Runtime
50us




IEC 61131-3
C/C++
Matlab/Simulink

4/26/2015

 I/O
1. 400

/()

2. XFCI/O

:1us

:100K

3. :24
4. I/O
5. I/O
EN61505EN954ISO13849
8

 EtherCAT

PLC Data

NC Data

HDR 2

ECAT
HDR

HDR 2

Ethernet Header

HDR 1

Master

EtherCAT I/O,

+
1us

Data n

Ethernet

 EtherCAT
:

AS-Interface
CANopen
CC-Link
ControlNet
DeviceNet
Ethernet/IP
FIPIO
Interbus
IO-Link
Lightbus
LonWorks
Modbus Plus, RTU, TCP
PROFIBUS
PROFINET IO

EtherCAT

OPCWebServer
ADS
Windows ADS
ActiveX DII.NetASPOPC

ADS

Windows
WebServer

via TCP/IP

ADS via HTTP

ADS via fieldbus

ADS via serial

connection

4/26/2015

11

TwinCAT 3
TwinCAT 3 :
Microsoft Visual Studio
System Manager
Integrated IEC 61131-3 (3rd)
Safety PLC
C/C++
Matlab Simulink

Matlab /
System-Manager:

programming environment

IO

Non real time

PLC

C# /

Motion Control

.NE
T

C/C++

Simulink

real time

IEC
61131

Object
oriented
extensions

C /
C++

Realtime
Workshop

Third party
C programming
tool

Safety
others

IEC Compiler

Microsoft C Compiler

TwinCAT Transport Layer - ADS

4/26/2015

12

in the Semiconductor Industry

Semiconductor TWG

August 2013

ETG: SEMI Member since 2006

=
EtherCAT: SEMI E54.20 since 2007

Semiconductor TWG

August 2013

ETG Semiconductor Working Group

Requested by ETG members from Semi industry
Tool makers
MFC vendors
Sensor makers
Control device makers
Goal: elaborate
Semiconductor specific device profiles
Implementation Guidelines
Semi best practice for EtherCAT
ETG Semi TWG is not competing with SEMI

Semiconductor TWG

August 2013

Semiconductor TWG Task Groups

Abatement and Subfab System Profile

Mass Flow Controller Profile
Process Control Valve Profile
Vacuum/Pressure Gauge Profile
Roughing & Turbo Pump Profile
DC & RF Power Generator Profile
RF Match Profile
Temperature Control Profile

Profiles for
Semiconductor
Industry
specific Devices

Source: Watlow

Source: Edwards

Source: MKS
Source: VAT

Source: Inficon
Source: Huettinger
Source: Edwards
Source: Brooks

EtherCAT in Semiconductor Tools until now

Fieldbus Gateway

SEMI specific Devices, such as

Mass Flow Controllers
Process Valves
Vacuum Gauges, etc.

Steuerung

Semiconductor TWG

Semiconductor/FPD Equipment companies in Korea

Customer

Homepage

Industry, Products

Application

1.

DMS

www.dms21.co.kr

FPD: PC, TwinCAT, Servo, IO

Coater, Cleaner

2.

Tera semicon

www.terasemicon.com

Semi/FPD: TwinCAT, EPC, IO

Heat Treatment Process Machine

3.

KCTech

www.kctech.co.kr

Semi: IPC, TwinCAT, IO

CMP

4.

NCD

www.ncdtech.co.kr

Semi: IPC&EPC, TwinCAT, Servo, IO,

Control Panel

ALD, CVD

5.

Narae Nanotech

www.naraenano.com

FPD: IPC, TwinCAT, Servo, IO

Coater

6.

Eugenetech

www.eugenetech.co.kr

Semi: IPC, TwinCAT, IO

LPCVD, Cyclic CVD

7.

Cantops

www.cantops.biz

Semi: EPC, TwinCAT, IO

Logistics

8.

CFI

www.cfinc.co.kr

Semi/FPD: TwinCAT, IO

Logistics

9.

NewYoung Mtech

Bankruptcy

Semi: TwinCAT, EPC, IO

Heat Treatment Process Machine

TNSK

www.tnskco.com

Semi: IPC&EPC, TwinCAT, IO

MOCVD

10.

4/26/2015

20

Beckhoff

PECVD
2009

PC C6920
CP6903
CX9001
BC9050

TwinCAT PLC ADS

CommunicationCP-Link 2

Beckhoff Image

2015-4-26

21

Beckhoff

Beckhoff Image

2015-4-26

22

BeckhoffPC

Applications & Solutions

23

CX1020 I/O
2

CX1020 I/O
3

CX1020 I/O

Applications & Solutions

24

48
48

48
80

Applications & Solutions

25

48

1
CP62 I/O

2
PCI/O

3
C6920 I/O

4
C6920I/O

Applications & Solutions

26

BeckhoffPC

2015-4-26

27

BeckhoffPC
TwinCAT

2015-4-26

28

BeckhoffPC

2015-4-26

29

BeckhoffPC

1Beckhoff16EL3314

2PCPID

3TwinCATPID
PID
4EtherCAT

2015-4-26

30

Application Award 2010

31

2001
150

Application Award 2010

32

 :
Beckhoff

18000

6EL7201+AM31122
TwinCAT NC
250s32DI/32DOPLC1ms
6g

TwinCAT+OMRON
PLC
EL7201+AM3112Omron+

Application Award 2010

33


C6650-0010
I/O
EtherCAT Bus
Coupler EK1100
EtherCAT Terminals
Motion
6 x EL7201
6 x AM3112
Automation
TwinCAT NCI

34


Beckhoff TwinCAT
Beckhoff TwinCAT
EtherCAT
Beckhoff
TwinCAT

PC

Control cabinet Industrial PC

TwinCAT
OEM
Application Award 2010

35

 | Rotkreuz

Komax AG

Applications & Solutions

36

 | Rotkreuz

Komax AG

IPC
PC C6140

I/O
EtherCAT BK1120

EtherCAT

TwinSAFE


AX5000

TwinCAT PLC/NC PTP
Applications & Solutions

37

 | Rotkreuz

Komax AG

PC

Applications & Solutions

38


Project MOCVD

Applications & Solutions

39

Applications & Solutions

40


Cast copper machine

Applications & Solutions

41


Ultrasonic cleaning equipment

Applications & Solutions

42

Shanghai Micro Electronics Equipment Co., Ltd. (SMEE)

Mask Alignment System

Applications & Solutions

43

PC
Beckhoff

PLC

TwinCAT
EtherCAT



Beckhoff

Applications & Solutions

44

PC

Thank You!

2015-4-26

45