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Basic Solutions
Md. Shamsul Arefin*, M. Bulut Coskun+, Tuncay Alan+, Adrian Neild+, Jean-Michel Redoute, Mehmet R. Yuce *
*
Department of Electrical and Computer Systems Engineering, Monash University, Melbourne, VIC/Australia,
+
Department of Mechanical and Aerospace Engineering , Monash University, Melbourne, VIC/Australia
Email: {md.arefin, bulut.coskun, tuncay.alan, adrian.neild, jean-michel.redoute, mehmet.yuce}@monash.edu
I.
INTRODUCTION
Fig. 1. Design of the fringing field capacitive pH sensor. There are 5 pairs
of gold electrodes (L: 200m, W:10m, Spacing:10m) in the sensing
area. As shown in the cross-sectional view, sensor is composed of 4
layers, namely; 500m-thick Si, 500nm SiO2, 300nm Au and 5nm
Si3N4.
II.
INTERFACE CIRCUIT
f vco
1
2 L0 (C0 C sen )
(1)
Fig. 3. An image of the fabricated chip wire-bonded to the pin grid array
that is placed on the VCO.
ACKNOWLEDGMENT
Part of this work was performed at the Melbourne Centre
for Nanofabrication (MCN) in the Victorian Node of the
Australian National Fabrication Facility (ANFF).
REFERENCES
[1]
CONCLUSION