Rochester Institute of Technology 1/17/2016

Microelectronic Engineereing CantileverBasics.xls

Dr. Lynn Fuller

Length x x=0 Force F L= 100 um

Width b= 4 m
Height h= 2 m
h
b E= 1.90E+11 N/m2
L
Ymax
Maximum displacement Ymax for given force (F)

Ymax = F L3/3EI F= 1.52E-06

3.42E-07
N
lb-force
I = bh3/12 Ymax = 1.00E+00 m

Maximum Stress for given force (F)

x=0 = F Lh/2I 5.70E+07 Pa (N/m2)

Strain = Stress / Youngs Modulus Strain = 3.00E-04 m/m

Change in length = Length x Strain L = 3.00E-02 um

Material Properties
Silicon Oxide Nitride Aluminum Units
Youngs Modulus 1.90E+11 7.30E+10 3.85E+11 6.80E+10 N/m2
Density 2.30E+03 2.50E+03 3.10E+03 2.70E+03 Kg/m3
Ultimate Strength 1.40E+10 1.60E+10 2.80E+10 N/m2

Mechanics of Materials, by Ferdinand P. Beer,

E. Russell Johnston, Jr., McGraw-Hill Book Co.1981
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