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SPECIAL REPORTS

Evolution of Devices Supporting Power


Electronics and Expansion of Technologies for
Mounting, Circuits, and Application to Products
MOCHIKAWA Hiroshi

With the ongoing introduction of renewable energy systems including photovoltaic power generation
systems, whose output tends to vary according to the weather conditions, power generation systems with
high efficiency over a wide output range are required. Power transmission systems must also offer high
efficiency, in order to minimize energy losses while transmitting electricity from widely distributed power
systems to distant power-consuming areas. Furthermore, there is a growing need for energy storage sys-
tems to balance supply and demand. On the other hand, to avoid wastage of precious energy, it is also
important to make greater efforts to enhance energy conservation.
To fulfill these diverse requirements, Toshiba has been continuously engaged in the development
of state-of-the-art power electronics technologies for optimal efficiency of electricity operation in each
process from electricity generation through to transmission, storage, and consumption, aimed at the con-
struction of smart communities.

Increase in power density 100 r s


Thyristor valves r yea
ry fou
The performance of power electron- g eve
Board power supplies blin
Dou
Power density (W/cm3)

10
ics equipment is often represented by its
General-purpose inverters
power density, which is defined as the (as researched by JEMA) Prediction for 2017
1 SiC matrix converters
output per unit volume of equipment. (Takahashi model: 48 W/cm3)
Power density therefore increases as the Unit power supplies
Inverters for air conditioners
0.1
volume of equipment is reduced. Figure 1
shows the trends in power density of Packaged power supplies
0.01
power electronics equipment. Since 1970, 1970 1980 1990 2000 2010 2020

power density has been doubling every Year

four years. This means that the volume * Plotted based on information in the articleTrends in the latest power devices(in Japanese) written
by Hiromichi Ohashi
of equipment has been reduced by half JEMA: THE JAPAN ELECTRICAL MANUFACTURERSASSOCIATION
every four years for the same amount
of output. Power densit y has been Figure 1. Trends in power density for power electronics equipment Power density has been
doubling every four years and is expected to continue to increase at this rate.
increasing at a rate that approaches the
increase in circuit density predicted by
Moores law*1. This trend is expected to of smart communities, the prevalence of an increase in assembly density. Toshiba
continue, driven by changes in the social electric vehicles (EVs), and demand for has been continually developing the tech-
situation such as the accelerating uptake of further reduction in carbon dioxide (CO2) nologies necessary to improve the power
renewable power generation, the building emissions. density of power electronics equipment.
Multiple technologies have sup-
ported the high growth rate of power
(*1) Observation made by G. Moore in density, including a reduction in equip-
Evolution of power devices
1965 that the transistor density in
a semiconductor integrated circuit ment losses, an improvement in cooling The performance of power devices
doubles every 18 to 24 months performance, a rise in heat resistance and contributes most to the reduction of

2 TOSHIBA REVIEW Vol.69 No.4 (2014)


SPECIAL REPORTS
losses of power electronics equipment. in Moores law for integrated circuits. In is theoretically possible. Moreover,
Major technologies we have been the future, SJ-MOSFET devices will be semiconductor fabs are still working to
working on to improve the performance more widely used in power condition- improve their gate oxide reliability to
of power devices are described below. ing systems (PCS) for photovoltaic (PV) a level necessary for mass production.
power generation applications as well as Although SiC MOSFETs will gradually
IEGT in energy-saving equipment. be adopted in applications where high
At present, many insulated-gate bipo- efficiency is critical, it will take a while
lar transistors (IGBTs) are used in power SiC and GaN devices until all Si power devices are replaced by
electronics equipment. Toshiba developed SiC and gallium nitride (GaN) power SiC devices.
a new type of device with a unique struc- devices tolerate electric fields an order of In order to reduce wafer cost, semi-
ture called an injection-enhanced gate magnitude higher than Si power devices. conductor fabs developed lateral GaN
transistor (IEGT) in order to reduce the This means that the thickness of SiC devices that are fabricated by growing a
on-state voltage of IGBTs. IEGTs are now and GaN devices can be reduced to one- thin layer of GaN on a low-cost Si wafer
available for practical applications. While tenth that of Si power devices at the same in which the main current flows laterally
gate turn-off thyristors (GTOs) and other breakdown voltage. It is considered that, through a thin GaN layer. GaN devices
power devices have a cylindrical wafer as a result, the conduction resistance of are about to enter mass production.
structure, IEGTs consist of a few tens of SiC and GaN devices can theoretically However, GaN devices still have reliabil-
square IEGT chips housed in a cylindrical be reduced to 1/300th. Therefore, SiC ity issues such as an abrupt increase in
casing. and GaN devices are expected as next- resistance during active operation. These
It has been theoretically elucidated generation devices. reliability issues are considered to be
that the performance of IEGTs can be Of SiC power devices, Schottky bar- primarily attributable to the inadequate
further improved by reducing process rier diodes (SBDs) have already been crystal quality of the GaN layer and
geometries. There is a possibility that, commercialized and used in practical electric field concentration in a device.
at above 2 kV, even silicon (Si) devices applications. This is because an SiC SBD Semiconductor fabs are now working to
will exhibit on-resistance lower than sili- helps to significantly reduce the losses resolve these issues.
con carbide (SiC) field-effect transistors of a switching device during turn-on
(FETs). (reverse recovery loss and turn-on loss),
Device cooling and
even if it is a Si device (IGBT or SJ-
SJ-MOSFET MOSFET). Furthermore, while Si SBDs
assembly technologies
In recent years, there has been a sig- are available with a breakdown voltage of As described above, R&D efforts are
nificant improvement in the performance only up to 200 V or so, SiC SBDs exhibit underway to improve power devices.
of metal-oxide-semiconductor field- excellent performance at up to around However, improving the performance of
effect transistors with a superjunction 3 kV. Toshiba conducted a detailed veri- power devices is not enough. Lets per-
structure (SJ-MOSFET). The losses of fication of loss characteristics for a com- form a simple calculation to see why.
an SJ-MOSFET are primarily attribut- bination of a Si IGBT and a SiC SBD. As a Just suppose that we have successfully
able to its specific on-resistance. In recent result, it was found that the combination developed an epoch-making device with
years, the specific on-resistance of the of a Si IGBT and a SiC SBD reduces not half the on-resistance per unit area of
SJ-MOSFET has been reduced at a very only turn-on loss as had previously been the conventional device. Now, suppose
rapid rate of 10 % per year. It is expected postulated but also turn-off loss since the that we pass twice the current through
that the specific on-resistance of a 600-V SiC SBD has no forward recovery voltage. the new device as we did before. Then,
SJ-MOSFET device will shortly fall below In contrast, although SiC switching the resulting voltage drop that occurs
10 mcm 2 . This improvement is due devices, particularly SiC MOSFETs that in the new device is the same as for the
to shrinking process geometries, as was have recently been attracting much atten- conventional device. This means that
previously achieved for semiconductor tion, are finding applications in end-use where it was previously necessary to con-
memory devices. The reduction in spe- products, they have yet to be commonly nect two chips in parallel in a system,
cific on-resistance means that the chip used in power electronics equipment. only one new chip can now conduct
area can be reduced without increasing This is presumably because the crystal the same amount of current. Indeed, it
on-resistance. The resulting reduction in quality of SiC wafers has yet to reach the seems fine. However, the heat generated
chip cost will fuel increased demand for level of Si wafers. The carrier mobility in a chip due to conduction loss is RI2
SJ-MOSFET devices. Once the demand through the channel of SiC MOSFETs is (where R is resistance and I is current).
begins to increase, power devices might still lower than desired, causing their Even if R is reduced by half, the generated
be improved at a faster rate, as reflected on-resistance to be much higher than heat becomes twice as much if twice the

Evolution of Devices Supporting Power Electronics and Expansion of Technologies for Mounting, Circuits, and Application to Products 3
amount of current, I, is passed. Moreover,
since the new chip has a current density
twice as high as the previous chip, it is
also necessary to double the current-
carrying capacity of on-chip wires.
Therefore, we need a technology for
efficiently dissipating heat that concen-
trates in the chip. We also need a wiring
technology for conducting an electric
current through a small chip without
Diode-clamped topology Neutral-pointed switch topology
a loss. In order to get the best perfor-
mance from a chip, it is also necessary to Figure 2. NPC circuits NPC circuits are broadly classified into two categories. In recent years,
improve the device cooling and assembly the neutral-point switch topology has been finding more use in grid connection inverters.
technologies at the same time.
Toshiba developed an assembly
structure in which both sides of a chip Consequently, electromagnetic noise ers (a) and neutral-point switch inverters
are cooled inside an IGBT module and increases. In order to solve this problem, (b). In a diode-clamped inverter, two
put it into practical use. As a result, the Toshiba developed an effective circuit vertically adjacent diodes are connected
new IGBT module has 60 % less thermal technology for damping electromagnetic in series. Since a voltage is applied across
resistance and one half the volume of the noise. the ends of the series-connected diodes,
previous module. The new IGBT module We developed a small electromag- diodes with a lower breakdown voltage
was mounted on a hybrid electric vehicle netic interference (EMI) filter with can be used. Although device utilization
(HEV) to demonstrate that it exhibits excellent noise suppression performance is high, a voltage drop occurs across two
excellent heat dissipation performance suitable for high-frequency switching diodes, causing a significant conduction
and high reliability when the vehicle is applications. The new EMI filter has loss. In contrast, two vertically adjacent
accelerating and driving at a constant intra-phase capacitors at both the input diodes are not series-connected in the
speed. and output. Connecting the phases at the neutral-point switch. Although diodes
neutral point helps to significantly reduce with twice the breakdown voltage are
common-mode noise (i.e., noise caused needed, this topology causes a voltage
Evolution of
by a current that flows through an earth drop across only one diode and thus a
circuit technology line to the earth). lower conduction loss. In the late 1970s,
NPC circuit Another solution for improving the Toshiba led the world in R&D of NPC
PCS and other PV grid connec- efficiency and reducing the size of a inverters and proposed original circuit
tion systems need to shape the pulse- sine-wave filter is the use of a multilevel topologies that subsequently led to the
width modulated (PWM) output from inverter that provides multiple levels of circuits shown in Figure 2. In recent
an inverter to sine-wave voltage with output voltage. It is true that a multilevel years, the neutral-point switch topology
minimal harmonic distortions. Grid inverter is more complex and consists has frequently been used for grid connec-
connection systems have a sine-wave of a larger number of components, but tion inverters and other applications,
filter at the output stage for this purpose. the benefit of even the simplest three- vindicating our foresight.
However, the use of a sine-wave filter is level inverter is equivalent to quadrupling
a bottleneck in improving the efficiency the switching frequency of a two-level Recovery-assist and A-SRB
and reducing the size of a grid connec- inverter. Moreover, a three-level inverter circuits
tion system. One way to overcome this has one-half the voltage step of a two- A parasitic diode is formed inside
bottleneck is by increasing the switching step inverter and therefore reduces EMI the SJ-MOSFET. The slow recovery of
frequency of an inverter, but this, in turn, noise by half. Figure 2 shows two typical the parasitic diode causes a switching
causes its switching loss to increase. The examples of a three-level inverter called a loss. This switching loss can be reduced
switching operation of the inverter must neutral-point-clamped (NPC) circuit that by adding an external circuit called a
be completed in a short period of time to has been proposed in the semiconductor recovery-assist circuit. Figure 3 shows an
reduce its switching loss. However, high- industry. example of a recovery-assist circuit.
speed switching causes abrupt changes in The currently proposed NPC circuits In 2003, Toshiba used a recovery-
voltage and current, as well as an increase are broadly classified into two types assist circuit for the first time in the com-
in the number of switching operations. shown in Figure 2: diode-clamped invert- pressor drive inverter of the GDR series of

4 TOSHIBA REVIEW Vol.69 No.4 (2014)


SPECIAL REPORTS
Auxiliary power source Switch circuit effective in reducing the switching loss source. In this respect, the A-SRB circuit
for recovery assist for recovery assist
of even high-voltage IEGTs and IGBTs is more beneficial for applications with a
that contain a flywheel diode with slow relatively high switching frequency such
reverse recovery. For IEGTs and IGBTs, as grid connection. On the other hand,
5 to 15 V
a high-speed, high-voltage diode must the recovery-assist circuit may be more
SJ-MOSFET
be incorporated into a recovery-assist advantageous for applications with a
circuit. An SiC diode is suitable for this relatively low switching frequency such as
application. Since the SiC diode conducts motor drive. There are high expectations
only briefly, a small-capacity diode suf- of its evolution and applications.
Figure 3. Circuit diagram of "recovery fices. We also found a solution for reduc-
assist" for single main device The ing the turn-off loss, which had been a MMC circuit
switch circuit for recovery assist consists of
a low-voltage MOSFET and a high-voltage,
challenge for SJ-MOSFETs. As a result, For the long-haul bulk transmission
high-speed diode. we developed an innovative advanced of electrical power, using alternating cur-
synchronous reverse blocking (A-SRB) rent (AC) at a mains frequency (50 Hz or
circuit (see Column). 60 Hz) is disadvantageous because of a
air conditioners for residential use. Since Since the main current needs to be significant voltage drop due to the induc-
then, roughly 600,000 units of the GDR applied to the recovery-assist circuit for tance of long power lines and the skin
series have been shipped. It has been each switching operation, power must effect of an AC current (i.e., the tendency
proven that the recovery-assist circuit is be supplied from an auxiliary power of an AC current to flow near the outer

Output capacitance of the SJ-MOSFET and reduction of output capacitance through


application of auxiliary voltage
The output capacitance of SJ-MOSFETs tance to become very high (Figures A and auxiliary voltage application circuit to ap-
exhibits markedly non-linear characteris- B). If the adjacent element is turned on in ply 20 to 30 V to the SJ-MOSFET. Conse-
tics. Their output capacitance is very high this state, a short-circuit current flows, quently, a voltage is applied across termi-
in the low output voltage region. This is charging the output capacitance. nals of the SJ-MOSFET while the gate is off
due to the structure of the SJ-MOSFET in This phenomenon occurs immediately (i.e., during the reverse blocking period).
which alternating p and n pillars form a after the adjacent element is turned on. This causes the entire drift region in the
drift region to achieve a high breakdown As a result, a voltage close to the main SJ-MOSFET to become a depletion region
voltage. voltage is applied to the terminal of the instantaneously, reducing output capac-
Immediately after turn-off, a depletion adjacent element, causing a significant itance by two orders of magnitude. This,
region is formed in the p-n junction. This turn-on loss. in turn, reduces the current that charges
causes output capacitance to increase. To resolve this issue, Toshiba developed output capacitance and eliminates a turn-
Due to the alternating p and n pillars, a the A-SRB topology (Figure C). on loss caused by the turn-on of the adja-
depletion region is formed across a wide When an SJ-MOSFET is turned off, the cent element.
area. The depletion region is thin at low A-SRB circuit turns off a reverse blocking
terminal voltage, causing output capaci- FET simultaneously and then activates an

100,000
Even in the off state, when the
applied voltage is low, a wide
depletion layer forms, causing a
large output capacitance.
Output capacitance (pF)

SJ-MOSFET Pre-charging
10,000 current
Reduction by
two orders of
Very large output magnitude High-speed
capacitance flywheel diode

1,000
Gate
signal
Auxiliary voltage
application circuit
100
0.1 1 10 100 Reverse blocking FET
Depletion region
Output voltage (V) Main current
Figure A. Depletion layer
immediately after turn-off Figure B. Example of output capacitance
of SJ-MOSFET characteristics of SJ-MOSFET Figure C. A-SRB circuit

Evolution of Devices Supporting Power Electronics and Expansion of Technologies for Mounting, Circuits, and Application to Products 5
ment as well as backup power supplies used
C C C to ensure uninterrupted power in the event
Multiple modules are
connected in series. of a power failure.
C C C
The voltage across the terminals of a
rechargeable battery varies with the state
R S T
of charge (SOC). In addition, since a volt-
Unnecessary
C C C age drop also occurs due to the internal
resistance of a battery, the battery voltage
C =
C C C changes during charging and discharg-
ing. In order to use rechargeable batter-
MMC circuit Unit module
ies effectively, it is necessary to convert
Figure 4. MMC circuit The MMC circuit eliminates the need for capacitors along HVDC lines,
the constantly changing voltage to an
making it suitable for HVDC applications. appropriate voltage. For power conver-
sion, high efficiency is required for power
electronics equipment. The conventional
surface of the conductor). High-voltage reliable power converters can be realized power electronics equipment has low
direct current (HVDC) transmission without using a snubber circuit. Further- efficiency in the low output voltage
provides effective solutions for these more, the MMC does not require any region. When a rechargeable battery is
issues. For HVDC transmission, power capacitors along the HVDC lines, elimi- charged and then used to operate power
converters are required at the interface of nating the need for ultrahigh-voltage electronics equipment that is frequently
HVDC and AC systems in order to con- capacitor banks. Therefore, the MMC is operated at low output voltage, almost
vert electricity from AC to DC and from suitable for HVDC applications. half of the charged energy is lost. This
DC to AC. For full conversion of power We have been working on R&D to loss occurs mainly because the efficiency
between AC and DC, very high-capacity achieve practical applications of the of power electronics equipment decreases
converters are needed. Conventionally, MMC to self-commutated HVDC. We at low power. Efficiency in the low output
a high-voltage, high-current thyristor have developed a unique three-winding region is therefore important for systems
was commonly used in line-commutated transformer MMC by applying basic with a rechargeable battery. Toshiba is
converters for HVDC. In recent years, principles of the MMC. The new AC-DC committed to the development of equip-
self-commutated converters that do converter reduces the number of passive ment that delivers high efficiency even in
not require a harmonic filter or a phase components required. It helps reduce the the low output region.
adjuster have been attracting much atten- transformer footprint area and cost and Toshiba Elevator and Building Sys-
tion. Self-commutated converters can be eliminates the need for provisions for tems Corporation developed a battery
operated without any AC voltage. For harmonic filtering. energy storage system using SCiBTM and
example, even when the AC system at applied it to an elevator. SCiBTM recov-
the receiving end has stopped due to a ers regenerative energy during braking
power failure, self-commutated convert-
Technologies for power
and releases it during traction machine
ers can keep transmitting electric power
electronics applications operation. As a result, the power con-
and can be started under power failure Energy storage systems sumption of the elevator was reduced
conditions. using rechargeable batteries by approximately 25 %. In the event of a
Toshiba has been focusing on the Toshiba offers the SCiBTM recharge- power failure, SCiBTM releases the stored
modular multilevel converter (MMC) able batter y, an improvement over power instantaneously until the eleva-
shown in Figure 4 that is suitable for self- lithium-ion batteries. SCiBTM features tor reaches a certain speed so that it can
commutated HVDC systems. The MMC rapid charging/discharging and has gradually decelerate and safely stop at the
consists of multiple series-connected many other outstanding characteris- nearest floor. This function helps allevi-
modules that comprise a capacitor and a tics compared to lithium-ion batteries, ate the impact of an emergency stop.
half-bridge circuit. Each module can be including enhanced safety, long life and
configured to provide either the capacitor low-temperature operation. Because of Motor drive technology
voltage or a zero voltage. The MMC com- these features, SCiBTM has been widely C onvent iona l ly, ma nu fac t u rers
bines voltages from individual modules used for hybrid electric vehicles (HEVs) emphasized the importance of sufficient
to produce multiple voltage levels. Since and other vehicles. In addition, due to cooling performance at the rated output
voltage processing is completed in each long life and low operating temperature, for motor drive inverters. Their efficiency
module during switching, simple and SCiBTM is now utilized in stationary equip- generally decreases at low to intermedi-

6 TOSHIBA REVIEW Vol.69 No.4 (2014)


SPECIAL REPORTS
ate output due to their design. However, tric power generation. It was realized by which is close to the efficiency of plugged
statistical data show that most of the elec- using a high-voltage, high-capacity cyclo- charging. For wireless power transmis-
tricity demand comes from motors. In converter whose manufacture became sion, it is necessary to generate a fre-
order to reduce power consumption and possible due to advances in power elec- quency as high as 85 kHz. Increased use
thereby CO2 emissions, we can no longer tronics technology. Thereafter, we devel- of new high-speed and low-loss power
ignore the decrease in efficiency at low oped self-commutated inverters such as devices, including SiC power devices, is
to intermediate output. The use of an NPC and center-tap reactor types for expected for this application.
inverter to drive an AC motor at variable pumped-storage generation applications.
speeds helps save energy at low output. In addition, we are working on develop-
Therefore, its energy-saving effect could ment projects using power electronics
Future outlook
be lost if an inverter has a poor efficiency technologies, including the input power Power electronics handles large
at low to intermediate output. Consider- control function in pumping mode and power with a collection of tiny cells of
ing the trend in energy-saving regula- the quick response function to reduce power devices that are in the order of
tions, it is necessary to improve efficiency voltage fluctuations caused by renewable microns in size. Therefore, power devices
not only at a rated output but also over a energy generation systems, as well as for are the most important and basic compo-
wide range of output. the effective utilization of hydropower nents in power electronics. Power devices
Toshiba has been developing rail- resources by improving efficiency and will rapidly evolve from now on. Toshiba
way drive systems using permanent achieving wide-range operation. will endeavor to realize epoch-making
magnet synchronous motors (PMSMs) high-performance equipment by com-
to improve energy efficiency and envi- Wireless power transmission bining innovation in power devices with
ronmental friendliness. We developed technology the supporting circuit and cooling tech-
high-reliability, small and lightweight At present, plug-in hybrid vehicles nologies. Regarding circuit technology,
4-in-1 inverters that have a size and (PHEVs) and electric vehicles (EVs) the building blocks of a circuit should
weight comparable to the conventional must be plugged into a charger station to be small and simple in order to reduce a
induction motor drive systems. In order charge their battery packs. Most vehicles circuits stray inductance and stray capac-
to further improve energy efficiency, we carry large rechargeable battery packs itance and to make it easier to improve
have also developed inverters using low- weighing several hundred kilograms in circuit performance. It is considered that,
loss SiC devices and a high-efficiency order to increase miles per charge. The accompanying the performance improve-
control method, which are now undergo- increase in weight of rechargeable bat- ment of power devices, intelligence and
ing demonstration testing. tery packs causes a vehicles running communication functions will be incor-
resistance to increase. In order to obtain porated into individual small building
High-power technology sufficient acceleration performance and blocks in the future so that they can con-
Renewable energy is expected to hill-climbing force, it is necessary to nect and cooperate with each other.
find a wider uptake worldwide. The increase the output of the drive system. Toshiba will continue to provide
PV market, in particular, is rapidly This results in an increase in weight of state-of-t he-a r t power elec t ron ics
expanding both in Japan and abroad. In the driving motors and vehicle struc- technologies for optimal efficiency of
response to the market needs, Toshiba tures. This vicious circle can be broken electricity operation in each process
Group developed 750-kW and 665-kW if we reduce the weight of automotive from electricity generation through to
power conditioning systems (PCS) for rechargeable battery packs and thus the transmission, storage and consumption,
multi-megawatt solar farms targeting overall weight of a vehicle. To achieve aimed at the construction of smart com-
the Japanese market, in addition to the this, it is essential to simplify frequently munities.
conventional 100-kW to 500-kW PCS. required charging.
In addition, we developed a new 100-kW Toshiba has been committed to the
outdoor PCS for use on rooftops for the R&D of a wireless power transmission
North American market in addition to technology that will significantly simpli-
the conventional 500-kW PCS. fy charging. A receiving pad of a contact-
In 1990, we were the first in the world less charger is mounted on the underside MOCHIKAWA Hiroshi
to provide an adjustable-speed pumped of a vehicle, and the transmitting pad Senior Fellow
storage system* 2 for utility hydroelec- is placed on the ground. We succeeded Power and Industrial Systems Research and
in wireless transmission of 7-kW power Development Center, Power Systems Com-
pany He is engaged in R&D of power elec-
(*2) As of December 1990 (as researched by using a converted car. The contactless tronics equipment. He is a member of the
Toshiba) charger has a system efficiency of 89 %, Institute of Electrical Engineers of Japan.

Evolution of Devices Supporting Power Electronics and Expansion of Technologies for Mounting, Circuits, and Application to Products 7

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